{"id":"https://openalex.org/W2011192937","doi":"https://doi.org/10.1117/12.809628","title":"Integrated incandescent microlamp coupled to SiO x N y waveguide","display_name":"Integrated incandescent microlamp coupled to SiO x N y waveguide","publication_year":2009,"publication_date":"2009-02-12","ids":{"openalex":"https://openalex.org/W2011192937","doi":"https://doi.org/10.1117/12.809628","mag":"2011192937"},"language":"en","primary_location":{"id":"doi:10.1117/12.809628","doi":"https://doi.org/10.1117/12.809628","is_oa":false,"landing_page_url":"https://doi.org/10.1117/12.809628","pdf_url":null,"source":{"id":"https://openalex.org/S183492911","display_name":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","issn_l":"0277-786X","issn":["0277-786X","1996-756X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","norway-1"],"host_organization":"https://openalex.org/P4310315543","host_organization_name":"SPIE","host_organization_lineage":["https://openalex.org/P4310315543"],"host_organization_lineage_names":["SPIE"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"SPIE Proceedings","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5067485334","display_name":"Daniel Orquiza de Carvalho","orcid":"https://orcid.org/0000-0002-0518-2021","observed_orcids":["https://orcid.org/0000-0002-0518-2021"]},"institutions":[{"id":"https://openalex.org/I17974374","display_name":"Universidade de S\u00e3o Paulo","ror":"https://ror.org/036rp1748","country_code":"BR","type":"education","lineage":["https://openalex.org/I17974374"]}],"countries":["BR"],"is_corresponding":false,"raw_author_name":"D. O. Carvalho","raw_affiliation_strings":["Univ. of S\u00e3o Paulo (Brazil)","University of S\u00e3o Paulo , Brazil"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Univ. of S\u00e3o Paulo (Brazil)","institution_ids":["https://openalex.org/I17974374"]},{"raw_affiliation_string":"University of S\u00e3o Paulo , Brazil","institution_ids":["https://openalex.org/I17974374"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5014112057","display_name":"Marcelo N. P. Carre\u00f1o","orcid":"https://orcid.org/0000-0003-2124-1623","observed_orcids":["https://orcid.org/0000-0003-2124-1623"]},"institutions":[{"id":"https://openalex.org/I17974374","display_name":"Universidade de S\u00e3o Paulo","ror":"https://ror.org/036rp1748","country_code":"BR","type":"education","lineage":["https://openalex.org/I17974374"]}],"countries":["BR"],"is_corresponding":false,"raw_author_name":"M. N. P. Carre\u00f1o","raw_affiliation_strings":["Univ. of S\u00e3o Paulo (Brazil)","University of S\u00e3o Paulo , Brazil"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Univ. of S\u00e3o Paulo (Brazil)","institution_ids":["https://openalex.org/I17974374"]},{"raw_affiliation_string":"University of S\u00e3o Paulo , Brazil","institution_ids":["https://openalex.org/I17974374"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5045336715","display_name":"Gustavo P. Rehder","orcid":"https://orcid.org/0000-0002-0340-126X","observed_orcids":["https://orcid.org/0000-0002-0340-126X"]},"institutions":[{"id":"https://openalex.org/I17974374","display_name":"Universidade de S\u00e3o Paulo","ror":"https://ror.org/036rp1748","country_code":"BR","type":"education","lineage":["https://openalex.org/I17974374"]}],"countries":["BR"],"is_corresponding":false,"raw_author_name":"G. P. Rehder","raw_affiliation_strings":["Univ. of S\u00e3o Paulo (Brazil)","University of S\u00e3o Paulo , Brazil"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Univ. of S\u00e3o Paulo (Brazil)","institution_ids":["https://openalex.org/I17974374"]},{"raw_affiliation_string":"University of S\u00e3o Paulo , Brazil","institution_ids":["https://openalex.org/I17974374"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5064191896","display_name":"M.I. Alayo","orcid":"https://orcid.org/0000-0002-0359-4639","observed_orcids":["https://orcid.org/0000-0002-0359-4639"]},"institutions":[{"id":"https://openalex.org/I17974374","display_name":"Universidade de S\u00e3o