{"id":"https://openalex.org/W2009202176","doi":"https://doi.org/10.1116/1.1352722","title":"Microwave-assisted chemical vapor deposition process for synthesizing carbon nanotubes","display_name":"Microwave-assisted chemical vapor deposition process for synthesizing carbon nanotubes","publication_year":2001,"publication_date":"2001-05-01","ids":{"openalex":"https://openalex.org/W2009202176","doi":"https://doi.org/10.1116/1.1352722","mag":"2009202176"},"language":"en","primary_location":{"id":"doi:10.1116/1.1352722","doi":"https://doi.org/10.1116/1.1352722","is_oa":false,"landing_page_url":"https://doi.org/10.1116/1.1352722","pdf_url":null,"source":{"id":"https://openalex.org/S4210169477","display_name":"Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena","issn_l":"1071-1023","issn":["1071-1023","1520-8567"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","poland-70"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5109126255","display_name":"Teng-Fang Kuo","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I25846049","display_name":"National Tsing Hua University","ror":"https://ror.org/00zdnkx70","country_code":"TW","type":"education","lineage":["https://openalex.org/I25846049"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Teng-Fan Kuo","raw_affiliation_strings":["Materials Science Center, National Tsing-Hua University, Hsinchu (300), Taiwan, Republic of China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Materials Science Center, National Tsing-Hua University, Hsinchu (300), Taiwan, Republic of China","institution_ids":["https://openalex.org/I25846049"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111667207","display_name":"Zhen\u2010Yu Juang","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I25846049","display_name":"National Tsing Hua University","ror":"https://ror.org/00zdnkx70","country_code":"TW","type":"education","lineage":["https://openalex.org/I25846049"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Zhen-Yu Juang","raw_affiliation_strings":["Department of Engineering and System Science, National Tsing-Hua University, Hsinchu (300), Taiwan, Republic of China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Engineering and System Science, National Tsing-Hua University, Hsinchu (300), Taiwan, Republic of China","institution_ids":["https://openalex.org/I25846049"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5109200446","display_name":"Chuen\u2010Horng Tsai","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I25846049","display_name":"National Tsing Hua University","ror":"https://ror.org/00zdnkx70","country_code":"TW","type":"education","lineage":["https://openalex.org/I25846049"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Chuen-Horng Tsai","raw_affiliation_strings":["Department of Engineering and System Science, National Tsing-Hua University, Hsinchu (300), Taiwan, Republic of China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Engineering and System Science, National Tsing-Hua University, Hsinchu (300), Taiwan, Republic of China","institution_ids":["https://openalex.org/I25846049"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5032768715","display_name":"You-Ming Tsau","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I134161618","display_name":"National Taiwan Normal University","ror":"https://ror.org/059dkdx38","country_code":"TW","type":"education","lineage":["https://openalex.org/I134161618"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"You-Ming Tsau","raw_affiliation_strings":["Department of Physics, National Taiwan Normal University, Taipei (117), Taiwan, Republic of China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Physics, National Taiwan Normal University, Taipei (117), Taiwan, Republic of China","institution_ids":["https://openalex.org/I134161618"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5109972481","display_name":"Hsiu\u2010Fung Cheng","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I134161618","display_name":"National Taiwan Normal University","ror":"https://ror.org/059dkdx38","country_code":"TW","type":"education","lineage":["https://openalex.org/I134161618"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Hsiu-Fung Cheng","raw_affiliation_strings":["Department of Physics, National Taiwan Normal University, Taipei (117), Taiwan, Republic of