{"id":"https://openalex.org/W2008708917","doi":"https://doi.org/10.1557/proc-387-413","title":"Influence of Oxygen on Rapid Thermal Co-Diffusion of Phosphorus and Aluminium in Silicon","display_name":"Influence of Oxygen on Rapid Thermal Co-Diffusion of Phosphorus and Aluminium in Silicon","publication_year":1995,"publication_date":"1995-01-01","ids":{"openalex":"https://openalex.org/W2008708917","doi":"https://doi.org/10.1557/proc-387-413","mag":"2008708917"},"language":"en","primary_location":{"id":"doi:10.1557/proc-387-413","doi":"https://doi.org/10.1557/proc-387-413","is_oa":false,"landing_page_url":"https://doi.org/10.1557/proc-387-413","pdf_url":null,"source":{"id":"https://openalex.org/S2530005873","display_name":"MRS Proceedings","issn_l":"0272-9172","issn":["0272-9172","1946-4274"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","jufo-1","norway-1"],"host_organization":"https://openalex.org/P4310311721","host_organization_name":"Cambridge University Press","host_organization_lineage":["https://openalex.org/P4310311721","https://openalex.org/P4310311702"],"host_organization_lineage_names":["Cambridge University Press","University of Cambridge"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"MRS Proceedings","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5050495886","display_name":"K. Mahfoud","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"K. Mahfoud","raw_affiliation_strings":["Lab. Phase (UPR du CNRS n\u00b0292), BP20, F-67037, Strasbourg, Cedex2, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Lab. Phase (UPR du CNRS n\u00b0292), BP20, F-67037, Strasbourg, Cedex2, France","institution_ids":["https://openalex.org/I1294671590"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5023029272","display_name":"Boucha\u00edb Hartiti","orcid":"https://orcid.org/0000-0003-0168-9965","observed_orcids":["https://orcid.org/0000-0003-0168-9965","https://orcid.org/0000-0002-8372-1422"]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"B. Hartiti","raw_affiliation_strings":["Lab. Phase (UPR du CNRS n\u00b0292), BP20, F-67037, Strasbourg, Cedex2, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Lab. Phase (UPR du CNRS n\u00b0292), BP20, F-67037, Strasbourg, Cedex2, France","institution_ids":["https://openalex.org/I1294671590"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5028544595","display_name":"J.C. M\u00fcller","orcid":"https://orcid.org/0009-0006-4422-450X","observed_orcids":["https://orcid.org/0009-0006-4422-450X"]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"J. C. Muller","raw_affiliation_strings":["Lab. Phase (UPR du CNRS n\u00b0292), BP20, F-67037, Strasbourg, Cedex2, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Lab. Phase (UPR du CNRS n\u00b0292), BP20, F-67037, Strasbourg, Cedex2, France","institution_ids":["https://openalex.org/I1294671590"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5089415291","display_name":"Paul Siffert","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"P. Siffert","raw_affiliation_strings":["Lab. Phase (UPR du CNRS n\u00b0292), BP20, F-67037, Strasbourg, Cedex2, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Lab. Phase (UPR du CNRS n\u00b0292), BP20, F-67037, Strasbourg, Cedex2, France","institution_ids":["https://openalex.org/I1294671590"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I1294671590"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.18335341,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":93},"biblio":{"volume":"387","issue":null,"first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10624","display_name":"Silicon and Solar Cell Technologies","score":0.41670000553131104,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10624","display_name":"Silicon and Solar Cell Technologies","score":0.41670000553131104,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11853","display_name":"Semiconductor materials and interfaces","score":0.3716000020503998,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.20100000500679016,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/rapid-thermal-processing","display_name":"rapid thermal processing","score":0.8169999718666077},{"id":"https://openalex.org/keywords/co-diffusion","display_name":"CO