{"id":"https://openalex.org/W2015352252","doi":"https://doi.org/10.1002/1521-4095(200110)13:20<1551::aid-adma1551>3.0.co;2-v","title":"Large Area Photonic Crystal Slabs for Visible Light with Waveguiding Defect Structures: Fabrication with Focused Ion Beam Assisted Laser Interference Lithography","display_name":"Large Area Photonic Crystal Slabs for Visible Light with Waveguiding Defect Structures: Fabrication with Focused Ion Beam Assisted Laser Interference Lithography","publication_year":2001,"publication_date":"2001-10-01","ids":{"openalex":"https://openalex.org/W2015352252","doi":"https://doi.org/10.1002/1521-4095(200110)13:20<1551::aid-adma1551>3.0.co;2-v","mag":"2015352252"},"language":"en","primary_location":{"id":"doi:10.1002/1521-4095(200110)13:20<1551::aid-adma1551>3.0.co;2-v","doi":"https://doi.org/10.1002/1521-4095(200110)13:20<1551::aid-adma1551>3.0.co;2-v","is_oa":false,"landing_page_url":"https://doi.org/10.1002/1521-4095(200110)13:20<1551::aid-adma1551>3.0.co;2-v","pdf_url":null,"source":{"id":"https://openalex.org/S99352657","display_name":"Advanced Materials","issn_l":"0935-9648","issn":["0935-9648","1521-4095"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-a","jufo-3","ki-jl-3","medline","norway-2","poland-200","russia-white-list-1","vabb-shw"],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Advanced Materials","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"https://research.utwente.nl/en/publications/1fd91de2-499f-49e5-8b38-6a8afb4bb3cc","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5076634154","display_name":"Laura Vogelaar","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I94624287","display_name":"University of Twente","ror":"https://ror.org/006hf6230","country_code":"NL","type":"education","lineage":["https://openalex.org/I94624287"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"L. Vogelaar","raw_affiliation_strings":["Applied Optics Group, Department of Applied Physics and MESA+ Research Institute, University of Twente, PO Box 217, NL-7500 AE Enschede (The Netherlands)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Applied Optics Group, Department of Applied Physics and MESA+ Research Institute, University of Twente, PO Box 217, NL-7500 AE Enschede (The Netherlands)","institution_ids":["https://openalex.org/I94624287"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5031125703","display_name":"Wietze Nijdam","orcid":"https://orcid.org/0009-0006-9207-5094","observed_orcids":["https://orcid.org/0009-0006-9207-5094"]},"institutions":[{"id":"https://openalex.org/I4210161132","display_name":"Aquamarijn (Netherlands)","ror":"https://ror.org/0570x4g13","country_code":"NL","type":"company","lineage":["https://openalex.org/I4210161132"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"W. Nijdam","raw_affiliation_strings":["Aquamarijn Micro Filtration, PO Box 217, NL-7500 AE Enschede (The Netherlands)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Aquamarijn Micro Filtration, PO Box 217, NL-7500 AE Enschede (The Netherlands)","institution_ids":["https://openalex.org/I4210161132"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5055795312","display_name":"H.A.G.M. van Wolferen","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I94624287","display_name":"University of Twente","ror":"https://ror.org/006hf6230","country_code":"NL","type":"education","lineage":["https://openalex.org/I94624287"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"H. A. G. M. van Wolferen","raw_affiliation_strings":["Lightwave Devices Group, Department of Electrical Engineering and MESA+ Research Institute, University of Twente, PO Box 217, NL-7500 AE Enschede (The Netherlands)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Lightwave Devices Group, Department of Electrical Engineering and MESA+ Research Institute, University of Twente, PO Box 217, NL-7500 AE Enschede (The Netherlands)","institution_ids":["https://openalex.org/I94624287"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5109238374","display_name":"R.M. de Ridder","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I94624287","display_name":"University of Twente","ror":"https://ror.org/006hf6230","country_code":"NL","type":"education","lineage":["https://openalex.org/I94624287"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"R. M. de Ridder","raw_affiliation_strings":["Lightwave Devices Group, Department of Electrical Engineering and MESA+ Research Institute, University of Twente, PO Box 217, NL-7500 AE Enschede (The Netherlands)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Lightwave Devices Group, Department