{"id":"https://openalex.org/W2010735762","doi":"https://doi.org/10.1016/s0013-4686(97)00147-3","title":"Electrochemical micromachining: An environmentally friendly, high speed processing technology","display_name":"Electrochemical micromachining: An environmentally friendly, high speed processing technology","publication_year":1997,"publication_date":"1997-01-01","ids":{"openalex":"https://openalex.org/W2010735762","doi":"https://doi.org/10.1016/s0013-4686(97)00147-3","mag":"2010735762"},"language":"en","primary_location":{"id":"doi:10.1016/s0013-4686(97)00147-3","doi":"https://doi.org/10.1016/s0013-4686(97)00147-3","is_oa":false,"landing_page_url":"https://doi.org/10.1016/s0013-4686(97)00147-3","pdf_url":null,"source":{"id":"https://openalex.org/S198339081","display_name":"Electrochimica Acta","issn_l":"0013-4686","issn":["0013-4686","1873-3859"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-b","jufo-2","ki-jl-2","norway-2","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Electrochimica Acta","raw_type":"journal-article"},"volume":null,"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5004762342","display_name":"Madhav Datta","orcid":"https://orcid.org/0000-0003-2593-5606","observed_orcids":["https://orcid.org/0000-0003-2593-5606"]},"institutions":[{"id":"https://openalex.org/I4210114115","display_name":"IBM Research - Thomas J. Watson Research Center","ror":"https://ror.org/0265w5591","country_code":"US","type":"facility","lineage":["https://openalex.org/I1341412227","https://openalex.org/I4210114115"]}],"countries":["US"],"is_corresponding":true,"raw_author_name":"Madhav Datta","raw_affiliation_strings":["IBM Corporation, T. J. Watson Research Center, Yorktown Heights, NY 10598, U.S.A"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM Corporation, T. J. Watson Research Center, Yorktown Heights, NY 10598, U.S.A","institution_ids":["https://openalex.org/I4210114115"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5047437308","display_name":"Derek B. Harris","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210114115","display_name":"IBM Research - Thomas J. Watson Research Center","ror":"https://ror.org/0265w5591","country_code":"US","type":"facility","lineage":["https://openalex.org/I1341412227","https://openalex.org/I4210114115"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Derek Harris","raw_affiliation_strings":["IBM Corporation, T. J. Watson Research Center, Yorktown Heights, NY 10598, U.S.A"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM Corporation, T. J. Watson Research Center, Yorktown Heights, NY 10598, U.S.A","institution_ids":["https://openalex.org/I4210114115"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":["https://openalex.org/A5004762342"],"corresponding_institution_ids":["https://openalex.org/I4210114115"],"apc_list":{"value":3790,"currency":"USD","value_usd":3790},"apc_paid":null,"fwci":0.9629,"has_fulltext":false,"cited_by_count":92,"citation_normalized_percentile":{"value":0.73412068,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":99},"biblio":{"volume":"42","issue":"20-22","first_page":"3007","last_page":"3013"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11451","display_name":"Advanced Machining and Optimization Techniques","score":0.9990000128746033,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11451","display_name":"Advanced Machining and Optimization Techniques","score":0.9990000128746033,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10732","display_name":"Laser Material Processing Techniques","score":0.00019999999494757503,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11301","display_name":"Advanced Surface Polishing Techniques","score":9.999999747378752e-05,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/electrochemical-micromachining","display_name":"electrochemical micromachining","score":1.0},{"id":"https://openalex.org/keywords/wet-etching","display_name":"wet etching","score":0.7609999775886536},{"id":"https://openalex.org/keywords/environmentally-friendly-processes","display_name":"environmentally friendly processing","score":0.6660000085830688},{"id":"https://openalex.org/keywords/microstructure-fabrication","display_name":"microstructure fabrication","score":0.722000002861023},{"id":"https://openalex.org/keywords/hazardous-waste-minimization","display_name":"hazardous waste reduction","score":0.7229999899864197},{"id":"https://openalex.org/keywords/high-speed-machining","display_name":"high-speed