{"id":"https://openalex.org/W2010628015","doi":"https://doi.org/10.1116/1.580941","title":"TiO 2 electrochromic thin films by reactive direct current magnetron sputtering","display_name":"TiO 2 electrochromic thin films by reactive direct current magnetron sputtering","publication_year":1997,"publication_date":"1997-09-01","ids":{"openalex":"https://openalex.org/W2010628015","doi":"https://doi.org/10.1116/1.580941","mag":"2010628015"},"language":"en","primary_location":{"id":"doi:10.1116/1.580941","doi":"https://doi.org/10.1116/1.580941","is_oa":false,"landing_page_url":"https://doi.org/10.1116/1.580941","pdf_url":null,"source":{"id":"https://openalex.org/S4210190837","display_name":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","issn_l":"0734-2101","issn":["0734-2101","1520-8559"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-c","jufo-1","ki-jl-1","norway-1","poland-70","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":null,"display_name":"K. Yoshimura","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210131458","display_name":"Nagoya Industrial Science Research Institute","ror":"https://ror.org/02xkqh785","country_code":"JP","type":"facility","lineage":["https://openalex.org/I4210131458"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"K. Yoshimura","raw_affiliation_strings":["National Industrial Research Institute of Nagoya, Hirate-cho, Kita-ku, Nagoya 462, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Industrial Research Institute of Nagoya, Hirate-cho, Kita-ku, Nagoya 462, Japan","institution_ids":["https://openalex.org/I4210131458"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101768405","display_name":"Takeshi Miki","orcid":"https://orcid.org/0000-0002-9085-264X","observed_orcids":["https://orcid.org/0000-0002-9085-264X"]},"institutions":[{"id":"https://openalex.org/I4210131458","display_name":"Nagoya Industrial Science Research Institute","ror":"https://ror.org/02xkqh785","country_code":"JP","type":"facility","lineage":["https://openalex.org/I4210131458"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"T. Miki","raw_affiliation_strings":["National Industrial Research Institute of Nagoya, Hirate-cho, Kita-ku, Nagoya 462, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Industrial Research Institute of Nagoya, Hirate-cho, Kita-ku, Nagoya 462, Japan","institution_ids":["https://openalex.org/I4210131458"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5111798614","display_name":"Seita Tanemura","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210131458","display_name":"Nagoya Industrial Science Research Institute","ror":"https://ror.org/02xkqh785","country_code":"JP","type":"facility","lineage":["https://openalex.org/I4210131458"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"S. Tanemura","raw_affiliation_strings":["National Industrial Research Institute of Nagoya, Hirate-cho, Kita-ku, Nagoya 462, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Industrial Research Institute of Nagoya, Hirate-cho, Kita-ku, Nagoya 462, Japan","institution_ids":["https://openalex.org/I4210131458"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I4210131458"],"apc_list":null,"apc_paid":null,"fwci":0.3037,"has_fulltext":false,"cited_by_count":23,"citation_normalized_percentile":{"value":0.46149809,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":96},"biblio":{"volume":"15","issue":"5","first_page":"2673","last_page":"2676"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11128","display_name":"Transition Metal Oxide Nanomaterials","score":0.9965999722480774,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11128","display_name":"Transition Metal Oxide Nanomaterials","score":0.9965999722480774,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10660","display_name":"Conducting polymers and applications","score":0.0010000000474974513,"subfield":{"id":"https://openalex.org/subfields/2507","display_name":"Polymers and Plastics"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10024","display_name":"TiO2 Photocatalysis and Solar Cells","score":0.0006000000284984708,"subfield":{"id":"https://openalex.org/subfields/2105","display_name":"Renewable Energy, Sustainability and the Environment"},"field":{"id":"https://openalex.org/fields/21","display_name":"Energy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/tio2-thin-films","display_name":"TiO2 thin films","score":0.859000027179718},{"id":"https://openalex.org/keywords/electrochromism","display_name":"electrochromism","score":0.9309999942779541},{"id":"https://openalex.org/keywords/reactive-dc-magnetron-sputtering","display_name":"reactive DC magnetron sputtering","score":0.8659999966621399},{"id":"https://openalex.org/keywords/sputtering-pressure","display_name":"sputtering pressure","score":0.8029999732971191},{"id":"https://openalex.org/keywords/visible-light-transmittance","display_name":"visible