{"id":"https://openalex.org/W2010527911","doi":"https://doi.org/10.1109/icime.2010.5477804","title":"Neural network-based system for optimizing process parameters of semiconductor compounds","display_name":"Neural network-based system for optimizing process parameters of semiconductor compounds","publication_year":2010,"publication_date":"2010-01-01","ids":{"openalex":"https://openalex.org/W2010527911","doi":"https://doi.org/10.1109/icime.2010.5477804","mag":"2010527911"},"language":"en","primary_location":{"id":"doi:10.1109/icime.2010.5477804","doi":"https://doi.org/10.1109/icime.2010.5477804","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icime.2010.5477804","pdf_url":null,"source":{"id":"https://openalex.org/S7407088832","display_name":"International Conference on Information Management and Engineering (ICIME)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2010 2nd IEEE International Conference on Information Management and Engineering","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5103552836","display_name":"Chung-Wei Yeh","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I33374188","display_name":"Kao Yuan University","ror":"https://ror.org/04nk1k821","country_code":"TW","type":"education","lineage":["https://openalex.org/I33374188"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Chung-Wei Yeh","raw_affiliation_strings":["Department of Management Information System, Kao Yuan University, Kaohsiung, Taiwan","Dept. of Management Information System, Kao Yuan University, Kaohsiung, Taiwan, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Management Information System, Kao Yuan University, Kaohsiung, Taiwan","institution_ids":["https://openalex.org/I33374188"]},{"raw_affiliation_string":"Dept. of Management Information System, Kao Yuan University, Kaohsiung, Taiwan, China","institution_ids":["https://openalex.org/I33374188"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5044824410","display_name":"Kee-Rong Wu","orcid":"https://orcid.org/0000-0003-3714-6014","observed_orcids":["https://orcid.org/0000-0003-3714-6014"]},"institutions":[{"id":"https://openalex.org/I43518871","display_name":"National Kaohsiung Marine University","ror":"https://ror.org/00ca6fy54","country_code":"TW","type":"education","lineage":["https://openalex.org/I43518871","https://openalex.org/I4387154394"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Kee-Rong Wu","raw_affiliation_strings":["Dept. of Marine Engineering, National Kaohsiung Marine University, Kaohsiung, Taiwan, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Dept. of Marine Engineering, National Kaohsiung Marine University, Kaohsiung, Taiwan, China","institution_ids":["https://openalex.org/I43518871"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.2586,"has_fulltext":false,"cited_by_count":4,"citation_normalized_percentile":{"value":0.4608284,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":96},"biblio":{"volume":"17","issue":null,"first_page":"214","last_page":"218"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10320","display_name":"Neural Networks and Applications","score":0.4424000084400177,"subfield":{"id":"https://openalex.org/subfields/1702","display_name":"Artificial Intelligence"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10320","display_name":"Neural Networks and Applications","score":0.4424000084400177,"subfield":{"id":"https://openalex.org/subfields/1702","display_name":"Artificial Intelligence"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11948","display_name":"Machine Learning in Materials Science","score":0.3127000033855438,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13373","display_name":"Data Mining and Machine Learning Applications","score":0.10119999945163727,"subfield":{"id":"https://openalex.org/subfields/1710","display_name":"Information Systems"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/neural-network","display_name":"artificial neural networks","score":0.4950000047683716},{"id":"https://openalex.org/keywords/process-parameter-optimization","display_name":"process parameter optimization","score":0.8970000147819519},{"id":"https://openalex.org/keywords/sputter-deposition","display_name":"sputter deposition","score":0.6759999990463257},{"id":"https://openalex.org/keywords/compound-semiconductors","display_name":"compound