{"id":"https://openalex.org/W2008496041","doi":"https://doi.org/10.1016/j.tsf.2009.02.084","title":"Influence of polymer porogens on the porosity and mechanical properties of spin coated Ultra Low k dielectrics","display_name":"Influence of polymer porogens on the porosity and mechanical properties of spin coated Ultra Low k dielectrics","publication_year":2009,"publication_date":"2009-02-22","ids":{"openalex":"https://openalex.org/W2008496041","doi":"https://doi.org/10.1016/j.tsf.2009.02.084","mag":"2008496041"},"language":"en","primary_location":{"id":"doi:10.1016/j.tsf.2009.02.084","doi":"https://doi.org/10.1016/j.tsf.2009.02.084","is_oa":false,"landing_page_url":"https://doi.org/10.1016/j.tsf.2009.02.084","pdf_url":null,"source":{"id":"https://openalex.org/S84339699","display_name":"Thin Solid Films","issn_l":"0040-6090","issn":["0040-6090","1879-2731"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-b","jufo-1","norway-1","poland-70","russia-white-list-1"],"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Thin Solid Films","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5109098957","display_name":"V. Jousseaume","orcid":"https://orcid.org/0000-0001-8888-6085","observed_orcids":["https://orcid.org/0000-0001-8888-6085","https://orcid.org/0000-0003-4738-7823"]},"institutions":[{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I3020098449","display_name":"CEA Grenoble","ror":"https://ror.org/02mg6n827","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I3020098449"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]}],"countries":["FR"],"is_corresponding":true,"raw_author_name":"V. Jousseaume","raw_affiliation_strings":["CEA-LETI-MINATEC, 17 rue des martyrs, 38054 Grenoble Cedex 9, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEA-LETI-MINATEC, 17 rue des martyrs, 38054 Grenoble Cedex 9, France","institution_ids":["https://openalex.org/I2738703131","https://openalex.org/I3020098449","https://openalex.org/I4210150049"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5113997925","display_name":"G. Rolland","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I3020098449","display_name":"CEA Grenoble","ror":"https://ror.org/02mg6n827","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I3020098449"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"G. Rolland","raw_affiliation_strings":["CEA-LETI-MINATEC, 17 rue des martyrs, 38054 Grenoble Cedex 9, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEA-LETI-MINATEC, 17 rue des martyrs, 38054 Grenoble Cedex 9, France","institution_ids":["https://openalex.org/I2738703131","https://openalex.org/I3020098449","https://openalex.org/I4210150049"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5010193079","display_name":"David Babonneau","orcid":"https://orcid.org/0000-0001-8932-5431","observed_orcids":["https://orcid.org/0000-0001-8932-5431"]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I32881790","display_name":"Universit\u00e9 de Poitiers","ror":"https://ror.org/04xhy8q59","country_code":"FR","type":"education","lineage":["https://openalex.org/I32881790"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"D. Babonneau","raw_affiliation_strings":["Laboratoire de Physique des Mat\u00e9riaux (PHYMAT), UMR 6630 CNRS Universit\u00e9 de Poitiers, BP30179, 86962 Futuroscope Chasseneuil Cedex, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Laboratoire de Physique des Mat\u00e9riaux (PHYMAT), UMR 6630 CNRS Universit\u00e9 de Poitiers, BP30179, 86962 Futuroscope Chasseneuil Cedex, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I32881790"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5114027998","display_name":"Jean Paul Simon","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I177483745","display_name":"Universit\u00e9 Joseph Fourier","ror":"https://ror.org/02aj0kh94","country_code":"FR","type":"education","lineage":["https://openalex.org/I177483745","https://openalex.org/I899635006"]},{"id":"https://openalex.org/I4210094574","display_name":"Science et Ing\u00e9nierie des Mat\u00e9riaux et Proc\u00e9d\u00e9s","ror":"https://ror.org/00m7zca23","country_code":"FR","type":"facility","lineage":["https://openalex.org/I106785703","https://openalex.org/I1294671590","https://openalex.org/I4210094574","https://openalex.org/I4210128300","https://openalex.org/I899635006"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"J.P. Simon","raw_affiliation_strings":["Science et Ing\u00e9nierie des Mat\u00e9riaux et