{"id":"https://openalex.org/W2012294571","doi":"https://doi.org/10.1016/j.apsusc.2003.08.070","title":"Fabrication and device characteristics of strained-Si-on-insulator (strained-SOI) CMOS","display_name":"Fabrication and device characteristics of strained-Si-on-insulator (strained-SOI) CMOS","publication_year":2003,"publication_date":"2003-10-16","ids":{"openalex":"https://openalex.org/W2012294571","doi":"https://doi.org/10.1016/j.apsusc.2003.08.070","mag":"2012294571"},"language":"en","primary_location":{"id":"doi:10.1016/j.apsusc.2003.08.070","doi":"https://doi.org/10.1016/j.apsusc.2003.08.070","is_oa":false,"landing_page_url":"https://doi.org/10.1016/j.apsusc.2003.08.070","pdf_url":null,"source":{"id":"https://openalex.org/S42323631","display_name":"Applied Surface Science","issn_l":"0169-4332","issn":["0169-4332","1873-5584"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-a","jufo-2","ki-jl-1","norway-1","poland-140","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Applied Surface Science","raw_type":"journal-article"},"volume":null,"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5042410367","display_name":"Shinichi Takagi","orcid":"https://orcid.org/0000-0002-5601-2604","observed_orcids":["https://orcid.org/0000-0002-5601-2604"]},"institutions":[{"id":"https://openalex.org/I4210127336","display_name":"Association of Super-Advanced Electronics","ror":"https://ror.org/0292ym357","country_code":"JP","type":"other","lineage":["https://openalex.org/I4210127336"]}],"countries":["JP"],"is_corresponding":true,"raw_author_name":"Shin-ichi Takagi","raw_affiliation_strings":["Association of Super-Advanced Electronics Technology (ASET), MIRAI Project, 1 Komukai Toshiba-cho, Saiwai-ku, Kawasaki 212-8582, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Association of Super-Advanced Electronics Technology (ASET), MIRAI Project, 1 Komukai Toshiba-cho, Saiwai-ku, Kawasaki 212-8582, Japan","institution_ids":["https://openalex.org/I4210127336"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5039332549","display_name":"Tomohisa Mizuno","orcid":"https://orcid.org/0000-0001-8039-4940","observed_orcids":["https://orcid.org/0000-0001-8039-4940"]},"institutions":[{"id":"https://openalex.org/I4210127336","display_name":"Association of Super-Advanced Electronics","ror":"https://ror.org/0292ym357","country_code":"JP","type":"other","lineage":["https://openalex.org/I4210127336"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Tomohisa Mizuno","raw_affiliation_strings":["Association of Super-Advanced Electronics Technology (ASET), MIRAI Project, 1 Komukai Toshiba-cho, Saiwai-ku, Kawasaki 212-8582, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Association of Super-Advanced Electronics Technology (ASET), MIRAI Project, 1 Komukai Toshiba-cho, Saiwai-ku, Kawasaki 212-8582, Japan","institution_ids":["https://openalex.org/I4210127336"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100829856","display_name":"Tsutomu Tezuka","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210127336","display_name":"Association of Super-Advanced Electronics","ror":"https://ror.org/0292ym357","country_code":"JP","type":"other","lineage":["https://openalex.org/I4210127336"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Tsutomu Tezuka","raw_affiliation_strings":["Association of Super-Advanced Electronics Technology (ASET), MIRAI Project, 1 Komukai Toshiba-cho, Saiwai-ku, Kawasaki 212-8582, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Association of Super-Advanced Electronics Technology (ASET), MIRAI Project, 1 Komukai Toshiba-cho, Saiwai-ku, Kawasaki 212-8582, Japan","institution_ids":["https://openalex.org/I4210127336"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5109931625","display_name":"Naoharu Sugiyama","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210127336","display_name":"Association of Super-Advanced Electronics","ror":"https://ror.org/0292ym357","country_code":"JP","type":"other","lineage":["https://openalex.org/I4210127336"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Naoharu Sugiyama","raw_affiliation_strings":["Association of Super-Advanced Electronics Technology (ASET), MIRAI Project, 1 Komukai Toshiba-cho, Saiwai-ku, Kawasaki 212-8582, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Association of Super-Advanced Electronics Technology (ASET), MIRAI Project, 1 Komukai Toshiba-cho, Saiwai-ku, Kawasaki 212-8582, Japan","institution_ids":["https://openalex.org/I4210127336"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5108488443","display_name":"Toshinori Numata","orcid":"https://orcid.org/0009-0006-3351-3816","observed_orcids":["https://orcid.org/0009-0006-3351-3816"]},"institutions":[{"id":"https://openalex.org/I4210127336","display_name":"Association of Super-Advanced Electronics","ror":"https://ror.org/0292ym357","country_code":"JP","type":"other","lineage":["https://openalex.org/I4210127336"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Toshinori Numata","raw_affiliation_strings":["Association of Super-Advanced Electronics Technology (ASET), MIRAI Project, 1 Komukai Toshiba-cho, Saiwai-ku, Kawasaki 212-8582, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Association of Super-Advanced Electronics