machining","score":0.5109999775886536},{"id":"https://openalex.org/keywords/microelectronic-components","display_name":"microelectronic components","score":0.6970000267028809}],"concepts":[{"id":"https://openalex.org/C171534860","wikidata":"https://www.wikidata.org/wiki/Q655870","display_name":"Environmentally friendly","level":2,"score":0.8145153522491455},{"id":"https://openalex.org/C187937830","wikidata":"https://www.wikidata.org/wiki/Q175403","display_name":"Microelectronics","level":2,"score":0.7257404923439026},{"id":"https://openalex.org/C145667562","wikidata":"https://www.wikidata.org/wiki/Q7646003","display_name":"Surface micromachining","level":4,"score":0.677445650100708},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.5762799978256226},{"id":"https://openalex.org/C100460472","wikidata":"https://www.wikidata.org/wiki/Q2368605","display_name":"Etching (microfabrication)","level":3,"score":0.572515070438385},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.5685203671455383},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5637351870536804},{"id":"https://openalex.org/C22507642","wikidata":"https://www.wikidata.org/wiki/Q1069369","display_name":"Hazardous waste","level":2,"score":0.48343193531036377},{"id":"https://openalex.org/C52859227","wikidata":"https://www.wikidata.org/wiki/Q7877","display_name":"Electrochemistry","level":3,"score":0.46098384261131287},{"id":"https://openalex.org/C33220542","wikidata":"https://www.wikidata.org/wiki/Q6086567","display_name":"Isotropic etching","level":4,"score":0.4577869176864624},{"id":"https://openalex.org/C21880701","wikidata":"https://www.wikidata.org/wiki/Q2144042","display_name":"Process engineering","level":1,"score":0.40713590383529663},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.20975631475448608},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.1445334255695343},{"id":"https://openalex.org/C548081761","wikidata":"https://www.wikidata.org/wiki/Q180388","display_name":"Waste management","level":1,"score":0.12650200724601746},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.10767501592636108},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.0},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C18903297","wikidata":"https://www.wikidata.org/wiki/Q7150","display_name":"Ecology","level":1,"score":0.0},{"id":"https://openalex.org/C147789679","wikidata":"https://www.wikidata.org/wiki/Q11372","display_name":"Physical chemistry","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1016/s0013-4686(97)00147-3","doi":"https://doi.org/10.1016/s0013-4686(97)00147-3","is_oa":false,"landing_page_url":"https://doi.org/10.1016/s0013-4686(97)00147-3","pdf_url":null,"source":{"id":"https://openalex.org/S198339081","display_name":"Electrochimica Acta","issn_l":"0013-4686","issn":["0013-4686","1873-3859"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-b","jufo-2","ki-jl-2","norway-2","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Electrochimica Acta","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.7811999917030334,"display_name":"Responsible consumption and production","id":"https://metadata.un.org/sdg/12"}],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":9,"referenced_works":["https://openalex.org/W566645725","https://openalex.org/W1970519428","https://openalex.org/W1970661643","https://openalex.org/W2027002397","https://openalex.org/W2074533924","https://openalex.org/W2131722625","https://openalex.org/W2161209155","https://openalex.org/W4236030255","https://openalex.org/W4295679857"],"related_works":["https://openalex.org/W2086627650","https://openalex.org/W3094244095","https://openalex.org/W3021988353","https://openalex.org/W3164565244","https://openalex.org/W2593292513","https://openalex.org/W7065666167","https://openalex.org/W2367582941","https://openalex.org/W2043937918","https://openalex.org/W2166449763","https://openalex.org/W4390224421"],"abstract_inverted_index":null,"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":4},{"year":2024,"cited_by_count":4},{"year":2023,"cited_by_count":5},{"year":2022,"cited_by_count":3},{"year":2021,"cited_by_count":3},{"year":2020,"cited_by_count":5},{"year":2019,"cited_by_count":1},{"year":2018,"cited_by_count":4},{"year":2017,"cited_by_count":3},{"year":2016,"cited_by_count":1},{"year":2015,"cited_by_count":5},{"year":2014,"cited_by_count":7},{"year":2013,"cited_by_count":6},{"year":2012,"cited_by_count":1}],"updated_date":"2026-11-04T10:54:05.112534","created_date":"2016-06-24T00:00:00"}