{"id":"https://openalex.org/W2014908370","doi":"https://doi.org/10.1117/12.51280","title":"Structural changes induced by thermal annealing in W/C multilayers","display_name":"Structural changes induced by thermal annealing in W/C multilayers","publication_year":1992,"publication_date":"1992-01-01","ids":{"openalex":"https://openalex.org/W2014908370","doi":"https://doi.org/10.1117/12.51280","mag":"2014908370"},"language":"en","primary_location":{"id":"doi:10.1117/12.51280","doi":"https://doi.org/10.1117/12.51280","is_oa":false,"landing_page_url":"https://doi.org/10.1117/12.51280","pdf_url":null,"source":{"id":"https://openalex.org/S183492911","display_name":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","issn_l":"0277-786X","issn":["0277-786X","1996-756X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","norway-1"],"host_organization":"https://openalex.org/P4310315543","host_organization_name":"SPIE","host_organization_lineage":["https://openalex.org/P4310315543"],"host_organization_lineage_names":["SPIE"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"SPIE Proceedings","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5108400085","display_name":"Benjamin S. Chao","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Benjamin S. Chao","raw_affiliation_strings":["Energy Conversion Devices, Inc. (United States)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Energy Conversion Devices, Inc. (United States)","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5103127033","display_name":"Jesus Gonzalez-Hernandez","orcid":"https://orcid.org/0000-0002-3724-1583","observed_orcids":["https://orcid.org/0000-0002-3724-1583"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Jesus Gonzalez-Hernandez","raw_affiliation_strings":["Energy Conversion Devices, Inc. (United States)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Energy Conversion Devices, Inc. (United States)","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5022481837","display_name":"David A. Pawlik","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"D. A. Pawlik","raw_affiliation_strings":["Energy Conversion Devices, Inc. (United States)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Energy Conversion Devices, Inc. (United States)","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5045902607","display_name":"Stanford R. Ovshinsky","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Stanford R. Ovshinsky","raw_affiliation_strings":["Energy Conversion Devices, Inc. (United States)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Energy Conversion Devices, Inc. (United States)","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5014884132","display_name":"James Scholhamer","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"James Scholhamer","raw_affiliation_strings":["Ovonic Synthetic Materials Co. (United States)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Ovonic Synthetic Materials Co. (United States)","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5109811950","display_name":"James Lee Wood","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"James L. Wood","raw_affiliation_strings":["Ovonic Synthetic Materials Co. (United States)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Ovonic Synthetic Materials Co. (United States)","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5051879325","display_name":"Kevin J. Parker","orcid":"https://orcid.org/0000-0002-6313-6605","observed_orcids":["https://orcid.org/0000-0002-6313-6605"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Kevin Parker","raw_affiliation_strings":["Ovonic Synthetic Materials Co. (United States)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Ovonic Synthetic Materials Co. (United States)","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":0,"institutions_distinct_count":0,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.0,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"1547","issue":null,"first_page":"196","last_page":"211"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10377","display_name":"Metal and Thin Film Mechanics","score":0.8852999806404114,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10377","display_name":"Metal and Thin Film Mechanics","score":0.8852999806404114,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11661","display_name":"Copper Interconnects and