{"id":"https://openalex.org/W2017111932","doi":"https://doi.org/10.1088/0960-1317/15/11/001","title":"Capacitive slanted-beam three-axis accelerometer: I. Modelling and design","display_name":"Capacitive slanted-beam three-axis accelerometer: I. Modelling and design","publication_year":2005,"publication_date":"2005-09-20","ids":{"openalex":"https://openalex.org/W2017111932","doi":"https://doi.org/10.1088/0960-1317/15/11/001","mag":"2017111932"},"language":"en","primary_location":{"id":"doi:10.1088/0960-1317/15/11/001","doi":"https://doi.org/10.1088/0960-1317/15/11/001","is_oa":true,"landing_page_url":"https://doi.org/10.1088/0960-1317/15/11/001","pdf_url":"https://iopscience.iop.org/article/10.1088/0960-1317/15/11/001/pdf","source":{"id":"https://openalex.org/S170809390","display_name":"Journal of Micromechanics and Microengineering","issn_l":"0960-1317","issn":["0960-1317","1361-6439"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-c","jufo-1","norway-1","poland-70","russia-white-list-2"],"host_organization":"https://openalex.org/P4310320083","host_organization_name":"IOP Publishing","host_organization_lineage":["https://openalex.org/P4310320083","https://openalex.org/P4310311669"],"host_organization_lineage_names":["IOP Publishing","Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Micromechanics and Microengineering","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"bronze","oa_url":"https://iopscience.iop.org/article/10.1088/0960-1317/15/11/001/pdf","any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5044338687","display_name":"Henrik R\u00f6djeg\u00e5rd","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4405256015","display_name":"Laboratoire de g\u00e9ographie et d'am\u00e9nagement","ror":"https://ror.org/03nx05k88","country_code":"FR","type":"facility","lineage":["https://openalex.org/I4210142324","https://openalex.org/I4405255810","https://openalex.org/I4405256015"]},{"id":"https://openalex.org/I4405258984","display_name":"Laboratoire de Psychologie","ror":"https://ror.org/01gy4cq52","country_code":"FR","type":"facility","lineage":["https://openalex.org/I15057530","https://openalex.org/I4405258984"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Henrik R\u00f6djeg\u00e5rd","raw_affiliation_strings":["The Imego Institute, SE-41133 G\u00f6teborg, Sweden"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"The Imego Institute, SE-41133 G\u00f6teborg, Sweden","institution_ids":["https://openalex.org/I4405256015","https://openalex.org/I4405258984"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5020128275","display_name":"G. Andersson","orcid":"https://orcid.org/0000-0001-6637-9859","observed_orcids":["https://orcid.org/0000-0001-6637-9859"]},"institutions":[{"id":"https://openalex.org/I4405256015","display_name":"Laboratoire de g\u00e9ographie et d'am\u00e9nagement","ror":"https://ror.org/03nx05k88","country_code":"FR","type":"facility","lineage":["https://openalex.org/I4210142324","https://openalex.org/I4405255810","https://openalex.org/I4405256015"]},{"id":"https://openalex.org/I4405258984","display_name":"Laboratoire de Psychologie","ror":"https://ror.org/01gy4cq52","country_code":"FR","type":"facility","lineage":["https://openalex.org/I15057530","https://openalex.org/I4405258984"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Gert I Andersson","raw_affiliation_strings":["The Imego Institute, SE-41133 G\u00f6teborg, Sweden"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"The Imego Institute, SE-41133 G\u00f6teborg, Sweden","institution_ids":["https://openalex.org/I4405256015","https://openalex.org/I4405258984"]}]},{"author_position":"middle","author":{"id":null,"display_name":"Cristina Rusu","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4405256015","display_name":"Laboratoire de g\u00e9ographie et d'am\u00e9nagement","ror":"https://ror.org/03nx05k88","country_code":"FR","type":"facility","lineage":["https://openalex.org/I4210142324","https://openalex.org/I4405255810","https://openalex.org/I4405256015"]},{"id":"https://openalex.org/I4405258984","display_name":"Laboratoire de Psychologie","ror":"https://ror.org/01gy4cq52","country_code":"FR","type":"facility","lineage":["https://openalex.org/I15057530","https://openalex.org/I4405258984"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Cristina Rusu","raw_affiliation_strings":["The Imego Institute, SE-41133 G\u00f6teborg, Sweden"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"The Imego Institute, SE-41133 G\u00f6teborg, Sweden","institution_ids":["https://openalex.org/I4405256015","https://openalex.org/I4405258984"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5065123206","display_name":"Mikael L\u00f6fgren","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Mikael L\u00f6fgren","raw_affiliation_strings":["Currently employed at Millicore