of Electrical Engineering and MESA+ Research Institute, University of Twente, PO Box 217, NL-7500 AE Enschede (The Netherlands)","institution_ids":["https://openalex.org/I94624287"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111989599","display_name":"F. B. Segerink","orcid":"https://orcid.org/0009-0005-9120-4774","observed_orcids":["https://orcid.org/0009-0005-9120-4774"]},"institutions":[{"id":"https://openalex.org/I94624287","display_name":"University of Twente","ror":"https://ror.org/006hf6230","country_code":"NL","type":"education","lineage":["https://openalex.org/I94624287"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"F. B. Segerink","raw_affiliation_strings":["Applied Optics Group, Department of Applied Physics and MESA+ Research Institute, University of Twente, PO Box 217, NL-7500 AE Enschede (The Netherlands)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Applied Optics Group, Department of Applied Physics and MESA+ Research Institute, University of Twente, PO Box 217, NL-7500 AE Enschede (The Netherlands)","institution_ids":["https://openalex.org/I94624287"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5046593997","display_name":"E. Fl\u00fcck","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I94624287","display_name":"University of Twente","ror":"https://ror.org/006hf6230","country_code":"NL","type":"education","lineage":["https://openalex.org/I94624287"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"E. Fl\u00fcck","raw_affiliation_strings":["Applied Optics Group, Department of Applied Physics and MESA+ Research Institute, University of Twente, PO Box 217, NL-7500 AE Enschede (The Netherlands)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Applied Optics Group, Department of Applied Physics and MESA+ Research Institute, University of Twente, PO Box 217, NL-7500 AE Enschede (The Netherlands)","institution_ids":["https://openalex.org/I94624287"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5042426515","display_name":"L. Kuipers","orcid":"https://orcid.org/0000-0003-0556-8167","observed_orcids":["https://orcid.org/0000-0003-0556-8167"]},"institutions":[{"id":"https://openalex.org/I94624287","display_name":"University of Twente","ror":"https://ror.org/006hf6230","country_code":"NL","type":"education","lineage":["https://openalex.org/I94624287"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"L. Kuipers","raw_affiliation_strings":["Applied Optics Group, Department of Applied Physics and MESA+ Research Institute, University of Twente, PO Box 217, NL-7500 AE Enschede (The Netherlands)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Applied Optics Group, Department of Applied Physics and MESA+ Research Institute, University of Twente, PO Box 217, NL-7500 AE Enschede (The Netherlands)","institution_ids":["https://openalex.org/I94624287"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5059424153","display_name":"N.F. van Hulst","orcid":"https://orcid.org/0000-0003-4630-1776","observed_orcids":["https://orcid.org/0000-0003-4630-1776"]},"institutions":[{"id":"https://openalex.org/I94624287","display_name":"University of Twente","ror":"https://ror.org/006hf6230","country_code":"NL","type":"education","lineage":["https://openalex.org/I94624287"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"N. F. van Hulst","raw_affiliation_strings":["Applied Optics Group, Department of Applied Physics and MESA+ Research Institute, University of Twente, PO Box 217, NL-7500 AE Enschede (The Netherlands)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Applied Optics Group, Department of Applied Physics and MESA+ Research Institute, University of Twente, PO Box 217, NL-7500 AE Enschede (The Netherlands)","institution_ids":["https://openalex.org/I94624287"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":{"value":6070,"currency":"USD","value_usd":6070},"apc_paid":null,"fwci":2.8131,"has_fulltext":true,"cited_by_count":89,"citation_normalized_percentile":{"value":0.90554538,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":88,"max":99},"biblio":{"volume":"13","issue":"20","first_page":"1551","last_page":"1551"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10666","display_name":"Photonic Crystals and Applications","score":0.9990000128746033,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10666","display_name":"Photonic Crystals and Applications","score":0.9990000128746033,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":0.00019999999494757503,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11723","display_name":"Optical Coatings and