Technology (ASET), MIRAI Project, 1 Komukai Toshiba-cho, Saiwai-ku, Kawasaki 212-8582, Japan","institution_ids":["https://openalex.org/I4210127336"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5035423482","display_name":"Koji Usuda","orcid":"https://orcid.org/0009-0004-3049-7190","observed_orcids":["https://orcid.org/0009-0004-3049-7190"]},"institutions":[{"id":"https://openalex.org/I4210127336","display_name":"Association of Super-Advanced Electronics","ror":"https://ror.org/0292ym357","country_code":"JP","type":"other","lineage":["https://openalex.org/I4210127336"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Koji Usuda","raw_affiliation_strings":["Association of Super-Advanced Electronics Technology (ASET), MIRAI Project, 1 Komukai Toshiba-cho, Saiwai-ku, Kawasaki 212-8582, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Association of Super-Advanced Electronics Technology (ASET), MIRAI Project, 1 Komukai Toshiba-cho, Saiwai-ku, Kawasaki 212-8582, Japan","institution_ids":["https://openalex.org/I4210127336"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110620973","display_name":"Yoshihiko Moriyama","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210127336","display_name":"Association of Super-Advanced Electronics","ror":"https://ror.org/0292ym357","country_code":"JP","type":"other","lineage":["https://openalex.org/I4210127336"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Yoshihiko Moriyama","raw_affiliation_strings":["Association of Super-Advanced Electronics Technology (ASET), MIRAI Project, 1 Komukai Toshiba-cho, Saiwai-ku, Kawasaki 212-8582, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Association of Super-Advanced Electronics Technology (ASET), MIRAI Project, 1 Komukai Toshiba-cho, Saiwai-ku, Kawasaki 212-8582, Japan","institution_ids":["https://openalex.org/I4210127336"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5070926343","display_name":"Shu Nakaharai","orcid":"https://orcid.org/0000-0002-6329-3942","observed_orcids":["https://orcid.org/0000-0002-6329-3942"]},"institutions":[{"id":"https://openalex.org/I4210127336","display_name":"Association of Super-Advanced Electronics","ror":"https://ror.org/0292ym357","country_code":"JP","type":"other","lineage":["https://openalex.org/I4210127336"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Shu Nakaharai","raw_affiliation_strings":["Association of Super-Advanced Electronics Technology (ASET), MIRAI Project, 1 Komukai Toshiba-cho, Saiwai-ku, Kawasaki 212-8582, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Association of Super-Advanced Electronics Technology (ASET), MIRAI Project, 1 Komukai Toshiba-cho, Saiwai-ku, Kawasaki 212-8582, Japan","institution_ids":["https://openalex.org/I4210127336"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111577245","display_name":"J. Koga","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210127336","display_name":"Association of Super-Advanced Electronics","ror":"https://ror.org/0292ym357","country_code":"JP","type":"other","lineage":["https://openalex.org/I4210127336"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Junji Koga","raw_affiliation_strings":["Association of Super-Advanced Electronics Technology (ASET), MIRAI Project, 1 Komukai Toshiba-cho, Saiwai-ku, Kawasaki 212-8582, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Association of Super-Advanced Electronics Technology (ASET), MIRAI Project, 1 Komukai Toshiba-cho, Saiwai-ku, Kawasaki 212-8582, Japan","institution_ids":["https://openalex.org/I4210127336"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111460239","display_name":"Akihito Tanabe","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210127336","display_name":"Association of Super-Advanced Electronics","ror":"https://ror.org/0292ym357","country_code":"JP","type":"other","lineage":["https://openalex.org/I4210127336"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Akihito Tanabe","raw_affiliation_strings":["Association of Super-Advanced Electronics Technology (ASET), MIRAI Project, 1 Komukai Toshiba-cho, Saiwai-ku, Kawasaki 212-8582, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Association of Super-Advanced Electronics Technology (ASET), MIRAI Project, 1 Komukai Toshiba-cho, Saiwai-ku, Kawasaki 212-8582, Japan","institution_ids":["https://openalex.org/I4210127336"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5012648716","display_name":"Tatsuro Maeda","orcid":"https://orcid.org/0000-0001-9092-6226","observed_orcids":["https://orcid.org/0000-0001-9092-6226"]},"institutions":[{"id":"https://openalex.org/I73613424","display_name":"National Institute of Advanced Industrial Science and Technology","ror":"https://ror.org/01703db54","country_code":"JP","type":"government","lineage":["https://openalex.org/I73613424"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Tatsuro Maeda","raw_affiliation_strings":["National Institute of Advanced Industrial Science and Technology (AIST), 1 Komukai Toshiba-cho, Saiwai-ku, Kawasaki 212-8582, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Institute of Advanced Industrial Science and Technology (AIST), 1 Komukai Toshiba-cho, Saiwai-ku, Kawasaki 