{"id":"https://openalex.org/W2010216555","doi":"https://doi.org/10.4028/www.scientific.net/ssp.134.173","title":"Particle Deposition and Removal from Ge Wafers","display_name":"Particle Deposition and Removal from Ge Wafers","publication_year":2007,"publication_date":"2007-11-01","ids":{"openalex":"https://openalex.org/W2010216555","doi":"https://doi.org/10.4028/www.scientific.net/ssp.134.173","mag":"2010216555"},"language":"en","primary_location":{"id":"doi:10.4028/www.scientific.net/ssp.134.173","doi":"https://doi.org/10.4028/www.scientific.net/ssp.134.173","is_oa":false,"landing_page_url":"https://doi.org/10.4028/www.scientific.net/ssp.134.173","pdf_url":null,"source":{"id":"https://openalex.org/S187696258","display_name":"Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena","issn_l":"1012-0394","issn":["1012-0394","1662-9779","1662-9787"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","jufo-1","norway-1"],"host_organization":"https://openalex.org/P4322614515","host_organization_name":"Scientific.net","host_organization_lineage":["https://openalex.org/P4322614515"],"host_organization_lineage_names":["Scientific.net"],"type":"book series"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Solid State Phenomena","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5035985445","display_name":"Sonja Sioncke","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Sonja Sioncke","raw_affiliation_strings":["IMEC vzw"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IMEC vzw","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5058435891","display_name":"Marcel Lux","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Marcel Lux","raw_affiliation_strings":["IMEC"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IMEC","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5085185765","display_name":"Wim Fyen","orcid":"https://orcid.org/0000-0001-9390-8816","observed_orcids":["https://orcid.org/0000-0001-9390-8816"]},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Wim Fyen","raw_affiliation_strings":["IMEC vzw"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IMEC vzw","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5089857324","display_name":"Marc Meuris","orcid":"https://orcid.org/0000-0002-9580-6810","observed_orcids":["https://orcid.org/0000-0002-9580-6810"]},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Marc Meuris","raw_affiliation_strings":["IMEC"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IMEC","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5109196979","display_name":"Paul Mertens","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Paul W. Mertens","raw_affiliation_strings":["IMEC Interuniversity Microelectronics Center"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IMEC Interuniversity Microelectronics Center","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5083053100","display_name":"Antoon Theuwis","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I119561980","display_name":"Umicore (Belgium)","ror":"https://ror.org/00zwdnt53","country_code":"BE","type":"company","lineage":["https://openalex.org/I119561980"]},{"id":"https://openalex.org/I4210097529","display_name":"Umicore (United States)","ror":"https://ror.org/00wqjhh20","country_code":"US","type":"company","lineage":["https://openalex.org/I119561980","https://openalex.org/I4210097529"]},{"id":"https://openalex.org/I4210101157","display_name":"Umicore (Germany)","ror":"https://ror.org/0151s7v18","country_code":"DE","type":"company","lineage":["https://openalex.org/I119561980","https://openalex.org/I4210101157"]}],"countries":["BE","DE","US"],"is_corresponding":false,"raw_author_name":"Antoon Theuwis","raw_affiliation_strings":["Umicore Research"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Umicore Research","institution_ids":["https://openalex.org/I119561980","https://openalex.org/I4210097529","https://openalex.org/I4210101157"]}]}],"institutions":[],"countries_distinct_count":3,"institutions_distinct_count":4,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.611,"has_fulltext":false,"cited_by_count":4,"citation_normalized_percentile":{"value":0.71912211,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":93},"biblio":{"volume":"134","issue":null,"first_page":"173","last_page":"176"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.5839999914169312,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.5839999914169312,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12350","display_name":"Particle Dynamics in Fluid Flows","score":0.04270000010728836,"subfield":{"id":"https://openalex.org/subfields/1507","display_name":"Fluid Flow and Transfer Processes"},"field":{"id":"https://openalex.org/fields/15","display_name":"Chemical Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13889","display_name":"Advanced Materials and Semiconductor Technologies","score":0.04179999977350235,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/particle-deposition","display_name":"particle deposition","score":0.9570000171661377},{"id":"https://openalex.org/keywords/particle-removal","display_name":"particle removal","score":0.9449999928474426},{"id":"https://openalex.org/keywords/germanium-wafers","display_name":"germanium wafers","score":0.9620000123977661},{"id":"https://openalex.org/keywords/wafer-contamination","display_name":"wafer contamination","score":0.6380000114440918},{"id":"https://openalex.org/keywords/surface-defects","display_name":"surface defects","score":0.30799999833106995},{"id":"https://openalex.org/keywords/semiconductor-wafers","display_name":"semiconductor wafers","score":0.5540000200271606}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.9081735610961914},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.650750994682312},{"id":"https://openalex.org/C64297162","wikidata":"https://www.wikidata.org/wiki/Q1987070","display_name":"Deposition (geology)","level":3,"score":0.6166101098060608},{"id":"https://openalex.org/C2778517922","wikidata":"https://www.wikidata.org/wiki/Q7140482","display_name":"Particle (ecology)","level":2,"score":0.45417141914367676},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.42450636625289917},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.42130953073501587},{"id":"https://openalex.org/C42360764","wikidata":"https://www.wikidata.org/wiki/Q83588","display_name":"Chemical engineering","level":1,"score":0.3940966725349426},{"id":"https://openalex.org/C61696701","wikidata":"https://www.wikidata.org/wiki/Q770766","display_name":"Engineering physics","level":1,"score":0.3823896050453186},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0},{"id":"https://openalex.org/C151730666","wikidata":"https://www.wikidata.org/wiki/Q7205","display_name":"Paleontology","level":1,"score":0.0},{"id":"https://openalex.org/C2816523","wikidata":"https://www.wikidata.org/wiki/Q180184","display_name":"Sediment","level":2,"score":0.0},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0},{"id":"https://openalex.org/C111368507","wikidata":"https://www.wikidata.org/wiki/Q43518","display_name":"Oceanography","level":1,"score":0.0},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.4028/www.scientific.net/ssp.134.173","doi":"https://doi.org/10.4028/www.scientific.net/ssp.134.173","is_oa":false,"landing_page_url":"https://doi.org/10.4028/www.scientific.net/ssp.134.173","pdf_url":null,"source":{"id":"https://openalex.org/S187696258","display_name":"Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena","issn_l":"1012-0394","issn":["1012-0394","1662-9779","1662-9787"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","jufo-1","norway-1"],"host_organization":"https://openalex.org/P4322614515","host_organization_name":"Scientific.net","host_organization_lineage":["https://openalex.org/P4322614515"],"host_organization_lineage_names":["Scientific.net"],"type":"book series"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Solid State Phenomena","raw_type":"journal-article"},{"id":"pmh:oai:CiteSeerX.psu:10.1.1.430.4203","doi":null,"is_oa":false,"landing_page_url":"http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.430.4203","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"http://www.scientific.net/SSP.134.173.pdf","raw_type":"text"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":1,"referenced_works":["https://openalex.org/W2072794077"],"related_works":["https://openalex.org/W4253655461","https://openalex.org/W2152007315","https://openalex.org/W2116014981","https://openalex.org/W1979204451","https://openalex.org/W2033166945","https://openalex.org/W2229873893","https://openalex.org/W2149563821","https://openalex.org/W4254299594","https://openalex.org/W2052113770","https://openalex.org/W4245878600"],"abstract_inverted_index":null,"counts_by_year":[{"year":2019,"cited_by_count":1},{"year":2018,"cited_by_count":1}],"updated_date":"2026-10-30T12:39:25.321706","created_date":"2016-06-24T00:00:00"}