{"id":"https://openalex.org/W2011803788","doi":"https://doi.org/10.1109/jsen.2012.2229563","title":"Flexible Sputter-Deposited Carbon Strain Sensor","display_name":"Flexible Sputter-Deposited Carbon Strain Sensor","publication_year":2012,"publication_date":"2012-11-21","ids":{"openalex":"https://openalex.org/W2011803788","doi":"https://doi.org/10.1109/jsen.2012.2229563","mag":"2011803788"},"language":"en","primary_location":{"id":"doi:10.1109/jsen.2012.2229563","doi":"https://doi.org/10.1109/jsen.2012.2229563","is_oa":false,"landing_page_url":"https://doi.org/10.1109/jsen.2012.2229563","pdf_url":null,"source":{"id":"https://openalex.org/S189694085","display_name":"IEEE Sensors Journal","issn_l":"1530-437X","issn":["1530-437X","1558-1748","2379-9153"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-c","jufo-2","ki-jl-2","norway-2","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310321027","host_organization_name":"IEEE Sensors Council","host_organization_lineage":["https://openalex.org/P4310321027","https://openalex.org/P4310319808"],"host_organization_lineage_names":["IEEE Sensors Council","Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Sensors Journal","raw_type":"journal-article"},"volume":null,"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5032564521","display_name":"Uday Tata","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I189196454","display_name":"The University of Texas at Arlington","ror":"https://ror.org/019kgqr73","country_code":"US","type":"education","lineage":["https://openalex.org/I189196454"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Uday Tata","raw_affiliation_strings":["Department of Electrical Engineering, University of Texas at Arlington, Arlington, TX, USA","[Dept. of Electr. Eng., Univ. of Texas at Arlington, Arlington, TX, USA]"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, University of Texas at Arlington, Arlington, TX, USA","institution_ids":["https://openalex.org/I189196454"]},{"raw_affiliation_string":"[Dept. of Electr. Eng., Univ. of Texas at Arlington, Arlington, TX, USA]","institution_ids":["https://openalex.org/I189196454"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5038366927","display_name":"Hung Cao","orcid":"https://orcid.org/0000-0003-4197-7208","observed_orcids":["https://orcid.org/0000-0003-4197-7208"]},"institutions":[{"id":"https://openalex.org/I189196454","display_name":"The University of Texas at Arlington","ror":"https://ror.org/019kgqr73","country_code":"US","type":"education","lineage":["https://openalex.org/I189196454"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Hung Cao","raw_affiliation_strings":["Department of Electrical Engineering, University of Texas at Arlington, Arlington, TX, USA","[Dept. of Electr. Eng., Univ. of Texas at Arlington, Arlington, TX, USA]"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, University of Texas at Arlington, Arlington, TX, USA","institution_ids":["https://openalex.org/I189196454"]},{"raw_affiliation_string":"[Dept. of Electr. Eng., Univ. of Texas at Arlington, Arlington, TX, USA]","institution_ids":["https://openalex.org/I189196454"]}]},{"author_position":"middle","author":{"id":null,"display_name":"Cuong M. Nguyen","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I189196454","display_name":"The University of Texas at Arlington","ror":"https://ror.org/019kgqr73","country_code":"US","type":"education","lineage":["https://openalex.org/I189196454"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Cuong M. Nguyen","raw_affiliation_strings":["Department of Electrical Engineering, University of Texas at Arlington, Arlington, TX, USA","[Dept. of Electr. Eng., Univ. of Texas at Arlington, Arlington, TX, USA]"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, University of Texas at Arlington, Arlington, TX, USA","institution_ids":["https://openalex.org/I189196454"]},{"raw_affiliation_string":"[Dept. of Electr. Eng., Univ. of Texas at Arlington, Arlington, TX, USA]","institution_ids":["https://openalex.org/I189196454"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5033472595","display_name":"J.