{"id":"https://openalex.org/W2014615801","doi":"https://doi.org/10.1063/1.4716030","title":"Measurement of bonding energy in an anhydrous nitrogen atmosphere and its application to silicon direct bonding technology","display_name":"Measurement of bonding energy in an anhydrous nitrogen atmosphere and its application to silicon direct bonding technology","publication_year":2012,"publication_date":"2012-05-15","ids":{"openalex":"https://openalex.org/W2014615801","doi":"https://doi.org/10.1063/1.4716030","mag":"2014615801"},"language":"en","primary_location":{"id":"doi:10.1063/1.4716030","doi":"https://doi.org/10.1063/1.4716030","is_oa":false,"landing_page_url":"https://doi.org/10.1063/1.4716030","pdf_url":null,"source":{"id":"https://openalex.org/S187991544","display_name":"Journal of Applied Physics","issn_l":"0021-8979","issn":["0021-8979","1089-7550","1520-8850"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-d","jufo-1","norway-1","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Applied Physics","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5021816461","display_name":"Frank Fournel","orcid":"https://orcid.org/0000-0001-6051-3391","observed_orcids":["https://orcid.org/0000-0001-6051-3391"]},"institutions":[{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I3020098449","display_name":"CEA Grenoble","ror":"https://ror.org/02mg6n827","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I3020098449"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"F. Fournel","raw_affiliation_strings":["CEA, LETI 1 , MINATEC Campus, F-38054 Grenoble, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEA, LETI 1 , MINATEC Campus, F-38054 Grenoble, France","institution_ids":["https://openalex.org/I2738703131","https://openalex.org/I3020098449","https://openalex.org/I4210150049"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5089007603","display_name":"L\u00e9onardo Continni","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I3020098449","display_name":"CEA Grenoble","ror":"https://ror.org/02mg6n827","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I3020098449"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"L. Continni","raw_affiliation_strings":["CEA, LETI 1 , MINATEC Campus, F-38054 Grenoble, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEA, LETI 1 , MINATEC Campus, F-38054 Grenoble, France","institution_ids":["https://openalex.org/I2738703131","https://openalex.org/I3020098449","https://openalex.org/I4210150049"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5109158586","display_name":"Christophe Morales","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I3020098449","display_name":"CEA Grenoble","ror":"https://ror.org/02mg6n827","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I3020098449"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"C. Morales","raw_affiliation_strings":["CEA, LETI 1 , MINATEC Campus, F-38054 Grenoble, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEA, LETI 1 , MINATEC Campus, F-38054 Grenoble, France","institution_ids":["https://openalex.org/I2738703131","https://openalex.org/I3020098449","https://openalex.org/I4210150049"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5076011830","display_name":"J\u00e9r\u00e9my Da Fonseca","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I3020098449","display_name":"CEA Grenoble","ror":"https://ror.org/02mg6n827","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I3020098449"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"J. Da Fonseca","raw_affiliation_strings":["CEA, LETI 1 , MINATEC Campus, F-38054 Grenoble, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEA, LETI 1 , MINATEC Campus, F-38054 Grenoble, France","institution_ids":["https://openalex.org/I2738703131","https://openalex.org/I3020098449","https://openalex.org/I4210150049"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5052811647","display_name":"H. Moriceau","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I3020098449","display_name":"CEA Grenoble","ror":"https://ror.org/02mg6n827","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I3020098449"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"H. Moriceau","raw_affiliation_strings":["CEA, LETI 1 , MINATEC Campus, F-38054 Grenoble, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEA, LETI 1 , MINATEC Campus, F-38054 Grenoble, France","institution_ids":["https://openalex.org/I2738703131","https://openalex.org/I3020098449","https://openalex.org/I4210150049"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5005062731","display_name":"F. Rieutord","orcid":"https://orcid.org/0000-0003-4697-3652","observed_orcids":["https://orcid.org/0000-0003-4697-3652"]},"institutions":[{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I3020098449","display_name":"CEA Grenoble","ror":"https://ror.org/02mg6n827","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I3020098449"]},{"id":"https://openalex.org/I4210124948","display_name":"Institut Nanosciences et Cryog\u00e9nie","ror":"https://ror.org/02w3v0826","country_code":"FR","type":"facility","lineage":["https://openalex.org/I2738703131","https://openalex.org/I4210113668","https://openalex.org/I4210124948"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"F. Rieutord","raw_affiliation_strings":["CEA, INAC 