{"id":"https://openalex.org/W2014912969","doi":"https://doi.org/10.1002/sca.4950170303","title":"How to analyze high\u2010aspect ratio pits with the coaxial scanning auger microprobe","display_name":"How to analyze high\u2010aspect ratio pits with the coaxial scanning auger microprobe","publication_year":1995,"publication_date":"1995-05-01","ids":{"openalex":"https://openalex.org/W2014912969","doi":"https://doi.org/10.1002/sca.4950170303","mag":"2014912969"},"language":"en","primary_location":{"id":"doi:10.1002/sca.4950170303","doi":"https://doi.org/10.1002/sca.4950170303","is_oa":false,"landing_page_url":"https://doi.org/10.1002/sca.4950170303","pdf_url":null,"source":{"id":"https://openalex.org/S51527640","display_name":"Scanning","issn_l":"0161-0457","issn":["0161-0457","1932-8745"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","poland-20","vabb-shw"],"host_organization":"https://openalex.org/P4310320595","host_organization_name":"Wiley","host_organization_lineage":["https://openalex.org/P4310320595"],"host_organization_lineage_names":["Wiley"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Scanning","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5054356824","display_name":"D. S. Kibalov","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1313323035","display_name":"Russian Academy of Sciences","ror":"https://ror.org/05qrfxd25","country_code":"RU","type":"government","lineage":["https://openalex.org/I1313323035"]}],"countries":["RU"],"is_corresponding":true,"raw_author_name":"D. S. Kibalov","raw_affiliation_strings":["Institute of Microelectronics, Russian Academy of Sciences, Yaroslavl, Russia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, Russian Academy of Sciences, Yaroslavl, Russia","institution_ids":["https://openalex.org/I1313323035"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5100876312","display_name":"V. K. Smirnov","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1313323035","display_name":"Russian Academy of Sciences","ror":"https://ror.org/05qrfxd25","country_code":"RU","type":"government","lineage":["https://openalex.org/I1313323035"]}],"countries":["RU"],"is_corresponding":false,"raw_author_name":"V. K. Smirnov","raw_affiliation_strings":["Institute of Microelectronics, Russian Academy of Sciences, Yaroslavl, Russia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, Russian Academy of Sciences, Yaroslavl, Russia","institution_ids":["https://openalex.org/I1313323035"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":["https://openalex.org/A5054356824"],"corresponding_institution_ids":["https://openalex.org/I1313323035"],"apc_list":{"value":1500,"currency":"USD","value_usd":1500},"apc_paid":null,"fwci":0.7809,"has_fulltext":false,"cited_by_count":3,"citation_normalized_percentile":{"value":0.65419784,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":93},"biblio":{"volume":"17","issue":"3","first_page":"141","last_page":"143"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12039","display_name":"Electron and X-Ray Spectroscopy Techniques","score":0.9624000191688538,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12039","display_name":"Electron and X-Ray Spectroscopy Techniques","score":0.9624000191688538,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12166","display_name":"Ion-surface interactions and analysis","score":0.025299999862909317,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13552","display_name":"Advanced Materials Characterization Techniques","score":0.004900000058114529,"subfield":{"id":"https://openalex.org/subfields/2500","display_name":"General Materials Science"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/cylindrical-mirror-analyzer","display_name":"cylindrical mirror analyzer","score":0.7509999871253967},{"id":"https://openalex.org/keywords/electrostatic-deflector","display_name":"electrostatic deflector","score":0.9779999852180481},{"id":"https://openalex.org/keywords/nondestructive-analysis","display_name":"non-destructive analysis","score":0.6079999804496765},{"id":"https://openalex.org/keywords/electron-gun","display_name":"electron