transmittance","score":0.7979999780654907},{"id":"https://openalex.org/keywords/coloration-efficiency","display_name":"coloration efficiency","score":0.9959999918937683},{"id":"https://openalex.org/keywords/liclo4-electrolyte","display_name":"LiClO4 electrolyte","score":0.8289999961853027},{"id":"https://openalex.org/keywords/propylene-carbonate","display_name":"propylene carbonate","score":0.8500000238418579}],"concepts":[{"id":"https://openalex.org/C101643646","wikidata":"https://www.wikidata.org/wiki/Q899105","display_name":"Electrochromism","level":3,"score":0.9916467666625977},{"id":"https://openalex.org/C2777983707","wikidata":"https://www.wikidata.org/wiki/Q415979","display_name":"Propylene carbonate","level":4,"score":0.7914730906486511},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7751662731170654},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.6877365112304688},{"id":"https://openalex.org/C150493377","wikidata":"https://www.wikidata.org/wiki/Q1427863","display_name":"Transmittance","level":2,"score":0.6537653207778931},{"id":"https://openalex.org/C2780164141","wikidata":"https://www.wikidata.org/wiki/Q18206760","display_name":"Electrochromic devices","level":4,"score":0.6056075096130371},{"id":"https://openalex.org/C61427134","wikidata":"https://www.wikidata.org/wiki/Q847609","display_name":"Sputter deposition","level":4,"score":0.5692852139472961},{"id":"https://openalex.org/C22423302","wikidata":"https://www.wikidata.org/wiki/Q898444","display_name":"Sputtering","level":3,"score":0.5461001992225647},{"id":"https://openalex.org/C68801617","wikidata":"https://www.wikidata.org/wiki/Q162908","display_name":"Electrolyte","level":3,"score":0.545016348361969},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.48111075162887573},{"id":"https://openalex.org/C123408415","wikidata":"https://www.wikidata.org/wiki/Q194154","display_name":"Cavity magnetron","level":4,"score":0.4699825346469879},{"id":"https://openalex.org/C89395315","wikidata":"https://www.wikidata.org/wiki/Q181232","display_name":"Anode","level":3,"score":0.4587341845035553},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.17070096731185913},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.10504114627838135},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.09331154823303223},{"id":"https://openalex.org/C147789679","wikidata":"https://www.wikidata.org/wiki/Q11372","display_name":"Physical chemistry","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1116/1.580941","doi":"https://doi.org/10.1116/1.580941","is_oa":false,"landing_page_url":"https://doi.org/10.1116/1.580941","pdf_url":null,"source":{"id":"https://openalex.org/S4210190837","display_name":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","issn_l":"0734-2101","issn":["0734-2101","1520-8559"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-c","jufo-1","ki-jl-1","norway-1","poland-70","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":4,"referenced_works":["https://openalex.org/W2017025959","https://openalex.org/W2025751468","https://openalex.org/W2033053343","https://openalex.org/W2057269705"],"related_works":["https://openalex.org/W619309760","https://openalex.org/W1992040393","https://openalex.org/W205658993","https://openalex.org/W4404276700","https://openalex.org/W2065428210","https://openalex.org/W1945550188","https://openalex.org/W1987608805","https://openalex.org/W2078139864","https://openalex.org/W2087591043","https://openalex.org/W2026823246"],"abstract_inverted_index":{"TiO":[0],"2":[1],"electrochromic":[2,18,47,64],"thin":[3],"films":[4],"have":[5,20],"been":[6,21],"prepared":[7],"by":[8,23],"reactive":[9],"dc":[10],"magnetron":[11],"sputtering":[12],"under":[13,56],"various":[14],"conditions":[15,59],"and":[16,78],"their":[17],"properties":[19,48],"investigated":[22],"using":[24],"1":[25],"M":[26],"LiClO4":[27],"in":[28],"propylene":[29],"carbonate":[30],"as":[31],"an":[32],"electrolyte.":[33],"Total":[34],"pressure":[35,58],"was":[36,82],"found":[37],"to":[38,44,74],"be":[39],"the":[40,46,79],"most":[41],"important":[42],"parameter":[43],"control":[45],"of":[49],"sputtered":[50],"TiO2":[51],"films.":[52],"The":[53],"sample":[54],"deposited":[55],"high":[57],"(8\u201310":[60],"Pa)":[61],"showed":[62],"good":[63],"properties;":[65],"its":[66],"visible":[67],"transmittance":[68],"changed":[69],"from":[70],"14%":[71],"(colored":[72],"state)":[73,77],"81%":[75],"(bleached":[76],"coloration":[80],"efficiency":[81],"29":[83],"cm2/C.":[84]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":1},{"year":2023,"cited_by_count":1},{"year":2022,"cited_by_count":1},{"year":2020,"cited_by_count":2},{"year":2019,"cited_by_count":1},{"year":2018,"cited_by_count":2},{"year":2017,"cited_by_count":1},{"year":2015,"cited_by_count":1},{"year":2014,"cited_by_count":1},{"year":2013,"cited_by_count":2}],"updated_date":"2026-09-29T14:09:16.559479","created_date":"2016-06-24T00:00:00"}