Proc\u00e9d\u00e9s (SIMaP), UMR 5266 CNRS-INPGrenoble-UJF, BP75, 38402 Saint Martin d'H\u00e8res, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Science et Ing\u00e9nierie des Mat\u00e9riaux et Proc\u00e9d\u00e9s (SIMaP), UMR 5266 CNRS-INPGrenoble-UJF, BP75, 38402 Saint Martin d'H\u00e8res, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I177483745","https://openalex.org/I4210094574"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":7,"corresponding_author_ids":["https://openalex.org/A5109098957"],"corresponding_institution_ids":["https://openalex.org/I2738703131","https://openalex.org/I3020098449","https://openalex.org/I4210150049"],"apc_list":{"value":3120,"currency":"USD","value_usd":3120},"apc_paid":null,"fwci":0.8097,"has_fulltext":false,"cited_by_count":18,"citation_normalized_percentile":{"value":0.67664351,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":87,"max":95},"biblio":{"volume":"517","issue":"15","first_page":"4413","last_page":"4418"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11661","display_name":"Copper Interconnects and Reliability","score":0.9390000104904175,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11661","display_name":"Copper Interconnects and Reliability","score":0.9390000104904175,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12084","display_name":"Synthesis and properties of polymers","score":0.014999999664723873,"subfield":{"id":"https://openalex.org/subfields/2507","display_name":"Polymers and Plastics"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.00930000003427267,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/ultra-low-k-dielectrics","display_name":"ultra low-k dielectrics","score":0.9350000023841858},{"id":"https://openalex.org/keywords/spin-coating","display_name":"spin coating","score":0.8830000162124634},{"id":"https://openalex.org/keywords/porosity","display_name":"porosity","score":0.8069999814033508},{"id":"https://openalex.org/keywords/pore-volume-fraction","display_name":"pore volume fraction","score":0.7680000066757202},{"id":"https://openalex.org/keywords/pore-size-distribution","display_name":"pore size distribution","score":0.7089999914169312},{"id":"https://openalex.org/keywords/dielectric-constant","display_name":"dielectric constant","score":0.7440000176429749},{"id":"https://openalex.org/keywords/mechanical-properties","display_name":"mechanical properties","score":0.8270000219345093},{"id":"https://openalex.org/keywords/elastic-properties","display_name":"elastic properties","score":0.8159999847412109},{"id":"https://openalex.org/keywords/thermal-curing","display_name":"thermal curing","score":0.7160000205039978},{"id":"https://openalex.org/keywords/uv-curing","display_name":"UV curing","score":0.8849999904632568},{"id":"https://openalex.org/keywords/cross-linking","display_name":"crosslinking","score":0.7570000290870667},{"id":"https://openalex.org/keywords/porous-polymer-films","display_name":"porous polymer films","score":0.4350000023841858}],"concepts":[{"id":"https://openalex.org/C176443586","wikidata":"https://www.wikidata.org/wiki/Q5598487","display_name":"Grazing-incidence small-angle scattering","level":5,"score":0.8727443218231201},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.8549586534500122},{"id":"https://openalex.org/C6648577","wikidata":"https://www.wikidata.org/wiki/Q622669","display_name":"Porosity","level":2,"score":0.6684530377388},{"id":"https://openalex.org/C133386390","wikidata":"https://www.wikidata.org/wiki/Q184996","display_name":"Dielectric","level":2,"score":0.6500833630561829},{"id":"https://openalex.org/C65590680","wikidata":"https://www.wikidata.org/wiki/Q909482","display_name":"Volume fraction","level":2,"score":0.6405758857727051},{"id":"https://openalex.org/C521977710","wikidata":"https://www.wikidata.org/wiki/Q81163","display_name":"Polymer","level":2,"score":0.5699505805969238},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.5456287860870361},{"id":"https://openalex.org/C114873805","wikidata":"https://www.wikidata.org/wiki/Q2122541","display_name":"Porosimetry","level":4,"score":0.519224226474762},{"id":"https://openalex.org/C160892712","wikidata":"https://www.wikidata.org/wiki/Q901559","display_name":"Fourier transform infrared spectroscopy","level":2,"score":0.456132709980011},{"id":"https://openalex.org/C115196108","wikidata":"https://www.wikidata.org/wiki/Q1305254","display_name":"Spin