{"id":"https://openalex.org/W2009130600","doi":"https://doi.org/10.1541/ieejias.131.237","title":"Tracking Control of an XY Stage by Considering Suppression of Machine-Stand Vibration","display_name":"Tracking Control of an XY Stage by Considering Suppression of Machine-Stand Vibration","publication_year":2011,"publication_date":"2011-01-01","ids":{"openalex":"https://openalex.org/W2009130600","doi":"https://doi.org/10.1541/ieejias.131.237","mag":"2009130600"},"language":"en","primary_location":{"id":"doi:10.1541/ieejias.131.237","doi":"https://doi.org/10.1541/ieejias.131.237","is_oa":true,"landing_page_url":"https://doi.org/10.1541/ieejias.131.237","pdf_url":"https://www.jstage.jst.go.jp/article/ieejias/131/3/131_3_237/_pdf","source":{"id":"https://openalex.org/S91284046","display_name":"IEEJ Transactions on Industry Applications","issn_l":"0913-6339","issn":["0913-6339","1348-8163"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":["jufo-1","norway-1","poland-40","russia-white-list-4"],"host_organization":"https://openalex.org/P4320800591","host_organization_name":"Institute of Electrical Engineers of Japan","host_organization_lineage":["https://openalex.org/P4320800591"],"host_organization_lineage_names":["Institute of Electrical Engineers of Japan"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEJ Transactions on Industry Applications","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"bronze","oa_url":"https://www.jstage.jst.go.jp/article/ieejias/131/3/131_3_237/_pdf","any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5013373596","display_name":"Mitsuo Hirata","orcid":"https://orcid.org/0000-0002-7210-2140","observed_orcids":["https://orcid.org/0000-0002-7210-2140"]},"institutions":[{"id":"https://openalex.org/I207399273","display_name":"Utsunomiya University","ror":"https://ror.org/05bx1gz93","country_code":"JP","type":"education","lineage":["https://openalex.org/I207399273"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Mitsuo Hirata","raw_affiliation_strings":["Utsunomiya University","Non-member (Utsunomiya University)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Utsunomiya University","institution_ids":["https://openalex.org/I207399273"]},{"raw_affiliation_string":"Non-member (Utsunomiya University)","institution_ids":["https://openalex.org/I207399273"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5040346552","display_name":"Yuto Sakata","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I207399273","display_name":"Utsunomiya University","ror":"https://ror.org/05bx1gz93","country_code":"JP","type":"education","lineage":["https://openalex.org/I207399273"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Yuto Sakata","raw_affiliation_strings":["Utsunomiya University","Non-member (Utsunomiya University)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Utsunomiya University","institution_ids":["https://openalex.org/I207399273"]},{"raw_affiliation_string":"Non-member (Utsunomiya University)","institution_ids":["https://openalex.org/I207399273"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5071600002","display_name":"Yuji Ide","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I207399273","display_name":"Utsunomiya University","ror":"https://ror.org/05bx1gz93","country_code":"JP","type":"education","lineage":["https://openalex.org/I207399273"]},{"id":"https://openalex.org/I4405276586","display_name":"Sanyo Denki Co., Ltd. (Japan)","ror":"https://ror.org/05qfcnr81","country_code":"JP","type":"company","lineage":["https://openalex.org/I4405276586"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Yuji Ide","raw_affiliation_strings":["Sanyo Denki","(Utsunomiya University)","Non-member (Utsunomiya University)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Sanyo Denki","institution_ids":["https://openalex.org/I4405276586"]},{"raw_affiliation_string":"(Utsunomiya University)","institution_ids":["https://openalex.org/I207399273"]},{"raw_affiliation_string":"Non-member (Utsunomiya University)","institution_ids":["https://openalex.org/I207399273"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":true,"cited_by_count":1,"citation_normalized_percentile":{"value":0.1981699,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":91,"max":95},"biblio":{"volume":"131","issue":"3","first_page":"237","last_page":"243"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T13644","display_name":"Control Systems in Engineering","score":0.3052000105381012,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T13644","display_name":"Control Systems in Engineering","score":0.3052000105381012,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11525","display_name":"Piezoelectric Actuators and Control","score":0.2736999988555908,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11749","display_name":"Iterative Learning Control Systems","score":0.1200999990105629,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/xy-stage","display_name":"XY stage","score":0.9240000247955322},{"id":"https://openalex.org/keywords/tracking-control","display_name":"tracking control","score":0.9160000085830688},{"id":"https://openalex.org/keywords/vibration-reduction","display_name":"vibration suppression","score":0.9240000247955322},{"id":"https://openalex.org/keywords/positioning-accuracy","display_name":"positioning accuracy","score":0.8360000252723694},{"id":"https://openalex.org/keywords/machine-tools","display_name":"machine tools","score":0.6610000133514404}],"concepts":[{"id":"https://openalex.org/C198394728","wikidata":"https://www.wikidata.org/wiki/Q3695508","display_name":"Vibration","level":2,"score":0.7215605974197388},{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.6499477624893188},{"id":"https://openalex.org/C2775936607","wikidata":"https://www.wikidata.org/wiki/Q466845","display_name":"Tracking (education)","level":2,"score":0.6420091390609741},{"id":"https://openalex.org/C172707124","wikidata":"https://www.wikidata.org/wiki/Q423488","display_name":"Actuator","level":2,"score":0.5553674101829529},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5433261394500732},{"id":"https://openalex.org/C106131492","wikidata":"https://www.wikidata.org/wiki/Q3072260","display_name":"Filter (signal processing)","level":2,"score":0.5111106038093567},{"id":"https://openalex.org/C146357865","wikidata":"https://www.wikidata.org/wiki/Q1123245","display_name":"Stage (stratigraphy)","level":2,"score":0.4962669014930725},{"id":"https://openalex.org/C49240428","wikidata":"https://www.wikidata.org/wiki/Q3305953","display_name":"Vibration control","level":3,"score":0.43862974643707275},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.42221102118492126},{"id":"https://openalex.org/C133731056","wikidata":"https://www.wikidata.org/wiki/Q4917288","display_name":"Control engineering","level":1,"score":0.3440757393836975},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.33892855048179626},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.2058802843093872},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.20188018679618835},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.16048330068588257},{"id":"https://openalex.org/C31972630","wikidata":"https://www.wikidata.org/wiki/Q844240","display_name":"Computer vision","level":1,"score":0.11214578151702881},{"id":"https://openalex.org/C151730666","wikidata":"https://www.wikidata.org/wiki/Q7205","display_name":"Paleontology","level":1,"score":0.0},{"id":"https://openalex.org/C19417346","wikidata":"https://www.wikidata.org/wiki/Q7922","display_name":"Pedagogy","level":1,"score":0.0},{"id":"https://openalex.org/C15744967","wikidata":"https://www.wikidata.org/wiki/Q9418","display_name":"Psychology","level":0,"score":0.0},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1541/ieejias.131.237","doi":"https://doi.org/10.1541/ieejias.131.237","is_oa":true,"landing_page_url":"https://doi.org/10.1541/ieejias.131.237","pdf_url":"https://www.jstage.jst.go.jp/article/ieejias/131/3/131_3_237/_pdf","source":{"id":"https://openalex.org/S91284046","display_name":"IEEJ Transactions on Industry Applications","issn_l":"0913-6339","issn":["0913-6339","1348-8163"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":["jufo-1","norway-1","poland-40","russia-white-list-4"],"host_organization":"https://openalex.org/P4320800591","host_organization_name":"Institute of Electrical Engineers of Japan","host_organization_lineage":["https://openalex.org/P4320800591"],"host_organization_lineage_names":["Institute of Electrical Engineers of Japan"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEJ Transactions on Industry Applications","raw_type":"journal-article"}],"best_oa_location":{"id":"doi:10.1541/ieejias.131.237","doi":"https://doi.org/10.1541/ieejias.131.237","is_oa":true,"landing_page_url":"https://doi.org/10.1541/ieejias.131.237","pdf_url":"https://www.jstage.jst.go.jp/article/ieejias/131/3/131_3_237/_pdf","source":{"id":"https://openalex.org/S91284046","display_name":"IEEJ Transactions on Industry Applications","issn_l":"0913-6339","issn":["0913-6339","1348-8163"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":["jufo-1","norway-1","poland-40","russia-white-list-4"],"host_organization":"https://openalex.org/P4320800591","host_organization_name":"Institute of Electrical Engineers of Japan","host_organization_lineage":["https://openalex.org/P4320800591"],"host_organization_lineage_names":["Institute of Electrical Engineers of Japan"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEJ Transactions on Industry Applications","raw_type":"journal-article"},"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2009130600.pdf","grobid_xml":"https://content.openalex.org/works/W2009130600.grobid-xml"},"referenced_works_count":7,"referenced_works":["https://openalex.org/W71018047","https://openalex.org/W1964956827","https://openalex.org/W1996533766","https://openalex.org/W2095483318","https://openalex.org/W2172724902","https://openalex.org/W2313839925","https://openalex.org/W2323288548"],"related_works":["https://openalex.org/W2552138484","https://openalex.org/W4309763550","https://openalex.org/W2164190171","https://openalex.org/W2368738850","https://openalex.org/W2546335228","https://openalex.org/W2044354746","https://openalex.org/W2375486780","https://openalex.org/W1655567978","https://openalex.org/W2541177715","https://openalex.org/W2269245154"],"abstract_inverted_index":{"Machine":[0],"tools":[1],"require":[2],"XY":[3,15],"stages":[4],"that":[5],"can":[6],"be":[7],"quickly":[8],"and":[9,34,52,60,76],"accurately":[10],"controlled.":[11],"However,":[12],"when":[13],"an":[14],"stage":[16],"is":[17,70],"moved":[18],"at":[19],"a":[20,46,54,74],"high":[21],"speed,":[22],"machine":[23],"stand":[24],"vibrates":[25],"because":[26],"of":[27,31,66],"the":[28,32,38,67],"reaction":[29],"force":[30],"actuator,":[33],"this":[35,42],"vibration":[36],"decreases":[37],"positioning":[39],"accuracy.":[40],"In":[41],"paper,":[43],"we":[44],"propose":[45],"control":[47],"method":[48,69],"based":[49],"on":[50],"ZPETC":[51],"used":[53],"peak":[55],"filter":[56],"to":[57],"achieve":[58],"quick":[59],"accurate":[61],"tracking":[62],"control.":[63],"The":[64],"effectiveness":[65],"proposed":[68],"verified":[71],"by":[72],"performing":[73],"simulation":[75],"experiment.":[77]},"counts_by_year":[{"year":2026,"cited_by_count":1}],"updated_date":"2026-10-30T12:39:25.321706","created_date":"2016-06-24T00:00:00"}