{"id":"https://openalex.org/W2013318463","doi":"https://doi.org/10.1109/iedm.2006.346959","title":"High-Performance and Low-Power CMOS Device Technologies Featuring Metal/High-k Gate Stacks with Uniaxial Strained Silicon Channels on (100) and (110) Substrates","display_name":"High-Performance and Low-Power CMOS Device Technologies Featuring Metal/High-k Gate Stacks with Uniaxial Strained Silicon Channels on (100) and (110) Substrates","publication_year":2006,"publication_date":"2006-01-01","ids":{"openalex":"https://openalex.org/W2013318463","doi":"https://doi.org/10.1109/iedm.2006.346959","mag":"2013318463"},"language":"en","primary_location":{"id":"doi:10.1109/iedm.2006.346959","doi":"https://doi.org/10.1109/iedm.2006.346959","is_oa":false,"landing_page_url":"https://doi.org/10.1109/iedm.2006.346959","pdf_url":null,"source":{"id":"https://openalex.org/S4210168112","display_name":"Technical digest - International Electron Devices Meeting/Technical digest","issn_l":"0163-1918","issn":["0163-1918","2156-017X"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2006 International Electron Devices Meeting","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5071671250","display_name":"Yasushi Tateshita","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210143797","display_name":"Sony (Japan)","ror":"https://ror.org/04wzv3n59","country_code":"JP","type":"company","lineage":["https://openalex.org/I4210143797"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Y. Tateshita","raw_affiliation_strings":["Semiconductor Technology Development Group, Semiconductor Business Unit, Sony Corporation Atsugi Technology, Atsugi, Kanagawa, Japan","Semiconductor Technology Development Group, Semiconductor Business Unit, SONY Corporation, Atsugi Tec., 4-14-1 Asahi-cho, Atsugi-shi, Kanagawa, 243-0014, Japan. Phone: +81-46-230-6756, Fax: +81-46-230-6556, E-mail: yasushi.tateshita@jp.sony.com"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Semiconductor Technology Development Group, Semiconductor Business Unit, Sony Corporation Atsugi Technology, Atsugi, Kanagawa, Japan","institution_ids":["https://openalex.org/I4210143797"]},{"raw_affiliation_string":"Semiconductor Technology Development Group, Semiconductor Business Unit, SONY Corporation, Atsugi Tec., 4-14-1 Asahi-cho, Atsugi-shi, Kanagawa, 243-0014, Japan. Phone: +81-46-230-6756, Fax: +81-46-230-6556, E-mail: yasushi.tateshita@jp.sony.com","institution_ids":["https://openalex.org/I4210143797"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5043833715","display_name":"J. Wang","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210143797","display_name":"Sony (Japan)","ror":"https://ror.org/04wzv3n59","country_code":"JP","type":"company","lineage":["https://openalex.org/I4210143797"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"J. Wang","raw_affiliation_strings":["Semiconductor Technology Development Group, Semiconductor Business Unit, Sony Corporation Atsugi Technology, Atsugi, Kanagawa, Japan","Semiconductor Technology Development Group, Semiconductor Business Unit, SONY Corporation, Atsugi Tec., 4-14-1 Asahi-cho, Atsugi-shi, Kanagawa, 243-0014, Japan. Phone: +81-46-230-6756, Fax: +81-46-230-6556"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Semiconductor Technology Development Group, Semiconductor Business Unit, Sony Corporation Atsugi Technology, Atsugi, Kanagawa, Japan","institution_ids":["https://openalex.org/I4210143797"]},{"raw_affiliation_string":"Semiconductor Technology Development Group, Semiconductor Business Unit, SONY Corporation, Atsugi Tec., 4-14-1 Asahi-cho, Atsugi-shi, Kanagawa, 243-0014, Japan. Phone: +81-46-230-6756, Fax: +81-46-230-6556","institution_ids":["https://openalex.org/I4210143797"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5019121384","display_name":"Katuto Nagano","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210143797","display_name":"Sony (Japan)","ror":"https://ror.org/04wzv3n59","country_code":"JP","type":"company","lineage":["https://openalex.org/I4210143797"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"K. Nagano","raw_affiliation_strings":["Semiconductor Technology Development Group, Semiconductor Business Unit, Sony Corporation Atsugi Technology, Atsugi, Kanagawa, Japan","Semiconductor Technology Development Group, Semiconductor Business Unit, SONY Corporation, Atsugi Tec., 4-14-1 Asahi-cho, Atsugi-shi, Kanagawa, 243-0014, Japan. Phone: +81-46-230-6756, Fax: +81-46-230-6556"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Semiconductor Technology Development Group, Semiconductor Business Unit, Sony Corporation Atsugi Technology, Atsugi, Kanagawa, Japan","institution_ids":["https://openalex.org/I4210143797"]},{"raw_affiliation_string":"Semiconductor Technology Development Group, Semiconductor Business Unit, SONY Corporation, Atsugi Tec., 4-14-1 Asahi-cho, Atsugi-shi, Kanagawa, 243-0014, Japan. Phone: +81-46-230-6756, Fax: +81-46-230-6556","institution_ids":["https://openalex.org/I4210143797"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5102770552","display_name":"T. Hirano","orcid":"https://orcid.org/0009-0009-9558-657X","observed_orcids":["https://orcid.org/0009-0009-9558-657X"]},"institutions":[{"id":"https://openalex.org/I4210143797","display_name":"Sony (Japan)","ror":"https://ror.org/04wzv3n59","country_code":"JP","type":"company","lineage":["https://openalex.org/I4210143797"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"T. Hirano","raw_affiliation_strings":["Semiconductor Technology Development Group, Semiconductor Business Unit, Sony Corporation Atsugi Technology, Atsugi, Kanagawa, Japan","Semiconductor Technology Development