{"id":"https://openalex.org/W2010141322","doi":"https://doi.org/10.1002/mop.21874","title":"Wet etchingX-cut LiNbO3 using diluted joint proton source","display_name":"Wet etchingX-cut LiNbO3 using diluted joint proton source","publication_year":2006,"publication_date":"2006-01-01","ids":{"openalex":"https://openalex.org/W2010141322","doi":"https://doi.org/10.1002/mop.21874","mag":"2010141322"},"language":"en","primary_location":{"id":"doi:10.1002/mop.21874","doi":"https://doi.org/10.1002/mop.21874","is_oa":false,"landing_page_url":"https://doi.org/10.1002/mop.21874","pdf_url":null,"source":{"id":"https://openalex.org/S59479367","display_name":"Microwave and Optical Technology Letters","issn_l":"0895-2477","issn":["0895-2477","1098-2760"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-d","jufo-1","norway-1","poland-40","russia-white-list-2"],"host_organization":"https://openalex.org/P4310320595","host_organization_name":"Wiley","host_organization_lineage":["https://openalex.org/P4310320595"],"host_organization_lineage_names":["Wiley"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Microwave and Optical Technology Letters","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5028160561","display_name":"Tien\u2010Lun Ting","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I16733864","display_name":"National Taiwan University","ror":"https://ror.org/05bqach95","country_code":"TW","type":"education","lineage":["https://openalex.org/I16733864"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Tien-Lun Ting","raw_affiliation_strings":["Graduate Institute of Electro-Optical Engineering, National Taiwan University, Taipei, Taiwan, Republic of China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Graduate Institute of Electro-Optical Engineering, National Taiwan University, Taipei, Taiwan, Republic of China","institution_ids":["https://openalex.org/I16733864"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5070882361","display_name":"Liangyin Chen","orcid":"https://orcid.org/0000-0001-6166-890X","observed_orcids":["https://orcid.org/0000-0001-6166-890X"]},"institutions":[{"id":"https://openalex.org/I16733864","display_name":"National Taiwan University","ror":"https://ror.org/05bqach95","country_code":"TW","type":"education","lineage":["https://openalex.org/I16733864"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Liang-Yin Chen","raw_affiliation_strings":["Graduate Institute of Electro-Optical Engineering, National Taiwan University, Taipei, Taiwan, Republic of China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Graduate Institute of Electro-Optical Engineering, National Taiwan University, Taipei, Taiwan, Republic of China","institution_ids":["https://openalex.org/I16733864"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5089101139","display_name":"Way\u2010Seen Wang","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I16733864","display_name":"National Taiwan University","ror":"https://ror.org/05bqach95","country_code":"TW","type":"education","lineage":["https://openalex.org/I16733864"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Way-Seen Wang","raw_affiliation_strings":["[Department of Electrical Engineering, National Taiwan University, Taipei, Taiwan, Republic of China]"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"[Department of Electrical Engineering, National Taiwan University, Taipei, Taiwan, Republic of China]","institution_ids":["https://openalex.org/I16733864"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I16733864"],"apc_list":{"value":2470,"currency":"USD","value_usd":2470},"apc_paid":null,"fwci":0.1878,"has_fulltext":false,"cited_by_count":4,"citation_normalized_percentile":{"value":0.49185111,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":93},"biblio":{"volume":"48","issue":"10","first_page":"2108","last_page":"2111"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11050","display_name":"Photorefractive and Nonlinear Optics","score":0.8349999785423279,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11050","display_name":"Photorefractive and Nonlinear Optics","score":0.8349999785423279,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.031599998474121094,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12155","display_name":"Microwave Dielectric Ceramics Synthesis","score":0.01860000006854534,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/wet-etching","display_name":"wet etching","score":0.7749999761581421},{"id":"https://openalex.org/keywords/lithium-niobate","display_name":"lithium niobate","score":0.8849999904632568},{"id":"https://openalex.org/keywords/x-cut-linbo3","display_name":"X-cut LiNbO3","score":0.9419999718666077},{"id":"https://openalex.org/keywords/ridge-waveguide","display_name":"ridge waveguide","score":0.6629999876022339},{"id":"https://openalex.org/keywords/proton-exchange","display_name":"proton exchange","score":0.8579999804496765},{"id":"https://openalex.org/keywords/lithium-carbonate","display_name":"lithium carbonate","score":0.7950000166893005},{"id":"https://openalex.org/keywords/benzoic-acid","display_name":"benzoic acid","score":0.9760000109672546},{"id":"https://openalex.org/keywords/adipic-acid","display_name":"adipic acid","score":0.996999979019165},{"id":"https://openalex.org/keywords/etch-profile","display_name":"etch