{"id":"https://openalex.org/W2010575830","doi":"https://doi.org/10.4028/www.scientific.net/kem.206-213.523","title":"Effect of Tantalum Addition on Optical Transmittance and Electrical Resistivity of TiN Thin Films Prepared by d.c. Magnetron Sputtering","display_name":"Effect of Tantalum Addition on Optical Transmittance and Electrical Resistivity of TiN Thin Films Prepared by d.c. Magnetron Sputtering","publication_year":2001,"publication_date":"2001-12-01","ids":{"openalex":"https://openalex.org/W2010575830","doi":"https://doi.org/10.4028/www.scientific.net/kem.206-213.523","mag":"2010575830"},"language":"en","primary_location":{"id":"doi:10.4028/www.scientific.net/kem.206-213.523","doi":"https://doi.org/10.4028/www.scientific.net/kem.206-213.523","is_oa":true,"landing_page_url":"https://doi.org/10.4028/www.scientific.net/kem.206-213.523","pdf_url":null,"source":{"id":"https://openalex.org/S75411654","display_name":"Key engineering materials","issn_l":"1013-9826","issn":["1013-9826","1662-9795","1662-9809"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","jufo-1","norway-1","vabb-shw"],"host_organization":"https://openalex.org/P4310317839","host_organization_name":"Trans Tech Publications","host_organization_lineage":["https://openalex.org/P4310317839"],"host_organization_lineage_names":["Trans Tech Publications"],"type":"book series"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Key Engineering Materials","raw_type":"journal-article"},"volume":null,"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"hybrid","oa_url":"https://doi.org/10.4028/www.scientific.net/kem.206-213.523","any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5060190786","display_name":"O. Bourbia","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I125485651","display_name":"University Fr\u00e8res Mentouri Constantine 1","ror":"https://ror.org/017wv6808","country_code":"DZ","type":"education","lineage":["https://openalex.org/I125485651"]}],"countries":["DZ"],"is_corresponding":false,"raw_author_name":"O. Bourbia","raw_affiliation_strings":["Mentouri University - Constantine"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Mentouri University - Constantine","institution_ids":["https://openalex.org/I125485651"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5015631352","display_name":"S. Achour","orcid":"https://orcid.org/0000-0002-0839-8514","observed_orcids":["https://orcid.org/0000-0002-0839-8514"]},"institutions":[{"id":"https://openalex.org/I125485651","display_name":"University Fr\u00e8res Mentouri Constantine 1","ror":"https://ror.org/017wv6808","country_code":"DZ","type":"education","lineage":["https://openalex.org/I125485651"]}],"countries":["DZ"],"is_corresponding":false,"raw_author_name":"S. Achour","raw_affiliation_strings":["Mentouri University - Constantine"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Mentouri University - Constantine","institution_ids":["https://openalex.org/I125485651"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5006682623","display_name":"S. Zerkout","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I125485651","display_name":"University Fr\u00e8res Mentouri Constantine 1","ror":"https://ror.org/017wv6808","country_code":"DZ","type":"education","lineage":["https://openalex.org/I125485651"]}],"countries":["DZ"],"is_corresponding":false,"raw_author_name":"S. Zerkout","raw_affiliation_strings":["Mentouri University - Constantine"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Mentouri University - Constantine","institution_ids":["https://openalex.org/I125485651"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5084017060","display_name":"M. Benkahoul","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"M. Benkahoul","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"last","author":{"id":"https://openalex.org/A5110146406","display_name":"Abdelhamid Harabi","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I125485651","display_name":"University Fr\u00e8res Mentouri Constantine 1","ror":"https://ror.org/017wv6808","country_code":"DZ","type":"education","lineage":["https://openalex.org/I125485651"]}],"countries":["DZ"],"is_corresponding":false,"raw_author_name":"Abdelhamid Harabi","raw_affiliation_strings":["Mentouri University"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Mentouri University","institution_ids":["https://openalex.org/I125485651"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.22097755,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":93},"biblio":{"volume":"206-213","issue":null,"first_page":"523","last_page":"526"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10377","display_name":"Metal and Thin Film Mechanics","score":0.9550999999046326,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10377","display_name":"Metal and Thin Film