{"id":"https://openalex.org/W2017352019","doi":"https://doi.org/10.1117/12.887491","title":"EUV: induced ablation and surface modifications of solids","display_name":"EUV: induced ablation and surface modifications of solids","publication_year":2011,"publication_date":"2011-05-04","ids":{"openalex":"https://openalex.org/W2017352019","doi":"https://doi.org/10.1117/12.887491","mag":"2017352019"},"language":"en","primary_location":{"id":"doi:10.1117/12.887491","doi":"https://doi.org/10.1117/12.887491","is_oa":false,"landing_page_url":"https://doi.org/10.1117/12.887491","pdf_url":null,"source":{"id":"https://openalex.org/S183492911","display_name":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","issn_l":"0277-786X","issn":["0277-786X","1996-756X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","norway-1"],"host_organization":"https://openalex.org/P4310315543","host_organization_name":"SPIE","host_organization_lineage":["https://openalex.org/P4310315543"],"host_organization_lineage_names":["SPIE"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"SPIE Proceedings","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5087522946","display_name":"Andrzej S. Bartnik","orcid":"https://orcid.org/0000-0002-7555-8426","observed_orcids":["https://orcid.org/0000-0002-7555-8426"]},"institutions":[{"id":"https://openalex.org/I2800249161","display_name":"Military University of Technology in Warsaw","ror":"https://ror.org/05fct5h31","country_code":"PL","type":"education","lineage":["https://openalex.org/I2800249161"]}],"countries":["PL"],"is_corresponding":false,"raw_author_name":"A. Bartnik","raw_affiliation_strings":["Military Univ. of Technology (Poland)","Military University of Technology Poland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Military Univ. of Technology (Poland)","institution_ids":["https://openalex.org/I2800249161"]},{"raw_affiliation_string":"Military University of Technology Poland","institution_ids":["https://openalex.org/I2800249161"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5016518066","display_name":"Henryk Fiedorowicz","orcid":"https://orcid.org/0000-0002-7022-3408","observed_orcids":["https://orcid.org/0000-0002-7022-3408"]},"institutions":[{"id":"https://openalex.org/I2800249161","display_name":"Military University of Technology in Warsaw","ror":"https://ror.org/05fct5h31","country_code":"PL","type":"education","lineage":["https://openalex.org/I2800249161"]}],"countries":["PL"],"is_corresponding":false,"raw_author_name":"H. Fiedorowicz","raw_affiliation_strings":["Military Univ. of Technology (Poland)","Military University of Technology Poland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Military Univ. of Technology (Poland)","institution_ids":["https://openalex.org/I2800249161"]},{"raw_affiliation_string":"Military University of Technology Poland","institution_ids":["https://openalex.org/I2800249161"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5080883462","display_name":"Roman Jarocki","orcid":"https://orcid.org/0000-0001-6758-0984","observed_orcids":["https://orcid.org/0000-0001-6758-0984"]},"institutions":[{"id":"https://openalex.org/I2800249161","display_name":"Military University of Technology in Warsaw","ror":"https://ror.org/05fct5h31","country_code":"PL","type":"education","lineage":["https://openalex.org/I2800249161"]}],"countries":["PL"],"is_corresponding":false,"raw_author_name":"R. Jarocki","raw_affiliation_strings":["Military Univ. of Technology (Poland)","Military University of Technology Poland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Military Univ. of Technology (Poland)","institution_ids":["https://openalex.org/I2800249161"]},{"raw_affiliation_string":"Military University of Technology Poland","institution_ids":["https://openalex.org/I2800249161"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5076200807","display_name":"Jerzy Kostecki","orcid":"https://orcid.org/0000-0003-0105-0109","observed_orcids":["https://orcid.org/0000-0003-0105-0109"]},"institutions":[{"id":"https://openalex.org/I2800249161","display_name":"Military University of Technology in Warsaw","ror":"https://ror.org/05fct5h31","country_code":"PL","type":"education","lineage":["https://openalex.org/I2800249161"]}],"countries":["PL"],"is_corresponding":false,"raw_author_name":"J. Kostecki","raw_affiliation_strings":["Military Univ. of Technology (Poland)","Military University of Technology Poland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Military Univ. of Technology (Poland)","institution_ids":["https://openalex.org/I2800249161"]},{"raw_affiliation_string":"Military University of Technology Poland","institution_ids":["https://openalex.org/I2800249161"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5074971858","display_name":"M. Szczurek","orcid":"https://orcid.org/0000-0002-8794-2118","observed_orcids":["https://orcid.org/0000-0002-8794-2118"]},"institutions":[{"id":"https://openalex.org/I2800249161","display_name":"Military