Paulo","ror":"https://ror.org/036rp1748","country_code":"BR","type":"education","lineage":["https://openalex.org/I17974374"]}],"countries":["BR"],"is_corresponding":false,"raw_author_name":"M. I. Alayo","raw_affiliation_strings":["Univ. of S\u00e3o Paulo (Brazil)","University of S\u00e3o Paulo , Brazil"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Univ. of S\u00e3o Paulo (Brazil)","institution_ids":["https://openalex.org/I17974374"]},{"raw_affiliation_string":"University of S\u00e3o Paulo , Brazil","institution_ids":["https://openalex.org/I17974374"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I17974374"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":4,"citation_normalized_percentile":{"value":0.07450809,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":95},"biblio":{"volume":"7208","issue":null,"first_page":"72080U","last_page":"72080U"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":0.9937000274658203,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":0.9937000274658203,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.005900000222027302,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11050","display_name":"Photorefractive and Nonlinear Optics","score":0.0,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/silicon-oxynitride-waveguides","display_name":"silicon oxynitride waveguides","score":0.972000002861023},{"id":"https://openalex.org/keywords/optical-coupling","display_name":"optical coupling","score":0.5580000281333923},{"id":"https://openalex.org/keywords/bulk-micromachining","display_name":"bulk micromachining","score":0.8569999933242798},{"id":"https://openalex.org/keywords/koh-etching","display_name":"KOH etching","score":0.628000020980835},{"id":"https://openalex.org/keywords/integrated-light-sources","display_name":"integrated light sources","score":0.46000000834465027},{"id":"https://openalex.org/keywords/mems","display_name":"MEMS","score":0.3070000112056732},{"id":"https://openalex.org/keywords/pecvd-deposition","display_name":"PECVD deposition","score":0.6159999966621399}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.8140652179718018},{"id":"https://openalex.org/C173886181","wikidata":"https://www.wikidata.org/wiki/Q47616","display_name":"Incandescent light bulb","level":2,"score":0.771899938583374},{"id":"https://openalex.org/C2779476251","wikidata":"https://www.wikidata.org/wiki/Q7515030","display_name":"Silicon oxynitride","level":4,"score":0.6273186802864075},{"id":"https://openalex.org/C200687136","wikidata":"https://www.wikidata.org/wiki/Q11233438","display_name":"Waveguide","level":2,"score":0.6117740869522095},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5952591300010681},{"id":"https://openalex.org/C36456112","wikidata":"https://www.wikidata.org/wiki/Q288064","display_name":"Cladding (metalworking)","level":2,"score":0.5801109075546265},{"id":"https://openalex.org/C38347018","wikidata":"https://www.wikidata.org/wiki/Q905958","display_name":"Plasma-enhanced chemical vapor deposition","level":3,"score":0.5724557638168335},{"id":"https://openalex.org/C145667562","wikidata":"https://www.wikidata.org/wiki/Q7646003","display_name":"Surface micromachining","level":4,"score":0.5619664192199707},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.5387770533561707},{"id":"https://openalex.org/C2776390347","wikidata":"https://www.wikidata.org/wiki/Q474163","display_name":"Amorphous silicon","level":4,"score":0.5236375331878662},{"id":"https://openalex.org/C2777289219","wikidata":"https://www.wikidata.org/wiki/Q7632154","display_name":"Substrate (aquarium)","level":2,"score":0.4711940288543701},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.3656827211380005},{"id":"https://openalex.org/C2779667780","wikidata":"https://www.wikidata.org/wiki/Q18206302","display_name":"Crystalline silicon","level":3,"score":0.2657861113548279},{"id":"https://openalex.org/C2777431650","wikidata":"https://www.wikidata.org/wiki/Q413828","display_name":"Silicon