\u2010C. Chiao","orcid":"https://orcid.org/0000-0001-9670-0340","observed_orcids":["https://orcid.org/0000-0001-9670-0340"]},"institutions":[{"id":"https://openalex.org/I189196454","display_name":"The University of Texas at Arlington","ror":"https://ror.org/019kgqr73","country_code":"US","type":"education","lineage":["https://openalex.org/I189196454"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Jung-Chih Chiao","raw_affiliation_strings":["Department of Electrical Engineering, University of Texas at Arlington, Arlington, TX, USA","[Dept. of Electr. Eng., Univ. of Texas at Arlington, Arlington, TX, USA]"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, University of Texas at Arlington, Arlington, TX, USA","institution_ids":["https://openalex.org/I189196454"]},{"raw_affiliation_string":"[Dept. of Electr. Eng., Univ. of Texas at Arlington, Arlington, TX, USA]","institution_ids":["https://openalex.org/I189196454"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I189196454"],"apc_list":{"value":2645,"currency":"USD","value_usd":2645},"apc_paid":null,"fwci":0.7286,"has_fulltext":false,"cited_by_count":8,"citation_normalized_percentile":{"value":0.69356583,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":98},"biblio":{"volume":"13","issue":"2","first_page":"444","last_page":"445"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10338","display_name":"Advanced Sensor and Energy Harvesting Materials","score":0.7875999808311462,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10338","display_name":"Advanced Sensor and Energy Harvesting Materials","score":0.7875999808311462,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.16259999573230743,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10377","display_name":"Metal and Thin Film Mechanics","score":0.02250000089406967,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/strain-sensors","display_name":"strain sensors","score":0.7960000038146973},{"id":"https://openalex.org/keywords/amorphous-carbon","display_name":"amorphous carbon","score":0.8740000128746033},{"id":"https://openalex.org/keywords/piezoresistive-sensors","display_name":"piezoresistive sensors","score":0.8259999752044678},{"id":"https://openalex.org/keywords/sputter-deposition","display_name":"sputter deposition","score":0.8650000095367432},{"id":"https://openalex.org/keywords/flexible-substrates","display_name":"flexible substrates","score":0.734000027179718},{"id":"https://openalex.org/keywords/polyimide","display_name":"polyimide","score":0.9649999737739563},{"id":"https://openalex.org/keywords/laser-micromachining","display_name":"laser micromachining","score":0.9919999837875366},{"id":"https://openalex.org/keywords/gauge-factor","display_name":"gauge factor","score":0.7749999761581421},{"id":"https://openalex.org/keywords/hysteresis","display_name":"hysteresis","score":0.796999990940094},{"id":"https://openalex.org/keywords/dynamic-response","display_name":"dynamic response","score":0.6449999809265137}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.8494625091552734},{"id":"https://openalex.org/C2777403436","wikidata":"https://www.wikidata.org/wiki/Q5527632","display_name":"Gauge factor","level":4,"score":0.84578537940979},{"id":"https://openalex.org/C2780965675","wikidata":"https://www.wikidata.org/wiki/Q145958","display_name":"Polyimide","level":3,"score":0.7739486694335938},{"id":"https://openalex.org/C60584519","wikidata":"https://www.wikidata.org/wiki/Q610723","display_name":"Strain gauge","level":2,"score":0.7553417682647705},{"id":"https://openalex.org/C198490522","wikidata":"https://www.wikidata.org/wiki/Q1932915","display_name":"Piezoresistive effect","level":2,"score":0.7162315845489502},{"id":"https://openalex.org/C123299182","wikidata":"https://www.wikidata.org/wiki/Q190837","display_name":"Hysteresis","level":2,"score":0.597208559513092},{"id":"https://openalex.org/C22423302","wikidata":"https://www.wikidata.org/wiki/Q898444","display_name":"Sputtering","level":3,"score":0.5772296190261841},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.5621650218963623},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5548787117004395},{"id":"https://openalex.org/C2777289219","wikidata":"https://www.wikidata.org/wiki/Q7632154","display_name":"Substrate (aquarium)","level":2,"score":0.5334399342536926},{"id":"https://openalex.org/C56052488","wikidata":"https://www.wikidata.org/wiki/Q103382","display_name":"Amorphous solid","level":2,"score":0.5320063233375549},{"id":"https://openalex.org/C145667562","wikidata":"https://www.wikidata.org/wiki/Q7646003","display_name":"Surface micromachining","level":4,"score":0.489112913608551},{"id":"https://openalex.org/C201931942","wikidata":"https://www.wikidata.org/wiki/Q798012","display_name":"Amorphous carbon","level":3,"score":0.4607466459274292},{"id":"https://openalex.org/C61427134","wikidata":"https://www.wikidata.org/wiki/Q847609","display_name":"Sputter deposition","level":4,"score":0.4532736837863922},{"id":"https://openalex.org/C141354745","wikidata":"https://www.wikidata.org/wiki/Q17227","display_name":"Cantilever","level":2,"score":0.45240527391433716},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.39244210720062256},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.28677159547805786},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.20984166860580444},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.09382027387619019},{"id":"https://openalex.org/C8010536","wikidata":"https://www.wikidata.org/wiki/Q160398","display_name":"Crystallography","level":1,"score":0.059879302978515625},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.0},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.0},{"id":"https://openalex.org/C111368507","wikidata":"https://www.wikidata.org/wiki/Q43518","display_name":"Oceanography","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/jsen.2012.2229563","doi":"https://doi.org/10.1109/jsen.2012.2229563","is_oa":false,"landing_page_url":"https://doi.org/10.1109/jsen.2012.2229563","pdf_url":null,"source":{"id":"https://openalex.org/S189694085","display_name":"IEEE Sensors Journal","issn_l":"1530-437X","issn":["1530-437X","1558-1748","2379-9153"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-c","jufo-2","ki-jl-2","norway-2","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310321027","host_organization_name":"IEEE Sensors Council","host_organization_lineage":["https://openalex.org/P4310321027","https://openalex.org/P4310319808"],"host_organization_lineage_names":["IEEE Sensors Council","Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Sensors Journal","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":5,"referenced_works":["https://openalex.org/W1966704944","https://openalex.org/W2050248078","https://openalex.org/W2067053570","https://openalex.org/W2103107528","https://openalex.org/W2121984978"],"related_works":["https://openalex.org/W6946169846","https://openalex.org/W2067053570","https://openalex.org/W2791450420","https://openalex.org/W4311433226","https://openalex.org/W6955209162","https://openalex.org/W2967226000","https://openalex.org/W3084130889","https://openalex.org/W3082053180","https://openalex.org/W2471476938","https://openalex.org/W4389077646"],"abstract_inverted_index":{"In":[0],"this":[1],"letter,":[2],"we":[3],"report":[4],"a":[5,13,22,42],"piezoresistive":[6],"amorphous":[7],"carbon":[8,18],"strain":[9,28,36],"sensor":[10],"fabricated":[11],"on":[12],"flexible":[14],"polyimide":[15,24],"substrate.":[16],"Amorphous":[17],"was":[19],"sputter-deposited":[20],"onto":[21],"125-\u03bcm-thick":[23],"film":[25],"and":[26,50],"the":[27,56],"gauges":[29],"were":[30,38],"tailored":[31],"using":[32,41],"laser":[33],"micromachining.":[34],"The":[35],"sensors":[37],"tested":[39],"by":[40],"cantilever":[43],"setup":[44],"to":[45],"obtain":[46],"sensitivity,":[47],"hysteresis,":[48],"repeatability,":[49],"dynamic":[51],"response.":[52],"Gauge":[53],"factors":[54],"in":[55],"range":[57],"of":[58],"6-9":[59],"have":[60],"been":[61],"achieved.":[62]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":1},{"year":2019,"cited_by_count":1},{"year":2018,"cited_by_count":1},{"year":2015,"cited_by_count":4}],"updated_date":"2026-09-29T14:09:16.559479","created_date":"2016-06-24T00:00:00"}