{"id":"https://openalex.org/W2017677010","doi":"https://doi.org/10.1117/12.228172","title":"Method to produce a reference grid artifact for matching a MEBES 4500 system to an external reference","display_name":"Method to produce a reference grid artifact for matching a MEBES 4500 system to an external reference","publication_year":1995,"publication_date":"1995-10-06","ids":{"openalex":"https://openalex.org/W2017677010","doi":"https://doi.org/10.1117/12.228172","mag":"2017677010"},"language":"en","primary_location":{"id":"doi:10.1117/12.228172","doi":"https://doi.org/10.1117/12.228172","is_oa":false,"landing_page_url":"https://doi.org/10.1117/12.228172","pdf_url":null,"source":{"id":"https://openalex.org/S183492911","display_name":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","issn_l":"0277-786X","issn":["0277-786X","1996-756X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","norway-1"],"host_organization":"https://openalex.org/P4310315543","host_organization_name":"SPIE","host_organization_lineage":["https://openalex.org/P4310315543"],"host_organization_lineage_names":["SPIE"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"SPIE Proceedings","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5027407821","display_name":"Jim DeWitt","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1343180700","display_name":"Intel (United States)","ror":"https://ror.org/01ek73717","country_code":"US","type":"company","lineage":["https://openalex.org/I1343180700"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Jim DeWitt","raw_affiliation_strings":["Intel Corp. (United States)","Intel Corporation, United States"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Intel Corp. (United States)","institution_ids":["https://openalex.org/I1343180700"]},{"raw_affiliation_string":"Intel Corporation, United States","institution_ids":["https://openalex.org/I1343180700"]}]},{"author_position":"middle","author":{"id":null,"display_name":"Joe Watson","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1343180700","display_name":"Intel (United States)","ror":"https://ror.org/01ek73717","country_code":"US","type":"company","lineage":["https://openalex.org/I1343180700"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Joe Watson","raw_affiliation_strings":["Intel Corp. (United States)","Intel Corporation, United States"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Intel Corp. (United States)","institution_ids":["https://openalex.org/I1343180700"]},{"raw_affiliation_string":"Intel Corporation, United States","institution_ids":["https://openalex.org/I1343180700"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5071063183","display_name":"Thomas P. Coleman","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Thomas P. Coleman","raw_affiliation_strings":["ETEC Systems, Inc. (United States)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"ETEC Systems, Inc. (United States)","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5084185579","display_name":"Leonard Gasiorek","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Leonard Gasiorek","raw_affiliation_strings":["Etec Systems, Inc. (United States)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Etec Systems, Inc. (United States)","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5037106729","display_name":"Michael D. Lubin","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Michael D. Lubin","raw_affiliation_strings":["Etec Systems, Inc. (United States)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Etec Systems, Inc. (United States)","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5036720793","display_name":"Robert J. Naber","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Robert J. Naber","raw_affiliation_strings":["Etec Systems, Inc. (United States)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Etec Systems, Inc. (United States)","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100702487","display_name":"William Wang","orcid":"https://orcid.org/0009-0002-6485-9714","observed_orcids":["https://orcid.org/0009-0002-6485-9714"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"William Wang","raw_affiliation_strings":["Etec Systems, Inc. (United States)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Etec Systems, Inc. (United States)","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5023093484","display_name":"Keith Wires","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Keith Wires","raw_affiliation_strings":["Etec Systems, Inc. (United States)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Etec Systems, Inc. (United States)","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":1.3803,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.7830524,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"2621","issue":null,"first_page":"208","last_page":"213"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.8105000257492065,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.8105000257492065,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11583","display_name":"Advanced Measurement and Metrology Techniques","score":0.17520000040531158,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10638","display_name":"Optical measurement and interference techniques","score":0.0044999998062849045,"subfield":{"id":"https://openalex.org/subfields/1707","display_name":"Computer Vision and Pattern