{"id":"https://openalex.org/W2012133289","doi":"https://doi.org/10.1063/1.1313248","title":"Accurate measurements of the intrinsic diffusivities of boron and phosphorus in silicon","display_name":"Accurate measurements of the intrinsic diffusivities of boron and phosphorus in silicon","publication_year":2000,"publication_date":"2000-09-25","ids":{"openalex":"https://openalex.org/W2012133289","doi":"https://doi.org/10.1063/1.1313248","mag":"2012133289"},"language":"en","primary_location":{"id":"doi:10.1063/1.1313248","doi":"https://doi.org/10.1063/1.1313248","is_oa":false,"landing_page_url":"https://doi.org/10.1063/1.1313248","pdf_url":null,"source":{"id":"https://openalex.org/S105243760","display_name":"Applied Physics Letters","issn_l":"0003-6951","issn":["0003-6951","1077-3118","1520-8842"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-a","jufo-3","ki-jl-1","norway-2","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Applied Physics Letters","raw_type":"journal-article"},"parent_works":[],"lineage":["https://openalex.org/W2012133289"],"child_works_count":0,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5036949613","display_name":"Yaser M. Haddara","orcid":"https://orcid.org/0000-0002-4159-0938","observed_orcids":["https://orcid.org/0000-0002-4159-0938"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Yaser M. Haddara","raw_affiliation_strings":["CoRelation Inc., 945 Hamilton Ave., Menlo Park, California\u200994025"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CoRelation Inc., 945 Hamilton Ave., Menlo Park, California\u200994025","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5038587914","display_name":"Brennan T. Folmer","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I33213144","display_name":"University of Florida","ror":"https://ror.org/02y3ad647","country_code":"US","type":"education","lineage":["https://openalex.org/I33213144"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Brennan T. Folmer","raw_affiliation_strings":["SWAMP Center, Department of Electrical and Computer Engineering, University of Florida, Gainesville, Florida\u200932611"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"SWAMP Center, Department of Electrical and Computer Engineering, University of Florida, Gainesville, Florida\u200932611","institution_ids":["https://openalex.org/I33213144"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5013059066","display_name":"Mark E. Law","orcid":"https://orcid.org/0000-0002-0363-2041","observed_orcids":["https://orcid.org/0000-0002-0363-2041"]},"institutions":[{"id":"https://openalex.org/I33213144","display_name":"University of Florida","ror":"https://ror.org/02y3ad647","country_code":"US","type":"education","lineage":["https://openalex.org/I33213144"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Mark E. Law","raw_affiliation_strings":["SWAMP Center, Department of Electrical and Computer Engineering, University of Florida, Gainesville, Florida\u200932611"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"SWAMP Center, Department of Electrical and Computer Engineering, University of Florida, Gainesville, Florida\u200932611","institution_ids":["https://openalex.org/I33213144"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5025603845","display_name":"Temel H. Buyuklimanli","orcid":"https://orcid.org/0000-0002-2009-5452","observed_orcids":["https://orcid.org/0000-0002-2009-5452"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Temel Buyuklimanli","raw_affiliation_strings":["Evans East, 666 Plainsboro Road, Suite 1236, Plainsboro, New Jersey\u200908536"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Evans East, 666 Plainsboro Road, Suite 1236, Plainsboro, New Jersey\u200908536","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":5.451,"has_fulltext":false,"cited_by_count":74,"citation_normalized_percentile":{"value":0.96684359,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":87,"max":98},"biblio":{"volume":"77","issue":"13","first_page":"1976","last_page":"1978"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11853","display_name":"Semiconductor materials and interfaces","score":0.5990999937057495,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11853","display_name":"Semiconductor materials and