{"id":"https://openalex.org/W2010569331","doi":"https://doi.org/10.1063/1.4866285","title":"Graphene growth on AlN templates on silicon using propane-hydrogen chemical vapor deposition","display_name":"Graphene growth on AlN templates on silicon using propane-hydrogen chemical vapor deposition","publication_year":2014,"publication_date":"2014-02-17","ids":{"openalex":"https://openalex.org/W2010569331","doi":"https://doi.org/10.1063/1.4866285","mag":"2010569331"},"language":"en","primary_location":{"id":"doi:10.1063/1.4866285","doi":"https://doi.org/10.1063/1.4866285","is_oa":false,"landing_page_url":"https://doi.org/10.1063/1.4866285","pdf_url":null,"source":{"id":"https://openalex.org/S105243760","display_name":"Applied Physics Letters","issn_l":"0003-6951","issn":["0003-6951","1077-3118","1520-8842"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-a","jufo-3","ki-jl-1","norway-2","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Applied Physics Letters","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5103941252","display_name":"Adrien Michon","orcid":"https://orcid.org/0000-0002-8870-3696","observed_orcids":["https://orcid.org/0000-0002-8870-3696"]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I4210124361","display_name":"Centre de Recherche sur l'H\u00e9t\u00e9ro-Epitaxie et ses Applications","ror":"https://ror.org/03y8mpv07","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I201841394","https://openalex.org/I4210098836","https://openalex.org/I4210124361"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"A. Michon","raw_affiliation_strings":["CRHEA-CNRS 1 , Rue Bernard Gregory, 06560 Valbonne, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CRHEA-CNRS 1 , Rue Bernard Gregory, 06560 Valbonne, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I4210124361"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5080811662","display_name":"Antoine Tiberj","orcid":"https://orcid.org/0000-0002-8609-3986","observed_orcids":["https://orcid.org/0000-0002-8609-3986"]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I4387154756","display_name":"Universit\u00e9 Montpellier 2","ror":"https://ror.org/00wh4bp03","country_code":"FR","type":"education","lineage":["https://openalex.org/I19894307","https://openalex.org/I4387154756"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"A. Tiberj","raw_affiliation_strings":["L2C-CNRS/Universit\u00e9 Montpellier 2 2 , Place Eug\u00e8ne Bataillon, 34095 Montpellier, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"L2C-CNRS/Universit\u00e9 Montpellier 2 2 , Place Eug\u00e8ne Bataillon, 34095 Montpellier, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I4387154756"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5061145398","display_name":"S. V\u00e9zian","orcid":"https://orcid.org/0000-0002-4521-047X","observed_orcids":["https://orcid.org/0000-0002-4521-047X"]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I4210124361","display_name":"Centre de Recherche sur l'H\u00e9t\u00e9ro-Epitaxie et ses Applications","ror":"https://ror.org/03y8mpv07","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I201841394","https://openalex.org/I4210098836","https://openalex.org/I4210124361"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"S. V\u00e9zian","raw_affiliation_strings":["CRHEA-CNRS 1 , Rue Bernard Gregory, 06560 Valbonne, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CRHEA-CNRS 1 , Rue Bernard Gregory, 06560 Valbonne, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I4210124361"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5073056712","display_name":"Elodie Roudon","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I4210124361","display_name":"Centre de Recherche sur l'H\u00e9t\u00e9ro-Epitaxie et ses Applications","ror":"https://ror.org/03y8mpv07","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I201841394","https://openalex.org/I4210098836","https://openalex.org/I4210124361"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"E. Roudon","raw_affiliation_strings":["CRHEA-CNRS 1 , Rue Bernard Gregory, 06560 Valbonne, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CRHEA-CNRS 1 , Rue Bernard Gregory, 06560 