gun","score":0.3880000114440918}],"concepts":[{"id":"https://openalex.org/C2780646311","wikidata":"https://www.wikidata.org/wiki/Q1142501","display_name":"Auger","level":2,"score":0.8654780387878418},{"id":"https://openalex.org/C51221625","wikidata":"https://www.wikidata.org/wiki/Q1751466","display_name":"Coaxial","level":2,"score":0.827308177947998},{"id":"https://openalex.org/C125206250","wikidata":"https://www.wikidata.org/wiki/Q2365355","display_name":"Microprobe","level":2,"score":0.8019770383834839},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5337173938751221},{"id":"https://openalex.org/C25442681","wikidata":"https://www.wikidata.org/wiki/Q28087","display_name":"Auger electron spectroscopy","level":2,"score":0.4761005640029907},{"id":"https://openalex.org/C138411078","wikidata":"https://www.wikidata.org/wiki/Q911272","display_name":"Electron microprobe","level":2,"score":0.4695824980735779},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.4680238366127014},{"id":"https://openalex.org/C82558694","wikidata":"https://www.wikidata.org/wiki/Q1545619","display_name":"Aspect ratio (aeronautics)","level":2,"score":0.4127351939678192},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.2439003586769104},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.17282742261886597},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.17178964614868164},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.16734683513641357},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.15587082505226135},{"id":"https://openalex.org/C199289684","wikidata":"https://www.wikidata.org/wiki/Q83353","display_name":"Mineralogy","level":1,"score":0.12505099177360535},{"id":"https://openalex.org/C184779094","wikidata":"https://www.wikidata.org/wiki/Q26383","display_name":"Atomic physics","level":1,"score":0.11751306056976318},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.09252864122390747},{"id":"https://openalex.org/C185544564","wikidata":"https://www.wikidata.org/wiki/Q81197","display_name":"Nuclear physics","level":1,"score":0.06136608123779297}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1002/sca.4950170303","doi":"https://doi.org/10.1002/sca.4950170303","is_oa":false,"landing_page_url":"https://doi.org/10.1002/sca.4950170303","pdf_url":null,"source":{"id":"https://openalex.org/S51527640","display_name":"Scanning","issn_l":"0161-0457","issn":["0161-0457","1932-8745"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","poland-20","vabb-shw"],"host_organization":"https://openalex.org/P4310320595","host_organization_name":"Wiley","host_organization_lineage":["https://openalex.org/P4310320595"],"host_organization_lineage_names":["Wiley"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Scanning","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":1,"referenced_works":["https://openalex.org/W28442029"],"related_works":["https://openalex.org/W2100431298","https://openalex.org/W2004997220","https://openalex.org/W2033951382","https://openalex.org/W1975930267","https://openalex.org/W3087386061","https://openalex.org/W1991823465","https://openalex.org/W2021508775","https://openalex.org/W2144597509","https://openalex.org/W2064484593","https://openalex.org/W1974612605"],"abstract_inverted_index":{"Abstract":[0],"A":[1],"new":[2],"technique":[3],"has":[4],"solved":[5],"the":[6,25,34,37,43,51,61,69,75,80,83,91,97,103],"problem":[7,81],"of":[8,11,18,27,46,63,85,96,105],"Auger":[9,40,70],"analysis":[10,17,35],"high\u2010aspect":[12,65],"ratio":[13,66],"pits.":[14],"The":[15,77],"nondestructive":[16],"these":[19],"micron\u2010size":[20],"pits":[21],"is":[22,36,48,72],"important":[23],"for":[24,33],"development":[26],"gigabit":[28],"memory":[29],"chips.":[30],"Very":[31],"suitable":[32],"coaxial":[38,49],"scanning":[39],"microprobe":[41],"(SAM),":[42],"electron":[44],"gun":[45],"which":[47],"with":[50],"cylindrical\u2010mirror":[52],"analyzer":[53],"(CMA).":[54],"However,":[55],"this":[56,106],"SAM":[57],"could":[58],"not":[59],"probe":[60],"bottom":[62],"a":[64],"pit":[67],"because":[68],"signal":[71],"trapped":[73],"in":[74,94],"pit.":[76],"solution":[78],"to":[79,90],"was":[82],"use":[84],"an":[86],"electrostatic":[87],"deflector":[88],"attached":[89],"sample":[92],"mount":[93],"front":[95],"CMA.":[98],"Theory":[99],"and":[100],"experiments":[101],"proved":[102],"advantage":[104],"technique.":[107]},"counts_by_year":[{"year":2015,"cited_by_count":1}],"updated_date":"2026-05-21T06:26:12.895304","created_date":"2016-06-24T00:00:00"}