{"id":"https://openalex.org/W2012144197","doi":"https://doi.org/10.1109/icsens.2007.355720","title":"Development of a Novel Flexural Plate Wave Biosensor for Immunoglobulin-E Detection by Using SAM and MEMS Technologies","display_name":"Development of a Novel Flexural Plate Wave Biosensor for Immunoglobulin-E Detection by Using SAM and MEMS Technologies","publication_year":2006,"publication_date":"2006-10-01","ids":{"openalex":"https://openalex.org/W2012144197","doi":"https://doi.org/10.1109/icsens.2007.355720","mag":"2012144197"},"language":"en","primary_location":{"id":"doi:10.1109/icsens.2007.355720","doi":"https://doi.org/10.1109/icsens.2007.355720","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icsens.2007.355720","pdf_url":null,"source":{"id":"https://openalex.org/S4210192710","display_name":"Proceedings of IEEE Sensors/Proceedings of IEEE Sensors ...","issn_l":"1930-0395","issn":["1930-0395","2168-9229","2168-9237"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","jufo-1","norway-1"],"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2006 5th IEEE Conference on Sensors","raw_type":"proceedings-article"},"parent_works":[],"lineage":["https://openalex.org/W2012144197"],"child_works_count":0,"type":"conference-paper","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5113056292","display_name":"I\u2010Yu Huang","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I142974352","display_name":"National Sun Yat-sen University","ror":"https://ror.org/00mjawt10","country_code":"TW","type":"education","lineage":["https://openalex.org/I142974352"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"I-Yu Huang","raw_affiliation_strings":["Department of Electrical Engineering, National Sun Yat-Sen University, Kaohsiung, Taiwan","Department of Electrical Engineering, National Sun Yat-Sen University, Kaohsiung, Taiwan 80424. Email: iyuhuang@mail.nsysu.edu.tw"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, National Sun Yat-Sen University, Kaohsiung, Taiwan","institution_ids":["https://openalex.org/I142974352"]},{"raw_affiliation_string":"Department of Electrical Engineering, National Sun Yat-Sen University, Kaohsiung, Taiwan 80424. Email: iyuhuang@mail.nsysu.edu.tw","institution_ids":["https://openalex.org/I142974352"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5063802457","display_name":"Ming\u2010Chih Lee","orcid":"https://orcid.org/0000-0002-9842-4893","observed_orcids":["https://orcid.org/0000-0002-9842-4893"]},"institutions":[{"id":"https://openalex.org/I142974352","display_name":"National Sun Yat-sen University","ror":"https://ror.org/00mjawt10","country_code":"TW","type":"education","lineage":["https://openalex.org/I142974352"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Ming-Chih Lee","raw_affiliation_strings":["Department of Electrical Engineering, National Sun Yat-Sen University, Kaohsiung, Taiwan","Department of Electrical Engineering National Sun Yat-Sen University Kaohsiung, Taiwan 80424"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, National Sun Yat-Sen University, Kaohsiung, Taiwan","institution_ids":["https://openalex.org/I142974352"]},{"raw_affiliation_string":"Department of Electrical Engineering National Sun Yat-Sen University Kaohsiung, Taiwan 80424","institution_ids":["https://openalex.org/I142974352"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5004120093","display_name":"Yi-Wen Chang","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I142974352","display_name":"National Sun Yat-sen University","ror":"https://ror.org/00mjawt10","country_code":"TW","type":"education","lineage":["https://openalex.org/I142974352"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Yi-Wen Chang","raw_affiliation_strings":["Department of Electrical Engineering, National Sun Yat-Sen University, Kaohsiung, Taiwan","Department of Electrical Engineering National Sun Yat-Sen University Kaohsiung, Taiwan 80424"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, National Sun Yat-Sen University, Kaohsiung, Taiwan","institution_ids":["https://openalex.org/I142974352"]},{"raw_affiliation_string":"Department of Electrical Engineering National Sun Yat-Sen University Kaohsiung, Taiwan 80424","institution_ids":["https://openalex.org/I142974352"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I142974352"],"apc_list":null,"apc_paid":null,"fwci":1.0572,"has_fulltext":false,"cited_by_count":14,"citation_normalized_percentile":{"value":0.68315091,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":87,"max":95},"biblio":{"volume":null,"issue":null,"first_page":"70","last_page":"73"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10662","display_name":"Ultrasonics and Acoustic Wave Propagation","score":9.999999747378752e-05,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11393","display_name":"Biosensors and Analytical Detection","score":0.0,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/self-assembled-monolayers","display_name":"self-assembled monolayers","score":0.8550000190734863},{"id":"https://openalex.org/keywords/mems","display_name":"MEMS","score":0.5649999976158142},{"id":"https://openalex.org/keywords/interdigital-transducers","display_name":"interdigital