semiconductors","score":0.5299999713897705},{"id":"https://openalex.org/keywords/c4-5-decision-tree","display_name":"C4.5 decision tree","score":0.8539999723434448},{"id":"https://openalex.org/keywords/rule-mining","display_name":"rule discovery","score":0.9829999804496765},{"id":"https://openalex.org/keywords/hybrid-neural-network","display_name":"hybrid neural network","score":0.5490000247955322}],"concepts":[{"id":"https://openalex.org/C50644808","wikidata":"https://www.wikidata.org/wiki/Q192776","display_name":"Artificial neural network","level":2,"score":0.5076884031295776},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.5065406560897827},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.4526698887348175},{"id":"https://openalex.org/C11413529","wikidata":"https://www.wikidata.org/wiki/Q8366","display_name":"Algorithm","level":1,"score":0.40735000371932983}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/icime.2010.5477804","doi":"https://doi.org/10.1109/icime.2010.5477804","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icime.2010.5477804","pdf_url":null,"source":{"id":"https://openalex.org/S7407088832","display_name":"International Conference on Information Management and Engineering (ICIME)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2010 2nd IEEE International Conference on Information Management and Engineering","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":14,"referenced_works":["https://openalex.org/W636906727","https://openalex.org/W1964034895","https://openalex.org/W1969808180","https://openalex.org/W1975542279","https://openalex.org/W1982258277","https://openalex.org/W1983520151","https://openalex.org/W1986656491","https://openalex.org/W2007225761","https://openalex.org/W2017198208","https://openalex.org/W2079915109","https://openalex.org/W2125055259","https://openalex.org/W2128525212","https://openalex.org/W2357413123","https://openalex.org/W2520499112"],"related_works":["https://openalex.org/W1633245502","https://openalex.org/W2098753334","https://openalex.org/W2019806751","https://openalex.org/W7160421685","https://openalex.org/W1997749003","https://openalex.org/W2376677001","https://openalex.org/W2011794268","https://openalex.org/W2128605280","https://openalex.org/W2032428159","https://openalex.org/W2153334892"],"abstract_inverted_index":{"Finding":[0],"the":[1,15,33,37,72,75,99,103,108,112,121,136,139,146,156],"optimal":[2],"parameters":[3,35,73,158],"in":[4,14,90],"anionic":[5],"co-doped":[6],"titanium":[7],"dioxide":[8],"(TiO2)":[9],"is":[10],"an":[11],"important":[12],"task":[13],"compound":[16],"preparation":[17],"on":[18],"either":[19],"photocatalytic-oriented":[20],"or":[21],"mechanical-preferred":[22],"properties.":[23],"This":[24],"work":[25],"proposes":[26],"a":[27,126],"neural":[28,148],"network-based":[29],"system":[30,43,150],"to":[31,124,154],"optimize":[32,155],"process":[34],"of":[36,39,62,74,77,138,159],"deposition":[38,76,157],"TiCxOyNzfilms.":[40],"The":[41,56,67,117,142],"proposed":[42,140,147],"comprises":[44],"three":[45],"stages,":[46],"which":[47],"are":[48,115],"data":[49,57],"processing,":[50],"parameter":[51,68],"training":[52,69],"and":[53,85,95,102,106,111,129],"rule":[54],"mining.":[55],"processing":[58],"phase":[59,70,119],"classifies":[60],"instances":[61],"sputtering":[63],"gases":[64],"into":[65],"groups.":[66],"optimizes":[71],"TiCxOyNz.":[78],"Three":[79],"layers":[80,87],"-":[81,88],"input,":[82],"hybrid":[83],"hidden":[84,104,109],"output":[86,113],"reside":[89],"this":[91],"phase.":[92],"Both":[93],"feed-forward":[94],"feed-back":[96],"connections":[97],"between":[98,107],"input":[100],"layer":[101,105,110,114],"established.":[116],"mining":[118],"uses":[120],"C4.5":[122],"algorithm":[123],"construct":[125],"decision":[127],"tree":[128],"develop":[130],"rules.":[131],"An":[132],"illustrative":[133],"example":[134],"demonstrates":[135],"performance":[137,153],"system.":[141],"results":[143],"indicate":[144],"that":[145],"network":[149],"exhibits":[151],"superior":[152],"TiCxOyNzand":[160],"mine":[161],"rules":[162],"for":[163],"so":[164],"doing.":[165]},"counts_by_year":[{"year":2016,"cited_by_count":1},{"year":2015,"cited_by_count":2},{"year":2013,"cited_by_count":1}],"updated_date":"2026-10-26T11:51:55.731654","created_date":"2016-06-24T00:00:00"}