Valbonne, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I4210124361"]}]},{"author_position":"middle","author":{"id":null,"display_name":"D. Lefebvre","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I4210124361","display_name":"Centre de Recherche sur l'H\u00e9t\u00e9ro-Epitaxie et ses Applications","ror":"https://ror.org/03y8mpv07","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I201841394","https://openalex.org/I4210098836","https://openalex.org/I4210124361"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"D. Lefebvre","raw_affiliation_strings":["CRHEA-CNRS 1 , Rue Bernard Gregory, 06560 Valbonne, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CRHEA-CNRS 1 , Rue Bernard Gregory, 06560 Valbonne, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I4210124361"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5079499073","display_name":"Marc Portail","orcid":"https://orcid.org/0000-0002-2305-6758","observed_orcids":["https://orcid.org/0000-0002-2305-6758"]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I4210124361","display_name":"Centre de Recherche sur l'H\u00e9t\u00e9ro-Epitaxie et ses Applications","ror":"https://ror.org/03y8mpv07","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I201841394","https://openalex.org/I4210098836","https://openalex.org/I4210124361"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"M. Portail","raw_affiliation_strings":["CRHEA-CNRS 1 , Rue Bernard Gregory, 06560 Valbonne, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CRHEA-CNRS 1 , Rue Bernard Gregory, 06560 Valbonne, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I4210124361"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5050084169","display_name":"Marcin Zieli\u0144ski","orcid":"https://orcid.org/0000-0003-1663-3868","observed_orcids":["https://orcid.org/0000-0003-1663-3868"]},"institutions":[{"id":"https://openalex.org/I4210101693","display_name":"NOVASiC (France)","ror":"https://ror.org/016r60a96","country_code":"FR","type":"company","lineage":["https://openalex.org/I4210101693"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"M. Zielinski","raw_affiliation_strings":["NOVASiC, Savoie Technolac 3 , Arche Bat 4, BP267, 73375 Le Bourget du Lac, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"NOVASiC, Savoie Technolac 3 , Arche Bat 4, BP267, 73375 Le Bourget du Lac, France","institution_ids":["https://openalex.org/I4210101693"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5052886848","display_name":"Thierry Chassagne","orcid":"https://orcid.org/0000-0002-3816-652X","observed_orcids":["https://orcid.org/0000-0002-3816-652X"]},"institutions":[{"id":"https://openalex.org/I4210101693","display_name":"NOVASiC (France)","ror":"https://ror.org/016r60a96","country_code":"FR","type":"company","lineage":["https://openalex.org/I4210101693"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"T. Chassagne","raw_affiliation_strings":["NOVASiC, Savoie Technolac 3 , Arche Bat 4, BP267, 73375 Le Bourget du Lac, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"NOVASiC, Savoie Technolac 3 , Arche Bat 4, BP267, 73375 Le Bourget du Lac, France","institution_ids":["https://openalex.org/I4210101693"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5105472185","display_name":"Jean Camassel","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I4387154756","display_name":"Universit\u00e9 Montpellier 2","ror":"https://ror.org/00wh4bp03","country_code":"FR","type":"education","lineage":["https://openalex.org/I19894307","https://openalex.org/I4387154756"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"J. Camassel","raw_affiliation_strings":["L2C-CNRS/Universit\u00e9 Montpellier 2 2 , Place Eug\u00e8ne Bataillon, 34095 Montpellier, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"L2C-CNRS/Universit\u00e9 Montpellier 2 2 , Place Eug\u00e8ne Bataillon, 34095 Montpellier, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I4387154756"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5011220704","display_name":"Yvon Cordier","orcid":"https://orcid.org/0000-0003-3720-9409","observed_orcids":["https://orcid.org/0000-0003-3720-9409"]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I4210124361","display_name":"Centre de Recherche sur l'H\u00e9t\u00e9ro-Epitaxie et ses