{"id":"https://openalex.org/W2015509548","doi":"https://doi.org/10.1149/04901.0025ecst","title":"(Invited) Pure Dopant Deposition of B and Ga for Ultrashallow Junctions in Si-based Devices","display_name":"(Invited) Pure Dopant Deposition of B and Ga for Ultrashallow Junctions in Si-based Devices","publication_year":2012,"publication_date":"2012-08-30","ids":{"openalex":"https://openalex.org/W2015509548","doi":"https://doi.org/10.1149/04901.0025ecst","mag":"2015509548"},"language":"en","primary_location":{"id":"doi:10.1149/04901.0025ecst","doi":"https://doi.org/10.1149/04901.0025ecst","is_oa":true,"landing_page_url":"https://doi.org/10.1149/04901.0025ecst","pdf_url":"https://repository.tudelft.nl/file/File_93cbd484-512b-45eb-a651-2a8a97162889","source":{"id":"https://openalex.org/S4210205149","display_name":"ECS Transactions","issn_l":"1938-5862","issn":["1938-5862","1938-6737","2151-2051"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":["norway-1","poland-20"],"host_organization":"https://openalex.org/P4310311669","host_organization_name":"Institute of Physics","host_organization_lineage":["https://openalex.org/P4310311669"],"host_organization_lineage_names":["Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"ECS Transactions","raw_type":"journal-article"},"volume":null,"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"bronze","oa_url":"https://repository.tudelft.nl/file/File_93cbd484-512b-45eb-a651-2a8a97162889","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5023605915","display_name":"Lis K. Nanver","orcid":"https://orcid.org/0000-0003-3667-4077","observed_orcids":["https://orcid.org/0000-0003-3667-4077"]},"institutions":[{"id":"https://openalex.org/I98358874","display_name":"Delft University of Technology","ror":"https://ror.org/02e2c7k09","country_code":"NL","type":"education","lineage":["https://openalex.org/I98358874"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"L. K. Nanver","raw_affiliation_strings":["Delft University of Technology"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Delft University of Technology","institution_ids":["https://openalex.org/I98358874"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5056862915","display_name":"Amir Sammak","orcid":"https://orcid.org/0000-0002-9776-9099","observed_orcids":["https://orcid.org/0000-0002-9776-9099","https://orcid.org/0009-0002-6779-7221"]},"institutions":[{"id":"https://openalex.org/I98358874","display_name":"Delft University of Technology","ror":"https://ror.org/02e2c7k09","country_code":"NL","type":"education","lineage":["https://openalex.org/I98358874"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"A. Sammak","raw_affiliation_strings":["Delft University of Technology"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Delft University of Technology","institution_ids":["https://openalex.org/I98358874"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5102018795","display_name":"Vahid Mohammadi","orcid":"https://orcid.org/0000-0001-9330-9848","observed_orcids":["https://orcid.org/0000-0001-9330-9848","https://orcid.org/0000-0002-2457-3167"]},"institutions":[{"id":"https://openalex.org/I98358874","display_name":"Delft University of Technology","ror":"https://ror.org/02e2c7k09","country_code":"NL","type":"education","lineage":["https://openalex.org/I98358874"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"V. Mohammadi","raw_affiliation_strings":["Delft University of Technology"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Delft University of Technology","institution_ids":["https://openalex.org/I98358874"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5061830128","display_name":"K. R. C. Mok","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I98358874","display_name":"Delft University of Technology","ror":"https://ror.org/02e2c7k09","country_code":"NL","type":"education","lineage":["https://openalex.org/I98358874"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"K. R. C. Mok","raw_affiliation_strings":["Delft University of Technology"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Delft University of Technology","institution_ids":["https://openalex.org/I98358874"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5077776631","display_name":"Lin