{"id":"https://openalex.org/W2010708652","doi":"https://doi.org/10.1116/1.585863","title":"Use of scanning tunneling microscopy and transmission electron microscopy to quantify and characterize CoSi2 roughness","display_name":"Use of scanning tunneling microscopy and transmission electron microscopy to quantify and characterize CoSi2 roughness","publication_year":1992,"publication_date":"1992-07-01","ids":{"openalex":"https://openalex.org/W2010708652","doi":"https://doi.org/10.1116/1.585863","mag":"2010708652"},"language":"en","primary_location":{"id":"doi:10.1116/1.585863","doi":"https://doi.org/10.1116/1.585863","is_oa":false,"landing_page_url":"https://doi.org/10.1116/1.585863","pdf_url":null,"source":{"id":"https://openalex.org/S4210169477","display_name":"Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena","issn_l":"1071-1023","issn":["1071-1023","1520-8567"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","poland-70"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5033530254","display_name":"Richard C. Chapman","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"R. C. Chapman","raw_affiliation_strings":["MCNC, Research Triangle Park, North Carolina 27709"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"MCNC, Research Triangle Park, North Carolina 27709","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5103408552","display_name":"P. L. Smith","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"P. Smith","raw_affiliation_strings":["MCNC, Research Triangle Park, North Carolina 27709"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"MCNC, Research Triangle Park, North Carolina 27709","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5004142104","display_name":"R. P. Adu","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"R. P. Adu","raw_affiliation_strings":["MCNC, Research Triangle Park, North Carolina 27709"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"MCNC, Research Triangle Park, North Carolina 27709","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111456677","display_name":"Gary E. McGuire","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"G. E. McGuire","raw_affiliation_strings":["MCNC, Research Triangle Park, North Carolina 27709"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"MCNC, Research Triangle Park, North Carolina 27709","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5011728198","display_name":"C. A. Canovai","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I137902535","display_name":"North Carolina State University","ror":"https://ror.org/04tj63d06","country_code":"US","type":"education","lineage":["https://openalex.org/I137902535"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"C. Canovai","raw_affiliation_strings":["Department of Electrical and Computer Engineering, North Carolina State University, Raleigh, North Carolina 27695"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering, North Carolina State University, Raleigh, North Carolina 27695","institution_ids":["https://openalex.org/I137902535"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5111967734","display_name":"C. M. Osburn","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I137902535","display_name":"North Carolina State University","ror":"https://ror.org/04tj63d06","country_code":"US","type":"education","lineage":["https://openalex.org/I137902535"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"C. Osburn","raw_affiliation_strings":["Department of Electrical and Computer Engineering, North Carolina State University, Raleigh, North Carolina 27695","MCNC, Research Triangle Park, North Carolina 27709"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering, North Carolina State University, Raleigh, North Carolina 27695","institution_ids":["https://openalex.org/I137902535"]},{"raw_affiliation_string":"MCNC, Research Triangle Park, North Carolina 27709","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":2.5097,"has_fulltext":false,"cited_by_count":13,"citation_normalized_percentile":{"value":0.88286713,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"10","issue":"4","first_page":"1329","last_page":"1334"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11853","display_name":"Semiconductor materials and interfaces","score":0.9800000190734863,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11853","display_name":"Semiconductor materials and interfaces","score":0.9800000190734863,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.010400000028312206,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13531","display_name":"Surface