{"id":"https://openalex.org/W2015026257","doi":"https://doi.org/10.1080/15376494.2011.572247","title":"Squeeze-Film Damping Characteristics of Cantilever Microresonators under Large Electrostatic Loading","display_name":"Squeeze-Film Damping Characteristics of Cantilever Microresonators under Large Electrostatic Loading","publication_year":2012,"publication_date":"2012-09-05","ids":{"openalex":"https://openalex.org/W2015026257","doi":"https://doi.org/10.1080/15376494.2011.572247","mag":"2015026257"},"language":"en","primary_location":{"id":"doi:10.1080/15376494.2011.572247","doi":"https://doi.org/10.1080/15376494.2011.572247","is_oa":false,"landing_page_url":"https://doi.org/10.1080/15376494.2011.572247","pdf_url":null,"source":{"id":"https://openalex.org/S87569533","display_name":"Mechanics of Advanced Materials and Structures","issn_l":"1537-6494","issn":["1537-6494","1537-6532"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","jufo-1","norway-1","poland-70","russia-white-list-1"],"host_organization":"https://openalex.org/P4310320547","host_organization_name":"Taylor & Francis","host_organization_lineage":["https://openalex.org/P4310320547","https://openalex.org/P4310320449"],"host_organization_lineage_names":["Taylor & Francis","Informa"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Mechanics of Advanced Materials and Structures","raw_type":"journal-article"},"parent_works":[],"lineage":["https://openalex.org/W2015026257"],"child_works_count":0,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5002069978","display_name":"Saikat Chaterjee","orcid":"https://orcid.org/0000-0002-8991-775X","observed_orcids":["https://orcid.org/0000-0002-8991-775X"]},"institutions":[{"id":"https://openalex.org/I170979836","display_name":"Jadavpur University","ror":"https://ror.org/02af4h012","country_code":"IN","type":"education","lineage":["https://openalex.org/I170979836"]}],"countries":["IN"],"is_corresponding":false,"raw_author_name":"S. Chaterjee","raw_affiliation_strings":["Department of Mechanical Engineering, Jadavpur University, Kolkata, India"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, Jadavpur University, Kolkata, India","institution_ids":["https://openalex.org/I170979836"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5059603557","display_name":"Goutam Pohit","orcid":"https://orcid.org/0000-0001-6253-7418","observed_orcids":["https://orcid.org/0000-0001-6253-7418"]},"institutions":[{"id":"https://openalex.org/I170979836","display_name":"Jadavpur University","ror":"https://ror.org/02af4h012","country_code":"IN","type":"education","lineage":["https://openalex.org/I170979836"]}],"countries":["IN"],"is_corresponding":false,"raw_author_name":"G. Pohit","raw_affiliation_strings":["Department of Mechanical Engineering, Jadavpur University, Kolkata, India"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, Jadavpur University, Kolkata, India","institution_ids":["https://openalex.org/I170979836"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I170979836"],"apc_list":null,"apc_paid":null,"fwci":0.1953,"has_fulltext":false,"cited_by_count":4,"citation_normalized_percentile":{"value":0.54951947,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":87,"max":95},"biblio":{"volume":"19","issue":"8","first_page":"613","last_page":"624"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9990000128746033,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9990000128746033,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12206","display_name":"Vibration and Dynamic Analysis","score":9.999999747378752e-05,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11096","display_name":"Aeroelasticity and Vibration Control","score":9.999999747378752e-05,"subfield":{"id":"https://openalex.org/subfields/2202","display_name":"Aerospace Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/squeeze-film-damping","display_name":"squeeze film damping","score":0.9990000128746033},{"id":"https://openalex.org/keywords/electrostatic-actuation","display_name":"electrostatic actuation","score":0.9430000185966492},{"id":"https://openalex.org/keywords/compressible-reynolds-equation","display_name":"compressible Reynolds equation","score":0.9829999804496765},{"id":"https://openalex.org/keywords/flow-compressibility","display_name":"flow compressibility","score":0.8709999918937683},{"id":"https://openalex.org/keywords/dc-polarization","display_name":"DC polarization","score":0.7940000295639038},{"id":"https://openalex.org/keywords/ambient-pressure-effects","display_name":"ambient pressure effects","score":0.871999979019165},{"id":"https://openalex.org/keywords/semi-analytical-model","display_name":"semi-analytical model","score":0.722000002861023},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"microelectromechanical systems","score":0.7110000252723694}],"concepts":[{"id":"https://openalex.org/C2777152588","wikidata":"https://www.wikidata.org/wiki/Q6839237","display_name":"Microbeam","level":2,"score":0.7959954738616943},{"id":"https://openalex.org/C141354745","wikidata":"https://www.wikidata.org/wiki/Q17227","display_name":"Cantilever","level":2,"score":0.7823928594589233},{"id":"https://openalex.org/C84655787","wikidata":"https://www.wikidata.org/wiki/Q8067817","display_name":"Compressibility","level":2,"score":0.6873560547828674},{"id":"https://openalex.org/C57879066","wikidata":"https://www.wikidata.org/wiki/Q41217","display_name":"Mechanics","level":1,"score":0.6282127499580383},{"id":"https://openalex.org/C135628077","wikidata":"https://www.wikidata.org/wiki/Q220184","display_name":"Finite