Qi","orcid":"https://orcid.org/0000-0002-4129-0089","observed_orcids":["https://orcid.org/0000-0002-4129-0089"]},"institutions":[{"id":"https://openalex.org/I98358874","display_name":"Delft University of Technology","ror":"https://ror.org/02e2c7k09","country_code":"NL","type":"education","lineage":["https://openalex.org/I98358874"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"L. Qi","raw_affiliation_strings":["Delft University of Technology"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Delft University of Technology","institution_ids":["https://openalex.org/I98358874"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5042418616","display_name":"A. \u0160aki\u0107","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I98358874","display_name":"Delft University of Technology","ror":"https://ror.org/02e2c7k09","country_code":"NL","type":"education","lineage":["https://openalex.org/I98358874"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"A. \u0160aki\u0107","raw_affiliation_strings":["Delft University of Technology"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Delft University of Technology","institution_ids":["https://openalex.org/I98358874"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5067385204","display_name":"Negin Golshani","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I98358874","display_name":"Delft University of Technology","ror":"https://ror.org/02e2c7k09","country_code":"NL","type":"education","lineage":["https://openalex.org/I98358874"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"N. Golshani","raw_affiliation_strings":["Delft University of Technology"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Delft University of Technology","institution_ids":["https://openalex.org/I98358874"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5001763918","display_name":"Jaber Derakhshandeh","orcid":"https://orcid.org/0000-0003-2448-9165","observed_orcids":["https://orcid.org/0000-0003-2448-9165"]},"institutions":[{"id":"https://openalex.org/I98358874","display_name":"Delft University of Technology","ror":"https://ror.org/02e2c7k09","country_code":"NL","type":"education","lineage":["https://openalex.org/I98358874"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"J. Derakhshandeh","raw_affiliation_strings":["Delft University of Technology"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Delft University of Technology","institution_ids":["https://openalex.org/I98358874"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5112763928","display_name":"Tom L. M. Scholtes","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I98358874","display_name":"Delft University of Technology","ror":"https://ror.org/02e2c7k09","country_code":"NL","type":"education","lineage":["https://openalex.org/I98358874"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"T. M. L. Scholtes","raw_affiliation_strings":["Delft University of Technology"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Delft University of Technology","institution_ids":["https://openalex.org/I98358874"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5110107971","display_name":"W.B. de Boer","orcid":"https://orcid.org/0000-0001-8403-4790","observed_orcids":["https://orcid.org/0000-0001-8403-4790"]},"institutions":[{"id":"https://openalex.org/I98358874","display_name":"Delft University of Technology","ror":"https://ror.org/02e2c7k09","country_code":"NL","type":"education","lineage":["https://openalex.org/I98358874"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"W. B. de Boer","raw_affiliation_strings":["Delft University of Technology"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Delft University of Technology","institution_ids":["https://openalex.org/I98358874"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I98358874"],"apc_list":null,"apc_paid":null,"fwci":14.1584,"has_fulltext":true,"cited_by_count":21,"citation_normalized_percentile":{"value":0.99145809,"is_in_top_1_percent":true,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":89,"max":98},"biblio":{"volume":"49","issue":"1","first_page":"25","last_page":"33"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11853","display_name":"Semiconductor