China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Physics, National Taiwan Normal University, Taipei (117), Taiwan, Republic of China","institution_ids":["https://openalex.org/I134161618"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5024445761","display_name":"I\u2010Nan Lin","orcid":"https://orcid.org/0000-0001-6474-2394","observed_orcids":["https://orcid.org/0000-0001-6474-2394"]},"institutions":[{"id":"https://openalex.org/I25846049","display_name":"National Tsing Hua University","ror":"https://ror.org/00zdnkx70","country_code":"TW","type":"education","lineage":["https://openalex.org/I25846049"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"I-Nan Lin","raw_affiliation_strings":["Materials Science Center, National Tsing-Hua University, Hsinchu (300), Taiwan, Republic of China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Materials Science Center, National Tsing-Hua University, Hsinchu (300), Taiwan, Republic of China","institution_ids":["https://openalex.org/I25846049"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":1.0088,"has_fulltext":false,"cited_by_count":10,"citation_normalized_percentile":{"value":0.71241904,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":93},"biblio":{"volume":"19","issue":"3","first_page":"1030","last_page":"1033"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10074","display_name":"Carbon Nanotubes in Composites","score":0.9785000085830688,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10074","display_name":"Carbon Nanotubes in Composites","score":0.9785000085830688,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10083","display_name":"Graphene research and applications","score":0.009700000286102295,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12270","display_name":"Microwave-Assisted Synthesis and Applications","score":0.0031999999191612005,"subfield":{"id":"https://openalex.org/subfields/1605","display_name":"Organic Chemistry"},"field":{"id":"https://openalex.org/fields/16","display_name":"Chemistry"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/carbon-nanotubes","display_name":"carbon nanotubes","score":0.9760000109672546},{"id":"https://openalex.org/keywords/microwave-susceptors","display_name":"microwave susceptors","score":0.6909999847412109},{"id":"https://openalex.org/keywords/self-heating-effect","display_name":"self-heating","score":0.6779999732971191},{"id":"https://openalex.org/keywords/catalysts","display_name":"catalysts","score":0.8270000219345093},{"id":"https://openalex.org/keywords/silicon-substrate","display_name":"silicon substrate","score":0.7630000114440918},{"id":"https://openalex.org/keywords/deposition-rate","display_name":"deposition rate","score":0.7860000133514404},{"id":"https://openalex.org/keywords/chamber-design","display_name":"chamber design","score":0.4020000100135803}],"concepts":[{"id":"https://openalex.org/C2775943645","wikidata":"https://www.wikidata.org/wiki/Q7648839","display_name":"Susceptor","level":4,"score":0.9773910641670227},{"id":"https://openalex.org/C57410435","wikidata":"https://www.wikidata.org/wiki/Q505668","display_name":"Chemical vapor deposition","level":2,"score":0.7672090530395508},{"id":"https://openalex.org/C513720949","wikidata":"https://www.wikidata.org/wiki/Q1778729","display_name":"Carbon nanotube","level":2,"score":0.7486003637313843},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7115479707717896},{"id":"https://openalex.org/C44838205","wikidata":"https://www.wikidata.org/wiki/Q127995","display_name":"Microwave","level":2,"score":0.6901587247848511},{"id":"https://openalex.org/C42360764","wikidata":"https://www.wikidata.org/wiki/Q83588","display_name":"Chemical engineering","level":1,"score":0.5401121973991394},{"id":"https://openalex.org/C64297162","wikidata":"https://www.wikidata.org/wiki/Q1987070","display_name":"Deposition (geology)","level":3,"score":0.4970729649066925},{"id":"https://openalex.org/C2777289219","wikidata":"https://www.wikidata.org/wiki/Q7632154","display_name":"Substrate (aquarium)","level":2,"score":0.4870508015155792},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.4772774577140808},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.47122466564178467},{"id":"https://openalex.org/C111548154","wikidata":"https://www.wikidata.org/wiki/Q5953272","display_name":"Hybrid physical-chemical vapor