{"id":"https://openalex.org/W2014089341","doi":"https://doi.org/10.1016/j.sna.2014.04.031","title":"High performance PZT thick films based on bonding technique for d31 mode harvester with integrated proof mass","display_name":"High performance PZT thick films based on bonding technique for d31 mode harvester with integrated proof mass","publication_year":2014,"publication_date":"2014-04-26","ids":{"openalex":"https://openalex.org/W2014089341","doi":"https://doi.org/10.1016/j.sna.2014.04.031","mag":"2014089341"},"language":"en","primary_location":{"id":"doi:10.1016/j.sna.2014.04.031","doi":"https://doi.org/10.1016/j.sna.2014.04.031","is_oa":false,"landing_page_url":"https://doi.org/10.1016/j.sna.2014.04.031","pdf_url":null,"source":{"id":"https://openalex.org/S16945967","display_name":"Sensors and Actuators A Physical","issn_l":"0924-4247","issn":["0924-4247","1873-3069"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-d","jufo-1","norway-1","poland-100","russia-white-list-1"],"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors and Actuators A: Physical","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5001216674","display_name":"Bin Tang Yang","orcid":"https://orcid.org/0000-0001-7948-3823","observed_orcids":["https://orcid.org/0000-0001-7948-3823"]},"institutions":[{"id":"https://openalex.org/I183067930","display_name":"Shanghai Jiao Tong University","ror":"https://ror.org/0220qvk04","country_code":"CN","type":"education","lineage":["https://openalex.org/I183067930"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Bin Yang","raw_affiliation_strings":["National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Micro and Nano Science and Technology, Shanghai Jiao Tong University, Shanghai 200240, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Micro and Nano Science and Technology, Shanghai Jiao Tong University, Shanghai 200240, China","institution_ids":["https://openalex.org/I183067930"]}]},{"author_position":"middle","author":{"id":null,"display_name":"Yanbo Zhu","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I183067930","display_name":"Shanghai Jiao Tong University","ror":"https://ror.org/0220qvk04","country_code":"CN","type":"education","lineage":["https://openalex.org/I183067930"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yanbo Zhu","raw_affiliation_strings":["National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Micro and Nano Science and Technology, Shanghai Jiao Tong University, Shanghai 200240, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Micro and Nano Science and Technology, Shanghai Jiao Tong University, Shanghai 200240, China","institution_ids":["https://openalex.org/I183067930"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5002539950","display_name":"Xingzhao Wang","orcid":"https://orcid.org/0000-0003-3582-6737","observed_orcids":["https://orcid.org/0000-0003-3582-6737"]},"institutions":[{"id":"https://openalex.org/I183067930","display_name":"Shanghai Jiao Tong University","ror":"https://ror.org/0220qvk04","country_code":"CN","type":"education","lineage":["https://openalex.org/I183067930"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xingzhao Wang","raw_affiliation_strings":["National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Micro and Nano Science and Technology, Shanghai Jiao Tong University, Shanghai 200240, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Micro and Nano Science and Technology, Shanghai Jiao Tong University, Shanghai 200240, China","institution_ids":["https://openalex.org/I183067930"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101881520","display_name":"Jingquan Liu","orcid":"https://orcid.org/0000-0003-4140-1516","observed_orcids":["https://orcid.org/0000-0003-4140-1516"]},"institutions":[{"id":"https://openalex.org/I183067930","display_name":"Shanghai Jiao Tong University","ror":"https://ror.org/0220qvk04","country_code":"CN","type":"education","lineage":["https://openalex.org/I183067930"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Jing-quan Liu","raw_affiliation_strings":["National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Micro and Nano Science and Technology, Shanghai Jiao Tong University, Shanghai 200240, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Micro and Nano Science and Technology, Shanghai Jiao Tong University, Shanghai 200240, China","institution_ids":["https://openalex.org/I183067930"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5026807955","display_name":"Xiang Chen","orcid":"https://orcid.org/0000-0002-3640-060X","observed_orcids":["https://orcid.org/0000-0002-3640-060X"]},"institutions":[{"id":"https://openalex.org/I183067930","display_name":"Shanghai Jiao Tong University","ror":"https://ror.org/0220qvk04","country_code":"CN","type":"education","lineage":["https://openalex.org/I183067930"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xiang Chen","raw_affiliation_strings":["National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Micro and Nano Science and Technology, Shanghai Jiao Tong University, Shanghai 200240, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Micro and Nano Science and Technology, Shanghai Jiao Tong University, Shanghai 200240, China","institution_ids":["https://openalex.org/I183067930"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5110166643","display_name":"Chunsheng Yang","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I183067930","display_name":"Shanghai Jiao Tong University","ror":"https://ror.org/0220qvk04","country_code":"CN","type":"education","lineage":["https://openalex.org/I183067930"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Chunsheng Yang","raw_affiliation_strings":["National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Micro and Nano Science and Technology, Shanghai Jiao Tong University, Shanghai 200240, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Micro and Nano Science and Technology, Shanghai Jiao Tong University, Shanghai 200240, China","institution_ids":["https://openalex.org/I183067930"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":["https://openalex.org/A5101881520"],"corresponding_institution_ids":["https://openalex.org/I183067930"],"apc_list":{"value":3750,"currency":"USD","value_usd":3750},"apc_paid":null,"fwci":0.3909,"has_fulltext":false,"cited_by_count":19,"citation_normalized_percentile":{"value":0.65786807,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":87,"max":98},"biblio":{"volume":"214","issue":null,"first_page":"88","last_page":"94"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11230","display_name":"Innovative