materials and interfaces","score":0.5522000193595886,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11853","display_name":"Semiconductor materials and interfaces","score":0.5522000193595886,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.4016000032424927,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10624","display_name":"Silicon and Solar Cell Technologies","score":0.017799999564886093,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/boron","display_name":"boron","score":0.7630000114440918},{"id":"https://openalex.org/keywords/gallium","display_name":"gallium","score":0.9990000128746033},{"id":"https://openalex.org/keywords/ultrashallow-junctions","display_name":"ultra-shallow junctions","score":0.984000027179718},{"id":"https://openalex.org/keywords/silicon-diodes","display_name":"silicon diodes","score":0.7260000109672546},{"id":"https://openalex.org/keywords/germanium-diodes","display_name":"germanium diodes","score":0.9869999885559082},{"id":"https://openalex.org/keywords/photodiode","display_name":"photodiode","score":0.7319999933242798},{"id":"https://openalex.org/keywords/euv-lithography","display_name":"EUV lithography","score":0.7200000286102295},{"id":"https://openalex.org/keywords/saturation-current","display_name":"saturation current","score":0.8220000267028809},{"id":"https://openalex.org/keywords/interface-properties","display_name":"interface properties","score":0.32499998807907104}],"concepts":[{"id":"https://openalex.org/C191952053","wikidata":"https://www.wikidata.org/wiki/Q15119237","display_name":"Dopant","level":3,"score":0.7684042453765869},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7352371215820312},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.6389783024787903},{"id":"https://openalex.org/C78434282","wikidata":"https://www.wikidata.org/wiki/Q11656","display_name":"Diode","level":2,"score":0.5729852914810181},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.5428443551063538},{"id":"https://openalex.org/C2780081452","wikidata":"https://www.wikidata.org/wiki/Q5297293","display_name":"Dopant Activation","level":4,"score":0.511966347694397},{"id":"https://openalex.org/C501308230","wikidata":"https://www.wikidata.org/wiki/Q618","display_name":"Boron","level":2,"score":0.4473956823348999},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.43169087171554565},{"id":"https://openalex.org/C57863236","wikidata":"https://www.wikidata.org/wiki/Q1130571","display_name":"Doping","level":2,"score":0.42579853534698486},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.10976839065551758},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.0}],"mesh":[],"locations_count":3,"locations":[{"id":"doi:10.1149/04901.0025ecst","doi":"https://doi.org/10.1149/04901.0025ecst","is_oa":true,"landing_page_url":"https://doi.org/10.1149/04901.0025ecst","pdf_url":"https://repository.tudelft.nl/file/File_93cbd484-512b-45eb-a651-2a8a97162889","source":{"id":"https://openalex.org/S4210205149","display_name":"ECS Transactions","issn_l":"1938-5862","issn":["1938-5862","1938-6737","2151-2051"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":["norway-1","poland-20"],"host_organization":"https://openalex.org/P4310311669","host_organization_name":"Institute of Physics","host_organization_lineage":["https://openalex.org/P4310311669"],"host_organization_lineage_names":["Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"ECS Transactions","raw_type":"journal-article"},{"id":"pmh:oai:tudelft.nl:uuid:e0e4fc8a-cff2-4e45-8fa8-aff79b13ff92","doi":null,"is_oa":false,"landing_page_url":"http://resolver.tudelft.nl/uuid:e0e4fc8a-cff2-4e45-8fa8-aff79b13ff92","pdf_url":null,"source":{"id":"https://openalex.org/S4306400906","display_name":"Research Repository (Delft University of Technology)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I98358874","host_organization_name":"Delft University of Technology","host_organization_lineage":["https://openalex.org/I98358874"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"journal