transducers","score":0.8560000061988831},{"id":"https://openalex.org/keywords/bulk-micromachining","display_name":"bulk micromachining","score":0.8709999918937683},{"id":"https://openalex.org/keywords/mass-sensitivity","display_name":"mass sensitivity","score":0.6880000233650208},{"id":"https://openalex.org/keywords/c-axis-orientation","display_name":"c-axis orientation","score":0.6740000247955322}],"concepts":[{"id":"https://openalex.org/C100082104","wikidata":"https://www.wikidata.org/wiki/Q183759","display_name":"Piezoelectricity","level":2,"score":0.5449633598327637},{"id":"https://openalex.org/C160756335","wikidata":"https://www.wikidata.org/wiki/Q669391","display_name":"Biosensor","level":2,"score":0.5232714414596558},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5078158974647522},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.5000905990600586},{"id":"https://openalex.org/C178405089","wikidata":"https://www.wikidata.org/wiki/Q857201","display_name":"Flexural strength","level":2,"score":0.48877403140068054},{"id":"https://openalex.org/C2777289219","wikidata":"https://www.wikidata.org/wiki/Q7632154","display_name":"Substrate (aquarium)","level":2,"score":0.4516455829143524},{"id":"https://openalex.org/C142358356","wikidata":"https://www.wikidata.org/wiki/Q375680","display_name":"Lamb waves","level":3,"score":0.4475213587284088},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.3546794652938843},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.24146947264671326},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.1882207989692688},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.13801982998847961},{"id":"https://openalex.org/C84174578","wikidata":"https://www.wikidata.org/wiki/Q889796","display_name":"Surface wave","level":2,"score":0.128971666097641},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C111368507","wikidata":"https://www.wikidata.org/wiki/Q43518","display_name":"Oceanography","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/icsens.2007.355720","doi":"https://doi.org/10.1109/icsens.2007.355720","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icsens.2007.355720","pdf_url":null,"source":{"id":"https://openalex.org/S4210192710","display_name":"Proceedings of IEEE Sensors/Proceedings of IEEE Sensors ...","issn_l":"1930-0395","issn":["1930-0395","2168-9229","2168-9237"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","jufo-1","norway-1"],"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2006 5th IEEE Conference on Sensors","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320321040","display_name":"National Science Council","ror":"https://ror.org/02kv4zf79"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":9,"referenced_works":["https://openalex.org/W206446308","https://openalex.org/W1233592146","https://openalex.org/W1972017339","https://openalex.org/W2013989395","https://openalex.org/W2038824587","https://openalex.org/W2050405205","https://openalex.org/W2059919138","https://openalex.org/W2141978693","https://openalex.org/W2502161444"],"related_works":["https://openalex.org/W2129705975","https://openalex.org/W2066056684","https://openalex.org/W1980701768","https://openalex.org/W2012626847","https://openalex.org/W2974074376","https://openalex.org/W2781666354","https://openalex.org/W2067369019","https://openalex.org/W1972017339","https://openalex.org/W2008550005","https://openalex.org/W2969982733"],"abstract_inverted_index":{"This":[0,106],"paper":[1],"presents":[2],"the":[3,33,63,66,108],"design,":[4],"fabrication":[5],"and":[6,29,52,91,101],"characterization":[7],"of":[8,57,65],"a":[9,37,55,76,92],"novel":[10],"flexural":[11,47],"plate":[12,48],"wave":[13],"(FPW)":[14],"microsensor":[15,95],"for":[16],"immunoglobulin-E":[17],"(IgE)":[18],"detecting":[19],"applications.":[20],"The":[21,45],"propagation":[22],"membrane":[23],"is":[24,107],"constructed":[25],"with":[26,96],"SiO2/Si3N4/ZnO":[27],"multilayers":[28],"be":[30],"released":[31],"from":[32],"silicon":[34],"substrate":[35],"as":[36],"floating":[38],"thin-plate":[39],"by":[40,54,115],"using":[41],"bulk":[42],"micromachining":[43],"technology.":[44],"ultrasonic":[46],"waves":[49],"are":[50],"launched":[51],"received":[53],"pair":[56],"Cr/Au":[58],"interdigital":[59],"transducers":[60],"(IDTs)":[61],"on":[62],"surface":[64],"ZnO":[67,80],"piezoelectric":[68,81],"thin":[69,82],"film.":[70],"In":[71],"this":[72],"study,":[73],"we":[74],"demonstrated":[75],"high":[77],"C-axis":[78],"orientation":[79],"film":[83],"deposition,":[84],"an":[85,116],"IgE":[86,113],"self-assembly":[87],"monolayer":[88],"(SAM)":[89],"immobilization":[90],"FPW":[93],"allergy":[94],"21":[97],"MHz":[98],"center":[99],"frequency":[100],"233":[102],"cm3/g":[103],"mass":[104],"sensitivity.":[105],"first":[109],"report":[110],"demonstrating":[111],"human":[112],"detection":[114],"FPW-based":[117],"microsensor.":[118]},"counts_by_year":[{"year":2022,"cited_by_count":1},{"year":2021,"cited_by_count":1},{"year":2020,"cited_by_count":1},{"year":2018,"cited_by_count":1},{"year":2015,"cited_by_count":1},{"year":2014,"cited_by_count":1},{"year":2013,"cited_by_count":1},{"year":2012,"cited_by_count":2}],"updated_date":"2026-11-03T10:50:19.383937","created_date":"2016-06-24T00:00:00"}