{"id":"https://openalex.org/W2016126739","doi":"https://doi.org/10.1063/1.1611639","title":"Control of microelectromechanical systems membrane curvature by silicon ion implantation","display_name":"Control of microelectromechanical systems membrane curvature by silicon ion implantation","publication_year":2003,"publication_date":"2003-09-18","ids":{"openalex":"https://openalex.org/W2016126739","doi":"https://doi.org/10.1063/1.1611639","mag":"2016126739"},"language":"en","primary_location":{"id":"doi:10.1063/1.1611639","doi":"https://doi.org/10.1063/1.1611639","is_oa":false,"landing_page_url":"https://doi.org/10.1063/1.1611639","pdf_url":null,"source":{"id":"https://openalex.org/S105243760","display_name":"Applied Physics Letters","issn_l":"0003-6951","issn":["0003-6951","1077-3118","1520-8842"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-a","jufo-3","ki-jl-1","norway-2","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Applied Physics Letters","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5101941551","display_name":"Sungho Jin","orcid":"https://orcid.org/0000-0002-6055-414X","observed_orcids":["https://orcid.org/0000-0002-6055-414X"]},"institutions":[{"id":"https://openalex.org/I36258959","display_name":"University of California San Diego","ror":"https://ror.org/0168r3w48","country_code":"US","type":"education","lineage":["https://openalex.org/I36258959"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"S. Jin","raw_affiliation_strings":["University of California at San Diego, La Jolla, California\u200992093"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"University of California at San Diego, La Jolla, California\u200992093","institution_ids":["https://openalex.org/I36258959"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5026585097","display_name":"H. Mavoori","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I149581226","display_name":"Hawaii Pacific University","ror":"https://ror.org/01963ay88","country_code":"US","type":"education","lineage":["https://openalex.org/I149581226"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"H. Mavoori","raw_affiliation_strings":["Hawaii Pacific University, Honolulu, Hawaii\u200996822"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Hawaii Pacific University, Honolulu, Hawaii\u200996822","institution_ids":["https://openalex.org/I149581226"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5011418414","display_name":"J. Kim","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"J. Kim","raw_affiliation_strings":["Bell Labs, Lucent Technologies, Murray Hill, New Jersey\u200907974"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Bell Labs, Lucent Technologies, Murray Hill, New Jersey\u200907974","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5049688771","display_name":"Vladimir Aksyuk","orcid":"https://orcid.org/0000-0002-9653-4722","observed_orcids":["https://orcid.org/0000-0002-9653-4722"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"V. A. Aksyuk","raw_affiliation_strings":["Bell Labs, Lucent Technologies, Murray Hill, New Jersey\u200907974"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Bell Labs, Lucent Technologies, Murray Hill, New Jersey\u200907974","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":1.9857,"has_fulltext":false,"cited_by_count":17,"citation_normalized_percentile":{"value":0.85731737,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":93},"biblio":{"volume":"83","issue":"12","first_page":"2321","last_page":"2323"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12166","display_name":"Ion-surface interactions and analysis","score":9.999999747378752e-05,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/mems-membranes","display_name":"MEMS membranes","score":0.824999988079071},{"id":"https://openalex.org/keywords/membrane-curvature","display_name":"membrane curvature","score":0.8349999785423279},{"id":"https://openalex.org/keywords/silicon-ion-implantation","display_name":"silicon ion implantation","score":0.9890000224113464},{"id":"https://openalex.org/keywords/gold-metallization","display_name":"gold metallization","score":0.8899999856948853},{"id":"https://openalex.org/keywords/moving-mirror","display_name":"moving mirror","score":0.8080000281333923},{"id":"https://openalex.org/keywords/compressive-stress","display_name":"compressive stress","score":0.7300000190734863}],"concepts":[{"id":"https://openalex.org/C195065555","wikidata":"https://www.wikidata.org/wiki/Q214881","display_name":"Curvature","level":2,"score":0.8157572746276855},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.7863449454307556},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7629296779632568},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.7354078888893127},{"id":"https://openalex.org/C41823505","wikidata":"https://www.wikidata.org/wiki/Q1436752","display_name":"Ion