Recognition"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/reference-grid","display_name":"reference grid","score":0.8220000267028809}],"concepts":[{"id":"https://openalex.org/C2779010991","wikidata":"https://www.wikidata.org/wiki/Q2720909","display_name":"Artifact (error)","level":2,"score":0.8270981311798096},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.7216717004776001},{"id":"https://openalex.org/C187691185","wikidata":"https://www.wikidata.org/wiki/Q2020720","display_name":"Grid","level":2,"score":0.6705604791641235},{"id":"https://openalex.org/C165064840","wikidata":"https://www.wikidata.org/wiki/Q1321061","display_name":"Matching (statistics)","level":2,"score":0.6006539463996887},{"id":"https://openalex.org/C2776401178","wikidata":"https://www.wikidata.org/wiki/Q12050496","display_name":"Feature (linguistics)","level":2,"score":0.5549952983856201},{"id":"https://openalex.org/C195766429","wikidata":"https://www.wikidata.org/wiki/Q394","display_name":"Metrology","level":2,"score":0.5260467529296875},{"id":"https://openalex.org/C31972630","wikidata":"https://www.wikidata.org/wiki/Q844240","display_name":"Computer vision","level":1,"score":0.5128943920135498},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.46409884095191956},{"id":"https://openalex.org/C158096908","wikidata":"https://www.wikidata.org/wiki/Q3983303","display_name":"Template matching","level":3,"score":0.43207651376724243},{"id":"https://openalex.org/C115961682","wikidata":"https://www.wikidata.org/wiki/Q860623","display_name":"Image (mathematics)","level":2,"score":0.1342090666294098},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.12902000546455383},{"id":"https://openalex.org/C105795698","wikidata":"https://www.wikidata.org/wiki/Q12483","display_name":"Statistics","level":1,"score":0.07990145683288574},{"id":"https://openalex.org/C138885662","wikidata":"https://www.wikidata.org/wiki/Q5891","display_name":"Philosophy","level":0,"score":0.0},{"id":"https://openalex.org/C2524010","wikidata":"https://www.wikidata.org/wiki/Q8087","display_name":"Geometry","level":1,"score":0.0},{"id":"https://openalex.org/C41895202","wikidata":"https://www.wikidata.org/wiki/Q8162","display_name":"Linguistics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1117/12.228172","doi":"https://doi.org/10.1117/12.228172","is_oa":false,"landing_page_url":"https://doi.org/10.1117/12.228172","pdf_url":null,"source":{"id":"https://openalex.org/S183492911","display_name":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","issn_l":"0277-786X","issn":["0277-786X","1996-756X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","norway-1"],"host_organization":"https://openalex.org/P4310315543","host_organization_name":"SPIE","host_organization_lineage":["https://openalex.org/P4310315543"],"host_organization_lineage_names":["SPIE"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"SPIE Proceedings","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W2077418018","https://openalex.org/W2060570614","https://openalex.org/W2015842866","https://openalex.org/W1981630077","https://openalex.org/W4237022678","https://openalex.org/W6959300828","https://openalex.org/W1999275743","https://openalex.org/W2004654762","https://openalex.org/W1985948212","https://openalex.org/W2040971656"],"abstract_inverted_index":{"It":[0,39],"has":[1,40],"been":[2,42],"shown":[3,43],"that":[4,44],"mask":[5],"composite":[6,200],"pattern":[7,127,135],"position":[8],"errors":[9,150,202],"can":[10,49,158,173],"be":[11,50,160,174],"reduced":[12],"by":[13,53,205],"more":[14],"than":[15],"40%":[16],"on":[17,74,128,137],"the":[18,56,63,75,129,138,152,171],"MEBES":[19,31,47,64,76],"4000":[20,32],"system":[21,33,103,196],"if":[22],"a":[23,30,82,92,96,109,118,124,163],"reference":[24,84,125,164],"grid":[25,58,70,104,126],"is":[26],"used":[27,161],"to":[28,34,94,117,122,145,176,184,198],"match":[29],"an":[35,186],"independent":[36,206],"metrology":[37,207],"tool.":[38,154],"also":[41],"matching":[45,59,71,197],"between":[46],"systems":[48],"significantly":[51],"improved":[52],"use":[54,101],"of":[55,62,69,81,133,151,181],"dynamic":[57],"(DGM)":[60],"feature":[61],"4500":[65,77],"system.":[66],"Several":[67],"methods":[68],"are":[72,188],"possible":[73],"tool,":[78],"including":[79],"generation":[80],"physical":[83],"artifact":[85,99,165,187],"or":[86],"'golden":[87],"plate.'":[88],"This":[89],"work":[90],"defines":[91],"method":[93],"produce":[95,185],"golden":[97],"plate":[98],"for":[100,166],"in":[102,195],"matching.":[105],"The":[106,155],"technique":[107],"uses":[108],"second":[110],"level":[111,120],"(phase":[112],"shift":[113],"mask)":[114],"alignment":[115],"capability":[116],"zero":[119],"target":[121],"place":[123],"reticle.":[130],"Subsequent":[131],"exposures":[132],"this":[134,182],"overlaid":[136],"same":[139],"substrate":[140],"with":[141],"different":[142,167],"orientations":[143],"serve":[144],"reduce":[146,199],"systematic":[147],"and":[148],"random":[149],"exposure":[153],"processed":[156],"image":[157],"then":[159],"as":[162,190,192,203],"systems.":[168],"If":[169],"necessary,":[170],"procedure":[172],"iterated":[175],"further":[177],"improve":[178],"accuracy.":[179],"Results":[180],"methodology":[183],"presented":[189],"well":[191],"its":[193],"application":[194],"positional":[201],"measured":[204],"tools.":[208]},"counts_by_year":[],"updated_date":"2026-10-30T12:39:25.321706","created_date":"2016-06-24T00:00:00"}