{"id":"https://openalex.org/W2010657359","doi":"https://doi.org/10.1179/1743284713y.0000000236","title":"Annealing effect on microstructure and mechanical properties of magnetron sputtering Ti\u2013Si\u2013C thin film","display_name":"Annealing effect on microstructure and mechanical properties of magnetron sputtering Ti\u2013Si\u2013C thin film","publication_year":2013,"publication_date":"2013-04-04","ids":{"openalex":"https://openalex.org/W2010657359","doi":"https://doi.org/10.1179/1743284713y.0000000236","mag":"2010657359"},"language":"en","primary_location":{"id":"doi:10.1179/1743284713y.0000000236","doi":"https://doi.org/10.1179/1743284713y.0000000236","is_oa":false,"landing_page_url":"https://doi.org/10.1179/1743284713y.0000000236","pdf_url":null,"source":{"id":"https://openalex.org/S82336448","display_name":"Materials Science and Technology","issn_l":"0267-0836","issn":["0267-0836","1743-2847"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-d","jufo-1","ki-jl-1","norway-1","poland-70","russia-white-list-2"],"host_organization":"https://openalex.org/P4310320442","host_organization_name":"Maney Publishing","host_organization_lineage":["https://openalex.org/P4310320442"],"host_organization_lineage_names":["Maney Publishing"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Materials Science and Technology","raw_type":"journal-article"},"parent_works":[],"lineage":["https://openalex.org/W2010657359"],"child_works_count":0,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5017575772","display_name":"Zixu Chen","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I17145004","display_name":"Northwestern Polytechnical University","ror":"https://ror.org/01y0j0j86","country_code":"CN","type":"education","lineage":["https://openalex.org/I17145004"]},{"id":"https://openalex.org/I4391768207","display_name":"State Key Laboratory of Solidification Processing","ror":"https://ror.org/024dcqa50","country_code":"CN","type":"facility","lineage":["https://openalex.org/I17145004","https://openalex.org/I4391768207"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Z S Chen","raw_affiliation_strings":["State Key Laboratory of Solidification Processing Carbon/Carbon Composites Research Center, Northwestern Polytechnical University, Xi'an 710072, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Solidification Processing Carbon/Carbon Composites Research Center, Northwestern Polytechnical University, Xi'an 710072, China","institution_ids":["https://openalex.org/I17145004","https://openalex.org/I4391768207"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5077878492","display_name":"Huandong Li","orcid":"https://orcid.org/0009-0009-3086-1307","observed_orcids":["https://orcid.org/0009-0009-3086-1307"]},"institutions":[{"id":"https://openalex.org/I17145004","display_name":"Northwestern Polytechnical University","ror":"https://ror.org/01y0j0j86","country_code":"CN","type":"education","lineage":["https://openalex.org/I17145004"]},{"id":"https://openalex.org/I4391768207","display_name":"State Key Laboratory of Solidification Processing","ror":"https://ror.org/024dcqa50","country_code":"CN","type":"facility","lineage":["https://openalex.org/I17145004","https://openalex.org/I4391768207"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"H J Li","raw_affiliation_strings":["State Key Laboratory of Solidification Processing Carbon/Carbon Composites Research Center, Northwestern Polytechnical University, Xi'an 710072, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Solidification Processing Carbon/Carbon Composites Research Center, Northwestern Polytechnical University, Xi'an 710072, China","institution_ids":["https://openalex.org/I17145004","https://openalex.org/I4391768207"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5070913464","display_name":"Quanhong Fu","orcid":"https://orcid.org/0000-0003-1680-7557","observed_orcids":["https://orcid.org/0000-0003-1680-7557"]},"institutions":[{"id":"https://openalex.org/I17145004","display_name":"Northwestern