{"id":"https://openalex.org/W2014041385","doi":"https://doi.org/10.1149/1.3207702","title":"Strain Evaluation in SiC MEMS Test Structures","display_name":"Strain Evaluation in SiC MEMS Test Structures","publication_year":2009,"publication_date":"2009-09-25","ids":{"openalex":"https://openalex.org/W2014041385","doi":"https://doi.org/10.1149/1.3207702","mag":"2014041385"},"language":"en","primary_location":{"id":"doi:10.1149/1.3207702","doi":"https://doi.org/10.1149/1.3207702","is_oa":true,"landing_page_url":"https://doi.org/10.1149/1.3207702","pdf_url":"https://iopscience.iop.org/article/10.1149/1.3207702/pdf","source":{"id":"https://openalex.org/S4210205149","display_name":"ECS Transactions","issn_l":"1938-5862","issn":["1938-5862","1938-6737","2151-2051"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":["norway-1","poland-20"],"host_organization":"https://openalex.org/P4310311669","host_organization_name":"Institute of Physics","host_organization_lineage":["https://openalex.org/P4310311669"],"host_organization_lineage_names":["Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"ECS Transactions","raw_type":"journal-article"},"volume":null,"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"bronze","oa_url":"https://iopscience.iop.org/article/10.1149/1.3207702/pdf","any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5081786857","display_name":"Matteo Bosi","orcid":"https://orcid.org/0000-0001-8992-0249","observed_orcids":["https://orcid.org/0000-0001-8992-0249"]},"institutions":[{"id":"https://openalex.org/I4210155236","display_name":"National Research Council","ror":"https://ror.org/04zaypm56","country_code":"IT","type":"nonprofit","lineage":["https://openalex.org/I4210155236"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Matteo Bosi","raw_affiliation_strings":["Consiglio Nazionale delle Ricerche"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Consiglio Nazionale delle Ricerche","institution_ids":["https://openalex.org/I4210155236"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5078873907","display_name":"G. Attolini","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210155236","display_name":"National Research Council","ror":"https://ror.org/04zaypm56","country_code":"IT","type":"nonprofit","lineage":["https://openalex.org/I4210155236"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Giovanni Attolini","raw_affiliation_strings":["Consiglio Nazionale delle Ricerche"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Consiglio Nazionale delle Ricerche","institution_ids":["https://openalex.org/I4210155236"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5076029397","display_name":"Bernard Enrico Watts","orcid":"https://orcid.org/0000-0002-3809-8264","observed_orcids":["https://orcid.org/0000-0002-3809-8264"]},"institutions":[{"id":"https://openalex.org/I4210155236","display_name":"National Research Council","ror":"https://ror.org/04zaypm56","country_code":"IT","type":"nonprofit","lineage":["https://openalex.org/I4210155236"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Bernard E. Watts","raw_affiliation_strings":["Consiglio Nazionale delle Ricerche"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Consiglio Nazionale delle Ricerche","institution_ids":["https://openalex.org/I4210155236"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5071779292","display_name":"C. Frigeri","orcid":"https://orcid.org/0000-0003-1098-7120","observed_orcids":["https://orcid.org/0000-0003-1098-7120"]},"institutions":[{"id":"https://openalex.org/I4210155236","display_name":"National Research Council","ror":"https://ror.org/04zaypm56","country_code":"IT","type":"nonprofit","lineage":["https://openalex.org/I4210155236"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Cesare Frigeri","raw_affiliation_strings":["Consiglio Nazionale delle Ricerche"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Consiglio Nazionale delle Ricerche","institution_ids":["https://openalex.org/I4210155236"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5032052278","display_name":"Francesca Rossi","orcid":"https://orcid.org/0000-0003-1773-2542","observed_orcids":["https://orcid.org/0000-0003-1773-2542"]},"institutions":[{"id":"https://openalex.org/I4210155236","display_name":"National Research Council","ror":"https://ror.org/04zaypm56","country_code":"IT","type":"nonprofit","lineage":["https://openalex.org/I4210155236"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Francesca Rossi","raw_affiliation_strings":["Consiglio Nazionale delle Ricerche"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Consiglio Nazionale delle Ricerche","institution_ids":["https://openalex.org/I4210155236"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5081039241","display_name":"Antonella