{"id":"https://openalex.org/W2012811044","doi":"https://doi.org/10.1016/j.spmi.2012.08.003","title":"Effect of deposition temperature on the microstructure and surface morphology of c-axis oriented AlN films deposited on sapphire substrate by RF reactive magnetron sputtering","display_name":"Effect of deposition temperature on the microstructure and surface morphology of c-axis oriented AlN films deposited on sapphire substrate by RF reactive magnetron sputtering","publication_year":2012,"publication_date":"2012-08-09","ids":{"openalex":"https://openalex.org/W2012811044","doi":"https://doi.org/10.1016/j.spmi.2012.08.003","mag":"2012811044"},"language":"en","primary_location":{"id":"doi:10.1016/j.spmi.2012.08.003","doi":"https://doi.org/10.1016/j.spmi.2012.08.003","is_oa":false,"landing_page_url":"https://doi.org/10.1016/j.spmi.2012.08.003","pdf_url":null,"source":{"id":"https://openalex.org/S107898947","display_name":"Superlattices and Microstructures","issn_l":"0749-6036","issn":["0749-6036","1096-3677"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","norway-1","poland-20"],"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Superlattices and Microstructures","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5046567031","display_name":"Xu-Ping Kuang","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I204983213","display_name":"Harbin Institute of Technology","ror":"https://ror.org/01yqg2h08","country_code":"CN","type":"education","lineage":["https://openalex.org/I204983213"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Xu-Ping Kuang","raw_affiliation_strings":["Shenzhen Graduate School, Harbin Institute of Technology, Shenzhen 518055, PR China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Shenzhen Graduate School, Harbin Institute of Technology, Shenzhen 518055, PR China","institution_ids":["https://openalex.org/I204983213"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5001713639","display_name":"Huayu Zhang","orcid":"https://orcid.org/0000-0001-6574-5394","observed_orcids":["https://orcid.org/0000-0001-6574-5394"]},"institutions":[{"id":"https://openalex.org/I204983213","display_name":"Harbin Institute of Technology","ror":"https://ror.org/01yqg2h08","country_code":"CN","type":"education","lineage":["https://openalex.org/I204983213"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Hua-Yu Zhang","raw_affiliation_strings":["Shenzhen Graduate School, Harbin Institute of Technology, Shenzhen 518055, PR China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Shenzhen Graduate School, Harbin Institute of Technology, Shenzhen 518055, PR China","institution_ids":["https://openalex.org/I204983213"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5084372598","display_name":"Gui\u2010Gen Wang","orcid":"https://orcid.org/0000-0001-8606-8986","observed_orcids":["https://orcid.org/0000-0001-8606-8986"]},"institutions":[{"id":"https://openalex.org/I204983213","display_name":"Harbin Institute of Technology","ror":"https://ror.org/01yqg2h08","country_code":"CN","type":"education","lineage":["https://openalex.org/I204983213"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Gui-Gen Wang","raw_affiliation_strings":["Shenzhen Graduate School, Harbin Institute of Technology, Shenzhen 518055, PR China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Shenzhen Graduate School, Harbin Institute of Technology, Shenzhen 518055, PR China","institution_ids":["https://openalex.org/I204983213"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111811156","display_name":"Lin Cui","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I204983213","display_name":"Harbin Institute of Technology","ror":"https://ror.org/01yqg2h08","country_code":"CN","type":"education","lineage":["https://openalex.org/I204983213"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Lin Cui","raw_affiliation_strings":["Shenzhen Graduate School, Harbin Institute of Technology, Shenzhen 518055, PR China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Shenzhen Graduate School, Harbin Institute of Technology, Shenzhen 518055, PR China","institution_ids":["https://openalex.org/I204983213"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5015860742","display_name":"Can Zhu","orcid":"https://orcid.org/0000-0001-6604-6173","observed_orcids":["https://orcid.org/0000-0001-6604-6173"]},"institutions":[{"id":"https://openalex.org/I204983213","display_name":"Harbin Institute of Technology","ror":"https://ror.org/01yqg2h08","country_code":"CN","type":"education","lineage":["https://openalex.org/I204983213"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Can Zhu","raw_affiliation_strings":["Shenzhen Graduate School, Harbin Institute of Technology, Shenzhen 518055, PR China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Shenzhen Graduate School, Harbin Institute of Technology, Shenzhen 518055, PR China","institution_ids":["https://openalex.org/I204983213"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5051208759","display_name":"Lei Jin","orcid":"https://orcid.org/0000-0002-8375-5315","observed_orcids":["https://orcid.org/0000-0002-8375-5315"]},"institutions":[{"id":"https://openalex.org/I204983213","display_name":"Harbin