{"id":"https://openalex.org/W2013333810","doi":"https://doi.org/10.2320/matertrans.47.1869","title":"Spin-Coating Polyimide Film on Hydrogenated DLC Film Surface Prepared by Ion Beam Deposition Method","display_name":"Spin-Coating Polyimide Film on Hydrogenated DLC Film Surface Prepared by Ion Beam Deposition Method","publication_year":2006,"publication_date":"2006-01-01","ids":{"openalex":"https://openalex.org/W2013333810","doi":"https://doi.org/10.2320/matertrans.47.1869","mag":"2013333810"},"language":"en","primary_location":{"id":"doi:10.2320/matertrans.47.1869","doi":"https://doi.org/10.2320/matertrans.47.1869","is_oa":true,"landing_page_url":"https://doi.org/10.2320/matertrans.47.1869","pdf_url":"https://www.jstage.jst.go.jp/article/matertrans/47/7/47_7_1869/_pdf","source":{"id":"https://openalex.org/S4210209311","display_name":"MATERIALS TRANSACTIONS","issn_l":"1345-9678","issn":["1345-9678","1347-5320"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-c","jufo-1","norway-1","poland-40","russia-white-list-3"],"host_organization":"https://openalex.org/P4322765269","host_organization_name":"Japan Institute of Metals","host_organization_lineage":["https://openalex.org/P4322765269"],"host_organization_lineage_names":["Japan Institute of Metals"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"MATERIALS TRANSACTIONS","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"bronze","oa_url":"https://www.jstage.jst.go.jp/article/matertrans/47/7/47_7_1869/_pdf","any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5109137122","display_name":"Fong-Cheng Tai","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I91807558","display_name":"National Cheng Kung University","ror":"https://ror.org/01b8kcc49","country_code":"TW","type":"education","lineage":["https://openalex.org/I91807558"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Fong-Cheng Tai","raw_affiliation_strings":["Department of Materials Science and Engineering, National Cheng-Kung University"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Materials Science and Engineering, National Cheng-Kung University","institution_ids":["https://openalex.org/I91807558"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5012912510","display_name":"Shih-Chin Lee","orcid":"https://orcid.org/0009-0004-2277-1671","observed_orcids":["https://orcid.org/0009-0004-2277-1671"]},"institutions":[{"id":"https://openalex.org/I91807558","display_name":"National Cheng Kung University","ror":"https://ror.org/01b8kcc49","country_code":"TW","type":"education","lineage":["https://openalex.org/I91807558"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Shih-Chin Lee","raw_affiliation_strings":["Department of Materials Science and Engineering, National Cheng-Kung University"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Materials Science and Engineering, National Cheng-Kung University","institution_ids":["https://openalex.org/I91807558"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5090912467","display_name":"Chehung Wei","orcid":"https://orcid.org/0000-0001-7269-1179","observed_orcids":["https://orcid.org/0000-0001-7269-1179"]},"institutions":[{"id":"https://openalex.org/I65196183","display_name":"Tatung University","ror":"https://ror.org/030m18266","country_code":"TW","type":"education","lineage":["https://openalex.org/I65196183"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Che-Hung Wei","raw_affiliation_strings":["Department of Mechanical Engineering, TATUNG University","Department of Mechanical Engineering, Tatung University#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, TATUNG University","institution_ids":["https://openalex.org/I65196183"]},{"raw_affiliation_string":"Department of Mechanical Engineering, Tatung University#TAB#","institution_ids":["https://openalex.org/I65196183"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.192,"has_fulltext":true,"cited_by_count":2,"citation_normalized_percentile":{"value":0.47646956,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":93},"biblio":{"volume":"47","issue":"7","first_page":"1869","last_page":"1873"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10478","display_name":"Diamond and Carbon-based Materials Research","score":0.5029000043869019,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10478","display_name":"Diamond and Carbon-based Materials