University of Technology in Warsaw","ror":"https://ror.org/05fct5h31","country_code":"PL","type":"education","lineage":["https://openalex.org/I2800249161"]}],"countries":["PL"],"is_corresponding":false,"raw_author_name":"M. Szczurek","raw_affiliation_strings":["Military Univ. of Technology (Poland)","Military University of Technology Poland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Military Univ. of Technology (Poland)","institution_ids":["https://openalex.org/I2800249161"]},{"raw_affiliation_string":"Military University of Technology Poland","institution_ids":["https://openalex.org/I2800249161"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5001064729","display_name":"Tadeusz Szczurek","orcid":"https://orcid.org/0000-0002-3433-8072","observed_orcids":["https://orcid.org/0000-0002-3433-8072"]},"institutions":[{"id":"https://openalex.org/I2800249161","display_name":"Military University of Technology in Warsaw","ror":"https://ror.org/05fct5h31","country_code":"PL","type":"education","lineage":["https://openalex.org/I2800249161"]}],"countries":["PL"],"is_corresponding":false,"raw_author_name":"A. Szczurek","raw_affiliation_strings":["Military Univ. of Technology (Poland)","Military University of Technology Poland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Military Univ. of Technology (Poland)","institution_ids":["https://openalex.org/I2800249161"]},{"raw_affiliation_string":"Military University of Technology Poland","institution_ids":["https://openalex.org/I2800249161"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5055515591","display_name":"Przemyslaw Wojciech Wachulak","orcid":"https://orcid.org/0000-0001-9853-7946","observed_orcids":["https://orcid.org/0000-0001-9853-7946"]},"institutions":[{"id":"https://openalex.org/I2800249161","display_name":"Military University of Technology in Warsaw","ror":"https://ror.org/05fct5h31","country_code":"PL","type":"education","lineage":["https://openalex.org/I2800249161"]}],"countries":["PL"],"is_corresponding":false,"raw_author_name":"P. Wachulak","raw_affiliation_strings":["Military Univ. of Technology (Poland)","Military University of Technology Poland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Military Univ. of Technology (Poland)","institution_ids":["https://openalex.org/I2800249161"]},{"raw_affiliation_string":"Military University of Technology Poland","institution_ids":["https://openalex.org/I2800249161"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I2800249161"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":4,"citation_normalized_percentile":{"value":0.0,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":94},"biblio":{"volume":"8077","issue":null,"first_page":"80770H","last_page":"80770H"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10732","display_name":"Laser Material Processing Techniques","score":0.9829000234603882,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10732","display_name":"Laser Material Processing Techniques","score":0.9829000234603882,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.006099999882280827,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12166","display_name":"Ion-surface interactions and analysis","score":0.0017999999690800905,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/surface-modification","display_name":"surface modification","score":0.6449999809265137},{"id":"https://openalex.org/keywords/polymers","display_name":"polymers","score":0.9909999966621399},{"id":"https://openalex.org/keywords/gas-puff-target","display_name":"gas puff target","score":0.7860000133514404},{"id":"https://openalex.org/keywords/surface-morphology","display_name":"surface morphology","score":0.492000013589859},{"id":"https://openalex.org/keywords/oxygen-containing-functional-groups","display_name":"oxygen-containing functional groups","score":0.7519999742507935},{"id":"https://openalex.org/keywords/inorganic-solids","display_name":"inorganic solids","score":0.7639999985694885}],"concepts":[{"id":"https://openalex.org/C175708663","wikidata":"https://www.wikidata.org/wiki/Q899559","display_name":"X-ray photoelectron spectroscopy","level":2,"score":0.8656978011131287},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6967064738273621},{"id":"https://openalex.org/C162996421","wikidata":"https://www.wikidata.org/wiki/Q371965","display_name":"Extreme ultraviolet lithography","level":2,"score":0.677385687828064},{"id":"https://openalex.org/C521977710","wikidata":"https://www.wikidata.org/wiki/Q81163","display_name":"Polymer","level":2,"score":0.6629030108451843},{"id":"https://openalex.org/C26771246","wikidata":"https://www.wikidata.org/wiki/Q321095","display_name":"Scanning electron