and Thin Film Phenomena","score":0.0027000000700354576,"subfield":{"id":"https://openalex.org/subfields/3104","display_name":"Condensed Matter Physics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/cobalt-silicide","display_name":"cobalt silicide","score":0.9330000281333923},{"id":"https://openalex.org/keywords/shallow-junction-formation","display_name":"shallow junction formation","score":0.7879999876022339},{"id":"https://openalex.org/keywords/scanning-tunneling-microscopy","display_name":"scanning tunneling microscopy","score":0.7129999995231628},{"id":"https://openalex.org/keywords/transmission-electron-microscopy","display_name":"transmission electron microscopy","score":0.9980000257492065}],"concepts":[{"id":"https://openalex.org/C6518042","wikidata":"https://www.wikidata.org/wiki/Q175646","display_name":"Scanning tunneling microscope","level":2,"score":0.7724607586860657},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7569113969802856},{"id":"https://openalex.org/C71039073","wikidata":"https://www.wikidata.org/wiki/Q3439090","display_name":"Surface finish","level":2,"score":0.7162835597991943},{"id":"https://openalex.org/C107365816","wikidata":"https://www.wikidata.org/wiki/Q114817","display_name":"Surface roughness","level":2,"score":0.666701078414917},{"id":"https://openalex.org/C146088050","wikidata":"https://www.wikidata.org/wiki/Q744818","display_name":"Transmission electron microscopy","level":2,"score":0.581601083278656},{"id":"https://openalex.org/C26771246","wikidata":"https://www.wikidata.org/wiki/Q321095","display_name":"Scanning electron microscope","level":2,"score":0.4861757159233093},{"id":"https://openalex.org/C147080431","wikidata":"https://www.wikidata.org/wiki/Q1074953","display_name":"Microscopy","level":2,"score":0.4267466068267822},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.3438342809677124},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.338422954082489},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.2780027389526367},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.05110788345336914}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1116/1.585863","doi":"https://doi.org/10.1116/1.585863","is_oa":false,"landing_page_url":"https://doi.org/10.1116/1.585863","pdf_url":null,"source":{"id":"https://openalex.org/S4210169477","display_name":"Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena","issn_l":"1071-1023","issn":["1071-1023","1520-8567"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","poland-70"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W2315932912","https://openalex.org/W2622670269","https://openalex.org/W2049579945","https://openalex.org/W2606208972","https://openalex.org/W2091855382","https://openalex.org/W1976071727","https://openalex.org/W2011579841","https://openalex.org/W2059170937","https://openalex.org/W1967658299","https://openalex.org/W2023420547"],"abstract_inverted_index":{"Scanning":[0],"tunneling":[1],"microscopy":[2,7],"(STM)":[3],"and":[4,13,18,62,76,94],"transmission":[5],"electron":[6],"(TEM)":[8],"were":[9,113,121],"used":[10],"to":[11,30,55,115,123],"quantify":[12],"characterize":[14],"CoSi2":[15],"surface":[16,56,93],"roughness":[17,52,57,72,98,104,108],"CoSi2/Si":[19,25],"interface":[20,26,75,95],"roughness.":[21,96],"Roughness":[22],"at":[23,73],"the":[24,33,74,77,88,102],"has":[27],"been":[28],"reported":[29],"be":[31,69],"on":[32,87],"order":[34],"of":[35,92],"20":[36],"nm,":[37],"enough":[38],"for":[39],"concern":[40],"in":[41,45],"shallow":[42],"junction":[43],"formation":[44],"submicron":[46],"complementary":[47],"metal\u2013oxide":[48],"semiconductor":[49],"devices.":[50],"Interface":[51],"is":[53],"tied":[54],"by":[58,63,111,118],"thermal":[59,124],"grooving":[60,82,125],"kinetics":[61,126],"thermodynamics.":[64],"Hence,":[65],"a":[66],"correlation":[67],"should":[68],"seen":[70],"between":[71],"surface,":[78],"yielding":[79],"information":[80],"regarding":[81],"kinetics.":[83],"This":[84,97],"study":[85],"focused":[86],"processing":[89],"time":[90],"dependence":[91],"was":[99],"quantified":[100],"using":[101],"average":[103],"measurement":[105],"technique.":[106],"The":[107],"values":[109],"obtained":[110,117],"TEM":[112],"compared":[114],"those":[116],"STM.":[119],"Both":[120],"fitted":[122],"equations.":[127]},"counts_by_year":[],"updated_date":"2026-10-14T16:39:01.820549","created_date":"2016-06-24T00:00:00"}