Research","score":0.5029000043869019,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10377","display_name":"Metal and Thin Film Mechanics","score":0.3594000041484833,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12084","display_name":"Synthesis and properties of polymers","score":0.06199999898672104,"subfield":{"id":"https://openalex.org/subfields/2507","display_name":"Polymers and Plastics"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/hydrogenated-diamond-like-carbon","display_name":"hydrogenated diamond-like carbon","score":0.8920000195503235},{"id":"https://openalex.org/keywords/polyimide-films","display_name":"polyimide films","score":0.9020000100135803},{"id":"https://openalex.org/keywords/spin-coating","display_name":"spin coating","score":0.8209999799728394},{"id":"https://openalex.org/keywords/ion-beam-deposition","display_name":"ion beam deposition","score":0.9639999866485596},{"id":"https://openalex.org/keywords/adhesion","display_name":"adhesion","score":0.6299999952316284},{"id":"https://openalex.org/keywords/annealing","display_name":"annealing","score":0.6119999885559082},{"id":"https://openalex.org/keywords/graphitization","display_name":"graphitization","score":0.6899999976158142},{"id":"https://openalex.org/keywords/imidization","display_name":"imidization","score":0.8870000243186951},{"id":"https://openalex.org/keywords/warpage-reduction","display_name":"warpage reduction","score":0.7289999723434448},{"id":"https://openalex.org/keywords/electrical-resistivity","display_name":"electrical resistivity","score":0.9559999704360962},{"id":"https://openalex.org/keywords/silicon-substrate","display_name":"silicon substrate","score":0.42800000309944153},{"id":"https://openalex.org/keywords/surface-passivation","display_name":"surface passivation","score":0.6489999890327454}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.917347252368927},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.7037630081176758},{"id":"https://openalex.org/C2780965675","wikidata":"https://www.wikidata.org/wiki/Q145958","display_name":"Polyimide","level":3,"score":0.6341071128845215},{"id":"https://openalex.org/C115196108","wikidata":"https://www.wikidata.org/wiki/Q1305254","display_name":"Spin coating","level":3,"score":0.5898541212081909},{"id":"https://openalex.org/C40003534","wikidata":"https://www.wikidata.org/wiki/Q862228","display_name":"Raman spectroscopy","level":2,"score":0.5384269952774048},{"id":"https://openalex.org/C6556556","wikidata":"https://www.wikidata.org/wiki/Q899239","display_name":"Contact angle","level":2,"score":0.4859091341495514},{"id":"https://openalex.org/C2781448156","wikidata":"https://www.wikidata.org/wiki/Q1570182","display_name":"Coating","level":2,"score":0.47824445366859436},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.467408686876297},{"id":"https://openalex.org/C33574316","wikidata":"https://www.wikidata.org/wiki/Q917260","display_name":"Passivation","level":3,"score":0.4568643271923065},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.45151758193969727},{"id":"https://openalex.org/C112950240","wikidata":"https://www.wikidata.org/wiki/Q76005","display_name":"Ultimate tensile strength","level":2,"score":0.43939143419265747},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.15826058387756348},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.14671921730041504},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.2320/matertrans.47.1869","doi":"https://doi.org/10.2320/matertrans.47.1869","is_oa":true,"landing_page_url":"https://doi.org/10.2320/matertrans.47.1869","pdf_url":"https://www.jstage.jst.go.jp/article/matertrans/47/7/47_7_1869/_pdf","source":{"id":"https://openalex.org/S4210209311","display_name":"MATERIALS TRANSACTIONS","issn_l":"1345-9678","issn":["1345-9678","1347-5320"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-c","jufo-1","norway-1","poland-40","russia-white-list-3"],"host_organization":"https://openalex.org/P4322765269","host_organization_name":"Japan Institute of Metals","host_organization_lineage":["https://openalex.org/P4322765269"],"host_organization_lineage_names":["Japan Institute of Metals"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"MATERIALS TRANSACTIONS","raw_type":"journal-article"}],"best_oa_location":{"id":"doi:10.2320/matertrans.47.1869","doi":"https://doi.org/10.2320/matertrans.47.1869","is_oa":true,"landing_page_url":"https://doi.org/10.2320/matertrans.47.1869","pdf_url":"https://www.jstage.jst.go.jp/article/matertrans/47/7/47_7_1869/_pdf","source":{"id":"https://openalex.org/S4210209311","display_name":"MATERIALS