Group, Semiconductor Business Unit, SONY Corporation, Atsugi Tec., 4-14-1 Asahi-cho, Atsugi-shi, Kanagawa, 243-0014, Japan. Phone: +81-46-230-6756, Fax: +81-46-230-6556"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Semiconductor Technology Development Group, Semiconductor Business Unit, Sony Corporation Atsugi Technology, Atsugi, Kanagawa, Japan","institution_ids":["https://openalex.org/I4210143797"]},{"raw_affiliation_string":"Semiconductor Technology Development Group, Semiconductor Business Unit, SONY Corporation, Atsugi Tec., 4-14-1 Asahi-cho, Atsugi-shi, Kanagawa, 243-0014, Japan. Phone: +81-46-230-6756, Fax: +81-46-230-6556","institution_ids":["https://openalex.org/I4210143797"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5047040769","display_name":"Yuki Miyanami","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210143797","display_name":"Sony (Japan)","ror":"https://ror.org/04wzv3n59","country_code":"JP","type":"company","lineage":["https://openalex.org/I4210143797"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Y. Miyanami","raw_affiliation_strings":["Semiconductor Technology Development Group, Semiconductor Business Unit, Sony Corporation Atsugi Technology, Atsugi, Kanagawa, Japan","Semiconductor Technology Development Group, Semiconductor Business Unit, SONY Corporation, Atsugi Tec., 4-14-1 Asahi-cho, Atsugi-shi, Kanagawa, 243-0014, Japan. Phone: +81-46-230-6756, Fax: +81-46-230-6556"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Semiconductor Technology Development Group, Semiconductor Business Unit, Sony Corporation Atsugi Technology, Atsugi, Kanagawa, Japan","institution_ids":["https://openalex.org/I4210143797"]},{"raw_affiliation_string":"Semiconductor Technology Development Group, Semiconductor Business Unit, SONY Corporation, Atsugi Tec., 4-14-1 Asahi-cho, Atsugi-shi, Kanagawa, 243-0014, Japan. Phone: +81-46-230-6756, Fax: +81-46-230-6556","institution_ids":["https://openalex.org/I4210143797"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5108204811","display_name":"Tetsuya Ikuta","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210143797","display_name":"Sony (Japan)","ror":"https://ror.org/04wzv3n59","country_code":"JP","type":"company","lineage":["https://openalex.org/I4210143797"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"T. Ikuta","raw_affiliation_strings":["Semiconductor Technology Development Group, Semiconductor Business Unit, Sony Corporation Atsugi Technology, Atsugi, Kanagawa, Japan","Semiconductor Technology Development Group, Semiconductor Business Unit, SONY Corporation, Atsugi Tec., 4-14-1 Asahi-cho, Atsugi-shi, Kanagawa, 243-0014, Japan. Phone: +81-46-230-6756, Fax: +81-46-230-6556"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Semiconductor Technology Development Group, Semiconductor Business Unit, Sony Corporation Atsugi Technology, Atsugi, Kanagawa, Japan","institution_ids":["https://openalex.org/I4210143797"]},{"raw_affiliation_string":"Semiconductor Technology Development Group, Semiconductor Business Unit, SONY Corporation, Atsugi Tec., 4-14-1 Asahi-cho, Atsugi-shi, Kanagawa, 243-0014, Japan. Phone: +81-46-230-6756, Fax: +81-46-230-6556","institution_ids":["https://openalex.org/I4210143797"]}]},{"author_position":"middle","author":{"id":null,"display_name":"T. Kataoka","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210143797","display_name":"Sony (Japan)","ror":"https://ror.org/04wzv3n59","country_code":"JP","type":"company","lineage":["https://openalex.org/I4210143797"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"T. Kataoka","raw_affiliation_strings":["Semiconductor Technology Development Group, Semiconductor Business Unit, Sony Corporation Atsugi Technology, Atsugi, Kanagawa, Japan","Semiconductor Technology Development Group, Semiconductor Business Unit, SONY Corporation, Atsugi Tec., 4-14-1 Asahi-cho, Atsugi-shi, Kanagawa, 243-0014, Japan. Phone: +81-46-230-6756, Fax: +81-46-230-6556"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Semiconductor Technology Development Group, Semiconductor Business Unit, Sony Corporation Atsugi Technology, Atsugi, Kanagawa, Japan","institution_ids":["https://openalex.org/I4210143797"]},{"raw_affiliation_string":"Semiconductor Technology Development Group, Semiconductor Business Unit, SONY Corporation, Atsugi Tec., 4-14-1 Asahi-cho, Atsugi-shi, Kanagawa, 243-0014, Japan. Phone: +81-46-230-6756, Fax: +81-46-230-6556","institution_ids":["https://openalex.org/I4210143797"]}]},{"author_position":"middle","author":{"id":null,"display_name":"Y. Kikuchi","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210143797","display_name":"Sony (Japan)","ror":"https://ror.org/04wzv3n59","country_code":"JP","type":"company","lineage":["https://openalex.org/I4210143797"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Y. Kikuchi","raw_affiliation_strings":["Semiconductor Technology Development Group, Semiconductor Business Unit, Sony Corporation Atsugi Technology, Atsugi, Kanagawa, Japan","Semiconductor Technology Development Group, Semiconductor Business Unit, SONY Corporation, Atsugi Tec., 4-14-1 Asahi-cho, Atsugi-shi, Kanagawa, 243-0014, Japan. Phone: +81-46-230-6756, Fax: +81-46-230-6556"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Semiconductor Technology Development Group, Semiconductor Business Unit, Sony Corporation Atsugi Technology, Atsugi, Kanagawa, Japan","institution_ids":["https://openalex.org/I4210143797"]},{"raw_affiliation_string":"Semiconductor Technology Development Group, Semiconductor Business Unit, SONY Corporation, Atsugi Tec., 4-14-1 Asahi-cho, Atsugi-shi, Kanagawa, 243-0014, Japan. Phone: +81-46-230-6756, Fax: +81-46-230-6556","institution_ids":["https://openalex.org/I4210143797"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111987055","display_name":"Shinpei Yamaguchi","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210143797","display_name":"Sony (Japan)","ror":"https://ror.org/04wzv3n59","country_code":"JP","type":"company","lineage":["https://openalex.org/I4210143797"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"S. Yamaguchi","raw_affiliation_strings":["Semiconductor Technology Development Group, Semiconductor Business Unit, Sony Corporation Atsugi Technology, Atsugi, Kanagawa, Japan","Semiconductor Technology Development Group, Semiconductor Business Unit, SONY Corporation, Atsugi Tec., 4-14-1 Asahi-cho, Atsugi-shi, Kanagawa, 243-0014, Japan. Phone: +81-46-230-6756, Fax: +81-46-230-6556"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Semiconductor Technology Development Group, Semiconductor Business Unit, Sony Corporation Atsugi Technology, Atsugi, Kanagawa, Japan","institution_ids":["https://openalex.org/I4210143797"]},{"raw_affiliation_string":"Semiconductor Technology Development Group, Semiconductor Business Unit, SONY Corporation, Atsugi Tec., 4-14-1 Asahi-cho, Atsugi-shi, Kanagawa, 243-0014, Japan. Phone: +81-46-230-6756, Fax: +81-46-230-6556","institution_ids":["https://openalex.org/I4210143797"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5061847665","display_name":"Takao Ando","orcid":"https://orcid.org/0000-0003-0884-3873","observed_orcids":["https://orcid.org/0000-0003-0884-3873"]},"institutions":[{"id":"https://openalex.org/I4210143797","display_name":"Sony (Japan)","ror":"https://ror.org/04wzv3n59","country_code":"JP","type":"company","lineage":["https://openalex.org/I4210143797"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"T. Ando","raw_affiliation_strings":["Semiconductor Technology Development Group, Semiconductor Business Unit, Sony Corporation Atsugi Technology, Atsugi, Kanagawa, Japan","Semiconductor Technology Development Group, Semiconductor Business Unit, SONY Corporation, Atsugi Tec., 4-14-1 Asahi-cho, Atsugi-shi, Kanagawa, 243-0014, Japan. Phone: +81-46-230-6756, Fax: +81-46-230-6556"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Semiconductor Technology Development Group, Semiconductor Business Unit, Sony Corporation Atsugi Technology, Atsugi, Kanagawa, Japan","institution_ids":["https://openalex.org/I4210143797"]},{"raw_affiliation_string":"Semiconductor Technology Development Group, Semiconductor Business Unit, SONY Corporation, Atsugi Tec., 4-14-1 Asahi-cho, Atsugi-shi, Kanagawa, 243-0014, Japan. Phone: +81-46-230-6756, Fax: +81-46-230-6556","institution_ids":["https://openalex.org/I4210143797"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5040159954","display_name":"Kaori Tai","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210143797","display_name":"Sony (Japan)","ror":"https://ror.org/04wzv3n59","country_code":"JP","type":"company","lineage":["https://openalex.org/I4210143797"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"K. Tai","raw_affiliation_strings":["Semiconductor Technology Development Group, Semiconductor Business Unit, Sony Corporation Atsugi Technology, Atsugi, Kanagawa, Japan","Semiconductor Technology Development Group, Semiconductor Business Unit, SONY Corporation, Atsugi Tec., 4-14-1 Asahi-cho, Atsugi-shi, Kanagawa, 243-0014, Japan. Phone: +81-46-230-6756, Fax: +81-46-230-6556"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Semiconductor Technology Development Group, Semiconductor Business Unit, Sony Corporation Atsugi Technology, Atsugi, Kanagawa, Japan","institution_ids":["https://openalex.org/I4210143797"]},{"raw_affiliation_string":"Semiconductor Technology Development Group, Semiconductor Business Unit, SONY Corporation, Atsugi Tec., 4-14-1 Asahi-cho, Atsugi-shi, Kanagawa, 243-0014, Japan. Phone: +81-46-230-6756, Fax: +81-46-230-6556","institution_ids":["https://openalex.org/I4210143797"]}]},{"author_position":"middle","author":{"id":null,"display_name":"R. Matsumoto","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210143797","display_name":"Sony (Japan)","ror":"https://ror.org/04wzv3n59","country_code":"JP","type":"company","lineage":["https://openalex.org/I4210143797"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"R. Matsumoto","raw_affiliation_strings":["Semiconductor Technology Development Group, Semiconductor Business Unit, Sony Corporation Atsugi Technology, Atsugi, Kanagawa, Japan","Semiconductor Technology Development Group, Semiconductor Business Unit, SONY Corporation, Atsugi Tec., 4-14-1 Asahi-cho, Atsugi-shi, Kanagawa, 243-0014, Japan. Phone: +81-46-230-6756, Fax: +81-46-230-6556"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Semiconductor Technology Development Group, Semiconductor Business Unit, Sony Corporation Atsugi Technology, Atsugi, Kanagawa, Japan","institution_ids":["https://openalex.org/I4210143797"]},{"raw_affiliation_string":"Semiconductor Technology Development Group, Semiconductor Business Unit, SONY Corporation, Atsugi Tec., 4-14-1 Asahi-cho, Atsugi-shi, Kanagawa, 243-0014, Japan. Phone: +81-46-230-6756, Fax: +81-46-230-6556","institution_ids":["https://openalex.org/I4210143797"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5020933599","display_name":"S. Fujita","orcid":"https://orcid.org/0009-0008-0350-7276","observed_orcids":["https://orcid.org/0009-0008-0350-7276"]},"institutions":[{"id":"https://openalex.org/I4210143797","display_name":"Sony (Japan)","ror":"https://ror.org/04wzv3n59","country_code":"JP","type":"company","lineage":["https://openalex.org/I4210143797"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"S. Fujita","raw_affiliation_strings":["Semiconductor