deposition","level":5,"score":0.4706743657588959},{"id":"https://openalex.org/C183866003","wikidata":"https://www.wikidata.org/wiki/Q515503","display_name":"Combustion chemical vapor deposition","level":4,"score":0.3955475091934204},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.26469919085502625},{"id":"https://openalex.org/C75937256","wikidata":"https://www.wikidata.org/wiki/Q1440781","display_name":"Carbon film","level":3,"score":0.21513631939888},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.05084577202796936},{"id":"https://openalex.org/C110738630","wikidata":"https://www.wikidata.org/wiki/Q1135540","display_name":"Epitaxy","level":3,"score":0.04928967356681824},{"id":"https://openalex.org/C111368507","wikidata":"https://www.wikidata.org/wiki/Q43518","display_name":"Oceanography","level":1,"score":0.0},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C151730666","wikidata":"https://www.wikidata.org/wiki/Q7205","display_name":"Paleontology","level":1,"score":0.0},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.0},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.0},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0},{"id":"https://openalex.org/C2816523","wikidata":"https://www.wikidata.org/wiki/Q180184","display_name":"Sediment","level":2,"score":0.0},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1116/1.1352722","doi":"https://doi.org/10.1116/1.1352722","is_oa":false,"landing_page_url":"https://doi.org/10.1116/1.1352722","pdf_url":null,"source":{"id":"https://openalex.org/S4210169477","display_name":"Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena","issn_l":"1071-1023","issn":["1071-1023","1520-8567"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","poland-70"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320321040","display_name":"National Science Council","ror":"https://ror.org/02kv4zf79"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":12,"referenced_works":["https://openalex.org/W1986345850","https://openalex.org/W1990239471","https://openalex.org/W2008302913","https://openalex.org/W2014353717","https://openalex.org/W2016286375","https://openalex.org/W2018858346","https://openalex.org/W2039858835","https://openalex.org/W2082904789","https://openalex.org/W2115659029","https://openalex.org/W2127128965","https://openalex.org/W2147577254","https://openalex.org/W4248813723"],"related_works":["https://openalex.org/W2115423593","https://openalex.org/W3160010334","https://openalex.org/W2792524400","https://openalex.org/W1989335747","https://openalex.org/W2044638081","https://openalex.org/W2158113552","https://openalex.org/W2024763360","https://openalex.org/W1972709338","https://openalex.org/W2112342407","https://openalex.org/W2002015045"],"abstract_inverted_index":{"A":[0,29],"chemical":[1],"vapor":[2],"deposition":[3,31],"(CVD)":[4],"process":[5,76],"is":[6,94],"described":[7],"that":[8],"uses":[9],"a":[10,26,36,78,137],"susceptor":[11],"to":[12,43,55,61],"absorb":[13,111],"the":[14,18,44,50,56,63,66,71,82,85,99,108,112,116,119,123,133],"microwave":[15,113],"and":[16,70,122],"self-generate":[17],"heat":[19],"for":[20,130],"growing":[21,57,132],"carbon":[22],"nanotubes":[23],"(CNTs)":[24],"on":[25,87],"Si":[27],"substrate.":[28],"high":[30],"rate":[32],"of":[33,84,98,118,125],"CNTs":[34,134],"over":[35],"large":[37],"area":[38],"has":[39],"been":[40],"achieved,":[41],"compared":[42],"conventional":[45],"CVD":[46,75,139],"process,":[47],"in":[48,81,102],"which":[49],"reaction":[51,64],"chamber":[52,88,121],"was":[53],"heated":[54],"temperature":[58],"(\u223c1100":[59],"\u00b0C)":[60],"trigger":[62],"between":[65],"CH4":[67],"gas":[68],"species":[69],"catalyst.":[72],"The":[73,96],"modified":[74],"possesses":[77],"pronounced":[79],"advantage":[80],"simplicity":[83],"react":[86],"design":[89,117],"because":[90],"no":[91],"external":[92],"heating":[93],"required.":[95],"size":[97],"substrate":[100],"is,":[101],"principle,":[103],"unlimited":[104],"as":[105,107],"long":[106],"susceptors":[109,126],"can":[110],"uniformly.":[114],"However,":[115],"processing":[120],"choice":[124],"are":[127],"very":[128],"critical":[129],"successfully":[131],"using":[135],"such":[136],"microwave-assisted":[138],"process.":[140]},"counts_by_year":[{"year":2020,"cited_by_count":1}],"updated_date":"2026-09-25T08:18:29.962427","created_date":"2016-06-24T00:00:00"}