Gratings","score":9.999999747378752e-05,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/photonic-crystal-slabs","display_name":"photonic crystal slabs","score":0.9980000257492065},{"id":"https://openalex.org/keywords/visible-light","display_name":"visible light","score":0.5950000286102295},{"id":"https://openalex.org/keywords/laser-interference-lithography","display_name":"laser interference lithography","score":0.9940000176429749},{"id":"https://openalex.org/keywords/silicon-nitride","display_name":"silicon nitride","score":0.6729999780654907},{"id":"https://openalex.org/keywords/air-holes","display_name":"air holes","score":0.6169999837875366},{"id":"https://openalex.org/keywords/large-area-fabrication","display_name":"large-area fabrication","score":0.6399999856948853}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.8930405378341675},{"id":"https://openalex.org/C75302062","wikidata":"https://www.wikidata.org/wiki/Q900150","display_name":"Photonic crystal","level":2,"score":0.8152754306793213},{"id":"https://openalex.org/C204223013","wikidata":"https://www.wikidata.org/wiki/Q133036","display_name":"Lithography","level":2,"score":0.6537214517593384},{"id":"https://openalex.org/C159395582","wikidata":"https://www.wikidata.org/wiki/Q6046394","display_name":"Interference lithography","level":4,"score":0.6446101665496826},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.6095325350761414},{"id":"https://openalex.org/C161866238","wikidata":"https://www.wikidata.org/wiki/Q258563","display_name":"Focused ion beam","level":3,"score":0.6003137826919556},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.5941946506500244},{"id":"https://openalex.org/C105487726","wikidata":"https://www.wikidata.org/wiki/Q622938","display_name":"Photolithography","level":2,"score":0.5098761320114136},{"id":"https://openalex.org/C32022120","wikidata":"https://www.wikidata.org/wiki/Q797225","display_name":"Interference (communication)","level":3,"score":0.49465224146842957},{"id":"https://openalex.org/C20788544","wikidata":"https://www.wikidata.org/wiki/Q467054","display_name":"Photonics","level":2,"score":0.49043509364128113},{"id":"https://openalex.org/C113740112","wikidata":"https://www.wikidata.org/wiki/Q5904738","display_name":"Slab","level":2,"score":0.48883265256881714},{"id":"https://openalex.org/C520434653","wikidata":"https://www.wikidata.org/wiki/Q38867","display_name":"Laser","level":2,"score":0.47667908668518066},{"id":"https://openalex.org/C137905882","wikidata":"https://www.wikidata.org/wiki/Q6783445","display_name":"Maskless lithography","level":5,"score":0.46198827028274536},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.4572870135307312},{"id":"https://openalex.org/C104663316","wikidata":"https://www.wikidata.org/wiki/Q76299","display_name":"Visible spectrum","level":2,"score":0.45449841022491455},{"id":"https://openalex.org/C200274948","wikidata":"https://www.wikidata.org/wiki/Q256845","display_name":"Electron-beam lithography","level":4,"score":0.4325129985809326},{"id":"https://openalex.org/C170642482","wikidata":"https://www.wikidata.org/wiki/Q16944509","display_name":"Yablonovite","level":4,"score":0.42165741324424744},{"id":"https://openalex.org/C22799297","wikidata":"https://www.wikidata.org/wiki/Q523846","display_name":"Photonic integrated circuit","level":3,"score":0.3725121021270752},{"id":"https://openalex.org/C53524968","wikidata":"https://www.wikidata.org/wiki/Q7315582","display_name":"Resist","level":3,"score":0.320961594581604},{"id":"https://openalex.org/C145148216","wikidata":"https://www.wikidata.org/wiki/Q36496","display_name":"Ion","level":2,"score":0.20702052116394043},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.18803536891937256},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C127162648","wikidata":"https://www.wikidata.org/wiki/Q16858953","display_name":"Channel (broadcasting)","level":2,"score":0.0},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.0},{"id":"https://openalex.org/C8058405","wikidata":"https://www.wikidata.org/wiki/Q46255","display_name":"Geophysics","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":3,"locations":[{"id":"doi:10.1002/1521-4095(200110)13:20<1551::aid-adma1551>3.0.co;2-v","doi":"https://doi.org/10.1002/1521-4095(200110)13:20<1551::aid-adma1551>3.0.co;2-v","is_oa":false,"landing_page_url":"https://doi.org/10.1002/1521-4095(200110)13:20<1551::aid-adma1551>3.0.co;2-v","pdf_url":null,"source":{"id":"https://openalex.org/S99352657","display_name":"Advanced