Technology Development Group, Semiconductor Business Unit, Sony Corporation Atsugi Technology, Atsugi, Kanagawa, Japan","Semiconductor Technology Development Group, Semiconductor Business Unit, SONY Corporation, Atsugi Tec., 4-14-1 Asahi-cho, Atsugi-shi, Kanagawa, 243-0014, Japan. Phone: +81-46-230-6756, Fax: +81-46-230-6556"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Semiconductor Technology Development Group, Semiconductor Business Unit, Sony Corporation Atsugi Technology, Atsugi, Kanagawa, Japan","institution_ids":["https://openalex.org/I4210143797"]},{"raw_affiliation_string":"Semiconductor Technology Development Group, Semiconductor Business Unit, SONY Corporation, Atsugi Tec., 4-14-1 Asahi-cho, Atsugi-shi, Kanagawa, 243-0014, Japan. Phone: +81-46-230-6756, Fax: +81-46-230-6556","institution_ids":["https://openalex.org/I4210143797"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5087455811","display_name":"Chigusa Yamane","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210143797","display_name":"Sony (Japan)","ror":"https://ror.org/04wzv3n59","country_code":"JP","type":"company","lineage":["https://openalex.org/I4210143797"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"C. Yamane","raw_affiliation_strings":["Semiconductor Technology Development Group, Semiconductor Business Unit, Sony Corporation Atsugi Technology, Atsugi, Kanagawa, Japan","Semiconductor Technology Development Group, Semiconductor Business Unit, SONY Corporation, Atsugi Tec., 4-14-1 Asahi-cho, Atsugi-shi, Kanagawa, 243-0014, Japan. Phone: +81-46-230-6756, Fax: +81-46-230-6556"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Semiconductor Technology Development Group, Semiconductor Business Unit, Sony Corporation Atsugi Technology, Atsugi, Kanagawa, Japan","institution_ids":["https://openalex.org/I4210143797"]},{"raw_affiliation_string":"Semiconductor Technology Development Group, Semiconductor Business Unit, SONY Corporation, Atsugi Tec., 4-14-1 Asahi-cho, Atsugi-shi, Kanagawa, 243-0014, Japan. Phone: +81-46-230-6756, Fax: +81-46-230-6556","institution_ids":["https://openalex.org/I4210143797"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101700198","display_name":"Ryo Yamamoto","orcid":"https://orcid.org/0000-0003-1663-0990","observed_orcids":["https://orcid.org/0000-0003-1663-0990"]},"institutions":[{"id":"https://openalex.org/I4210143797","display_name":"Sony (Japan)","ror":"https://ror.org/04wzv3n59","country_code":"JP","type":"company","lineage":["https://openalex.org/I4210143797"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"R. Yamamoto","raw_affiliation_strings":["Semiconductor Technology Development Group, Semiconductor Business Unit, Sony Corporation Atsugi Technology, Atsugi, Kanagawa, Japan","Semiconductor Technology Development Group, Semiconductor Business Unit, SONY Corporation, Atsugi Tec., 4-14-1 Asahi-cho, Atsugi-shi, Kanagawa, 243-0014, Japan. Phone: +81-46-230-6756, Fax: +81-46-230-6556"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Semiconductor Technology Development Group, Semiconductor Business Unit, Sony Corporation Atsugi Technology, Atsugi, Kanagawa, Japan","institution_ids":["https://openalex.org/I4210143797"]},{"raw_affiliation_string":"Semiconductor Technology Development Group, Semiconductor Business Unit, SONY Corporation, Atsugi Tec., 4-14-1 Asahi-cho, Atsugi-shi, Kanagawa, 243-0014, Japan. Phone: +81-46-230-6756, Fax: +81-46-230-6556","institution_ids":["https://openalex.org/I4210143797"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5021315429","display_name":"S Kanda","orcid":"https://orcid.org/0000-0002-5462-122X","observed_orcids":["https://orcid.org/0000-0002-5462-122X"]},"institutions":[{"id":"https://openalex.org/I4210143797","display_name":"Sony (Japan)","ror":"https://ror.org/04wzv3n59","country_code":"JP","type":"company","lineage":["https://openalex.org/I4210143797"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"S. Kanda","raw_affiliation_strings":["Semiconductor Technology Development Group, Semiconductor Business Unit, Sony Corporation Atsugi Technology, Atsugi, Kanagawa, Japan","Semiconductor Technology Development Group, Semiconductor Business Unit, SONY Corporation, Atsugi Tec., 4-14-1 Asahi-cho, Atsugi-shi, Kanagawa, 243-0014, Japan. Phone: +81-46-230-6756, Fax: +81-46-230-6556"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Semiconductor Technology Development Group, Semiconductor Business Unit, Sony Corporation Atsugi Technology, Atsugi, Kanagawa, Japan","institution_ids":["https://openalex.org/I4210143797"]},{"raw_affiliation_string":"Semiconductor Technology Development Group, Semiconductor Business Unit, SONY Corporation, Atsugi Tec., 4-14-1 Asahi-cho, Atsugi-shi, Kanagawa, 243-0014, Japan. Phone: +81-46-230-6756, Fax: +81-46-230-6556","institution_ids":["https://openalex.org/I4210143797"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5112086077","display_name":"Kouichi Kugimiya","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210143797","display_name":"Sony (Japan)","ror":"https://ror.org/04wzv3n59","country_code":"JP","type":"company","lineage":["https://openalex.org/I4210143797"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"K. Kugimiya","raw_affiliation_strings":["Semiconductor Technology Development Group, Semiconductor Business Unit, Sony Corporation Atsugi Technology, Atsugi, Kanagawa, Japan","Semiconductor Technology Development Group, Semiconductor Business Unit, SONY Corporation, Atsugi Tec., 4-14-1 Asahi-cho, Atsugi-shi, Kanagawa, 243-0014, Japan. Phone: +81-46-230-6756, Fax: +81-46-230-6556"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Semiconductor