212-8582, Japan","institution_ids":["https://openalex.org/I73613424"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":["https://openalex.org/A5042410367"],"corresponding_institution_ids":["https://openalex.org/I4210127336"],"apc_list":{"value":3930,"currency":"USD","value_usd":3930},"apc_paid":null,"fwci":0.6692,"has_fulltext":false,"cited_by_count":20,"citation_normalized_percentile":{"value":0.73957441,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":96},"biblio":{"volume":"224","issue":"1-4","first_page":"241","last_page":"247"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10558","display_name":"Advancements in Semiconductor Devices and Circuit Design","score":0.9843999743461609,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10558","display_name":"Advancements in Semiconductor Devices and Circuit Design","score":0.9843999743461609,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.014600000344216824,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":0.00019999999494757503,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/strained-silicon","display_name":"strained silicon","score":0.460999995470047},{"id":"https://openalex.org/keywords/electron-mobility","display_name":"electron mobility","score":0.6930000185966492},{"id":"https://openalex.org/keywords/hole-mobility","display_name":"hole mobility","score":1.0},{"id":"https://openalex.org/keywords/ring-oscillator","display_name":"ring oscillator","score":0.8769999742507935},{"id":"https://openalex.org/keywords/low-supply-voltage","display_name":"low supply voltage","score":0.5899999737739563},{"id":"https://openalex.org/keywords/sub-100-nm-cmos","display_name":"sub-100 nm CMOS","score":0.847000002861023},{"id":"https://openalex.org/keywords/soi-mosfet","display_name":"SOI MOSFET","score":0.7689999938011169},{"id":"https://openalex.org/keywords/device-fabrication","display_name":"device fabrication","score":0.6230000257492065}],"concepts":[{"id":"https://openalex.org/C53143962","wikidata":"https://www.wikidata.org/wiki/Q1478788","display_name":"Silicon on insulator","level":3,"score":0.9135501384735107},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.8136990070343018},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.7623196840286255},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6791059970855713},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.6480581760406494},{"id":"https://openalex.org/C2778413303","wikidata":"https://www.wikidata.org/wiki/Q210793","display_name":"MOSFET","level":4,"score":0.4392584562301636},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.3882693648338318},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.31890591979026794},{"id":"https://openalex.org/C172385210","wikidata":"https://www.wikidata.org/wiki/Q5339","display_name":"Transistor","level":3,"score":0.2802595794200897},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.276350736618042},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.15435433387756348},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1016/j.apsusc.2003.08.070","doi":"https://doi.org/10.1016/j.apsusc.2003.08.070","is_oa":false,"landing_page_url":"https://doi.org/10.1016/j.apsusc.2003.08.070","pdf_url":null,"source":{"id":"https://openalex.org/S42323631","display_name":"Applied Surface Science","issn_l":"0169-4332","issn":["0169-4332","1873-5584"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-a","jufo-2","ki-jl-1","norway-1","poland-140","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Applied Surface Science","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/9","display_name":"Industry, innovation and infrastructure","score":0.4943999946117401}],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":24,"referenced_works":["https://openalex.org/W1543800037","https://openalex.org/W1553539875","https://openalex.org/W1838941182","https://openalex.org/W1974675817","https://openalex.org/W2029383455","https://openalex.org/W2035525257","https://openalex.org/W2036761846","https://openalex.org/W2047992476","https://openalex.org/W2052443981","https://openalex.org/W2054818222","https://openalex.org/W2073720450","https://openalex.org/W2090800313","https://openalex.org/W2102807214","https://openalex.org/W2118842063","https://openalex.org/W2124744101","https://openalex.org/W2131991468","https://openalex.org/W2144700371","https://openalex.org/W2164255562","https://openalex.org/W2167300113","https://openalex.org/W2536367956","https://openalex.org/W2538376663","https://openalex.org/W2540108101","https://openalex.org/W2543678205","https://openalex.org/W6725615803"],"related_works":["https://openalex.org/W1987879102","https://openalex.org/W2129432150","https://openalex.org/W2140182689","https://openalex.org/W1535061817","https://openalex.org/W2115564875","https://openalex.org/W2540655259","https://openalex.org/W354633234","https://openalex.org/W2466588819","https://openalex.org/W2136326538","https://openalex.org/W2539807407"],"abstract_inverted_index":null,"counts_by_year":[{"year":2023,"cited_by_count":1},{"year":2017,"cited_by_count":2},{"year":2016,"cited_by_count":1},{"year":2015,"cited_by_count":1},{"year":2013,"cited_by_count":2},{"year":2012,"cited_by_count":2}],"updated_date":"2026-09-21T07:43:02.447757","created_date":"2016-06-24T00:00:00"}