element method","level":2,"score":0.6218425631523132},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.558844804763794},{"id":"https://openalex.org/C157334427","wikidata":"https://www.wikidata.org/wiki/Q7319639","display_name":"Reynolds equation","level":4,"score":0.47567644715309143},{"id":"https://openalex.org/C205049153","wikidata":"https://www.wikidata.org/wiki/Q2698605","display_name":"Polarization (electrochemistry)","level":2,"score":0.47507303953170776},{"id":"https://openalex.org/C168834538","wikidata":"https://www.wikidata.org/wiki/Q3705329","display_name":"Beam (structure)","level":2,"score":0.4531663656234741},{"id":"https://openalex.org/C14037181","wikidata":"https://www.wikidata.org/wiki/Q215007","display_name":"Equations of motion","level":2,"score":0.4355659782886505},{"id":"https://openalex.org/C74650414","wikidata":"https://www.wikidata.org/wiki/Q11397","display_name":"Classical mechanics","level":1,"score":0.3704044222831726},{"id":"https://openalex.org/C66938386","wikidata":"https://www.wikidata.org/wiki/Q633538","display_name":"Structural engineering","level":1,"score":0.36146819591522217},{"id":"https://openalex.org/C182748727","wikidata":"https://www.wikidata.org/wiki/Q178932","display_name":"Reynolds number","level":3,"score":0.31904512643814087},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.30163079500198364},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.210595965385437},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.20237115025520325},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.11960721015930176},{"id":"https://openalex.org/C147789679","wikidata":"https://www.wikidata.org/wiki/Q11372","display_name":"Physical chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C196558001","wikidata":"https://www.wikidata.org/wiki/Q190132","display_name":"Turbulence","level":2,"score":0.0},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1080/15376494.2011.572247","doi":"https://doi.org/10.1080/15376494.2011.572247","is_oa":false,"landing_page_url":"https://doi.org/10.1080/15376494.2011.572247","pdf_url":null,"source":{"id":"https://openalex.org/S87569533","display_name":"Mechanics of Advanced Materials and Structures","issn_l":"1537-6494","issn":["1537-6494","1537-6532"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","jufo-1","norway-1","poland-70","russia-white-list-1"],"host_organization":"https://openalex.org/P4310320547","host_organization_name":"Taylor & Francis","host_organization_lineage":["https://openalex.org/P4310320547","https://openalex.org/P4310320449"],"host_organization_lineage_names":["Taylor & Francis","Informa"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Mechanics of Advanced Materials and Structures","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":26,"referenced_works":["https://openalex.org/W1551707782","https://openalex.org/W1964454488","https://openalex.org/W1973840112","https://openalex.org/W1975524436","https://openalex.org/W1979109011","https://openalex.org/W1982703690","https://openalex.org/W1994151002","https://openalex.org/W2011028942","https://openalex.org/W2015891739","https://openalex.org/W2022344696","https://openalex.org/W2037838910","https://openalex.org/W2041152887","https://openalex.org/W2041463281","https://openalex.org/W2044114804","https://openalex.org/W2055930971","https://openalex.org/W2057323240","https://openalex.org/W2061543408","https://openalex.org/W2065195259","https://openalex.org/W2117621441","https://openalex.org/W2118616571","https://openalex.org/W2121574635","https://openalex.org/W2152382055","https://openalex.org/W2154050130","https://openalex.org/W2156014908","https://openalex.org/W2165091983","https://openalex.org/W4206649591"],"related_works":["https://openalex.org/W2044114804","https://openalex.org/W4404571912","https://openalex.org/W6959413304","https://openalex.org/W2746977630","https://openalex.org/W2796478930","https://openalex.org/W2144127672","https://openalex.org/W2078541794","https://openalex.org/W2381856178","https://openalex.org/W2366730594","https://openalex.org/W1982703690"],"abstract_inverted_index":{"A":[0,26],"semi-analytical":[1],"model":[2,79],"of":[3,17,76,83,92],"an":[4],"electrostatically":[5],"actuated":[6],"damped":[7],"cantilever":[8],"microbeam":[9],"is":[10,46,59],"used":[11],"to":[12],"study":[13],"the":[14,30,35,41,62,77,81,90],"response":[15],"characteristics":[16],"small":[18],"amplitude":[19],"motion":[20],"about":[21],"a":[22,93],"statically":[23],"deflected":[24],"position.":[25],"Euler-beam":[27],"equation,":[28],"incorporating":[29],"electrostatic":[31],"force":[32],"terms":[33],"and":[34,52,70],"squeeze-film":[36],"damping":[37],"terms,":[38],"coupled":[39,63],"with":[40,61],"linearized":[42],"compressible":[43],"Reynolds":[44],"equation":[45],"analyzed":[47],"under":[48],"different":[49],"ambient":[50],"pressures":[51],"DC":[53],"polarization":[54],"conditions.":[55],"The":[56,74],"dynamic":[57],"problem":[58],"simulated":[60],"field":[64],"finite":[65],"element":[66],"analysis":[67],"software":[68],"ANSYS":[69],"results":[71],"are":[72],"compared.":[73],"applicability":[75],"present":[78],"for":[80],"range":[82],"flow":[84],"compressibility":[85,96],"has":[86],"been":[87],"studied":[88],"through":[89],"use":[91],"term":[94],"called":[95],"ratio.":[97]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":1},{"year":2023,"cited_by_count":1},{"year":2013,"cited_by_count":1}],"updated_date":"2026-11-09T13:22:03.289127","created_date":"2016-06-24T00:00:00"}