Technology Development Group, Semiconductor Business Unit, Sony Corporation Atsugi Technology, Atsugi, Kanagawa, Japan","institution_ids":["https://openalex.org/I4210143797"]},{"raw_affiliation_string":"Semiconductor Technology Development Group, Semiconductor Business Unit, SONY Corporation, Atsugi Tec., 4-14-1 Asahi-cho, Atsugi-shi, Kanagawa, 243-0014, Japan. Phone: +81-46-230-6756, Fax: +81-46-230-6556","institution_ids":["https://openalex.org/I4210143797"]}]},{"author_position":"middle","author":{"id":null,"display_name":"T. Kimura","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210143797","display_name":"Sony (Japan)","ror":"https://ror.org/04wzv3n59","country_code":"JP","type":"company","lineage":["https://openalex.org/I4210143797"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"T. Kimura","raw_affiliation_strings":["Semiconductor Technology Development Group, Semiconductor Business Unit, Sony Corporation Atsugi Technology, Atsugi, Kanagawa, Japan","Semiconductor Technology Development Group, Semiconductor Business Unit, SONY Corporation, Atsugi Tec., 4-14-1 Asahi-cho, Atsugi-shi, Kanagawa, 243-0014, Japan. Phone: +81-46-230-6756, Fax: +81-46-230-6556"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Semiconductor Technology Development Group, Semiconductor Business Unit, Sony Corporation Atsugi Technology, Atsugi, Kanagawa, Japan","institution_ids":["https://openalex.org/I4210143797"]},{"raw_affiliation_string":"Semiconductor Technology Development Group, Semiconductor Business Unit, SONY Corporation, Atsugi Tec., 4-14-1 Asahi-cho, Atsugi-shi, Kanagawa, 243-0014, Japan. Phone: +81-46-230-6756, Fax: +81-46-230-6556","institution_ids":["https://openalex.org/I4210143797"]}]},{"author_position":"middle","author":{"id":null,"display_name":"T. Ohchi","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210143797","display_name":"Sony (Japan)","ror":"https://ror.org/04wzv3n59","country_code":"JP","type":"company","lineage":["https://openalex.org/I4210143797"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"T. Ohchi","raw_affiliation_strings":["Semiconductor Technology Development Group, Semiconductor Business Unit, Sony Corporation Atsugi Technology, Atsugi, Kanagawa, Japan","Semiconductor Technology Development Group, Semiconductor Business Unit, SONY Corporation, Atsugi Tec., 4-14-1 Asahi-cho, Atsugi-shi, Kanagawa, 243-0014, Japan. Phone: +81-46-230-6756, Fax: +81-46-230-6556"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Semiconductor Technology Development Group, Semiconductor Business Unit, Sony Corporation Atsugi Technology, Atsugi, Kanagawa, Japan","institution_ids":["https://openalex.org/I4210143797"]},{"raw_affiliation_string":"Semiconductor Technology Development Group, Semiconductor Business Unit, SONY Corporation, Atsugi Tec., 4-14-1 Asahi-cho, Atsugi-shi, Kanagawa, 243-0014, Japan. Phone: +81-46-230-6756, Fax: +81-46-230-6556","institution_ids":["https://openalex.org/I4210143797"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5089307554","display_name":"Y. Yamamoto","orcid":"https://orcid.org/0000-0003-0582-1505","observed_orcids":["https://orcid.org/0000-0003-0582-1505"]},"institutions":[{"id":"https://openalex.org/I4210143797","display_name":"Sony (Japan)","ror":"https://ror.org/04wzv3n59","country_code":"JP","type":"company","lineage":["https://openalex.org/I4210143797"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Y. Yamamoto","raw_affiliation_strings":["Semiconductor Technology Development Group, Semiconductor Business Unit, Sony Corporation Atsugi Technology, Atsugi, Kanagawa, Japan","Semiconductor Technology Development Group, Semiconductor Business Unit, SONY Corporation, Atsugi Tec., 4-14-1 Asahi-cho, Atsugi-shi, Kanagawa, 243-0014, Japan. Phone: +81-46-230-6756, Fax: +81-46-230-6556"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Semiconductor Technology Development Group, Semiconductor Business Unit, Sony Corporation Atsugi Technology, Atsugi, Kanagawa, Japan","institution_ids":["https://openalex.org/I4210143797"]},{"raw_affiliation_string":"Semiconductor Technology Development Group, Semiconductor Business Unit, SONY Corporation, Atsugi Tec., 4-14-1 Asahi-cho, Atsugi-shi, Kanagawa, 243-0014, Japan. Phone: +81-46-230-6756, Fax: +81-46-230-6556","institution_ids":["https://openalex.org/I4210143797"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5029359099","display_name":"Y. Nagahama","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210143797","display_name":"Sony (Japan)","ror":"https://ror.org/04wzv3n59","country_code":"JP","type":"company","lineage":["https://openalex.org/I4210143797"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Y. Nagahama","raw_affiliation_strings":["Semiconductor Technology Development Group, Semiconductor Business Unit, Sony Corporation Atsugi Technology, Atsugi, Kanagawa, Japan","Semiconductor Technology Development Group, Semiconductor Business Unit, SONY Corporation, Atsugi Tec., 4-14-1 Asahi-cho, Atsugi-shi, Kanagawa, 243-0014, Japan. Phone: +81-46-230-6756, Fax: +81-46-230-6556"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Semiconductor Technology Development Group, Semiconductor Business Unit, Sony Corporation Atsugi Technology, Atsugi, Kanagawa, Japan","institution_ids":["https://openalex.org/I4210143797"]},{"raw_affiliation_string":"Semiconductor Technology Development Group, Semiconductor Business Unit, SONY Corporation, Atsugi Tec., 4-14-1 Asahi-cho, Atsugi-shi, Kanagawa, 243-0014, Japan. Phone: +81-46-230-6756, Fax: +81-46-230-6556","institution_ids":["https://openalex.org/I4210143797"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5081500233","display_name":"Yoshiya