Institute of Technology","ror":"https://ror.org/01yqg2h08","country_code":"CN","type":"education","lineage":["https://openalex.org/I204983213"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Lei Jin","raw_affiliation_strings":["Shenzhen Graduate School, Harbin Institute of Technology, Shenzhen 518055, PR China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Shenzhen Graduate School, Harbin Institute of Technology, Shenzhen 518055, PR China","institution_ids":["https://openalex.org/I204983213"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101592642","display_name":"Rui Sun","orcid":"https://orcid.org/0000-0002-0719-4595","observed_orcids":["https://orcid.org/0000-0002-0719-4595"]},"institutions":[{"id":"https://openalex.org/I204983213","display_name":"Harbin Institute of Technology","ror":"https://ror.org/01yqg2h08","country_code":"CN","type":"education","lineage":["https://openalex.org/I204983213"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Rui Sun","raw_affiliation_strings":["Shenzhen Graduate School, Harbin Institute of Technology, Shenzhen 518055, PR China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Shenzhen Graduate School, Harbin Institute of Technology, Shenzhen 518055, PR China","institution_ids":["https://openalex.org/I204983213"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5112447621","display_name":"Jiecai Han","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I204983213","display_name":"Harbin Institute of Technology","ror":"https://ror.org/01yqg2h08","country_code":"CN","type":"education","lineage":["https://openalex.org/I204983213"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jie-Cai Han","raw_affiliation_strings":["Center for Composite Materials, Harbin Institute of Technology, Harbin 150080, PR China","Shenzhen Graduate School, Harbin Institute of Technology, Shenzhen 518055, PR China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Center for Composite Materials, Harbin Institute of Technology, Harbin 150080, PR China","institution_ids":["https://openalex.org/I204983213"]},{"raw_affiliation_string":"Shenzhen Graduate School, Harbin Institute of Technology, Shenzhen 518055, PR China","institution_ids":["https://openalex.org/I204983213"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":["https://openalex.org/A5046567031","https://openalex.org/A5084372598"],"corresponding_institution_ids":["https://openalex.org/I204983213"],"apc_list":{"value":2550,"currency":"USD","value_usd":2550},"apc_paid":null,"fwci":1.7755,"has_fulltext":false,"cited_by_count":42,"citation_normalized_percentile":{"value":0.85002865,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":99},"biblio":{"volume":"52","issue":"5","first_page":"931","last_page":"940"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10099","display_name":"GaN-based semiconductor devices and materials","score":0.6776999831199646,"subfield":{"id":"https://openalex.org/subfields/3104","display_name":"Condensed Matter Physics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10099","display_name":"GaN-based semiconductor devices and materials","score":0.6776999831199646,"subfield":{"id":"https://openalex.org/subfields/3104","display_name":"Condensed Matter Physics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.17100000381469727,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10377","display_name":"Metal and Thin Film Mechanics","score":0.14059999585151672,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/aluminum-nitride-thin-films","display_name":"aluminum nitride thin films","score":0.9269999861717224},{"id":"https://openalex.org/keywords/c-axis-orientation","display_name":"c-axis orientation","score":0.8669999837875366},{"id":"https://openalex.org/keywords/deposition-temperature","display_name":"deposition temperature","score":0.8999999761581421},{"id":"https://openalex.org/keywords/sapphire-substrate","display_name":"sapphire substrate","score":0.9049999713897705},{"id":"https://openalex.org/keywords/reactive-rf-magnetron-sputtering","display_name":"reactive RF magnetron sputtering","score":0.9890000224113464},{"id":"https://openalex.org/keywords/surface-morphology","display_name":"surface morphology","score":0.7879999876022339},{"id":"https://openalex.org/keywords/crystal-structure","display_name":"crystal structure","score":0.8840000033378601},{"id":"https://openalex.org/keywords/stoichiometry","display_name":"stoichiometry","score":0.8529999852180481},{"id":"https://openalex.org/keywords/microstructure","display_name":"microstructure","score":0.4819999933242798}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.8409774303436279},{"id":"https://openalex.org/C175708663","wikidata":"https://www.wikidata.org/wiki/Q899559","display_name":"X-ray photoelectron spectroscopy","level":2,"score":0.7975977659225464},{"id":"https://openalex.org/C2777289219","wikidata":"https://www.wikidata.org/wiki/Q7632154","display_name":"Substrate (aquarium)","level":2,"score":0.6459866166114807},{"id":"https://openalex.org/C87976508","wikidata":"https://www.wikidata.org/wiki/Q1498213","display_name":"Microstructure","level":2,"score":0.6231390237808228},{"id":"https://openalex.org/C61427134","wikidata":"https://www.wikidata.org/wiki/Q847609","display_name":"Sputter