AB, G\u00f6teborg, Sweden"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Currently employed at Millicore AB, G\u00f6teborg, Sweden","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5032456473","display_name":"Dag Billger","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4405256015","display_name":"Laboratoire de g\u00e9ographie et d'am\u00e9nagement","ror":"https://ror.org/03nx05k88","country_code":"FR","type":"facility","lineage":["https://openalex.org/I4210142324","https://openalex.org/I4405255810","https://openalex.org/I4405256015"]},{"id":"https://openalex.org/I4405258984","display_name":"Laboratoire de Psychologie","ror":"https://ror.org/01gy4cq52","country_code":"FR","type":"facility","lineage":["https://openalex.org/I15057530","https://openalex.org/I4405258984"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Dag Billger","raw_affiliation_strings":["The Imego Institute, SE-41133 G\u00f6teborg, Sweden"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"The Imego Institute, SE-41133 G\u00f6teborg, Sweden","institution_ids":["https://openalex.org/I4405256015","https://openalex.org/I4405258984"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":{"value":3325,"currency":"USD","value_usd":3325},"apc_paid":null,"fwci":1.8444,"has_fulltext":true,"cited_by_count":28,"citation_normalized_percentile":{"value":0.84696771,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":98},"biblio":{"volume":"15","issue":"11","first_page":"1989","last_page":"1996"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13885","display_name":"Geophysics and Sensor Technology","score":0.00019999999494757503,"subfield":{"id":"https://openalex.org/subfields/1908","display_name":"Geophysics"},"field":{"id":"https://openalex.org/fields/19","display_name":"Earth and Planetary Sciences"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":9.999999747378752e-05,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/capacitive-accelerometer","display_name":"capacitive accelerometer","score":0.7279999852180481},{"id":"https://openalex.org/keywords/triaxial-accelerometer","display_name":"triaxial accelerometer","score":0.8600000143051147},{"id":"https://openalex.org/keywords/seismic-mass","display_name":"seismic mass","score":0.8980000019073486},{"id":"https://openalex.org/keywords/finite-aspect-ratio","display_name":"finite aspect ratio","score":0.6380000114440918},{"id":"https://openalex.org/keywords/sensitivity","display_name":"sensitivity","score":0.7509999871253967},{"id":"https://openalex.org/keywords/resolution","display_name":"resolution","score":0.9750000238418579},{"id":"https://openalex.org/keywords/transverse-sensitivity","display_name":"transverse sensitivity","score":0.9940000176429749},{"id":"https://openalex.org/keywords/process-error","display_name":"process error","score":0.7879999876022339},{"id":"https://openalex.org/keywords/silicon-micromachining","display_name":"silicon micromachining","score":0.7540000081062317}],"concepts":[{"id":"https://openalex.org/C89805583","wikidata":"https://www.wikidata.org/wiki/Q192940","display_name":"Accelerometer","level":2,"score":0.9039724469184875},{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.7073788642883301},{"id":"https://openalex.org/C168834538","wikidata":"https://www.wikidata.org/wiki/Q3705329","display_name":"Beam (structure)","level":2,"score":0.6844265460968018},{"id":"https://openalex.org/C206755178","wikidata":"https://www.wikidata.org/wiki/Q1131271","display_name":"Capacitive sensing","level":2,"score":0.6417243480682373},{"id":"https://openalex.org/C154954056","wikidata":"https://www.wikidata.org/wiki/Q1604164","display_name":"Transverse plane","level":2,"score":0.6250964403152466},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.5498849153518677},{"id":"https://openalex.org/C138268822","wikidata":"https://www.wikidata.org/wiki/Q1051925","display_name":"Resolution (logic)","level":2,"score":0.5037946105003357},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.45849454402923584},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.45823293924331665},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.3974938690662384},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.37257587909698486},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3678504526615143},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.3479102551937103},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.30769050121307373},{"id":"https://openalex.org/C66938386","wikidata":"https://www.wikidata.org/wiki/Q633538","display_name":"Structural engineering","level":1,"score":0.20007112622261047},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.18049678206443787},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1088/0960-1317/15/11/001","doi":"https://doi.org/10.1088/0960-1317/15/11/001","is_oa":true,"landing_page_url":"https://doi.org/10.1088/0960-1317/15/11/001","pdf_url":"https://iopscience.iop.org/article/10.1088/0960-1317/15/11/001/pdf","source":{"id":"https://openalex.org/S170809390","display_name":"Journal