Polytechnical University","ror":"https://ror.org/01y0j0j86","country_code":"CN","type":"education","lineage":["https://openalex.org/I17145004"]},{"id":"https://openalex.org/I4391768207","display_name":"State Key Laboratory of Solidification Processing","ror":"https://ror.org/024dcqa50","country_code":"CN","type":"facility","lineage":["https://openalex.org/I17145004","https://openalex.org/I4391768207"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Q G Fu","raw_affiliation_strings":["State Key Laboratory of Solidification Processing Carbon/Carbon Composites Research Center, Northwestern Polytechnical University, Xi'an 710072, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Solidification Processing Carbon/Carbon Composites Research Center, Northwestern Polytechnical University, Xi'an 710072, China","institution_ids":["https://openalex.org/I17145004","https://openalex.org/I4391768207"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5078710572","display_name":"Dou Yang","orcid":"https://orcid.org/0000-0002-1972-0468","observed_orcids":["https://orcid.org/0000-0002-1972-0468"]},"institutions":[{"id":"https://openalex.org/I17145004","display_name":"Northwestern Polytechnical University","ror":"https://ror.org/01y0j0j86","country_code":"CN","type":"education","lineage":["https://openalex.org/I17145004"]},{"id":"https://openalex.org/I4391768207","display_name":"State Key Laboratory of Solidification Processing","ror":"https://ror.org/024dcqa50","country_code":"CN","type":"facility","lineage":["https://openalex.org/I17145004","https://openalex.org/I4391768207"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"D Yang","raw_affiliation_strings":["State Key Laboratory of Solidification Processing Carbon/Carbon Composites Research Center, Northwestern Polytechnical University, Xi'an 710072, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Solidification Processing Carbon/Carbon Composites Research Center, Northwestern Polytechnical University, Xi'an 710072, China","institution_ids":["https://openalex.org/I17145004","https://openalex.org/I4391768207"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5101471937","display_name":"Qingliang Shen","orcid":"https://orcid.org/0000-0002-1593-897X","observed_orcids":["https://orcid.org/0000-0002-1593-897X"]},"institutions":[{"id":"https://openalex.org/I17145004","display_name":"Northwestern Polytechnical University","ror":"https://ror.org/01y0j0j86","country_code":"CN","type":"education","lineage":["https://openalex.org/I17145004"]},{"id":"https://openalex.org/I4391768207","display_name":"State Key Laboratory of Solidification Processing","ror":"https://ror.org/024dcqa50","country_code":"CN","type":"facility","lineage":["https://openalex.org/I17145004","https://openalex.org/I4391768207"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Q L Shen","raw_affiliation_strings":["State Key Laboratory of Solidification Processing Carbon/Carbon Composites Research Center, Northwestern Polytechnical University, Xi'an 710072, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Solidification Processing Carbon/Carbon Composites Research Center, Northwestern Polytechnical University, Xi'an 710072, China","institution_ids":["https://openalex.org/I17145004","https://openalex.org/I4391768207"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":["https://openalex.org/A5077878492"],"corresponding_institution_ids":["https://openalex.org/I17145004","https://openalex.org/I4391768207"],"apc_list":{"value":4150,"currency":"USD","value_usd":4150},"apc_paid":null,"fwci":0.3142,"has_fulltext":false,"cited_by_count":9,"citation_normalized_percentile":{"value":0.56323885,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":87,"max":95},"biblio":{"volume":"29","issue":"8","first_page":"975","last_page":"979"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10377","display_name":"Metal and Thin Film