microscope","level":2,"score":0.5925622582435608},{"id":"https://openalex.org/C2779188808","wikidata":"https://www.wikidata.org/wiki/Q1806547","display_name":"Laser ablation","level":3,"score":0.5041495561599731},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.44608914852142334},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.34172236919403076},{"id":"https://openalex.org/C42360764","wikidata":"https://www.wikidata.org/wiki/Q83588","display_name":"Chemical engineering","level":1,"score":0.2782300114631653},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.27542710304260254},{"id":"https://openalex.org/C520434653","wikidata":"https://www.wikidata.org/wiki/Q38867","display_name":"Laser","level":2,"score":0.23485398292541504},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.19843417406082153},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.12340283393859863},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.07841667532920837},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.07151868939399719},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1117/12.887491","doi":"https://doi.org/10.1117/12.887491","is_oa":false,"landing_page_url":"https://doi.org/10.1117/12.887491","pdf_url":null,"source":{"id":"https://openalex.org/S183492911","display_name":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","issn_l":"0277-786X","issn":["0277-786X","1996-756X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","norway-1"],"host_organization":"https://openalex.org/P4310315543","host_organization_name":"SPIE","host_organization_lineage":["https://openalex.org/P4310315543"],"host_organization_lineage_names":["SPIE"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"SPIE Proceedings","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":9,"referenced_works":["https://openalex.org/W1969970604","https://openalex.org/W1990987969","https://openalex.org/W2024403731","https://openalex.org/W2024764101","https://openalex.org/W2073929095","https://openalex.org/W2074016966","https://openalex.org/W2086521150","https://openalex.org/W2114275367","https://openalex.org/W2489169018"],"related_works":["https://openalex.org/W2065137758","https://openalex.org/W71308981","https://openalex.org/W4300786983","https://openalex.org/W992483363","https://openalex.org/W1996890631","https://openalex.org/W2046716664","https://openalex.org/W2008861084","https://openalex.org/W2024764101","https://openalex.org/W1968525780","https://openalex.org/W7132729045"],"abstract_inverted_index":{"In":[0,99,119,191],"this":[1],"work":[2],"results":[3],"of":[4,11,73,81,87,101,112,121,134,146,164,172,177,180,182,193,198],"investigations":[5,138],"concerning":[6],"ablation":[7,45],"and":[8,13,34,55,75,95,159],"surface":[9,117,144],"modification":[10],"polymers":[12,103,195],"some":[14,102,194],"other":[15],"solids":[16,123],"using":[17,29,49],"a":[18,30,38,50,56,92,105],"laser-plasma":[19],"EUV":[20,97,135],"source":[21],"are":[22],"presented.":[23],"The":[24,44,61],"plasma":[25],"radiation":[26],"was":[27,35,47,108,169],"produced":[28],"gas":[31],"puff":[32],"target":[33],"focused":[36],"with":[37,130],"gold-plated":[39],"grazing":[40],"incidence":[41],"ellipsoidal":[42],"collector.":[43],"process":[46],"investigated":[48,65],"scanning":[51],"electron":[52],"microscope":[53],"(SEM)":[54],"quadrupole":[57],"mass":[58],"spectrometer":[59],"(QMS).":[60],"chemical":[62,140],"changes":[63,115,125,141],"were":[64,84,150,202],"by":[66],"X-ray":[67],"photoelectron":[68],"spectroscopy":[69],"(XPS).":[70],"Different":[71],"kinds":[72,179],"micro-":[74],"nanostructures":[76],"created":[77],"in":[78,116,142,152],"nearsurface":[79],"layers":[80,145],"the":[82,88,96,113,128,153,183,187,199],"materials":[83],"obtained.":[85],"Forms":[86],"structures":[89],"depend":[90],"on":[91],"particular":[93],"material":[94],"exposure.":[98],"case":[100,120,192],"even":[104],"single":[106],"shot":[107],"sufficient":[109],"for":[110,157],"creation":[111],"visible":[114,124],"morphology.":[118],"inorganic":[122],"required":[126],"usually":[127],"exposure":[129],"tens":[131],"or":[132],"hundreds":[133],"pulses.":[136],"XPS":[137,154],"revealed":[139,151],"near":[143],"polymers.":[147,161],"Significant":[148,162],"differences":[149],"spectra":[155,174],"acquired":[156],"irradiated":[158],"not-irradiated":[160],"decrease":[163],"functional":[165],"groups":[166],"containing":[167],"oxygen":[168],"indicated.":[170],"Analysis":[171],"QMS":[173],"indicate":[175],"emission":[176],"different":[178],"fragments":[181,197],"polymer":[184],"chains":[185],"including":[186],"repeating":[188,200],"structural":[189],"units.":[190],"only":[196],"unit":[201],"detected.":[203]},"counts_by_year":[{"year":2022,"cited_by_count":1},{"year":2018,"cited_by_count":1},{"year":2017,"cited_by_count":1},{"year":2015,"cited_by_count":1}],"updated_date":"2026-10-16T09:59:22.235173","created_date":"2016-06-24T00:00:00"}