Energy Harvesting Technologies","score":0.9980000257492065,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11230","display_name":"Innovative Energy Harvesting Technologies","score":0.9980000257492065,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.0008999999845400453,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10107","display_name":"Ferroelectric and Piezoelectric Materials","score":0.00039999998989515007,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/pzt-thick-films","display_name":"PZT thick films","score":0.9570000171661377},{"id":"https://openalex.org/keywords/piezoelectric-energy-harvesting","display_name":"piezoelectric energy harvesting","score":0.9129999876022339},{"id":"https://openalex.org/keywords/vibration-energy-harvesting","display_name":"vibration energy harvesting","score":0.7590000033378601},{"id":"https://openalex.org/keywords/d31-mode","display_name":"d31 mode","score":0.7519999742507935},{"id":"https://openalex.org/keywords/low-temperature-bonding","display_name":"low-temperature bonding","score":0.6660000085830688},{"id":"https://openalex.org/keywords/film-thinning","display_name":"film thinning","score":0.6690000295639038},{"id":"https://openalex.org/keywords/lumped-parameter-model","display_name":"lumped parameter model","score":0.8500000238418579},{"id":"https://openalex.org/keywords/energy-conversion-efficiency","display_name":"energy conversion efficiency","score":0.699999988079071}],"concepts":[{"id":"https://openalex.org/C2780330379","wikidata":"https://www.wikidata.org/wiki/Q16990023","display_name":"Proof mass","level":3,"score":0.8691706657409668},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.8177034854888916},{"id":"https://openalex.org/C100082104","wikidata":"https://www.wikidata.org/wiki/Q183759","display_name":"Piezoelectricity","level":2,"score":0.7096117734909058},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.5958733558654785},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.5827076435089111},{"id":"https://openalex.org/C141354745","wikidata":"https://www.wikidata.org/wiki/Q17227","display_name":"Cantilever","level":2,"score":0.5584471821784973},{"id":"https://openalex.org/C101518730","wikidata":"https://www.wikidata.org/wiki/Q930236","display_name":"Energy harvesting","level":3,"score":0.5166592597961426},{"id":"https://openalex.org/C198394728","wikidata":"https://www.wikidata.org/wiki/Q3695508","display_name":"Vibration","level":2,"score":0.5166552662849426},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.4966774582862854},{"id":"https://openalex.org/C117896860","wikidata":"https://www.wikidata.org/wiki/Q11376","display_name":"Acceleration","level":2,"score":0.47449374198913574},{"id":"https://openalex.org/C104779481","wikidata":"https://www.wikidata.org/wiki/Q50707","display_name":"Composite number","level":2,"score":0.41501298546791077},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.3886454403400421},{"id":"https://openalex.org/C186370098","wikidata":"https://www.wikidata.org/wiki/Q442787","display_name":"Energy (signal processing)","level":2,"score":0.32333359122276306},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.2612733244895935},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.220414400100708},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.10310542583465576},{"id":"https://openalex.org/C74650414","wikidata":"https://www.wikidata.org/wiki/Q11397","display_name":"Classical mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C105795698","wikidata":"https://www.wikidata.org/wiki/Q12483","display_name":"Statistics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1016/j.sna.2014.04.031","doi":"https://doi.org/10.1016/j.sna.2014.04.031","is_oa":false,"landing_page_url":"https://doi.org/10.1016/j.sna.2014.04.031","pdf_url":null,"source":{"id":"https://openalex.org/S16945967","display_name":"Sensors and Actuators A Physical","issn_l":"0924-4247","issn":["0924-4247","1873-3069"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-d","jufo-1","norway-1","poland-100","russia-white-list-1"],"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors and Actuators A: Physical","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.8485000133514404,"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7"},{"score":0.5378999710083008,"display_name":"Industry, innovation and infrastructure","id":"https://metadata.un.org/sdg/9"}],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":22,"referenced_works":["https://openalex.org/W1915903118","https://openalex.org/W1978972366","https://openalex.org/W1999451991","https://openalex.org/W2018637803","https://openalex.org/W2021888838","https://openalex.org/W2027091497","https://openalex.org/W2030847933","https://openalex.org/W2031418021","https://openalex.org/W2033416242","https://openalex.org/W2038832840","https://openalex.org/W2069046885","https://openalex.org/W2069901041","https://openalex.org/W2077294028","https://openalex.org/W2077841676","https://openalex.org/W2087525349","https://openalex.org/W2104935186","https://openalex.org/W2142172865","https://openalex.org/W2142908330","https://openalex.org/W2163003261","https://openalex.org/W2163933412","https://openalex.org/W2166477335","https://openalex.org/W2167187517"],"related_works":["https://openalex.org/W2077841676","https://openalex.org/W2740737040","https://openalex.org/W2118336323","https://openalex.org/W2119358493","https://openalex.org/W2288632138","https://openalex.org/W2127158676","https://openalex.org/W2035721460","https://openalex.org/W2171566425","https://openalex.org/W4235520810","https://openalex.org/W2020224452"],"abstract_inverted_index":null,"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2023,"cited_by_count":3},{"year":2022,"cited_by_count":6},{"year":2021,"cited_by_count":1},{"year":2020,"cited_by_count":1},{"year":2019,"cited_by_count":1},{"year":2018,"cited_by_count":5},{"year":2017,"cited_by_count":1}],"updated_date":"2026-10-17T09:40:24.721904","created_date":"2016-06-24T00:00:00"}