Hagimoto","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210143797","display_name":"Sony (Japan)","ror":"https://ror.org/04wzv3n59","country_code":"JP","type":"company","lineage":["https://openalex.org/I4210143797"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Y. Hagimoto","raw_affiliation_strings":["Semiconductor Technology Development Group, Semiconductor Business Unit, Sony Corporation Atsugi Technology, Atsugi, Kanagawa, Japan","Semiconductor Technology Development Group, Semiconductor Business Unit, SONY Corporation, Atsugi Tec., 4-14-1 Asahi-cho, Atsugi-shi, Kanagawa, 243-0014, Japan. Phone: +81-46-230-6756, Fax: +81-46-230-6556"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Semiconductor Technology Development Group, Semiconductor Business Unit, Sony Corporation Atsugi Technology, Atsugi, Kanagawa, Japan","institution_ids":["https://openalex.org/I4210143797"]},{"raw_affiliation_string":"Semiconductor Technology Development Group, Semiconductor Business Unit, SONY Corporation, Atsugi Tec., 4-14-1 Asahi-cho, Atsugi-shi, Kanagawa, 243-0014, Japan. Phone: +81-46-230-6756, Fax: +81-46-230-6556","institution_ids":["https://openalex.org/I4210143797"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5044481452","display_name":"Hitoshi Wakabayashi","orcid":"https://orcid.org/0000-0001-5509-521X","observed_orcids":["https://orcid.org/0000-0001-5509-521X","https://orcid.org/0000-0002-8527-1402"]},"institutions":[{"id":"https://openalex.org/I4210143797","display_name":"Sony (Japan)","ror":"https://ror.org/04wzv3n59","country_code":"JP","type":"company","lineage":["https://openalex.org/I4210143797"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"H. Wakabayashi","raw_affiliation_strings":["Semiconductor Technology Development Group, Semiconductor Business Unit, Sony Corporation Atsugi Technology, Atsugi, Kanagawa, Japan","Semiconductor Technology Development Group, Semiconductor Business Unit, SONY Corporation, Atsugi Tec., 4-14-1 Asahi-cho, Atsugi-shi, Kanagawa, 243-0014, Japan. Phone: +81-46-230-6756, Fax: +81-46-230-6556"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Semiconductor Technology Development Group, Semiconductor Business Unit, Sony Corporation Atsugi Technology, Atsugi, Kanagawa, Japan","institution_ids":["https://openalex.org/I4210143797"]},{"raw_affiliation_string":"Semiconductor Technology Development Group, Semiconductor Business Unit, SONY Corporation, Atsugi Tec., 4-14-1 Asahi-cho, Atsugi-shi, Kanagawa, 243-0014, Japan. Phone: +81-46-230-6756, Fax: +81-46-230-6556","institution_ids":["https://openalex.org/I4210143797"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5066051494","display_name":"Yudai Tagawa","orcid":"https://orcid.org/0009-0005-4370-7633","observed_orcids":["https://orcid.org/0009-0005-4370-7633"]},"institutions":[{"id":"https://openalex.org/I4210143797","display_name":"Sony (Japan)","ror":"https://ror.org/04wzv3n59","country_code":"JP","type":"company","lineage":["https://openalex.org/I4210143797"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Y. Tagawa","raw_affiliation_strings":["Semiconductor Technology Development Group, Semiconductor Business Unit, Sony Corporation Atsugi Technology, Atsugi, Kanagawa, Japan","Semiconductor Technology Development Group, Semiconductor Business Unit, SONY Corporation, Atsugi Tec., 4-14-1 Asahi-cho, Atsugi-shi, Kanagawa, 243-0014, Japan. Phone: +81-46-230-6756, Fax: +81-46-230-6556"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Semiconductor Technology Development Group, Semiconductor Business Unit, Sony Corporation Atsugi Technology, Atsugi, Kanagawa, Japan","institution_ids":["https://openalex.org/I4210143797"]},{"raw_affiliation_string":"Semiconductor Technology Development Group, Semiconductor Business Unit, SONY Corporation, Atsugi Tec., 4-14-1 Asahi-cho, Atsugi-shi, Kanagawa, 243-0014, Japan. Phone: +81-46-230-6756, Fax: +81-46-230-6556","institution_ids":["https://openalex.org/I4210143797"]}]},{"author_position":"middle","author":{"id":null,"display_name":"M. Tsukamoto","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210143797","display_name":"Sony (Japan)","ror":"https://ror.org/04wzv3n59","country_code":"JP","type":"company","lineage":["https://openalex.org/I4210143797"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"M. Tsukamoto","raw_affiliation_strings":["Semiconductor Technology Development Group, Semiconductor Business Unit, Sony Corporation Atsugi Technology, Atsugi, Kanagawa, Japan","Semiconductor Technology Development Group, Semiconductor Business Unit, SONY Corporation, Atsugi Tec., 4-14-1 Asahi-cho, Atsugi-shi, Kanagawa, 243-0014, Japan. Phone: +81-46-230-6756, Fax: +81-46-230-6556"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Semiconductor Technology Development Group, Semiconductor Business Unit, Sony Corporation Atsugi Technology, Atsugi, Kanagawa, Japan","institution_ids":["https://openalex.org/I4210143797"]},{"raw_affiliation_string":"Semiconductor Technology Development Group, Semiconductor Business Unit, SONY Corporation, Atsugi Tec., 4-14-1 Asahi-cho, Atsugi-shi, Kanagawa, 243-0014, Japan. Phone: +81-46-230-6756, Fax: +81-46-230-6556","institution_ids":["https://openalex.org/I4210143797"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5043608489","display_name":"Hayato Iwamoto","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210143797","display_name":"Sony (Japan)","ror":"https://ror.org/04wzv3n59","country_code":"JP","type":"company","lineage":["https://openalex.org/I4210143797"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"H. Iwamoto","raw_affiliation_strings":["Semiconductor