Mechanics","score":0.9535999894142151,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10377","display_name":"Metal and Thin Film Mechanics","score":0.9535999894142151,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12046","display_name":"MXene and MAX Phase Materials","score":0.041099999099969864,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13470","display_name":"Surface Treatment and Coatings","score":0.0007999999797903001,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/annealing-temperature","display_name":"annealing temperature","score":0.7820000052452087},{"id":"https://openalex.org/keywords/ti3sic2","display_name":"Ti3SiC2","score":0.8920000195503235},{"id":"https://openalex.org/keywords/ti5si3","display_name":"Ti5Si3","score":0.9129999876022339},{"id":"https://openalex.org/keywords/silicon-diffusion","display_name":"silicon diffusion","score":0.6660000085830688},{"id":"https://openalex.org/keywords/nucleation-and-growth","display_name":"nucleation and growth","score":0.7789999842643738},{"id":"https://openalex.org/keywords/microstructural-evolution","display_name":"microstructure evolution","score":0.6819999814033508},{"id":"https://openalex.org/keywords/hardness","display_name":"hardness","score":0.9120000004768372},{"id":"https://openalex.org/keywords/elastic-modulus","display_name":"elastic modulus","score":0.9959999918937683},{"id":"https://openalex.org/keywords/si-100-substrate","display_name":"Si(100) substrate","score":0.7239999771118164},{"id":"https://openalex.org/keywords/sapphire-substrate","display_name":"sapphire substrate","score":0.9950000047683716}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.9289829730987549},{"id":"https://openalex.org/C49326732","wikidata":"https://www.wikidata.org/wiki/Q1549892","display_name":"Nanoindentation","level":2,"score":0.7612760066986084},{"id":"https://openalex.org/C46275449","wikidata":"https://www.wikidata.org/wiki/Q2458815","display_name":"Crystallinity","level":2,"score":0.7201192378997803},{"id":"https://openalex.org/C56052488","wikidata":"https://www.wikidata.org/wiki/Q103382","display_name":"Amorphous solid","level":2,"score":0.7138653993606567},{"id":"https://openalex.org/C2777855556","wikidata":"https://www.wikidata.org/wiki/Q4339544","display_name":"Annealing (glass)","level":2,"score":0.7018285989761353},{"id":"https://openalex.org/C61427134","wikidata":"https://www.wikidata.org/wiki/Q847609","display_name":"Sputter deposition","level":4,"score":0.7006404399871826},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.6366622447967529},{"id":"https://openalex.org/C87976508","wikidata":"https://www.wikidata.org/wiki/Q1498213","display_name":"Microstructure","level":2,"score":0.6316792964935303},{"id":"https://openalex.org/C61048295","wikidata":"https://www.wikidata.org/wiki/Q909022","display_name":"Nucleation","level":2,"score":0.5552477836608887},{"id":"https://openalex.org/C175708663","wikidata":"https://www.wikidata.org/wiki/Q899559","display_name":"X-ray photoelectron spectroscopy","level":2,"score":0.4954134225845337},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.43439310789108276},{"id":"https://openalex.org/C22423302","wikidata":"https://www.wikidata.org/wiki/Q898444","display_name":"Sputtering","level":3,"score":0.4312679171562195},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.38677746057510376},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.3518974483013153},{"id":"https://openalex.org/C42360764","wikidata":"https://www.wikidata.org/wiki/Q83588","display_name":"Chemical engineering","level":1,"score":0.2343817949295044},{"id":"https://openalex.org/C8010536","wikidata":"https://www.wikidata.org/wiki/Q160398","display_name":"Crystallography","level":1,"score":0.18845534324645996},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.14786562323570251},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.0},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1179/1743284713y.0000000236","doi":"https://doi.org/10.1179/1743284713y.0000000236","is_oa":false,"landing_page_url":"https://doi.org/10.1179/1743284713y.0000000236","pdf_url":null,"source":{"id":"https://openalex.org/S82336448","display_name":"Materials