2 , SP2M/NRS, 17 rue des Martyrs, 38054 Grenoble Cedex 9, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEA, INAC 2 , SP2M/NRS, 17 rue des Martyrs, 38054 Grenoble Cedex 9, France","institution_ids":["https://openalex.org/I2738703131","https://openalex.org/I3020098449","https://openalex.org/I4210124948"]}]},{"author_position":"middle","author":{"id":null,"display_name":"A. Barthelemy","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I108523894","display_name":"Soitec (France)","ror":"https://ror.org/00s730510","country_code":"FR","type":"company","lineage":["https://openalex.org/I108523894"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"A. Barthelemy","raw_affiliation_strings":["SOITEC, Parc Technologique des Fontaines Chemin des Franques 3 , 38190 Bernin, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"SOITEC, Parc Technologique des Fontaines Chemin des Franques 3 , 38190 Bernin, France","institution_ids":["https://openalex.org/I108523894"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5037257708","display_name":"Ionut Radu","orcid":"https://orcid.org/0000-0002-6839-1015","observed_orcids":["https://orcid.org/0000-0002-6839-1015"]},"institutions":[{"id":"https://openalex.org/I108523894","display_name":"Soitec (France)","ror":"https://ror.org/00s730510","country_code":"FR","type":"company","lineage":["https://openalex.org/I108523894"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"I. Radu","raw_affiliation_strings":["SOITEC, Parc Technologique des Fontaines Chemin des Franques 3 , 38190 Bernin, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"SOITEC, Parc Technologique des Fontaines Chemin des Franques 3 , 38190 Bernin, France","institution_ids":["https://openalex.org/I108523894"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":5,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":{"value":3500,"currency":"USD","value_usd":3500},"apc_paid":null,"fwci":4.2016,"has_fulltext":false,"cited_by_count":104,"citation_normalized_percentile":{"value":0.94190029,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":96,"max":100},"biblio":{"volume":"111","issue":"10","first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11527","display_name":"3D IC and TSV technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11527","display_name":"3D IC and TSV technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10460","display_name":"Electronic Packaging and Soldering Technologies","score":0.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/bonding-energy","display_name":"bonding energy","score":0.9120000004768372},{"id":"https://openalex.org/keywords/silicon-direct-bonding","display_name":"silicon direct bonding","score":0.9010000228881836},{"id":"https://openalex.org/keywords/double-cantilever-beam-test","display_name":"double cantilever beam test","score":0.8410000205039978},{"id":"https://openalex.org/keywords/debonding-length","display_name":"debonding length","score":0.8339999914169312},{"id":"https://openalex.org/keywords/si-sio2-interface","display_name":"Si/SiO2 interface","score":0.8389999866485596},{"id":"https://openalex.org/keywords/bonding-mechanism","display_name":"bonding mechanism","score":0.7670000195503235},{"id":"https://openalex.org/keywords/silicon-wafers","display_name":"silicon wafers","score":0.7139999866485596}],"concepts":[{"id":"https://openalex.org/C201414436","wikidata":"https://www.wikidata.org/wiki/Q567503","display_name":"Anodic bonding","level":3,"score":0.6817100048065186},{"id":"https://openalex.org/C102217409","wikidata":"https://www.wikidata.org/wiki/Q3819604","display_name":"Bonding in solids","level":2,"score":0.672115683555603},{"id":"https://openalex.org/C187714232","wikidata":"https://www.wikidata.org/wiki/Q2745207","display_name":"Anhydrous","level":2,"score":0.6217042207717896},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5742313265800476},{"id":"https://openalex.org/C122032599","wikidata":"https://www.wikidata.org/wiki/Q2914535","display_name":"Bond energy","level":3,"score":0.5478460788726807},{"id":"https://openalex.org/C20625102","wikidata":"https://www.wikidata.org/wiki/Q137056","display_name":"Corrosion","level":2,"score":0.5180935263633728},{"id":"https://openalex.org/C2778071519","wikidata":"https://www.wikidata.org/wiki/Q5280309","display_name":"Direct bonding","level":3,"score":0.5063012838363647},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.5011849403381348},{"id":"https://openalex.org/C2779133538","wikidata":"https://www.wikidata.org/wiki/Q677010","display_name":"Wafer bonding","level":3,"score":0.4749312996864319},{"id":"https://openalex.org/C537208039","wikidata":"https://www.wikidata.org/wiki/Q627","display_name":"Nitrogen","level":2,"score":0.4676283001899719},{"id":"https://openalex.org/C2777855556","wikidata":"https://www.wikidata.org/wiki/Q4339544","display_name":"Annealing (glass)","level":2,"score":0.4665764272212982},{"id":"https://openalex.org/C21036866","wikidata":"https://www.wikidata.org/wiki/Q181767","display_name":"Stress (linguistics)","level":2,"score":0.44160035252571106},{"id":"https://openalex.org/C195839","wikidata":"https://www.wikidata.org/wiki/Q901959","display_name":"Surface