profile","score":0.6370000243186951},{"id":"https://openalex.org/keywords/etching-depth","display_name":"etch depth","score":0.7720000147819519}],"concepts":[{"id":"https://openalex.org/C2778844314","wikidata":"https://www.wikidata.org/wiki/Q191700","display_name":"Benzoic acid","level":2,"score":0.6181373000144958},{"id":"https://openalex.org/C100460472","wikidata":"https://www.wikidata.org/wiki/Q2368605","display_name":"Etching (microfabrication)","level":3,"score":0.5770143270492554},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5553572773933411},{"id":"https://openalex.org/C54516573","wikidata":"https://www.wikidata.org/wiki/Q2294","display_name":"Proton","level":2,"score":0.5457637906074524},{"id":"https://openalex.org/C44838205","wikidata":"https://www.wikidata.org/wiki/Q127995","display_name":"Microwave","level":2,"score":0.5393415093421936},{"id":"https://openalex.org/C2778541603","wikidata":"https://www.wikidata.org/wiki/Q152763","display_name":"Lithium (medication)","level":2,"score":0.45377662777900696},{"id":"https://openalex.org/C32277403","wikidata":"https://www.wikidata.org/wiki/Q740445","display_name":"Ridge","level":2,"score":0.4414014220237732},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.40784117579460144},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.3322782516479492},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.3180626630783081},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.13034221529960632},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.08015316724777222},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.07611805200576782},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.06401205062866211},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.05260062217712402},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C134018914","wikidata":"https://www.wikidata.org/wiki/Q162606","display_name":"Endocrinology","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.0},{"id":"https://openalex.org/C151730666","wikidata":"https://www.wikidata.org/wiki/Q7205","display_name":"Paleontology","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1002/mop.21874","doi":"https://doi.org/10.1002/mop.21874","is_oa":false,"landing_page_url":"https://doi.org/10.1002/mop.21874","pdf_url":null,"source":{"id":"https://openalex.org/S59479367","display_name":"Microwave and Optical Technology Letters","issn_l":"0895-2477","issn":["0895-2477","1098-2760"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-d","jufo-1","norway-1","poland-40","russia-white-list-2"],"host_organization":"https://openalex.org/P4310320595","host_organization_name":"Wiley","host_organization_lineage":["https://openalex.org/P4310320595"],"host_organization_lineage_names":["Wiley"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Microwave and Optical Technology Letters","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320321040","display_name":"National Science Council","ror":"https://ror.org/02kv4zf79"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":12,"referenced_works":["https://openalex.org/W1986286170","https://openalex.org/W1999158409","https://openalex.org/W2028463028","https://openalex.org/W2028868760","https://openalex.org/W2032461723","https://openalex.org/W2070551205","https://openalex.org/W2103783887","https://openalex.org/W2122883352","https://openalex.org/W2129162465","https://openalex.org/W2146999401","https://openalex.org/W2166718966","https://openalex.org/W2389454689"],"related_works":["https://openalex.org/W2032461723","https://openalex.org/W2103783887","https://openalex.org/W2187519757","https://openalex.org/W2150795844","https://openalex.org/W2316001468","https://openalex.org/W2087990682","https://openalex.org/W2790909445","https://openalex.org/W382876733","https://openalex.org/W44350144","https://openalex.org/W1979035343"],"abstract_inverted_index":{"By":[0],"adding":[1],"lithium":[2,52],"carbonate":[3],"into":[4],"a":[5],"mixture":[6],"of":[7,38],"benzoic":[8,46],"and":[9,30],"adipic":[10],"acids":[11],"as":[12],"the":[13,16,27,39,55],"proton-exchange":[14],"source,":[15],"wet-etched":[17],"ridge":[18,78],"structure":[19,79],"in":[20,80,97],"x-cut":[21,81],"LiNbO3":[22],"is":[23,49],"successfully":[24],"fabricated.":[25],"Both":[26],"etched":[28,56],"depths":[29],"profiles":[31],"are":[32,58],"demonstrated":[33],"to":[34,60,73],"be":[35,61,70],"outperformed":[36],"those":[37],"traditional":[40],"wet":[41,66],"etching":[42,67],"method":[43,68],"using":[44],"pure":[45],"acid,":[47],"which":[48],"diluted":[50],"by":[51],"benzoate.":[53],"Meanwhile,":[54],"surfaces":[57],"shown":[59],"very":[62],"smooth.":[63],"The":[64],"proposed":[65],"can":[69],"further":[71],"applied":[72],"fabricate":[74],"high-quality":[75],"components":[76],"with":[77],"LiNbO3.":[82],"\u00a9":[83],"2006":[84],"Wiley":[85,98],"Periodicals,":[86],"Inc.":[87],"Microwave":[88],"Opt":[89],"Technol":[90],"Lett":[91],"48:":[92],"2108\u20132111,":[93],"2006;":[94],"Published":[95],"online":[96],"InterScience":[99],"(www.interscience.wiley.com).":[100],"DOI":[101],"10.1002/mop.21874":[102]},"counts_by_year":[{"year":2022,"cited_by_count":1},{"year":2020,"cited_by_count":1}],"updated_date":"2026-10-30T12:39:25.321706","created_date":"2016-06-24T00:00:00"}