Applications","ror":"https://ror.org/03y8mpv07","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I201841394","https://openalex.org/I4210098836","https://openalex.org/I4210124361"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Y. Cordier","raw_affiliation_strings":["CRHEA-CNRS 1 , Rue Bernard Gregory, 06560 Valbonne, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CRHEA-CNRS 1 , Rue Bernard Gregory, 06560 Valbonne, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I4210124361"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":1.0776,"has_fulltext":false,"cited_by_count":26,"citation_normalized_percentile":{"value":0.74303238,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":98},"biblio":{"volume":"104","issue":"7","first_page":"071912","last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10083","display_name":"Graphene research and applications","score":0.9984999895095825,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10083","display_name":"Graphene research and applications","score":0.9984999895095825,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10275","display_name":"2D Materials and Applications","score":0.0003000000142492354,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10478","display_name":"Diamond and Carbon-based Materials Research","score":0.00019999999494757503,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/graphene-synthesis","display_name":"graphene synthesis","score":0.8019999861717224},{"id":"https://openalex.org/keywords/aln-templates","display_name":"AlN templates","score":0.7490000128746033},{"id":"https://openalex.org/keywords/si-111","display_name":"Si(111)","score":0.828000009059906},{"id":"https://openalex.org/keywords/epitaxial-graphene","display_name":"epitaxial graphene","score":0.9129999876022339},{"id":"https://openalex.org/keywords/multilayer-graphene","display_name":"multilayer graphene","score":0.7369999885559082},{"id":"https://openalex.org/keywords/carbon-source","display_name":"carbon source","score":0.39500001072883606}],"concepts":[{"id":"https://openalex.org/C30080830","wikidata":"https://www.wikidata.org/wiki/Q169917","display_name":"Graphene","level":2,"score":0.9185121059417725},{"id":"https://openalex.org/C57410435","wikidata":"https://www.wikidata.org/wiki/Q505668","display_name":"Chemical vapor deposition","level":2,"score":0.8167172074317932},{"id":"https://openalex.org/C82714645","wikidata":"https://www.wikidata.org/wiki/Q438331","display_name":"Template","level":2,"score":0.8043263554573059},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7942489385604858},{"id":"https://openalex.org/C2776345496","wikidata":"https://www.wikidata.org/wiki/Q131189","display_name":"Propane","level":2,"score":0.5888701677322388},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.5766046047210693},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.5739230513572693},{"id":"https://openalex.org/C2780722187","wikidata":"https://www.wikidata.org/wiki/Q412356","display_name":"Silicon carbide","level":2,"score":0.5440340638160706},{"id":"https://openalex.org/C108225325","wikidata":"https://www.wikidata.org/wiki/Q11456","display_name":"Semiconductor","level":2,"score":0.5385042428970337},{"id":"https://openalex.org/C140205800","wikidata":"https://www.wikidata.org/wiki/Q5860","display_name":"Carbon fibers","level":3,"score":0.5308657288551331},{"id":"https://openalex.org/C512968161","wikidata":"https://www.wikidata.org/wiki/Q556","display_name":"Hydrogen","level":2,"score":0.46531203389167786},{"id":"https://openalex.org/C110738630","wikidata":"https://www.wikidata.org/wiki/Q1135540","display_name":"Epitaxy","level":3,"score":0.4352194666862488},{"id":"https://openalex.org/C42360764","wikidata":"https://www.wikidata.org/wiki/Q83588","display_name":"Chemical engineering","level":1,"score":0.37863296270370483},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.3768685758113861},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.30432045459747314},{"id":"https://openalex.org/C104779481","wikidata":"https://www.wikidata.org/wiki/Q50707","display_name":"Composite number","level":2,"score":0.14218363165855408},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.11799708008766174},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.10318794846534729},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1063/1.4866285","doi":"https://doi.org/10.1063/1.4866285","is_oa":false,"landing_page_url":"https://doi.org/10.1063/1.4866285","pdf_url":null,"source":{"id":"https://openalex.org/S105243760","display_name":"Applied