coating","level":3,"score":0.44671767950057983},{"id":"https://openalex.org/C191486275","wikidata":"https://www.wikidata.org/wiki/Q210028","display_name":"Scattering","level":2,"score":0.41515862941741943},{"id":"https://openalex.org/C2781448156","wikidata":"https://www.wikidata.org/wiki/Q1570182","display_name":"Coating","level":2,"score":0.38022708892822266},{"id":"https://openalex.org/C42360764","wikidata":"https://www.wikidata.org/wiki/Q83588","display_name":"Chemical engineering","level":1,"score":0.22354421019554138},{"id":"https://openalex.org/C132841051","wikidata":"https://www.wikidata.org/wiki/Q4165337","display_name":"Small-angle neutron scattering","level":4,"score":0.2092510461807251},{"id":"https://openalex.org/C105569014","wikidata":"https://www.wikidata.org/wiki/Q3271208","display_name":"Porous medium","level":3,"score":0.19160214066505432},{"id":"https://openalex.org/C104015590","wikidata":"https://www.wikidata.org/wiki/Q1451740","display_name":"Neutron scattering","level":3,"score":0.1829509437084198},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.1439799964427948},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.0},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0}],"mesh":[],"locations_count":3,"locations":[{"id":"doi:10.1016/j.tsf.2009.02.084","doi":"https://doi.org/10.1016/j.tsf.2009.02.084","is_oa":false,"landing_page_url":"https://doi.org/10.1016/j.tsf.2009.02.084","pdf_url":null,"source":{"id":"https://openalex.org/S84339699","display_name":"Thin Solid Films","issn_l":"0040-6090","issn":["0040-6090","1879-2731"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-b","jufo-1","norway-1","poland-70","russia-white-list-1"],"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Thin Solid Films","raw_type":"journal-article"},{"id":"pmh:oai:HAL:hal-00354264v1","doi":null,"is_oa":false,"landing_page_url":"https://hal.science/hal-00354264","pdf_url":null,"source":{"id":"https://openalex.org/S4306402512","display_name":"HAL","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I4405252976","host_organization_name":"Centre pour la Communication Scientifique Directe","host_organization_lineage":["https://openalex.org/I4405252976"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"The Film Layers, 2008, in press","raw_type":"info:eu-repo/semantics/article"},{"id":"pmh:oai:HAL:hal-00437942v1","doi":null,"is_oa":false,"landing_page_url":"https://hal.science/hal-00437942","pdf_url":null,"source":{"id":"https://openalex.org/S4306402512","display_name":"HAL","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I4405252976","host_organization_name":"Centre pour la Communication Scientifique Directe","host_organization_lineage":["https://openalex.org/I4405252976"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Thin Solid Films, 2009, 517 (15), pp.4413-4418. ⟨10.1016/j.tsf.2009.02.084⟩","raw_type":"info:eu-repo/semantics/article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":21,"referenced_works":["https://openalex.org/W1523343856","https://openalex.org/W1965000388","https://openalex.org/W1967158447","https://openalex.org/W1969480222","https://openalex.org/W1981766865","https://openalex.org/W1982133277","https://openalex.org/W1996754191","https://openalex.org/W2014797212","https://openalex.org/W2021407985","https://openalex.org/W2051166244","https://openalex.org/W2053630150","https://openalex.org/W2062367761","https://openalex.org/W2067019074","https://openalex.org/W2072994085","https://openalex.org/W2086529087","https://openalex.org/W2088107578","https://openalex.org/W2099289030","https://openalex.org/W2125284678","https://openalex.org/W2139489516","https://openalex.org/W2159302160","https://openalex.org/W2166331143"],"related_works":["https://openalex.org/W4206851215","https://openalex.org/W2161222839","https://openalex.org/W4412482369","https://openalex.org/W2091644022","https://openalex.org/W2026541334","https://openalex.org/W7098048899","https://openalex.org/W2097228964","https://openalex.org/W2114177234","https://openalex.org/W1971942721","https://openalex.org/W2037509636"],"abstract_inverted_index":null,"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2023,"cited_by_count":1},{"year":2022,"cited_by_count":2},{"year":2021,"cited_by_count":1},{"year":2020,"cited_by_count":1},{"year":2016,"cited_by_count":1},{"year":2015,"cited_by_count":1},{"year":2014,"cited_by_count":2},{"year":2013,"cited_by_count":2},{"year":2012,"cited_by_count":2}],"updated_date":"2026-11-07T11:25:07.637180","created_date":"2016-06-24T00:00:00"}