Reliability","score":0.012199999764561653,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10478","display_name":"Diamond and Carbon-based Materials Research","score":0.01080000028014183,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/tungsten-carbon-multilayers","display_name":"tungsten/carbon multilayers","score":0.9629999995231628},{"id":"https://openalex.org/keywords/annealing","display_name":"annealing","score":0.972000002861023},{"id":"https://openalex.org/keywords/amorphous-tungsten","display_name":"amorphous tungsten","score":0.7559999823570251},{"id":"https://openalex.org/keywords/amorphous-carbon","display_name":"amorphous carbon","score":0.9399999976158142},{"id":"https://openalex.org/keywords/oxidation-protection","display_name":"oxidation protection","score":0.6970000267028809},{"id":"https://openalex.org/keywords/layer-expansion","display_name":"layer expansion","score":0.5709999799728394},{"id":"https://openalex.org/keywords/structural-order","display_name":"structural order","score":0.8309999704360962},{"id":"https://openalex.org/keywords/multilayer-films","display_name":"multilayer films","score":0.5379999876022339},{"id":"https://openalex.org/keywords/magnetron-sputtering","display_name":"magnetron sputtering","score":0.6690000295639038},{"id":"https://openalex.org/keywords/raman-scattering","display_name":"Raman scattering","score":0.4819999933242798},{"id":"https://openalex.org/keywords/auger-depth-profiling","display_name":"Auger depth profiling","score":0.9589999914169312},{"id":"https://openalex.org/keywords/x-ray-diffraction","display_name":"X-ray diffraction","score":0.796999990940094},{"id":"https://openalex.org/keywords/annealing-temperature","display_name":"annealing temperature","score":0.4090000092983246}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.8223715424537659},{"id":"https://openalex.org/C56052488","wikidata":"https://www.wikidata.org/wiki/Q103382","display_name":"Amorphous solid","level":2,"score":0.6909868717193604},{"id":"https://openalex.org/C2777855556","wikidata":"https://www.wikidata.org/wiki/Q4339544","display_name":"Annealing (glass)","level":2,"score":0.6685014367103577},{"id":"https://openalex.org/C542268612","wikidata":"https://www.wikidata.org/wiki/Q743","display_name":"Tungsten","level":2,"score":0.6653372645378113},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.5227582454681396},{"id":"https://openalex.org/C201370411","wikidata":"https://www.wikidata.org/wiki/Q388283","display_name":"Microcrystalline","level":2,"score":0.4988079071044922},{"id":"https://openalex.org/C40003534","wikidata":"https://www.wikidata.org/wiki/Q862228","display_name":"Raman spectroscopy","level":2,"score":0.4849584102630615},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.45693057775497437},{"id":"https://openalex.org/C194760766","wikidata":"https://www.wikidata.org/wiki/Q410851","display_name":"Nitride","level":3,"score":0.45072507858276367},{"id":"https://openalex.org/C22423302","wikidata":"https://www.wikidata.org/wiki/Q898444","display_name":"Sputtering","level":3,"score":0.4452110528945923},{"id":"https://openalex.org/C61427134","wikidata":"https://www.wikidata.org/wiki/Q847609","display_name":"Sputter deposition","level":4,"score":0.43280351161956787},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.37238460779190063},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.35915976762771606},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.32826125621795654},{"id":"https://openalex.org/C8010536","wikidata":"https://www.wikidata.org/wiki/Q160398","display_name":"Crystallography","level":1,"score":0.29014381766319275},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.2099718451499939},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.17197686433792114},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.161304771900177},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.08587926626205444},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1117/12.51280","doi":"https://doi.org/10.1117/12.51280","is_oa":false,"landing_page_url":"https://doi.org/10.1117/12.51280","pdf_url":null,"source":{"id":"https://openalex.org/S183492911","display_name":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","issn_l":"0277-786X","issn":["0277-786X","1996-756X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","norway-1"],"host_organization":"https://openalex.org/P4310315543","host_organization_name":"SPIE","host_organization_lineage":["https://openalex.org/P4310315543"],"host_organization_lineage_names":["SPIE"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"SPIE