article"},{"id":"pmh:tud:oai:tudelft.nl:uuid:e0e4fc8a-cff2-4e45-8fa8-aff79b13ff92","doi":null,"is_oa":true,"landing_page_url":"http://resolver.tudelft.nl/uuid:e0e4fc8a-cff2-4e45-8fa8-aff79b13ff92","pdf_url":null,"source":{"id":"https://openalex.org/S4306401843","display_name":"Data Archiving and Networked Services (DANS)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I1322597698","host_organization_name":"Royal Netherlands Academy of Arts and Sciences","host_organization_lineage":["https://openalex.org/I1322597698"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"ECS Transactions, 49 (1), 2012","raw_type":"info:eu-repo/semantics/article"}],"best_oa_location":{"id":"doi:10.1149/04901.0025ecst","doi":"https://doi.org/10.1149/04901.0025ecst","is_oa":true,"landing_page_url":"https://doi.org/10.1149/04901.0025ecst","pdf_url":"https://repository.tudelft.nl/file/File_93cbd484-512b-45eb-a651-2a8a97162889","source":{"id":"https://openalex.org/S4210205149","display_name":"ECS Transactions","issn_l":"1938-5862","issn":["1938-5862","1938-6737","2151-2051"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":["norway-1","poland-20"],"host_organization":"https://openalex.org/P4310311669","host_organization_name":"Institute of Physics","host_organization_lineage":["https://openalex.org/P4310311669"],"host_organization_lineage_names":["Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"ECS Transactions","raw_type":"journal-article"},"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2015509548.pdf","grobid_xml":"https://content.openalex.org/works/W2015509548.grobid-xml"},"referenced_works_count":3,"referenced_works":["https://openalex.org/W2495080454","https://openalex.org/W2787270150","https://openalex.org/W4391594533"],"related_works":["https://openalex.org/W2085694001","https://openalex.org/W3214038179","https://openalex.org/W2026947672","https://openalex.org/W2810588984","https://openalex.org/W3171769423","https://openalex.org/W1882017303","https://openalex.org/W1964677226","https://openalex.org/W1999644542","https://openalex.org/W2152611438","https://openalex.org/W7099427661"],"abstract_inverted_index":{"Envisioning":[0],"wide":[1],"future":[2],"relevance,":[3],"work":[4],"is":[5,39,91,116,121],"reviewed":[6],"here":[7,118],"on":[8,41,112,141,145],"the":[9,19,22,28,42,92,98,106,109,124],"pure":[10],"dopant":[11],"deposition":[12],"of":[13,21,30,97,108,126,132,139],"boron":[14],"(PureB),":[15],"gallium":[16],"(PureGa)":[17],"and":[18,63,83,143,148],"combination":[20],"two":[23],"(PureGaB),":[24],"as":[25,71,77,135],"used":[26],"in":[27,50,80],"fabrication":[29],"nanometer":[31],"shallow":[32],"p+n":[33],"Si":[34,142,147],"and/or":[35],"Ge":[36],"diodes.":[37],"Focus":[38],"placed":[40],"special":[43],"properties":[44],"that":[45,100,119],"have":[46,66],"put":[47],"these":[48],"diodes":[49],"a":[51,127],"class":[52],"apart:":[53],"their":[54,60],"ideal":[55],"electrical":[56],"behavior":[57],"together":[58],"with":[59],"electrical,":[61],"optical":[62],"chemical":[64],"robustness":[65],"lead":[67],"to":[68,123],"cutting-edge":[69],"application":[70],"photodiodes":[72],"for":[73,78],"detecting":[74],"low-penetration-depth":[75],"beams,":[76],"example":[79],"EUV":[81],"lithography":[82],"low-energy":[84],"electron":[85],"SEM":[86],"imaging.":[87],"Of":[88],"key":[89],"importance":[90],"effectively":[93],"high":[94],"Gummel":[95],"number":[96],"p+-region":[99],"provides":[101],"low":[102],"saturation":[103],"currents":[104],"despite":[105],"shallowness":[107],"junctions.":[110],"Based":[111],"experimental":[113],"evidence":[114],"it":[115],"proposed":[117],"this":[120],"related":[122],"formation":[125],"practically":[128],"complete":[129],"surface":[130],"coverage":[131],"acceptor":[133],"states":[134],"an":[136],"interface":[137],"property":[138],"PureB":[140],"PureGa":[144],"both":[146],"Ge.":[149]},"counts_by_year":[{"year":2024,"cited_by_count":1},{"year":2022,"cited_by_count":1},{"year":2021,"cited_by_count":2},{"year":2019,"cited_by_count":1},{"year":2018,"cited_by_count":3},{"year":2016,"cited_by_count":1},{"year":2015,"cited_by_count":2},{"year":2014,"cited_by_count":6},{"year":2013,"cited_by_count":4}],"updated_date":"2026-10-30T12:39:25.321706","created_date":"2016-06-24T00:00:00"}