Technology Development Group, Semiconductor Business Unit, Sony Corporation Atsugi Technology, Atsugi, Kanagawa, Japan","Semiconductor Technology Development Group, Semiconductor Business Unit, SONY Corporation, Atsugi Tec., 4-14-1 Asahi-cho, Atsugi-shi, Kanagawa, 243-0014, Japan. Phone: +81-46-230-6756, Fax: +81-46-230-6556"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Semiconductor Technology Development Group, Semiconductor Business Unit, Sony Corporation Atsugi Technology, Atsugi, Kanagawa, Japan","institution_ids":["https://openalex.org/I4210143797"]},{"raw_affiliation_string":"Semiconductor Technology Development Group, Semiconductor Business Unit, SONY Corporation, Atsugi Tec., 4-14-1 Asahi-cho, Atsugi-shi, Kanagawa, 243-0014, Japan. Phone: +81-46-230-6756, Fax: +81-46-230-6556","institution_ids":["https://openalex.org/I4210143797"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5074801588","display_name":"Masao Saito","orcid":"https://orcid.org/0000-0003-0769-8627","observed_orcids":["https://orcid.org/0000-0003-0769-8627"]},"institutions":[{"id":"https://openalex.org/I4210143797","display_name":"Sony (Japan)","ror":"https://ror.org/04wzv3n59","country_code":"JP","type":"company","lineage":["https://openalex.org/I4210143797"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"M. Saito","raw_affiliation_strings":["Semiconductor Technology Development Group, Semiconductor Business Unit, Sony Corporation Atsugi Technology, Atsugi, Kanagawa, Japan","Semiconductor Technology Development Group, Semiconductor Business Unit, SONY Corporation, Atsugi Tec., 4-14-1 Asahi-cho, Atsugi-shi, Kanagawa, 243-0014, Japan. Phone: +81-46-230-6756, Fax: +81-46-230-6556"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Semiconductor Technology Development Group, Semiconductor Business Unit, Sony Corporation Atsugi Technology, Atsugi, Kanagawa, Japan","institution_ids":["https://openalex.org/I4210143797"]},{"raw_affiliation_string":"Semiconductor Technology Development Group, Semiconductor Business Unit, SONY Corporation, Atsugi Tec., 4-14-1 Asahi-cho, Atsugi-shi, Kanagawa, 243-0014, Japan. Phone: +81-46-230-6756, Fax: +81-46-230-6556","institution_ids":["https://openalex.org/I4210143797"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5113774168","display_name":"S. Kadomura","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210143797","display_name":"Sony (Japan)","ror":"https://ror.org/04wzv3n59","country_code":"JP","type":"company","lineage":["https://openalex.org/I4210143797"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"S. Kadomura","raw_affiliation_strings":["Semiconductor Technology Development Group, Semiconductor Business Unit, Sony Corporation Atsugi Technology, Atsugi, Kanagawa, Japan","Semiconductor Technology Development Group, Semiconductor Business Unit, SONY Corporation, Atsugi Tec., 4-14-1 Asahi-cho, Atsugi-shi, Kanagawa, 243-0014, Japan. Phone: +81-46-230-6756, Fax: +81-46-230-6556"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Semiconductor Technology Development Group, Semiconductor Business Unit, Sony Corporation Atsugi Technology, Atsugi, Kanagawa, Japan","institution_ids":["https://openalex.org/I4210143797"]},{"raw_affiliation_string":"Semiconductor Technology Development Group, Semiconductor Business Unit, SONY Corporation, Atsugi Tec., 4-14-1 Asahi-cho, Atsugi-shi, Kanagawa, 243-0014, Japan. Phone: +81-46-230-6756, Fax: +81-46-230-6556","institution_ids":["https://openalex.org/I4210143797"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5102060909","display_name":"N. Nagashima","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210143797","display_name":"Sony (Japan)","ror":"https://ror.org/04wzv3n59","country_code":"JP","type":"company","lineage":["https://openalex.org/I4210143797"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"N. Nagashima","raw_affiliation_strings":["Semiconductor Technology Development Group, Semiconductor Business Unit, Sony Corporation Atsugi Technology, Atsugi, Kanagawa, Japan","Semiconductor Technology Development Group, Semiconductor Business Unit, SONY Corporation, Atsugi Tec., 4-14-1 Asahi-cho, Atsugi-shi, Kanagawa, 243-0014, Japan. Phone: +81-46-230-6756, Fax: +81-46-230-6556"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Semiconductor Technology Development Group, Semiconductor Business Unit, Sony Corporation Atsugi Technology, Atsugi, Kanagawa, Japan","institution_ids":["https://openalex.org/I4210143797"]},{"raw_affiliation_string":"Semiconductor Technology Development Group, Semiconductor Business Unit, SONY Corporation, Atsugi Tec., 4-14-1 Asahi-cho, Atsugi-shi, Kanagawa, 243-0014, Japan. Phone: +81-46-230-6756, Fax: +81-46-230-6556","institution_ids":["https://openalex.org/I4210143797"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I4210143797"],"apc_list":null,"apc_paid":null,"fwci":7.236,"has_fulltext":false,"cited_by_count":24,"citation_normalized_percentile":{"value":0.98065844,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":88,"max":96},"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"4"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10558","display_name":"Advancements in Semiconductor Devices and Circuit Design","score":0.9506999850273132,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10558","display_name":"Advancements in Semiconductor Devices and Circuit Design","score":0.9506999850273132,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.04500000178813934,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11853","display_name":"Semiconductor materials and