nitride","level":3,"score":0.25000280141830444},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.15113326907157898},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.09018626809120178},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C111368507","wikidata":"https://www.wikidata.org/wiki/Q43518","display_name":"Oceanography","level":1,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1117/12.809628","doi":"https://doi.org/10.1117/12.809628","is_oa":false,"landing_page_url":"https://doi.org/10.1117/12.809628","pdf_url":null,"source":{"id":"https://openalex.org/S183492911","display_name":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","issn_l":"0277-786X","issn":["0277-786X","1996-756X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","norway-1"],"host_organization":"https://openalex.org/P4310315543","host_organization_name":"SPIE","host_organization_lineage":["https://openalex.org/P4310315543"],"host_organization_lineage_names":["SPIE"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"SPIE Proceedings","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320320997","display_name":"Funda\u00e7\u00e3o de Amparo \u00e0 Pesquisa do Estado de S\u00e3o Paulo","ror":"https://ror.org/02ddkpn78"},{"id":"https://openalex.org/F4320323339","display_name":"Universidade de S\u00e3o Paulo","ror":"https://ror.org/036rp1748"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":7,"referenced_works":["https://openalex.org/W1915286538","https://openalex.org/W1959234221","https://openalex.org/W2008710821","https://openalex.org/W2403197450","https://openalex.org/W2534673004","https://openalex.org/W3001618029","https://openalex.org/W3199963640"],"related_works":["https://openalex.org/W1973284857","https://openalex.org/W1998443001","https://openalex.org/W1581479182","https://openalex.org/W2031588623","https://openalex.org/W4385948805","https://openalex.org/W2087499927","https://openalex.org/W3206242677","https://openalex.org/W2124309080","https://openalex.org/W2020326663","https://openalex.org/W1998304904"],"abstract_inverted_index":{"(This":[0],"paper":[1],"was":[2],"presented":[3],"in":[4,52,122],"Session":[5],"4,":[6],"Waveguide":[7],"Devices,":[8],"during":[9],"the":[10,26,39,43,75,78,81,84,87,90,111,119,130,132,136,143,164,167,171],"MEMS":[11],"and":[12,31,113],"Miniaturized":[13],"Systems":[14],"VIII":[15],"conference.)":[16],"This":[17,65],"work":[18,67],"shows":[19],"improvements":[20],"on":[21,99],"previous":[22,36],"results":[23,37],"related":[24],"to":[25,69,74,127,145,148],"integration":[27],"of":[28,41,56,80,83,89,118,139,154,170],"optical":[29,71],"waveguides":[30],"simple":[32],"light":[33,44,92],"sources.":[34],"These":[35],"showed":[38],"possibility":[40],"coupling":[42,169],"emitted":[45],"from":[46,129],"an":[47],"incandescent":[48,91,149],"chromium":[49],"filament":[50,144],"embedded":[51,133],"a":[53,62,100,155],"self-supported":[54],"region":[55],"silicon":[57,102,105,120,159],"oxynitride":[58,106],"(SiOxNy)":[59],"film":[60],"with":[61],"SiOxNy":[63],"waveguide.":[64],"specific":[66],"aims":[68],"increase":[70],"power":[72],"coupled":[73],"waveguide":[76,96],"through":[77],"investigation":[79],"geometry":[82],"microlamp.":[85],"Here,":[86],"length":[88],"is":[93,125],"analyzed.":[94],"The":[95],"are":[97],"fabricated":[98],"(100)":[101],"substrate":[103,121,131],"using":[104],"deposited":[107,162],"by":[108],"PECVD":[109],"as":[110],"core":[112],"cladding":[114],"layers.":[115],"Bulk":[116],"micromachining":[117],"KOH":[123],"solution":[124],"used":[126],"free":[128],"filament,":[134],"reducing":[135],"thermal":[137],"dissipation":[138],"that":[140],"region,":[141],"allowing":[142],"heat":[146],"up":[147],"temperatures.":[150],"A":[151],"microannealing":[152],"process":[153],"PECVD-obtained":[156],"amorphous":[157],"hydrogenated":[158],"carbide":[160],"(a-SiC:H)":[161],"over":[163],"microlamp":[165],"allows":[166],"correct":[168],"light.":[172]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2020,"cited_by_count":2},{"year":2017,"cited_by_count":1}],"updated_date":"2026-10-16T09:59:22.235173","created_date":"2016-06-24T00:00:00"}