interfaces","score":0.5990999937057495,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.3458999991416931,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10624","display_name":"Silicon and Solar Cell Technologies","score":0.037300001829862595,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/boron-diffusion","display_name":"boron diffusion","score":0.7480000257492065},{"id":"https://openalex.org/keywords/phosphorus-diffusion","display_name":"phosphorus diffusion","score":1.0},{"id":"https://openalex.org/keywords/intrinsic-diffusivity","display_name":"intrinsic diffusivity","score":0.8769999742507935},{"id":"https://openalex.org/keywords/silicon","display_name":"silicon","score":0.7770000100135803},{"id":"https://openalex.org/keywords/dopant-diffusion","display_name":"dopant diffusion","score":0.656000018119812},{"id":"https://openalex.org/keywords/transient-enhanced-diffusion","display_name":"transient enhanced diffusion","score":0.8510000109672546},{"id":"https://openalex.org/keywords/secondary-ion-mass-spectrometry","display_name":"secondary ion mass spectrometry","score":0.828000009059906},{"id":"https://openalex.org/keywords/surface-effects","display_name":"surface effects","score":0.6029999852180481},{"id":"https://openalex.org/keywords/czochralski-wafers","display_name":"Czochralski wafers","score":0.8669999837875366},{"id":"https://openalex.org/keywords/epitaxial-layers","display_name":"epitaxial layers","score":0.9380000233650208},{"id":"https://openalex.org/keywords/arsenic","display_name":"arsenic","score":0.6370000243186951},{"id":"https://openalex.org/keywords/antimony","display_name":"antimony","score":0.8050000071525574},{"id":"https://openalex.org/keywords/low-temperature-diffusion","display_name":"low-temperature diffusion","score":0.5189999938011169}],"concepts":[{"id":"https://openalex.org/C37668627","wikidata":"https://www.wikidata.org/wiki/Q3381809","display_name":"Thermal diffusivity","level":2,"score":0.7301585674285889},{"id":"https://openalex.org/C191952053","wikidata":"https://www.wikidata.org/wiki/Q15119237","display_name":"Dopant","level":3,"score":0.7291626334190369},{"id":"https://openalex.org/C77671233","wikidata":"https://www.wikidata.org/wiki/Q556046","display_name":"Secondary ion mass spectrometry","level":3,"score":0.6394181847572327},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.6238172054290771},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.6013286113739014},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.5769914984703064},{"id":"https://openalex.org/C69357855","wikidata":"https://www.wikidata.org/wiki/Q163214","display_name":"Diffusion","level":2,"score":0.5549641847610474},{"id":"https://openalex.org/C2777855556","wikidata":"https://www.wikidata.org/wiki/Q4339544","display_name":"Annealing (glass)","level":2,"score":0.5534560084342957},{"id":"https://openalex.org/C501308230","wikidata":"https://www.wikidata.org/wiki/Q618","display_name":"Boron","level":2,"score":0.5465280413627625},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.49449846148490906},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.43677571415901184},{"id":"https://openalex.org/C110738630","wikidata":"https://www.wikidata.org/wiki/Q1135540","display_name":"Epitaxy","level":3,"score":0.43644046783447266},{"id":"https://openalex.org/C162356407","wikidata":"https://www.wikidata.org/wiki/Q180809","display_name":"Mass spectrometry","level":2,"score":0.24131664633750916},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.19362786412239075},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.1808129847049713},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.17571163177490234},{"id":"https://openalex.org/C57863236","wikidata":"https://www.wikidata.org/wiki/Q1130571","display_name":"Doping","level":2,"score":0.12204661965370178},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.10457602143287659},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.09642365574836731},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.09318232536315918},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1063/1.1313248","doi":"https://doi.org/10.1063/1.1313248","is_oa":false,"landing_page_url":"https://doi.org/10.1063/1.1313248","pdf_url":null,"source":{"id":"https://openalex.org/S105243760","display_name":"Applied Physics Letters","issn_l":"0003-6951","issn":["0003-6951","1077-3118","1520-8842"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-a","jufo-3","ki-jl-1","norway-2","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Applied