interfaces","score":0.0007999999797903001,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/cmos","display_name":"CMOS","score":0.6340000033378601},{"id":"https://openalex.org/keywords/metal-gate","display_name":"metal gate","score":0.609000027179718},{"id":"https://openalex.org/keywords/high-k-dielectrics","display_name":"high-k dielectrics","score":0.8880000114440918},{"id":"https://openalex.org/keywords/sige-source-drain","display_name":"SiGe source/drain","score":0.8349999785423279},{"id":"https://openalex.org/keywords/tin-gate-electrode","display_name":"TiN gate electrode","score":0.7239999771118164},{"id":"https://openalex.org/keywords/hfo2-gate-dielectric","display_name":"HfO2 gate dielectric","score":0.8420000076293945},{"id":"https://openalex.org/keywords/low-power-transistors","display_name":"low-power transistors","score":0.6060000061988831},{"id":"https://openalex.org/keywords/gate-leakage-current","display_name":"gate leakage current","score":0.7979999780654907},{"id":"https://openalex.org/keywords/drive-current","display_name":"drive current","score":0.843999981880188},{"id":"https://openalex.org/keywords/off-state-current","display_name":"off-state current","score":0.5270000100135803},{"id":"https://openalex.org/keywords/threshold-voltage","display_name":"threshold voltage","score":0.49900001287460327}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.835995078086853},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.7301653027534485},{"id":"https://openalex.org/C116372231","wikidata":"https://www.wikidata.org/wiki/Q605757","display_name":"Copper interconnect","level":3,"score":0.7119103074073792},{"id":"https://openalex.org/C51140833","wikidata":"https://www.wikidata.org/wiki/Q6822740","display_name":"Metal gate","level":5,"score":0.6822789907455444},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.6665471792221069},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.6504755020141602},{"id":"https://openalex.org/C525849907","wikidata":"https://www.wikidata.org/wiki/Q1096","display_name":"Tin","level":2,"score":0.6417379379272461},{"id":"https://openalex.org/C2777042071","wikidata":"https://www.wikidata.org/wiki/Q6509304","display_name":"Leakage (economics)","level":2,"score":0.4891126751899719},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.4515378773212433},{"id":"https://openalex.org/C2361726","wikidata":"https://www.wikidata.org/wiki/Q5527031","display_name":"Gate oxide","level":4,"score":0.29038918018341064},{"id":"https://openalex.org/C172385210","wikidata":"https://www.wikidata.org/wiki/Q5339","display_name":"Transistor","level":3,"score":0.24885350465774536},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.1333242952823639},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.11300206184387207},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.10850745439529419},{"id":"https://openalex.org/C133386390","wikidata":"https://www.wikidata.org/wiki/Q184996","display_name":"Dielectric","level":2,"score":0.08861398696899414},{"id":"https://openalex.org/C162324750","wikidata":"https://www.wikidata.org/wiki/Q8134","display_name":"Economics","level":0,"score":0.0},{"id":"https://openalex.org/C139719470","wikidata":"https://www.wikidata.org/wiki/Q39680","display_name":"Macroeconomics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/iedm.2006.346959","doi":"https://doi.org/10.1109/iedm.2006.346959","is_oa":false,"landing_page_url":"https://doi.org/10.1109/iedm.2006.346959","pdf_url":null,"source":{"id":"https://openalex.org/S4210168112","display_name":"Technical digest - International Electron Devices Meeting/Technical digest","issn_l":"0163-1918","issn":["0163-1918","2156-017X"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2006 International Electron Devices Meeting","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Industry, innovation and infrastructure","id":"https://metadata.un.org/sdg/9","score":0.5378999710083008}],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W2540843788","https://openalex.org/W2541142559","https://openalex.org/W2072835119","https://openalex.org/W2065832459","https://openalex.org/W2012197785","https://openalex.org/W2060296114","https://openalex.org/W2532681255","https://openalex.org/W2166577149","https://openalex.org/W2056763917","https://openalex.org/W1996671514"],"abstract_inverted_index":{"CMOS":[0],"technologies":[1],"using":[2],"metal/high-k":[3],"damascene":[4,28],"gate":[5,29,91],"stacks":[6,30],"with":[7],"uniaxial":[8],"strained":[9],"silicon":[10],"channels":[11],"were":[12,20,35,61,87],"developed.":[13],"Gate":[14],"electrodes":[15],"of":[16,47,71,82,94],"HfSix":[17],"and":[18,24,31,49,58,66,97],"TiN":[19],"applied":[21],"to":[22,77],"nFETs":[23,65],"pFETs,":[25],"respectively.":[26],"TiN/HfO2":[27],"epitaxial":[32],"SiGe":[33],"source/drains":[34],"successfully":[36],"integrated":[37],"for":[38,63],"the":[39,64],"first":[40],"time.":[41],"As":[42],"a":[43,78],"result,":[44],"drive":[45,80],"currents":[46,93],"1050":[48],"710":[50],"uA/um":[51],"at":[52],"Vdd=1":[53],"V,":[54],"Ioff=":[55],"100":[56],"nA/um":[57],"Tinv=1.6":[59],"nm":[60],"obtained":[62],"pFETs.":[67],"The":[68],"further":[69],"integration":[70],"pFETs":[72],"on":[73],"(110)":[74],"substrates":[75],"contributed":[76],"higher":[79],"current":[81],"830":[83],"uA/um.":[84],"These":[85],"performances":[86],"realized":[88],"under":[89],"low":[90],"leakage":[92],"0.03":[95],"A/cm2":[96],"below.":[98]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2021,"cited_by_count":1},{"year":2018,"cited_by_count":1},{"year":2015,"cited_by_count":1},{"year":2014,"cited_by_count":1},{"year":2013,"cited_by_count":2}],"updated_date":"2026-11-04T10:54:05.112534","created_date":"2016-06-24T00:00:00"}