TRANSACTIONS","issn_l":"1345-9678","issn":["1345-9678","1347-5320"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-c","jufo-1","norway-1","poland-40","russia-white-list-3"],"host_organization":"https://openalex.org/P4322765269","host_organization_name":"Japan Institute of Metals","host_organization_lineage":["https://openalex.org/P4322765269"],"host_organization_lineage_names":["Japan Institute of Metals"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"MATERIALS TRANSACTIONS","raw_type":"journal-article"},"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2013333810.pdf","grobid_xml":"https://content.openalex.org/works/W2013333810.grobid-xml"},"referenced_works_count":32,"referenced_works":["https://openalex.org/W1968701230","https://openalex.org/W1970165735","https://openalex.org/W1973847260","https://openalex.org/W1979072343","https://openalex.org/W1987373744","https://openalex.org/W1990216821","https://openalex.org/W1992391703","https://openalex.org/W2002306565","https://openalex.org/W2015351592","https://openalex.org/W2016936946","https://openalex.org/W2018460477","https://openalex.org/W2019931669","https://openalex.org/W2020545748","https://openalex.org/W2022773895","https://openalex.org/W2023175813","https://openalex.org/W2047321785","https://openalex.org/W2050410854","https://openalex.org/W2053678090","https://openalex.org/W2056647124","https://openalex.org/W2058086180","https://openalex.org/W2064795101","https://openalex.org/W2071497970","https://openalex.org/W2076481804","https://openalex.org/W2076916929","https://openalex.org/W2080294090","https://openalex.org/W2087945626","https://openalex.org/W2088001343","https://openalex.org/W2093061849","https://openalex.org/W2094264008","https://openalex.org/W2123388664","https://openalex.org/W2132313801","https://openalex.org/W2153633039"],"related_works":["https://openalex.org/W2045729570","https://openalex.org/W7057620849","https://openalex.org/W7148818834","https://openalex.org/W2348171855","https://openalex.org/W2980017850","https://openalex.org/W2062002152","https://openalex.org/W2494673227","https://openalex.org/W2966154514","https://openalex.org/W2899371396","https://openalex.org/W1985216712"],"abstract_inverted_index":{"The":[0,164],"present":[1],"work":[2,82],"describes":[3],"the":[4,23,39,70,75,92,112,120,133,153,178],"hybrid":[5],"layers":[6],"consisting":[7],"of":[8,35,85,167,173],"1-\u03bcm-thick":[9],"hydrogenated":[10],"diamond-like":[11],"carbon":[12],"(DLCH)":[13],"film":[14,31,50,53,73,94,114,126,131,146,159],"deposited":[15],"by":[16],"ion":[17],"beam":[18],"deposition":[19],"(IBD)":[20],"method":[21],"as":[22,38,132],"bottom":[24,157],"layer":[25],"and":[26,51,57,80,106],"spin":[27],"coating":[28],"polyimide":[29],"(PI)":[30],"at":[32,101,123],"a":[33],"thickness":[34],"6":[36],"\u03bcm":[37],"top":[40,144],"layer.":[41],"Optical":[42],"microscopy":[43],"shows":[44,68],"that":[45,69,84,91,111,143,172],"all":[46],"DLCH":[47,72,93,130,158],"film,":[48],"PI":[49,86,113,125,145,179],"PI/DLCH":[52],"have":[54],"smooth":[55],"surface":[56],"are":[58],"free":[59],"from":[60,139,177],"cracks":[61],"or":[62],"wrinkles.":[63],"Water":[64],"contact":[65],"angle":[66],"measurement":[67,141],"annealed":[71],"has":[74],"higher":[76],"relative":[77],"adhesive":[78,81],"tension":[79],"than":[83],"film.":[87],"Raman":[88],"spectra":[89,108],"show":[90],"can":[95,127,150],"avoid":[96],"severe":[97],"graphitization":[98],"&":[99],"degradation":[100],"300\u00b0C":[102],"during":[103,119],"annealing":[104],"treatment,":[105],"FTIR":[107],"also":[109],"exhibit":[110],"will":[115],"reach":[116],"95%":[117],"imidization":[118],"curing":[121],"step":[122],"300\u00b0C.":[124],"act":[128],"on":[129],"stress":[134,149,155],"buffer.":[135],"This":[136],"is":[137,169,175],"demonstrate":[138],"warpage":[140,162],"showing":[142],"with":[147,160],"tensile":[148],"partially":[151],"reduce":[152],"compressive":[154],"over":[156],"6.7%":[161],"reduction.":[163],"electrical":[165],"resistivity":[166],"PI/DLCH/Si":[168],"similar":[170],"to":[171],"PI/Si":[174],"resulted":[176],"passivation":[180],"effect.":[181]},"counts_by_year":[{"year":2019,"cited_by_count":1}],"updated_date":"2026-10-30T12:39:25.321706","created_date":"2016-06-24T00:00:00"}