Physics Letters","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":17,"referenced_works":["https://openalex.org/W362080316","https://openalex.org/W1521626435","https://openalex.org/W1970409488","https://openalex.org/W1998081640","https://openalex.org/W2005958227","https://openalex.org/W2007009549","https://openalex.org/W2009737492","https://openalex.org/W2012978931","https://openalex.org/W2040913819","https://openalex.org/W2053631216","https://openalex.org/W2056315436","https://openalex.org/W2058768511","https://openalex.org/W2063540617","https://openalex.org/W2077994487","https://openalex.org/W2087618248","https://openalex.org/W2089241239","https://openalex.org/W4238680018"],"related_works":["https://openalex.org/W1981808964","https://openalex.org/W2040928941","https://openalex.org/W2078925586","https://openalex.org/W2090460754","https://openalex.org/W2075756295","https://openalex.org/W2288226525","https://openalex.org/W1977935904","https://openalex.org/W1986029519","https://openalex.org/W2023805855","https://openalex.org/W2013725732"],"abstract_inverted_index":{"All":[0,139],"activity":[1],"in":[2,17,40,54,125,128,149,152,184,234,248],"modeling":[3],"transient":[4,110,161,194],"diffusion":[5,86],"behavior":[6,87],"relies":[7],"on":[8,168],"knowledge":[9],"of":[10,15,37,59,85,99,119,172,250],"the":[11,35,49,97,115,176,182,204,216,230,235,251],"inert":[12,116],"intrinsic":[13,117],"diffusivities":[14,100,118,226],"dopants":[16,207],"Si.":[18],"The":[19,57],"measurements":[20,77],"upon":[21],"which":[22],"these":[23],"values":[24,231],"are":[25,79,192,200,227],"based":[26],"were":[27],"conducted":[28],"over":[29],"15":[30],"years":[31],"ago.":[32],"Since":[33],"then,":[34],"quality":[36],"wafers":[38,134],"used":[39],"industrial":[41],"applications":[42],"has":[43,62,88],"significantly":[44],"changed.":[45],"This":[46],"will":[47],"affect":[48,181],"effective":[50],"diffusivity":[51,183],"through":[52],"changes":[53],"trap":[55],"concentrations.":[56],"reliability":[58],"measurement":[60],"techniques":[61],"also":[63],"changed":[64,89],"dramatically":[65],"from":[66,101],"tracer":[67],"and":[68,123,131,135,159,188,224],"staining":[69],"methods":[70],"to":[71,154,174,215,244],"secondary":[72],"ion":[73],"mass":[74],"spectrometry":[75],"(SIMS)":[76],"that":[78,96,179,190,197,222],"dominant":[80],"today.":[81],"Finally,":[82],"our":[83,212,242],"understanding":[84],"significantly.":[90],"For":[91],"example,":[92],"we":[93,210],"now":[94],"understand":[95],"extraction":[98,214],"implanted":[102],"samples":[103,140,173],"with":[104],"no":[105,193],"pre-anneal":[106],"includes":[107],"a":[108,142,156,185],"significant":[109],"effect.":[111],"We":[112,164,240],"have":[113],"measured":[114],"As,":[120],"B,":[121],"P,":[122],"Sb":[124],"different":[126,177,228],"substrates":[127],"defect-free":[129],"Czochralski":[130],"float":[132],"zone":[133],"epitaxially":[136],"grown":[137],"layers.":[138],"underwent":[141],"30":[143],"min":[144],"anneal":[145],"at":[146,237],"1000":[147],"\u00b0C":[148],"dry":[150],"oxygen":[151],"order":[153],"grow":[155],"cap":[157],"oxide":[158],"eliminate":[160],"enhanced":[162],"diffusion.":[163],"performed":[165],"SIMS":[166],"analysis":[167],"an":[169],"initial":[170],"batch":[171],"evaluate":[175],"factors":[178,252],"may":[180],"nonideal":[186],"manner":[187],"concluded":[189],"there":[191],"effects":[195,199],"but":[196],"surface":[198],"important.":[201],"Hence,":[202],"for":[203],"fast":[205],"moving":[206],"(B,":[208],"P)":[209],"restrict":[211],"data":[213,220,247],"deep":[217],"implants.":[218],"Our":[219],"show":[221],"B":[223],"P":[225],"than":[229],"commonly":[232],"assumed":[233],"literature":[236],"low":[238],"temperatures.":[239],"compare":[241],"results":[243],"previously":[245],"published":[246],"light":[249],"mentioned":[253],"here.":[254]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":2},{"year":2021,"cited_by_count":1},{"year":2019,"cited_by_count":2},{"year":2017,"cited_by_count":1},{"year":2016,"cited_by_count":5},{"year":2015,"cited_by_count":1},{"year":2014,"cited_by_count":3},{"year":2013,"cited_by_count":1},{"year":2012,"cited_by_count":6}],"updated_date":"2026-11-07T11:25:07.637180","created_date":"2016-06-24T00:00:00"}