implantation","level":3,"score":0.5878291726112366},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5391324758529663},{"id":"https://openalex.org/C41625074","wikidata":"https://www.wikidata.org/wiki/Q176088","display_name":"Membrane","level":2,"score":0.5274439454078674},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.5237635970115662},{"id":"https://openalex.org/C19444555","wikidata":"https://www.wikidata.org/wiki/Q212750","display_name":"Flattening","level":2,"score":0.5016169548034668},{"id":"https://openalex.org/C2777278457","wikidata":"https://www.wikidata.org/wiki/Q6815124","display_name":"Membrane curvature","level":4,"score":0.46356213092803955},{"id":"https://openalex.org/C145148216","wikidata":"https://www.wikidata.org/wiki/Q36496","display_name":"Ion","level":2,"score":0.3558129370212555},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.3487408757209778},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.33863353729248047},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.135489821434021},{"id":"https://openalex.org/C55493867","wikidata":"https://www.wikidata.org/wiki/Q7094","display_name":"Biochemistry","level":1,"score":0.0},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C130316041","wikidata":"https://www.wikidata.org/wiki/Q189206","display_name":"Vesicle","level":3,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C2524010","wikidata":"https://www.wikidata.org/wiki/Q8087","display_name":"Geometry","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1063/1.1611639","doi":"https://doi.org/10.1063/1.1611639","is_oa":false,"landing_page_url":"https://doi.org/10.1063/1.1611639","pdf_url":null,"source":{"id":"https://openalex.org/S105243760","display_name":"Applied Physics Letters","issn_l":"0003-6951","issn":["0003-6951","1077-3118","1520-8842"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-a","jufo-3","ki-jl-1","norway-2","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Applied Physics Letters","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":4,"referenced_works":["https://openalex.org/W570234966","https://openalex.org/W636847917","https://openalex.org/W2066874036","https://openalex.org/W2122818202"],"related_works":["https://openalex.org/W1972273828","https://openalex.org/W2136346546","https://openalex.org/W2001041051","https://openalex.org/W6996606908","https://openalex.org/W2313503334","https://openalex.org/W2046053805","https://openalex.org/W2122818202","https://openalex.org/W1965619940","https://openalex.org/W2361595800","https://openalex.org/W1803815861"],"abstract_inverted_index":{"Thin":[0],"silicon":[1],"membranes":[2],"in":[3,95,125,163],"microelectromechanical":[4],"systems":[5],"(MEMS)":[6],"optical":[7,28],"devices":[8],"such":[9],"as":[10,52,54,64,66,116,128,130,155],"beam-steering,":[11],"movable":[12],"mirrors":[13],"may":[14],"exhibit":[15],"undesirable":[16],"curvature":[17,51,62,84,124,140],"when":[18],"their":[19],"surface":[20],"is":[21,70,87,157],"metallized":[22],"with":[23,151],"light-reflecting":[24],"metals":[25],"to":[26,46,72,90,133],"enhance":[27],"performance.":[29],"We":[30],"have":[31],"applied":[32],"Si+":[33],"ion":[34],"implantations":[35],"at":[36],"dose":[37],"levels":[38],"of":[39,57,81,102,106,122,139],"0.4\u20135\u00d71016/cm2":[40],"into":[41],"the":[42,49,55,67,76,82,91,100,164],"gold":[43,96],"metallization":[44,97],"layer":[45],"successfully":[47],"reduce":[48],"mirror":[50],"well":[53,65,129],"degree":[56,138],"its":[58],"temperature-dependent":[59],"changes.":[60],"The":[61,79],"change":[63],"temperature":[68],"dependence":[69],"found":[71],"be":[73,114,149],"dependent":[74],"on":[75],"implantation":[77,111,146],"dose.":[78],"mechanism":[80],"observed":[83],"flattening":[85],"effect":[86],"attributed":[88],"mostly":[89],"induced":[92],"compressive":[93],"stress":[94],"caused":[98],"by":[99],"insertion":[101],"foreign":[103],"implanted":[104],"atoms":[105],"silicon.":[107],"Such":[108],"a":[109,117,131,136,158],"Si":[110,156],"approach":[112],"can":[113,148],"useful":[115],"means":[118],"for":[119],"post-fabrication":[120],"correction":[121],"unwanted":[123],"MEMS":[126],"membranes,":[127],"technique":[132],"intentionally":[134],"introduce":[135],"desired":[137],"if":[141],"needed.":[142],"A":[143],"convenient":[144],"blanket":[145],"process":[147],"utilized":[150],"minimal":[152],"contamination":[153],"problems":[154],"common":[159],"element":[160],"already":[161],"present":[162],"MEMS.":[165]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2022,"cited_by_count":1},{"year":2015,"cited_by_count":1},{"year":2013,"cited_by_count":1}],"updated_date":"2026-09-21T07:43:02.447757","created_date":"2016-06-24T00:00:00"}