Proceedings","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W1965774002","https://openalex.org/W2074914710","https://openalex.org/W2004531459","https://openalex.org/W1971307364","https://openalex.org/W2057812469","https://openalex.org/W1965477774","https://openalex.org/W1982667708","https://openalex.org/W2002793145","https://openalex.org/W7057177237","https://openalex.org/W2058323562"],"abstract_inverted_index":{"Tungsten/carbon":[0],"(W/C)":[1],"multilayer":[2],"thin":[3,287],"films":[4],"with":[5,164,337,375],"a":[6,45,165,246,272],"nominal":[7],"d":[8,180,350],"spacing":[9,351],"varying":[10],"from":[11,32,98],"2.5":[12],"to":[13,34,41,54,73,127,156,194,344,371],"14":[14],"nm":[15,149,209],"were":[16,30,39,71],"prepared":[17],"by":[18,245],"magnetron":[19],"sputtering":[20],"technique.":[21],"The":[22,37,130,316,325,364],"thicknesses":[23,138],"of":[24,52,77,90,162,192,224,249,267,329,347],"the":[25,50,75,78,96,101,121,157,182,188,217,220,264,293,300,330,348,376,381],"W":[26,152,159,184,193,197,204,288,356,383],"and":[27,67,80,187,203,253,292,308,323,352,357,384],"C":[28,56,112,201,211,235,242,297,313,358,385],"layers":[29,123,132,145,289,359],"varied":[31],"0.5":[33],"12":[35,128],"nm.":[36,143],"multilayers":[38,97,218,285,331,368],"subjected":[40],"isochronal":[42],"anneals":[43],"in":[44,49,113,154,171,233,332,354,366,380],"quartz":[46],"tube":[47],"furnace":[48],"range":[51],"300":[53],"1000":[55,111],"under":[57],"high":[58,109],"purity":[59],"Ar":[60,114],"flow":[61],"conditions.":[62],"X-ray":[63],"diffraction,":[64],"Raman":[65],"scattering":[66],"Auger":[68],"depth":[69],"profiling":[70],"used":[72],"characterize":[74],"structure":[76,186],"as-prepared":[79],"annealed":[81],"films.":[82],"It":[83],"is":[84,319,342,369],"found":[85],"that":[86],"an":[87],"overcoat":[88],"layer":[89,169,185,189,198,202,205,212,281,298,326],"silicon":[91,166],"nitride":[92,167],"(30-50":[93],"nm)":[94,291],"prevents":[95],"oxidation":[99],"during":[100],"1":[102,215],"hr":[103],"heat":[104],"treatment":[105],"at":[106,228,255,263,305,311,360],"temperatures":[107],"as":[108,110],"flow.":[115],"In":[116],"all":[117,367],"studied":[118],"W/C":[119],"multilayers,":[120],"carbon":[122],"are":[124,133,139],"amorphous":[125,135,158,382],"(up":[126],"nm).":[129],"tungsten":[131],"also":[134],"when":[136],"their":[137],"less":[140],"than":[141,147,200],"5":[142,148,276],"Tungsten":[144],"thicker":[146,199,296],"show":[150,219],"crystalline":[151],"peaks":[153],"addition":[155],"feature.":[160],"Annealing":[161],"samples":[163],"protective":[168],"results":[170],"several":[172],"structural":[173,377],"changes":[174],"which":[175,234],"depend":[176],"on":[177,238,261],"annealing":[178,265,339],"temperature,":[179],"spacing,":[181],"as-deposited":[183],"thickness":[190,206,213],"ratio":[191],"C.":[195,269],"For":[196,283],">":[207],"4":[208],"and/or":[210],"<":[214],"nm,":[216],"initial":[221,301],"crystal":[222,317],"formation":[223],"microcrystalline":[225],"W2C":[226],"occurring":[227],"C-W":[229,309],"interfaces":[230,257,310],"(that":[231],"interface":[232],"was":[236,259],"deposited":[237,260],"W)":[239],"after":[240],"600":[241],"anneal,":[243],"followed":[244],"second":[247],"crystallization":[248,302],"a-W":[250,252,320,322],"or":[251,278,295,314,321],"WC":[254],"W-C":[256,307],"(W":[258],"C)":[262],"temperature":[266],"900":[268,312],"They":[270],"reveal":[271],"relatively":[273],"small":[274],"(<":[275],"%)":[277],"essentially":[279],"no":[280],"expansion.":[282],"those":[284],"having":[286],"(2":[290],"same":[294],"thicknesses,":[299],"takes":[303],"place":[304],"both":[306,355],"higher.":[315],"formed":[318],"WC.":[324],"pair":[327],"period":[328],"this":[333],"group":[334],"increases":[335],"monotonically":[336],"increasing":[338],"temperature.":[340],"Expansion":[341],"up":[343],"16":[345],"%":[346],"original":[349],"occurs":[353],"approximately":[361],"equal":[362],"rates.":[363],"expansion":[365],"interpreted":[370],"be":[372],"associated":[373],"mainly":[374],"ordering":[378],"processes":[379],"layers.":[386]},"counts_by_year":[],"updated_date":"2026-10-30T12:39:25.321706","created_date":"2016-06-24T00:00:00"}