deposition","level":4,"score":0.6147578954696655},{"id":"https://openalex.org/C2780064504","wikidata":"https://www.wikidata.org/wiki/Q127583","display_name":"Sapphire","level":3,"score":0.6143792867660522},{"id":"https://openalex.org/C144082473","wikidata":"https://www.wikidata.org/wiki/Q213185","display_name":"Stoichiometry","level":2,"score":0.5584864020347595},{"id":"https://openalex.org/C22423302","wikidata":"https://www.wikidata.org/wiki/Q898444","display_name":"Sputtering","level":3,"score":0.5255271792411804},{"id":"https://openalex.org/C64297162","wikidata":"https://www.wikidata.org/wiki/Q1987070","display_name":"Deposition (geology)","level":3,"score":0.5146961808204651},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.44834795594215393},{"id":"https://openalex.org/C42360764","wikidata":"https://www.wikidata.org/wiki/Q83588","display_name":"Chemical engineering","level":1,"score":0.4249875247478485},{"id":"https://openalex.org/C499950583","wikidata":"https://www.wikidata.org/wiki/Q183252","display_name":"Morphology (biology)","level":2,"score":0.4139310121536255},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.3804408311843872},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.2019144892692566},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.18810468912124634},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.12666484713554382},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.07186681032180786},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C54355233","wikidata":"https://www.wikidata.org/wiki/Q7162","display_name":"Genetics","level":1,"score":0.0},{"id":"https://openalex.org/C151730666","wikidata":"https://www.wikidata.org/wiki/Q7205","display_name":"Paleontology","level":1,"score":0.0},{"id":"https://openalex.org/C111368507","wikidata":"https://www.wikidata.org/wiki/Q43518","display_name":"Oceanography","level":1,"score":0.0},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0},{"id":"https://openalex.org/C520434653","wikidata":"https://www.wikidata.org/wiki/Q38867","display_name":"Laser","level":2,"score":0.0},{"id":"https://openalex.org/C2816523","wikidata":"https://www.wikidata.org/wiki/Q180184","display_name":"Sediment","level":2,"score":0.0},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.0},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1016/j.spmi.2012.08.003","doi":"https://doi.org/10.1016/j.spmi.2012.08.003","is_oa":false,"landing_page_url":"https://doi.org/10.1016/j.spmi.2012.08.003","pdf_url":null,"source":{"id":"https://openalex.org/S107898947","display_name":"Superlattices and Microstructures","issn_l":"0749-6036","issn":["0749-6036","1096-3677"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","norway-1","poland-20"],"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Superlattices and Microstructures","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":35,"referenced_works":["https://openalex.org/W123624018","https://openalex.org/W1492740626","https://openalex.org/W1587140794","https://openalex.org/W1965840427","https://openalex.org/W1966200157","https://openalex.org/W1971773038","https://openalex.org/W1974072513","https://openalex.org/W1978819423","https://openalex.org/W1985089047","https://openalex.org/W1986284610","https://openalex.org/W1988357484","https://openalex.org/W1993111792","https://openalex.org/W2005413459","https://openalex.org/W2011113596","https://openalex.org/W2017667889","https://openalex.org/W2022518758","https://openalex.org/W2027762745","https://openalex.org/W2029783491","https://openalex.org/W2030127699","https://openalex.org/W2034586485","https://openalex.org/W2041747969","https://openalex.org/W2045530478","https://openalex.org/W2047265928","https://openalex.org/W2056741187","https://openalex.org/W2057216300","https://openalex.org/W2062813441","https://openalex.org/W2066129911","https://openalex.org/W2070731038","https://openalex.org/W2071210947","https://openalex.org/W2077413495","https://openalex.org/W2095277493","https://openalex.org/W2108548217","https://openalex.org/W2140020354","https://openalex.org/W2154459248","https://openalex.org/W2162962542"],"related_works":["https://openalex.org/W1993281237","https://openalex.org/W2366815890","https://openalex.org/W2384973741","https://openalex.org/W2390059344","https://openalex.org/W7011353866","https://openalex.org/W2076733255","https://openalex.org/W2077882838","https://openalex.org/W2391901866","https://openalex.org/W1979839716","https://openalex.org/W2046289831"],"abstract_inverted_index":null,"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":4},{"year":2024,"cited_by_count":5},{"year":2023,"cited_by_count":2},{"year":2022,"cited_by_count":3},{"year":2021,"cited_by_count":2},{"year":2020,"cited_by_count":2},{"year":2019,"cited_by_count":2},{"year":2018,"cited_by_count":3},{"year":2017,"cited_by_count":6},{"year":2016,"cited_by_count":1},{"year":2015,"cited_by_count":7},{"year":2014,"cited_by_count":3},{"year":2013,"cited_by_count":1}],"updated_date":"2026-11-04T10:54:05.112534","created_date":"2016-06-24T00:00:00"}