of Micromechanics and Microengineering","issn_l":"0960-1317","issn":["0960-1317","1361-6439"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-c","jufo-1","norway-1","poland-70","russia-white-list-2"],"host_organization":"https://openalex.org/P4310320083","host_organization_name":"IOP Publishing","host_organization_lineage":["https://openalex.org/P4310320083","https://openalex.org/P4310311669"],"host_organization_lineage_names":["IOP Publishing","Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Micromechanics and Microengineering","raw_type":"journal-article"},{"id":"mag:2955145518","doi":null,"is_oa":false,"landing_page_url":"http://www.diva-portal.org/smash/record.jsf?pid=diva2:1152049","pdf_url":null,"source":{"id":"https://openalex.org/S170809390","display_name":"Journal of Micromechanics and Microengineering","issn_l":"0960-1317","issn":["0960-1317","1361-6439"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-c","jufo-1","norway-1","poland-70","russia-white-list-2"],"host_organization":"https://openalex.org/P4310320083","host_organization_name":"IOP Publishing","host_organization_lineage":["https://openalex.org/P4310320083","https://openalex.org/P4310311669"],"host_organization_lineage_names":["IOP Publishing","Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false,"raw_source_name":"Journal of Micromechanics and Microengineering","raw_type":null}],"best_oa_location":{"id":"doi:10.1088/0960-1317/15/11/001","doi":"https://doi.org/10.1088/0960-1317/15/11/001","is_oa":true,"landing_page_url":"https://doi.org/10.1088/0960-1317/15/11/001","pdf_url":"https://iopscience.iop.org/article/10.1088/0960-1317/15/11/001/pdf","source":{"id":"https://openalex.org/S170809390","display_name":"Journal of Micromechanics and Microengineering","issn_l":"0960-1317","issn":["0960-1317","1361-6439"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-c","jufo-1","norway-1","poland-70","russia-white-list-2"],"host_organization":"https://openalex.org/P4310320083","host_organization_name":"IOP Publishing","host_organization_lineage":["https://openalex.org/P4310320083","https://openalex.org/P4310311669"],"host_organization_lineage_names":["IOP Publishing","Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Micromechanics and Microengineering","raw_type":"journal-article"},"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2017111932.pdf","grobid_xml":"https://content.openalex.org/works/W2017111932.grobid-xml"},"referenced_works_count":10,"referenced_works":["https://openalex.org/W2041463281","https://openalex.org/W2081427901","https://openalex.org/W2087020924","https://openalex.org/W2093328453","https://openalex.org/W2108538325","https://openalex.org/W2113767002","https://openalex.org/W2134033443","https://openalex.org/W2153681676","https://openalex.org/W2493109755","https://openalex.org/W4251197254"],"related_works":["https://openalex.org/W2041172165","https://openalex.org/W2955145518","https://openalex.org/W1829820724","https://openalex.org/W2591925013","https://openalex.org/W2081427901","https://openalex.org/W2084389613","https://openalex.org/W2478632977","https://openalex.org/W2041585523","https://openalex.org/W2000853735","https://openalex.org/W2493109755"],"abstract_inverted_index":{"Three-axis":[0],"accelerometers":[1,37],"based":[2],"on":[3,11],"four":[4],"separate":[5],"seismic":[6],"masses,":[7],"each":[8],"one":[9],"suspended":[10],"a":[12,30,76],"slanted":[13],"beam,":[14],"have":[15,20,72],"previously":[16],"been":[17,73],"shown":[18],"to":[19],"identical":[21],"resolution":[22],"and":[23,32,55,65],"frequency":[24],"responses":[25],"in":[26,75],"all":[27],"directions.":[28],"Here,":[29],"new":[31],"in-depth":[33],"model":[34,42],"of":[35,52],"such":[36,46],"is":[38],"presented.":[39],"The":[40],"theoretical":[41],"incorporates":[43],"non-ideal":[44],"effects":[45],"as":[47],"the":[48,53,56],"finite":[49],"aspect":[50],"ratio":[51],"beam":[54],"frequency-dependent":[57],"squeezed":[58],"gas-film":[59],"damping.":[60],"Sensitivity,":[61],"resolution,":[62],"transverse":[63],"sensitivity":[64],"process":[66],"errors":[67],"are":[68],"discussed.":[69],"Prototype":[70],"devices":[71],"fabricated":[74],"straightforward":[77],"silicon":[78],"process.":[79]},"counts_by_year":[{"year":2022,"cited_by_count":1},{"year":2019,"cited_by_count":1},{"year":2018,"cited_by_count":2},{"year":2017,"cited_by_count":2},{"year":2016,"cited_by_count":2},{"year":2015,"cited_by_count":4},{"year":2014,"cited_by_count":1},{"year":2013,"cited_by_count":2},{"year":2012,"cited_by_count":5}],"updated_date":"2026-11-04T10:54:05.112534","created_date":"2016-06-24T00:00:00"}