Poggi","orcid":"https://orcid.org/0000-0001-9271-0584","observed_orcids":["https://orcid.org/0000-0001-9271-0584"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Antonella Poggi","raw_affiliation_strings":["IMM-CNR"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IMM-CNR","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5047857770","display_name":"Alberto Roncaglia","orcid":"https://orcid.org/0000-0001-9819-7603","observed_orcids":["https://orcid.org/0000-0001-9819-7603"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Alberto Roncaglia","raw_affiliation_strings":["IMM-CNR"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IMM-CNR","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5031124119","display_name":"Fulvio Mancarella","orcid":"https://orcid.org/0000-0002-1979-4387","observed_orcids":["https://orcid.org/0000-0002-1979-4387"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Fulvio Mancarella","raw_affiliation_strings":["IMM-CNR"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IMM-CNR","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5024956916","display_name":"Oscar Martinez","orcid":"https://orcid.org/0000-0002-2283-0350","observed_orcids":["https://orcid.org/0000-0002-2283-0350"]},"institutions":[{"id":"https://openalex.org/I108103353","display_name":"Universidad de Valladolid","ror":"https://ror.org/01fvbaw18","country_code":"ES","type":"education","lineage":["https://openalex.org/I108103353"]}],"countries":["ES"],"is_corresponding":false,"raw_author_name":"Oscar Martinez","raw_affiliation_strings":["Universidad de Valladolid"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Universidad de Valladolid","institution_ids":["https://openalex.org/I108103353"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5037913576","display_name":"Vanesa Hortelano","orcid":"https://orcid.org/0000-0001-7533-3625","observed_orcids":["https://orcid.org/0000-0001-7533-3625"]},"institutions":[{"id":"https://openalex.org/I108103353","display_name":"Universidad de Valladolid","ror":"https://ror.org/01fvbaw18","country_code":"ES","type":"education","lineage":["https://openalex.org/I108103353"]}],"countries":["ES"],"is_corresponding":false,"raw_author_name":"Vanesa Hortelano","raw_affiliation_strings":["Universidad de Valladolid"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Universidad de Valladolid","institution_ids":["https://openalex.org/I108103353"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":true,"cited_by_count":0,"citation_normalized_percentile":{"value":0.07703348,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"25","issue":"8","first_page":"1031","last_page":"1037"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.8827999830245972,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.8827999830245972,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10361","display_name":"Silicon Carbide Semiconductor Technologies","score":0.09309999644756317,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10377","display_name":"Metal and Thin Film Mechanics","score":0.011500000022351742,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/silicon-carbide","display_name":"silicon carbide","score":0.9070000052452087},{"id":"https://openalex.org/keywords/thin-film-stress","display_name":"film stress","score":0.4959999918937683},{"id":"https://openalex.org/keywords/strain","display_name":"strain","score":0.5189999938011169},{"id":"https://openalex.org/keywords/tensile-and-compressive-strain","display_name":"tensile and compressive strain","score":0.7429999709129333},{"id":"https://openalex.org/keywords/film-thickness-dependence","display_name":"film thickness dependence","score":0.8389999866485596},{"id":"https://openalex.org/keywords/membranes","display_name":"membranes","score":0.48399999737739563},{"id":"https://openalex.org/keywords/cantilever","display_name":"cantilever","score":0.9950000047683716},{"id":"https://openalex.org/keywords/raman-spectroscopy","display_name":"Raman spectroscopy","score":0.7369999885559082},{"id":"https://openalex.org/keywords/defects","display_name":"defects","score":0.7870000004768372},{"id":"https://openalex.org/keywords/cold-wall-reactor","display_name":"cold-wall reactor","score":0.9190000295639038}],"concepts":[{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.8489588499069214},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.8337974548339844},{"id":"https://openalex.org/C141354745","wikidata":"https://www.wikidata.org/wiki/Q17227","display_name":"Cantilever","level":2,"score":0.7427773475646973},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.7009871602058411},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.5765107870101929},{"id":"https://openalex.org/C2778022156","wikidata":"https://www.wikidata.org/wiki/Q576145","display_name":"Strain (injury)","level":2,"score":0.5618572235107422},{"id":"https://openalex.org/C112950240","wikidata":"https://www.wikidata.org/wiki/Q76005","display_name":"Ultimate tensile strength","level":2,"score":0.5517473220825195},{"id":"https://openalex.org/C41625074","wikidata":"https://www.wikidata.org/wiki/Q176088","display_name":"Membrane","level":2,"score":0.5354020595550537},{"id":"https://openalex.org/C40003534","wikidata":"https://www.wikidata.org/wiki/Q862228","display_name":"Raman spectroscopy","level":2,"score":0.5174406170845032},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.4622466564178467},{"id":"https://openalex.org/C182508753","wikidata":"https://www.wikidata.org/wiki/Q115605","display_name":"Tensile testing","level":3,"score":0.4530943036079407},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.4149032533168793},{"id":"https://openalex.org/C66938386","wikidata":"https://www.wikidata.org/wiki/Q633538","display_name":"Structural engineering","level":1,"score":0.3529752492904663},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.2829788327217102},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.17235243320465088},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.07295277714729309},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.0701344907283783},{"id":"https://openalex.org/C55493867","wikidata":"https://www.wikidata.org/wiki/Q7094","display_name":"Biochemistry","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C126322002","wikidata":"https://www.wikidata.org/wiki/Q11180","display_name":"Internal medicine","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1149/1.3207702","doi":"https://doi.org/10.1149/1.3207702","is_oa":true,"landing_page_url":"https://doi.org/10.1149/1.3207702","pdf_url":"https://iopscience.iop.org/article/10.1149/1.3207702/pdf","source":{"id":"https://openalex.org/S4210205149","display_name":"ECS Transactions","issn_l":"1938-5862","issn":["1938-5862","1938-6737","2151-2051"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":["norway-1","poland-20"],"host_organization":"https://openalex.org/P4310311669","host_organization_name":"Institute of Physics","host_organization_lineage":["https://openalex.org/P4310311669"],"host_organization_lineage_names":["Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"ECS Transactions","raw_type":"journal-article"}],"best_oa_location":{"id":"doi:10.1149/1.3207702","doi":"https://doi.org/10.1149/1.3207702","is_oa":true,"landing_page_url":"https://doi.org/10.1149/1.3207702","pdf_url":"https://iopscience.iop.org/article/10.1149/1.3207702/pdf","source":{"id":"https://openalex.org/S4210205149","display_name":"ECS Transactions","issn_l":"1938-5862","issn":["1938-5862","1938-6737","2151-2051"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":["norway-1","poland-20"],"host_organization":"https://openalex.org/P4310311669","host_organization_name":"Institute of Physics","host_organization_lineage":["https://openalex.org/P4310311669"],"host_organization_lineage_names":["Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"ECS Transactions","raw_type":"journal-article"},"sustainable_development_goals":[],"sustainable_development_goals_aurora":[{"id":"https://metadata.un.org/sdg/11","display_name":"Sustainable cities and communities","score":0.47999998927116394}],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2014041385.pdf","grobid_xml":"https://content.openalex.org/works/W2014041385.grobid-xml"},"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W2323294060","https://openalex.org/W2091998393","https://openalex.org/W2031136592","https://openalex.org/W7098959228","https://openalex.org/W2086660491","https://openalex.org/W2037322088","https://openalex.org/W2029646512","https://openalex.org/W2005847355","https://openalex.org/W2084898798","https://openalex.org/W1976264165"],"abstract_inverted_index":{"This":[0],"work":[1],"presents":[2],"the":[3,26,29,38,41,45,54],"growth":[4],"of":[5,44],"b":[6],"SiC":[7],"on":[8,69],"silicon":[9],"by":[10,34],"VPE":[11],"performed":[12],"in":[13,28],"a":[14],"home":[15],"built,":[16],"horizontal,":[17],"cold":[18],"wall":[19],"reactor.":[20],"Test":[21],"structures":[22],"used":[23,75],"to":[24,47,56,76],"assess":[25],"stresses":[27],"film":[30,70],"were":[31],"obtained":[32],"either":[33],"an":[35,51],"etch":[36],"through":[37],"wafer":[39,46],"from":[40,53],"bottom":[42],"side":[43],"produce":[48],"membranes":[49],"or":[50],"attack":[52],"front":[55],"reveal":[57],"cantilevers.":[58],"Membranes":[59],"and":[60,65,79],"cantilevers":[61],"presented":[62],"both":[63],"compressive":[64],"tensile":[66],"strain,":[67],"depending":[68],"thickness.":[71],"Raman":[72],"spectroscopy":[73],"was":[74],"study":[77],"strain":[78],"defects.":[80]},"counts_by_year":[],"updated_date":"2026-10-13T10:08:12.033832","created_date":"2016-06-24T00:00:00"}