Science and Technology","issn_l":"0267-0836","issn":["0267-0836","1743-2847"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-d","jufo-1","ki-jl-1","norway-1","poland-70","russia-white-list-2"],"host_organization":"https://openalex.org/P4310320442","host_organization_name":"Maney Publishing","host_organization_lineage":["https://openalex.org/P4310320442"],"host_organization_lineage_names":["Maney Publishing"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Materials Science and Technology","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":27,"referenced_works":["https://openalex.org/W41583942","https://openalex.org/W1532291909","https://openalex.org/W1637535621","https://openalex.org/W1985439506","https://openalex.org/W1989502337","https://openalex.org/W1989872024","https://openalex.org/W1999572552","https://openalex.org/W2001341936","https://openalex.org/W2002621496","https://openalex.org/W2006155151","https://openalex.org/W2007966480","https://openalex.org/W2021124039","https://openalex.org/W2038323991","https://openalex.org/W2049196100","https://openalex.org/W2054319175","https://openalex.org/W2054578784","https://openalex.org/W2056998225","https://openalex.org/W2061940157","https://openalex.org/W2064780354","https://openalex.org/W2071387232","https://openalex.org/W2072827795","https://openalex.org/W2076205323","https://openalex.org/W2101614336","https://openalex.org/W2113158221","https://openalex.org/W2116665432","https://openalex.org/W2143294795","https://openalex.org/W2146506701"],"related_works":["https://openalex.org/W1532291909","https://openalex.org/W1988515651","https://openalex.org/W2159579561","https://openalex.org/W2087790595","https://openalex.org/W2378462910","https://openalex.org/W1991404435","https://openalex.org/W3184025714","https://openalex.org/W2142176122","https://openalex.org/W2055664848","https://openalex.org/W2007890666"],"abstract_inverted_index":{"To":[0],"investigate":[1],"the":[2,37,92,102,109,138],"influence":[3],"of":[4,10,23,57,82,86,111,129,140],"temperature":[5,34,135],"on":[6,28],"nucleation":[7],"and":[8,26,30,49,62,70,84,88,113,142],"growth":[9],"Ti3SiC2,":[11],"Ti\u2013Si\u2013C":[12],"thin":[13],"films":[14,40,55,97],"were":[15,41],"deposited":[16,39,54],"by":[17,67,121],"magnetron":[18],"sputtering":[19],"from":[20],"elemental":[21],"targets":[22],"Ti,":[24],"Si":[25,61,105],"C":[27],"Si(100)":[29],"Al2O3":[31],"substrates":[32],"at":[33,45,98],"<200\u00b0C.":[35],"Subsequently,":[36],"as":[38,53,65],"annealed":[42],"in":[43,75,79,96,104],"vacuum":[44,76],"800,":[46],"950,":[47],"1100":[48],"1200\u00b0C":[50],"respectively.":[51],"The":[52,123],"consisted":[56],"amorphous":[58,60],"TiC,":[59],"free":[63],"C,":[64],"determined":[66,120],"X-ray":[68,71],"diffraction":[69],"photoelectron":[72],"spectroscopy.":[73],"Annealing":[74],"<950\u00b0C":[77],"resulted":[78],"improved":[80],"crystallinity":[81],"TiC":[83],"formation":[85,139],"SiCx":[87],"Ti5Si3":[89,143],"phases.":[90,144],"However,":[91],"Ti3SiC2":[93,141],"phase":[94],"forms":[95],"1100\u00b0C":[99],"owing":[100],"to":[101,137],"increase":[103],"diffusion":[106],"coefficient.":[107],"Moreover,":[108],"evolution":[110],"hardness":[112,131],"elastics":[114],"modulus":[115],"with":[116,132],"annealing":[117,134],"temperatures":[118],"was":[119],"nanoindentation.":[122],"results":[124],"showed":[125],"a":[126],"continuous":[127],"decline":[128],"film":[130],"increasing":[133],"due":[136]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":1},{"year":2023,"cited_by_count":1},{"year":2022,"cited_by_count":1},{"year":2019,"cited_by_count":2},{"year":2018,"cited_by_count":1},{"year":2017,"cited_by_count":1},{"year":2014,"cited_by_count":1}],"updated_date":"2026-10-27T15:51:10.671819","created_date":"2016-06-24T00:00:00"}