diffusion","score":0.8999999761581421},{"id":"https://openalex.org/keywords/phosphorus","display_name":"phosphorus","score":0.8339999914169312},{"id":"https://openalex.org/keywords/aluminum","display_name":"aluminum","score":0.9990000128746033},{"id":"https://openalex.org/keywords/silicon","display_name":"silicon","score":0.8700000047683716},{"id":"https://openalex.org/keywords/oxygen-concentration","display_name":"oxygen concentration","score":0.7730000019073486},{"id":"https://openalex.org/keywords/minority-carrier-diffusion-length","display_name":"minority carrier diffusion length","score":0.9330000281333923},{"id":"https://openalex.org/keywords/carbon","display_name":"carbon","score":0.6970000267028809},{"id":"https://openalex.org/keywords/impurity-diffusion","display_name":"impurity diffusion","score":0.7820000052452087},{"id":"https://openalex.org/keywords/semiconductor-processing","display_name":"semiconductor processing","score":0.35199999809265137}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.8499123454093933},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.8101762533187866},{"id":"https://openalex.org/C71987851","wikidata":"https://www.wikidata.org/wiki/Q7216430","display_name":"Impurity","level":2,"score":0.7035787105560303},{"id":"https://openalex.org/C513153333","wikidata":"https://www.wikidata.org/wiki/Q663","display_name":"Aluminium","level":2,"score":0.6969095468521118},{"id":"https://openalex.org/C540031477","wikidata":"https://www.wikidata.org/wiki/Q629","display_name":"Oxygen","level":2,"score":0.682352602481842},{"id":"https://openalex.org/C69357855","wikidata":"https://www.wikidata.org/wiki/Q163214","display_name":"Diffusion","level":2,"score":0.6711839437484741},{"id":"https://openalex.org/C204530211","wikidata":"https://www.wikidata.org/wiki/Q752823","display_name":"Thermal","level":2,"score":0.4624145030975342},{"id":"https://openalex.org/C42360764","wikidata":"https://www.wikidata.org/wiki/Q83588","display_name":"Chemical engineering","level":1,"score":0.44763147830963135},{"id":"https://openalex.org/C72832162","wikidata":"https://www.wikidata.org/wiki/Q2131545","display_name":"Rapid thermal processing","level":3,"score":0.423061341047287},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.285591185092926},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.17946746945381165},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.07355517148971558},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.05765482783317566},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1557/proc-387-413","doi":"https://doi.org/10.1557/proc-387-413","is_oa":false,"landing_page_url":"https://doi.org/10.1557/proc-387-413","pdf_url":null,"source":{"id":"https://openalex.org/S2530005873","display_name":"MRS Proceedings","issn_l":"0272-9172","issn":["0272-9172","1946-4274"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","jufo-1","norway-1"],"host_organization":"https://openalex.org/P4310311721","host_organization_name":"Cambridge University Press","host_organization_lineage":["https://openalex.org/P4310311721","https://openalex.org/P4310311702"],"host_organization_lineage_names":["Cambridge University Press","University of Cambridge"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"MRS Proceedings","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320322892","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":12,"referenced_works":["https://openalex.org/W1769403549","https://openalex.org/W1981956391","https://openalex.org/W1985107489","https://openalex.org/W1988993501","https://openalex.org/W2007854679","https://openalex.org/W2026685166","https://openalex.org/W2033267726","https://openalex.org/W2041537905","https://openalex.org/W2044048812","https://openalex.org/W2076077860","https://openalex.org/W2080158548","https://openalex.org/W2161807536"],"related_works":["https://openalex.org/W4246232176","https://openalex.org/W1988993501","https://openalex.org/W2053108989","https://openalex.org/W2082640456","https://openalex.org/W2125480592","https://openalex.org/W2531844540","https://openalex.org/W2326828700","https://openalex.org/W2083644281","https://openalex.org/W2014367837","https://openalex.org/W2109168826"],"abstract_inverted_index":null,"counts_by_year":[{"year":2022,"cited_by_count":1}],"updated_date":"2026-10-30T12:39:25.321706","created_date":"2016-06-24T00:00:00"}