{"id":"https://openalex.org/W2016563272","doi":"https://doi.org/10.1889/1.3256954","title":"63.1: Responsive Vacuum Deposition Technology for Cost\u2010Effective OLED Manufacturing","display_name":"63.1: Responsive Vacuum Deposition Technology for Cost\u2010Effective OLED Manufacturing","publication_year":2009,"publication_date":"2009-06-01","ids":{"openalex":"https://openalex.org/W2016563272","doi":"https://doi.org/10.1889/1.3256954","mag":"2016563272"},"language":"en","primary_location":{"id":"doi:10.1889/1.3256954","doi":"https://doi.org/10.1889/1.3256954","is_oa":false,"landing_page_url":"https://doi.org/10.1889/1.3256954","pdf_url":null,"source":{"id":"https://openalex.org/S4210171700","display_name":"SID Symposium Digest of Technical Papers","issn_l":"0097-966X","issn":["0097-966X","2154-6738","2154-6746","2168-0159"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core"],"host_organization":"https://openalex.org/P4310320595","host_organization_name":"Wiley","host_organization_lineage":["https://openalex.org/P4310320595"],"host_organization_lineage_names":["Wiley"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"SID Symposium Digest of Technical Papers","raw_type":"journal-article"},"volume":null,"type":"conference-paper","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5065847066","display_name":"Michael Long","orcid":"https://orcid.org/0009-0005-0093-9514","observed_orcids":["https://orcid.org/0009-0005-0093-9514"]},"institutions":[{"id":"https://openalex.org/I175669267","display_name":"Carestream (United States)","ror":"https://ror.org/048m16q57","country_code":"US","type":"company","lineage":["https://openalex.org/I175669267"]},{"id":"https://openalex.org/I4210159451","display_name":"Kodak (United States)","ror":"https://ror.org/04rn3ph18","country_code":"US","type":"company","lineage":["https://openalex.org/I4210159451"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Michael Long","raw_affiliation_strings":["Eastman Kodak Company, Rochester, New York, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Eastman Kodak Company, Rochester, New York, USA","institution_ids":["https://openalex.org/I175669267","https://openalex.org/I4210159451"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5038411948","display_name":"Bruce E. Koppe","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I175669267","display_name":"Carestream (United States)","ror":"https://ror.org/048m16q57","country_code":"US","type":"company","lineage":["https://openalex.org/I175669267"]},{"id":"https://openalex.org/I4210159451","display_name":"Kodak (United States)","ror":"https://ror.org/04rn3ph18","country_code":"US","type":"company","lineage":["https://openalex.org/I4210159451"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Bruce Koppe","raw_affiliation_strings":["Eastman Kodak Company, Rochester, New York, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Eastman Kodak Company, Rochester, New York, USA","institution_ids":["https://openalex.org/I175669267","https://openalex.org/I4210159451"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5088959135","display_name":"Neil Redden","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I175669267","display_name":"Carestream (United States)","ror":"https://ror.org/048m16q57","country_code":"US","type":"company","lineage":["https://openalex.org/I175669267"]},{"id":"https://openalex.org/I4210159451","display_name":"Kodak (United States)","ror":"https://ror.org/04rn3ph18","country_code":"US","type":"company","lineage":["https://openalex.org/I4210159451"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Neil Redden","raw_affiliation_strings":["Eastman Kodak Company, Rochester, New York, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Eastman Kodak Company, Rochester, New York, USA","institution_ids":["https://openalex.org/I175669267","https://openalex.org/I4210159451"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5063381433","display_name":"Michael L. Boroson","orcid":"https://orcid.org/0000-0002-8189-0804","observed_orcids":["https://orcid.org/0000-0002-8189-0804"]},"institutions":[{"id":"https://openalex.org/I175669267","display_name":"Carestream (United States)","ror":"https://ror.org/048m16q57","country_code":"US","type":"company","lineage":["https://openalex.org/I175669267"]},{"id":"https://openalex.org/I4210159451","display_name":"Kodak (United States)","ror":"https://ror.org/04rn3ph18","country_code":"US","type":"company","lineage":["https://openalex.org/I4210159451"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Michael Boroson","raw_affiliation_strings":["Eastman Kodak Company, Rochester, New York, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Eastman Kodak Company, Rochester, New York, USA","institution_ids":["https://openalex.org/I175669267","https://openalex.org/I4210159451"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.4685,"has_fulltext":false,"cited_by_count":3,"citation_normalized_percentile":{"value":0.51375596,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":93},"biblio":{"volume":"40","issue":"1","first_page":"943","last_page":"946"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10611","display_name":"Organic Light-Emitting Diodes