Materials","issn_l":"0935-9648","issn":["0935-9648","1521-4095"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-a","jufo-3","ki-jl-3","medline","norway-2","poland-200","russia-white-list-1","vabb-shw"],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Advanced Materials","raw_type":"journal-article"},{"id":"pmh:oai:ris.utwente.nl:openaire/1fd91de2-499f-49e5-8b38-6a8afb4bb3cc","doi":null,"is_oa":true,"landing_page_url":"https://research.utwente.nl/en/publications/1fd91de2-499f-49e5-8b38-6a8afb4bb3cc","pdf_url":null,"source":{"id":"https://openalex.org/S4406922991","display_name":"University of Twente Research Information","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Vogelaar, L, Nijdam, W, van Wolferen, H A G M, de Ridder, R M, Segerink, F B, Fl\u00fcck, E, Kuipers, L & van Hulst, N F 2001, 'Large area photonic crystal slabs for visible light with waveguiding defect structures : Fabrication with focused ion beam assisted laser interference lithography', Advanced materials, vol. 13, no. 20, pp. 1551-1554. https://doi.org/10.1002/1521-4095(200110)13:20<1551::AID-ADMA1551>3.0.CO;2-V","raw_type":"info:eu-repo/semantics/article"},{"id":"pmh:ut:oai:ris.utwente.nl:publications/1fd91de2-499f-49e5-8b38-6a8afb4bb3cc","doi":null,"is_oa":true,"landing_page_url":"https://research.utwente.nl/en/publications/1fd91de2-499f-49e5-8b38-6a8afb4bb3cc","pdf_url":null,"source":{"id":"https://openalex.org/S4406922991","display_name":"University of Twente Research Information","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Advanced materials, 13(20), 1551 - 1554. Wiley-Blackwell","raw_type":"info:eu-repo/semantics/article"}],"best_oa_location":{"id":"pmh:oai:ris.utwente.nl:openaire/1fd91de2-499f-49e5-8b38-6a8afb4bb3cc","doi":null,"is_oa":true,"landing_page_url":"https://research.utwente.nl/en/publications/1fd91de2-499f-49e5-8b38-6a8afb4bb3cc","pdf_url":null,"source":{"id":"https://openalex.org/S4406922991","display_name":"University of Twente Research Information","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Vogelaar, L, Nijdam, W, van Wolferen, H A G M, de Ridder, R M, Segerink, F B, Fl\u00fcck, E, Kuipers, L & van Hulst, N F 2001, 'Large area photonic crystal slabs for visible light with waveguiding defect structures : Fabrication with focused ion beam assisted laser interference lithography', Advanced materials, vol. 13, no. 20, pp. 1551-1554. https://doi.org/10.1002/1521-4095(200110)13:20<1551::AID-ADMA1551>3.0.CO;2-V","raw_type":"info:eu-repo/semantics/article"},"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320320925","display_name":"Stichting voor Fundamenteel Onderzoek der Materie","ror":"https://ror.org/04jsz6e67"},{"id":"https://openalex.org/F4320321015","display_name":"University of Twente","ror":"https://ror.org/006hf6230"},{"id":"https://openalex.org/F4320321800","display_name":"Nederlandse Organisatie voor Wetenschappelijk Onderzoek","ror":"https://ror.org/04jsz6e67"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":1,"referenced_works":["https://openalex.org/W1507437630"],"related_works":["https://openalex.org/W2139848998","https://openalex.org/W2011909251","https://openalex.org/W2567521944","https://openalex.org/W3184730698","https://openalex.org/W2101347012","https://openalex.org/W2079056049","https://openalex.org/W4389538518","https://openalex.org/W2737636585","https://openalex.org/W2095692422","https://openalex.org/W1670677540"],"abstract_inverted_index":{"Extended":[0],"photonic":[1,30,46],"crystal":[2,31,47],"slabs":[3,32],"with":[4,48],"light-guiding":[5,50],"defects":[6],"have":[7],"been":[8],"created":[9],"by":[10],"a":[11,43,49],"combination":[12],"of":[13,57],"laser":[14],"interference":[15],"lithography":[16],"(LIL)":[17],"and":[18],"local":[19],"focused":[20],"ion":[21],"beam":[22],"(FIB)":[23],"assisted":[24],"deposition.":[25],"Large":[26],"area,":[27],"highly":[28],"uniform":[29],"for":[33],"visible":[34],"light":[35],"are":[36],"thus":[37],"made":[38],"possible.":[39],"The":[40],"Figure":[41],"shows":[42],"freestanding":[44],"Si3N4\u2013air":[45],"defect":[51],"line":[52],"running":[53],"along":[54],"the":[55,58],"center":[56],"slab":[59],"(total":[60],"length":[61],"=":[62],"1":[63],"mm).":[64]},"counts_by_year":[{"year":2025,"cited_by_count":3},{"year":2024,"cited_by_count":1},{"year":2023,"cited_by_count":1},{"year":2022,"cited_by_count":1},{"year":2021,"cited_by_count":3},{"year":2020,"cited_by_count":3},{"year":2019,"cited_by_count":3},{"year":2018,"cited_by_count":4},{"year":2016,"cited_by_count":5},{"year":2015,"cited_by_count":1},{"year":2014,"cited_by_count":2},{"year":2013,"cited_by_count":4},{"year":2012,"cited_by_count":7}],"updated_date":"2026-11-07T11:25:07.637180","created_date":"2016-06-24T00:00:00"}