Mechanics","score":0.9550999999046326,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11661","display_name":"Copper Interconnects and Reliability","score":0.016100000590085983,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11723","display_name":"Optical Coatings and Gratings","score":0.011099999770522118,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/tantalum-addition","display_name":"tantalum addition","score":0.9380000233650208},{"id":"https://openalex.org/keywords/titanium-nitride-thin-films","display_name":"titanium nitride thin films","score":0.8370000123977661},{"id":"https://openalex.org/keywords/optical-transmittance","display_name":"optical transmittance","score":0.9929999709129333},{"id":"https://openalex.org/keywords/electrical-resistivity","display_name":"electrical resistivity","score":1.0},{"id":"https://openalex.org/keywords/dc-magnetron-sputtering","display_name":"DC magnetron sputtering","score":0.9449999928474426},{"id":"https://openalex.org/keywords/alloying-effects","display_name":"alloying effects","score":0.4449999928474426}],"concepts":[{"id":"https://openalex.org/C514619126","wikidata":"https://www.wikidata.org/wiki/Q1123","display_name":"Tantalum","level":2,"score":0.8581798076629639},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7998449206352234},{"id":"https://openalex.org/C525849907","wikidata":"https://www.wikidata.org/wiki/Q1096","display_name":"Tin","level":2,"score":0.7898567914962769},{"id":"https://openalex.org/C69990965","wikidata":"https://www.wikidata.org/wiki/Q65402698","display_name":"Electrical resistivity and conductivity","level":2,"score":0.7860610485076904},{"id":"https://openalex.org/C61427134","wikidata":"https://www.wikidata.org/wiki/Q847609","display_name":"Sputter deposition","level":4,"score":0.6321954727172852},{"id":"https://openalex.org/C150493377","wikidata":"https://www.wikidata.org/wiki/Q1427863","display_name":"Transmittance","level":2,"score":0.5913310050964355},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.5811449885368347},{"id":"https://openalex.org/C123408415","wikidata":"https://www.wikidata.org/wiki/Q194154","display_name":"Cavity magnetron","level":4,"score":0.5614306330680847},{"id":"https://openalex.org/C22423302","wikidata":"https://www.wikidata.org/wiki/Q898444","display_name":"Sputtering","level":3,"score":0.4911753833293915},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.4644501209259033},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.42789530754089355},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.11453408002853394},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.09632155299186707},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.4028/www.scientific.net/kem.206-213.523","doi":"https://doi.org/10.4028/www.scientific.net/kem.206-213.523","is_oa":true,"landing_page_url":"https://doi.org/10.4028/www.scientific.net/kem.206-213.523","pdf_url":null,"source":{"id":"https://openalex.org/S75411654","display_name":"Key engineering materials","issn_l":"1013-9826","issn":["1013-9826","1662-9795","1662-9809"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","jufo-1","norway-1","vabb-shw"],"host_organization":"https://openalex.org/P4310317839","host_organization_name":"Trans Tech Publications","host_organization_lineage":["https://openalex.org/P4310317839"],"host_organization_lineage_names":["Trans Tech Publications"],"type":"book series"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Key Engineering Materials","raw_type":"journal-article"}],"best_oa_location":{"id":"doi:10.4028/www.scientific.net/kem.206-213.523","doi":"https://doi.org/10.4028/www.scientific.net/kem.206-213.523","is_oa":true,"landing_page_url":"https://doi.org/10.4028/www.scientific.net/kem.206-213.523","pdf_url":null,"source":{"id":"https://openalex.org/S75411654","display_name":"Key engineering materials","issn_l":"1013-9826","issn":["1013-9826","1662-9795","1662-9809"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","jufo-1","norway-1","vabb-shw"],"host_organization":"https://openalex.org/P4310317839","host_organization_name":"Trans Tech Publications","host_organization_lineage":["https://openalex.org/P4310317839"],"host_organization_lineage_names":["Trans Tech Publications"],"type":"book series"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Key Engineering Materials","raw_type":"journal-article"},"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W1576858992","https://openalex.org/W3162275973","https://openalex.org/W764412609","https://openalex.org/W2054880905","https://openalex.org/W2901568741","https://openalex.org/W3184914483","https://openalex.org/W2075499131","https://openalex.org/W4244475437","https://openalex.org/W3147083000","https://openalex.org/W7133412614"],"abstract_inverted_index":null,"counts_by_year":[{"year":2022,"cited_by_count":1}],"updated_date":"2026-06-16T07:32:37.131356","created_date":"2016-06-24T00:00:00"}