Research","score":0.9940999746322632,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10611","display_name":"Organic Light-Emitting Diodes Research","score":0.9940999746322632,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13889","display_name":"Advanced Materials and Semiconductor Technologies","score":0.002199999988079071,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.0006000000284984708,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/vacuum-deposition","display_name":"vacuum deposition","score":0.7739999890327454},{"id":"https://openalex.org/keywords/oled-manufacturing","display_name":"OLED manufacturing","score":0.7889999747276306},{"id":"https://openalex.org/keywords/flash-evaporation","display_name":"flash evaporation","score":0.859000027179718},{"id":"https://openalex.org/keywords/feedback-control","display_name":"feedback control","score":0.925000011920929},{"id":"https://openalex.org/keywords/deposition-rate-control","display_name":"deposition rate control","score":0.7570000290870667},{"id":"https://openalex.org/keywords/cluster-tools","display_name":"cluster tools","score":0.8690000176429749},{"id":"https://openalex.org/keywords/cost-reduction","display_name":"cost reduction","score":0.6240000128746033}],"concepts":[{"id":"https://openalex.org/C195801359","wikidata":"https://www.wikidata.org/wiki/Q6452502","display_name":"Vaporization","level":2,"score":0.7734789252281189},{"id":"https://openalex.org/C64297162","wikidata":"https://www.wikidata.org/wiki/Q1987070","display_name":"Deposition (geology)","level":3,"score":0.632112979888916},{"id":"https://openalex.org/C150759737","wikidata":"https://www.wikidata.org/wiki/Q209593","display_name":"OLED","level":3,"score":0.6148093938827515},{"id":"https://openalex.org/C164866538","wikidata":"https://www.wikidata.org/wiki/Q367351","display_name":"Cluster (spacecraft)","level":2,"score":0.5545823574066162},{"id":"https://openalex.org/C2777526259","wikidata":"https://www.wikidata.org/wiki/Q221836","display_name":"Flash (photography)","level":2,"score":0.5042628049850464},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.42886143922805786},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.38155797123908997},{"id":"https://openalex.org/C21880701","wikidata":"https://www.wikidata.org/wiki/Q2144042","display_name":"Process engineering","level":1,"score":0.3512941002845764},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.266116201877594},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.2340652048587799},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.16875845193862915},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.15263304114341736},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.13046371936798096},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.06503507494926453},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C2816523","wikidata":"https://www.wikidata.org/wiki/Q180184","display_name":"Sediment","level":2,"score":0.0},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.0},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0},{"id":"https://openalex.org/C151730666","wikidata":"https://www.wikidata.org/wiki/Q7205","display_name":"Paleontology","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1889/1.3256954","doi":"https://doi.org/10.1889/1.3256954","is_oa":false,"landing_page_url":"https://doi.org/10.1889/1.3256954","pdf_url":null,"source":{"id":"https://openalex.org/S4210171700","display_name":"SID Symposium Digest of Technical Papers","issn_l":"0097-966X","issn":["0097-966X","2154-6738","2154-6746","2168-0159"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core"],"host_organization":"https://openalex.org/P4310320595","host_organization_name":"Wiley","host_organization_lineage":["https://openalex.org/P4310320595"],"host_organization_lineage_names":["Wiley"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"SID Symposium Digest of Technical Papers","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":3,"referenced_works":["https://openalex.org/W2055109826","https://openalex.org/W2077188122","https://openalex.org/W2220212987"],"related_works":["https://openalex.org/W2055109826","https://openalex.org/W2058666237","https://openalex.org/W2155746796","https://openalex.org/W1978565579","https://openalex.org/W2024151008","https://openalex.org/W2083800526","https://openalex.org/W2115360682","https://openalex.org/W2045912217","https://openalex.org/W7100186229","https://openalex.org/W3025089533"],"abstract_inverted_index":{"Abstract":[0],"The":[1],"ability":[2],"to":[3,9],"interrupt":[4],"and":[5,29],"reinitiate":[6],"vaporization":[7,35],"rapidly":[8],"precisely":[10],"controlled":[11],"rates":[12],"is":[13,41],"an":[14],"important":[15],"requirement":[16],"for":[17,26],"reducing":[18],"the":[19],"deposition":[20,36],"cost":[21],"component":[22],"of":[23],"OLED":[24],"displays":[25],"both":[27],"in\u2010line":[28],"cluster":[30],"tool":[31],"configurations.":[32],"A":[33],"flash":[34],"system":[37],"using":[38],"closed\u2010loop":[39],"control":[40],"described":[42],"that":[43],"achieves":[44],"these":[45],"objectives.":[46]},"counts_by_year":[{"year":2017,"cited_by_count":1},{"year":2014,"cited_by_count":1}],"updated_date":"2026-10-30T12:39:25.321706","created_date":"2016-06-24T00:00:00"}