Physics Letters","issn_l":"0003-6951","issn":["0003-6951","1077-3118","1520-8842"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-a","jufo-3","ki-jl-1","norway-2","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Applied Physics Letters","raw_type":"journal-article"},{"id":"pmh:oai:HAL:hal-01200742v1","doi":null,"is_oa":false,"landing_page_url":"https://hal.science/hal-01200742","pdf_url":null,"source":{"id":"https://openalex.org/S4306402512","display_name":"HAL","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I4405252976","host_organization_name":"Centre pour la Communication Scientifique Directe","host_organization_lineage":["https://openalex.org/I4405252976"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Applied Physics Letters, 2014, 104 (7), pp.071912. ⟨10.1063/1.4866285⟩","raw_type":"info:eu-repo/semantics/article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":39,"referenced_works":["https://openalex.org/W1544986587","https://openalex.org/W1949480416","https://openalex.org/W1966890151","https://openalex.org/W1970084469","https://openalex.org/W1973078455","https://openalex.org/W1978165289","https://openalex.org/W1978675242","https://openalex.org/W1981044184","https://openalex.org/W1988542431","https://openalex.org/W1988693848","https://openalex.org/W1997613934","https://openalex.org/W1998050200","https://openalex.org/W1999398156","https://openalex.org/W2014172407","https://openalex.org/W2014238723","https://openalex.org/W2017763992","https://openalex.org/W2018069046","https://openalex.org/W2037196441","https://openalex.org/W2039361114","https://openalex.org/W2045433435","https://openalex.org/W2047205370","https://openalex.org/W2049927663","https://openalex.org/W2058122340","https://openalex.org/W2058451568","https://openalex.org/W2059406035","https://openalex.org/W2060035971","https://openalex.org/W2062757334","https://openalex.org/W2072836371","https://openalex.org/W2073350670","https://openalex.org/W2081541767","https://openalex.org/W2083855839","https://openalex.org/W2085540001","https://openalex.org/W2088516092","https://openalex.org/W2095087418","https://openalex.org/W2098831830","https://openalex.org/W2102415385","https://openalex.org/W2140444203","https://openalex.org/W2164447696","https://openalex.org/W2325923649"],"related_works":["https://openalex.org/W2412504329","https://openalex.org/W3087444899","https://openalex.org/W2058451568","https://openalex.org/W2572660677","https://openalex.org/W3175768245","https://openalex.org/W2467526103","https://openalex.org/W1994752014","https://openalex.org/W2006112300","https://openalex.org/W3136643959","https://openalex.org/W2944423809"],"abstract_inverted_index":{"While":[0],"the":[1,31,48,66,69,73,83],"integration":[2,84],"of":[3,33,68,85],"graphene":[4,15,35,60,86],"on":[5,20,36,62],"semiconductor":[6],"surfaces":[7],"is":[8,78],"important":[9,80],"to":[10,58],"develop":[11],"new":[12],"applications,":[13],"epitaxial":[14],"has":[16],"only":[17],"been":[18],"integrated":[19],"SiC":[21],"substrates":[22],"or":[23],"3C-SiC/Si":[24],"templates.":[25,38],"In":[26],"this":[27],"work,":[28],"we":[29,51],"explore":[30],"possibility":[32],"growing":[34],"AlN/Si(111)":[37,63],"Using":[39],"a":[40],"chemical":[41],"vapor":[42],"deposition":[43],"process":[44],"with":[45,87],"propane":[46],"as":[47],"carbon":[49],"source,":[50],"have":[52],"obtained":[53],"graphitic":[54,74],"films":[55],"(from":[56],"2":[57],"10":[59],"layers)":[61],"while":[64],"preserving":[65],"morphology":[67],"AlN":[70],"layer":[71],"beneath":[72],"film.":[75],"This":[76],"study":[77],"an":[79],"step":[81],"for":[82],"semiconductors":[88],"other":[89],"than":[90],"SiC.":[91]},"counts_by_year":[{"year":2026,"cited_by_count":4},{"year":2024,"cited_by_count":2},{"year":2022,"cited_by_count":2},{"year":2020,"cited_by_count":4},{"year":2019,"cited_by_count":3},{"year":2018,"cited_by_count":3},{"year":2017,"cited_by_count":5},{"year":2016,"cited_by_count":2},{"year":2015,"cited_by_count":1}],"updated_date":"2026-11-10T11:39:43.021295","created_date":"2016-06-24T00:00:00"}