energy","level":2,"score":0.42774078249931335},{"id":"https://openalex.org/C178213299","wikidata":"https://www.wikidata.org/wiki/Q44424","display_name":"Chemical bond","level":2,"score":0.41720330715179443},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.36629197001457214},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.30682697892189026},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.26209694147109985},{"id":"https://openalex.org/C32909587","wikidata":"https://www.wikidata.org/wiki/Q11369","display_name":"Molecule","level":2,"score":0.14496541023254395},{"id":"https://openalex.org/C41895202","wikidata":"https://www.wikidata.org/wiki/Q8162","display_name":"Linguistics","level":1,"score":0.0},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C138885662","wikidata":"https://www.wikidata.org/wiki/Q5891","display_name":"Philosophy","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1063/1.4716030","doi":"https://doi.org/10.1063/1.4716030","is_oa":false,"landing_page_url":"https://doi.org/10.1063/1.4716030","pdf_url":null,"source":{"id":"https://openalex.org/S187991544","display_name":"Journal of Applied Physics","issn_l":"0021-8979","issn":["0021-8979","1089-7550","1520-8850"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-d","jufo-1","norway-1","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Applied Physics","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":28,"referenced_works":["https://openalex.org/W1643572397","https://openalex.org/W1964958541","https://openalex.org/W1973697821","https://openalex.org/W1976079988","https://openalex.org/W1978002271","https://openalex.org/W1980980279","https://openalex.org/W2001320522","https://openalex.org/W2003978230","https://openalex.org/W2010784362","https://openalex.org/W2019926612","https://openalex.org/W2033877234","https://openalex.org/W2036284768","https://openalex.org/W2037803004","https://openalex.org/W2043178920","https://openalex.org/W2053812676","https://openalex.org/W2054107724","https://openalex.org/W2060862073","https://openalex.org/W2069680472","https://openalex.org/W2076545802","https://openalex.org/W2081539999","https://openalex.org/W2105733205","https://openalex.org/W2120280494","https://openalex.org/W2121735512","https://openalex.org/W2131076635","https://openalex.org/W2131300332","https://openalex.org/W2134641752","https://openalex.org/W2140034488","https://openalex.org/W2162357431"],"related_works":["https://openalex.org/W2085220560","https://openalex.org/W4233419170","https://openalex.org/W3212961791","https://openalex.org/W4378982364","https://openalex.org/W2520676370","https://openalex.org/W2413947152","https://openalex.org/W3008251946","https://openalex.org/W4406972232","https://openalex.org/W3014995286","https://openalex.org/W2133214002"],"abstract_inverted_index":{"Bonding":[0],"energy":[1,25],"represents":[2],"an":[3],"important":[4],"parameter":[5],"for":[6,13],"direct":[7],"bonding":[8,20,24,59,71,78,128,141,147,167],"applications":[9],"as":[10,12],"well":[11],"the":[14,35,57,65,70,93,102,132,140,152,165,177],"elaboration":[15],"of":[16,23,77,80,112,143,179],"physical":[17,172],"mechanisms":[18,168],"at":[19,69],"interfaces.":[21,72],"Measurement":[22],"using":[26],"double":[27],"cantilever":[28],"beam":[29],"(DCB)":[30],"under":[31,85,104,122,135],"prescribed":[32],"displacement":[33],"is":[34,99],"most":[36],"used":[37],"technique":[38],"thanks":[39],"to":[40,91,117,126,131,163,170],"its":[41],"simplicity.":[42],"The":[43],"measurements":[44,76,103],"are":[45,61,149],"typically":[46],"done":[47],"in":[48,89,114,176],"standard":[49,136],"atmosphere":[50],"with":[51],"relative":[52],"humidity":[53],"above":[54],"30%.":[55],"Therefore,":[56],"obtained":[58],"energies":[60,79,129,142],"strongly":[62],"impacted":[63],"by":[64],"water":[66,94,113],"stress":[67,95,180],"corrosion":[68,96,181],"This":[73],"paper":[74],"presents":[75],"directly":[81],"bonded":[82],"silicon":[83],"wafers":[84],"anhydrous":[86,105],"nitrogen":[87,106],"conditions":[88,107],"order":[90],"prevent":[92],"effect.":[97,182],"It":[98],"shown":[100],"that":[101],"(less":[108],"than":[109],"0.2":[110],"ppm":[111],"nitrogen)":[115],"lead":[116],"high":[118],"stable":[119],"debonding":[120],"lengths":[121],"static":[123],"load":[124],"and":[125,169,173],"higher":[127],"compared":[130],"values":[133],"measured":[134,150],"ambient":[137],"conditions.":[138],"Moreover,":[139],"Si/SiO2":[144],"or":[145],"SiO2/SiO2":[146],"interfaces":[148],"overall":[151],"classical":[153],"post":[154],"bond":[155],"annealing":[156],"temperature":[157],"range.":[158],"These":[159],"new":[160],"results":[161],"allow":[162],"revisit":[164],"reported":[166],"highlight":[171],"chemical":[174],"phenomena":[175],"absence":[178]},"counts_by_year":[{"year":2026,"cited_by_count":11},{"year":2025,"cited_by_count":16},{"year":2024,"cited_by_count":13},{"year":2023,"cited_by_count":9},{"year":2022,"cited_by_count":4},{"year":2021,"cited_by_count":7},{"year":2020,"cited_by_count":5},{"year":2019,"cited_by_count":4},{"year":2018,"cited_by_count":4},{"year":2017,"cited_by_count":5},{"year":2016,"cited_by_count":5},{"year":2015,"cited_by_count":11},{"year":2014,"cited_by_count":6},{"year":2013,"cited_by_count":4}],"updated_date":"2026-11-07T11:25:07.637180","created_date":"2016-06-24T00:00:00"}