{"id":"https://openalex.org/W2008296259","doi":"https://doi.org/10.1016/s0038-1098(01)00411-2","title":"Structure and optical properties of carbon nitride films deposited by magnetron sputtering","display_name":"Structure and optical properties of carbon nitride films deposited by magnetron sputtering","publication_year":2001,"publication_date":"2001-11-01","ids":{"openalex":"https://openalex.org/W2008296259","doi":"https://doi.org/10.1016/s0038-1098(01)00411-2","mag":"2008296259"},"language":"en","primary_location":{"id":"doi:10.1016/s0038-1098(01)00411-2","doi":"https://doi.org/10.1016/s0038-1098(01)00411-2","is_oa":false,"landing_page_url":"https://doi.org/10.1016/s0038-1098(01)00411-2","pdf_url":null,"source":{"id":"https://openalex.org/S82088436","display_name":"Solid State Communications","issn_l":"0038-1098","issn":["0038-1098","1879-2766"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-c","jufo-1","norway-1","poland-70","russia-white-list-2"],"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Solid State Communications","raw_type":"journal-article"},"volume":null,"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5018295778","display_name":"Michael Lejeune","orcid":"https://orcid.org/0000-0002-2846-5227","observed_orcids":["https://orcid.org/0000-0002-2846-5227"]},"institutions":[{"id":"https://openalex.org/I4401200345","display_name":"Laboratoire de physique de la mati\u00e8re condens\u00e9e","ror":"https://ror.org/05brss208","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I4401200345","https://openalex.org/I4647051"]},{"id":"https://openalex.org/I4647051","display_name":"Universit\u00e9 de Picardie Jules Verne","ror":"https://ror.org/01gyxrk03","country_code":"FR","type":"education","lineage":["https://openalex.org/I4647051"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"M. Lejeune","raw_affiliation_strings":["Laboratoire de Physique de la Mati\u00e8re Condens\u00e9e, Facult\u00e9 des Sciences d'Amiens, Universite de Picardie Jules Verne, 33 rue Saint Leu, 80039 Amiens Cedex 2, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Laboratoire de Physique de la Mati\u00e8re Condens\u00e9e, Facult\u00e9 des Sciences d'Amiens, Universite de Picardie Jules Verne, 33 rue Saint Leu, 80039 Amiens Cedex 2, France","institution_ids":["https://openalex.org/I4401200345","https://openalex.org/I4647051"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5105413866","display_name":"O. Durand-Drouhin","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4401200345","display_name":"Laboratoire de physique de la mati\u00e8re condens\u00e9e","ror":"https://ror.org/05brss208","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I4401200345","https://openalex.org/I4647051"]},{"id":"https://openalex.org/I4647051","display_name":"Universit\u00e9 de Picardie Jules Verne","ror":"https://ror.org/01gyxrk03","country_code":"FR","type":"education","lineage":["https://openalex.org/I4647051"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"O. Durand-Drouhin","raw_affiliation_strings":["Laboratoire de Physique de la Mati\u00e8re Condens\u00e9e, Facult\u00e9 des Sciences d'Amiens, Universite de Picardie Jules Verne, 33 rue Saint Leu, 80039 Amiens Cedex 2, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Laboratoire de Physique de la Mati\u00e8re Condens\u00e9e, Facult\u00e9 des Sciences d'Amiens, Universite de Picardie Jules Verne, 33 rue Saint Leu, 80039 Amiens Cedex 2, France","institution_ids":["https://openalex.org/I4401200345","https://openalex.org/I4647051"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5088937288","display_name":"Kacem Zellama","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4401200345","display_name":"Laboratoire de physique de la mati\u00e8re condens\u00e9e","ror":"https://ror.org/05brss208","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I4401200345","https://openalex.org/I4647051"]},{"id":"https://openalex.org/I4647051","display_name":"Universit\u00e9 de Picardie Jules Verne","ror":"https://ror.org/01gyxrk03","country_code":"FR","type":"education","lineage":["https://openalex.org/I4647051"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"K. Zellama","raw_affiliation_strings":["Laboratoire de Physique de la Mati\u00e8re Condens\u00e9e, Facult\u00e9 des Sciences d'Amiens, Universite de Picardie Jules Verne, 33 rue Saint Leu, 80039 Amiens Cedex 2, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Laboratoire de Physique de la Mati\u00e8re Condens\u00e9e, Facult\u00e9 des Sciences d'Amiens, Universite de Picardie Jules Verne, 33 rue Saint Leu, 80039 Amiens Cedex 2, France","institution_ids":["https://openalex.org/I4401200345","https://openalex.org/I4647051"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5073934763","display_name":"M. Benlahsen","orcid":"https://orcid.org/0000-0003-3441-9427","observed_orcids":["https://orcid.org/0000-0003-3441-9427"]},"institutions":[{"id":"https://openalex.org/I4401200345","display_name":"Laboratoire de physique de la mati\u00e8re condens\u00e9e","ror":"https://ror.org/05brss208","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I4401200345","https://openalex.org/I4647051"]},{"id":"https://openalex.org/I4647051","display_name":"Universit\u00e9 de Picardie Jules Verne","ror":"https://ror.org/01gyxrk03","country_code":"FR","type":"education","lineage":["https://openalex.org/I4647051"]}],"countries":["FR"],"is_corresponding":true,"raw_author_name":"M. Benlahsen","raw_affiliation_strings":["Laboratoire de Physique de la Mati\u00e8re Condens\u00e9e, Facult\u00e9 des Sciences d'Amiens, Universite de Picardie Jules Verne, 33 rue Saint Leu, 80039 Amiens Cedex 2, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Laboratoire de Physique de la Mati\u00e8re Condens\u00e9e, Facult\u00e9 des Sciences d'Amiens, Universite de Picardie Jules Verne, 33 rue Saint Leu, 80039 Amiens Cedex 2, France","institution_ids":["https://openalex.org/I4401200345","https://openalex.org/I4647051"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":["https://openalex.org/A5073934763"],"corresponding_institution_ids":["https://openalex.org/I4401200345","https://openalex.org/I4647051"],"apc_list":{"value":2960,"currency":"USD","value_usd":2960},"apc_paid":null,"fwci":8.1745,"has_fulltext":false,"cited_by_count":38,"citation_normalized_percentile":{"value":0.97663932,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":89,"max":96},"biblio":{"volume":"120","issue":"9-10","first_page":"337","last_page":"342"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10377","display_name":"Metal and Thin Film Mechanics","score":0.5692999958992004,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10377","display_name":"Metal and Thin Film Mechanics","score":0.5692999958992004,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10478","display_name":"Diamond and Carbon-based Materials Research","score":0.37619999051094055,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11341","display_name":"Boron and Carbon Nanomaterials Research","score":0.007199999876320362,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/carbon-nitride-films","display_name":"carbon nitride films","score":0.968999981880188},{"id":"https://openalex.org/keywords/rf-magnetron-sputtering","display_name":"RF magnetron sputtering","score":0.9150000214576721},{"id":"https://openalex.org/keywords/graphite-target","display_name":"graphite target","score":0.925000011920929},{"id":"https://openalex.org/keywords/nitrogen-atmosphere","display_name":"nitrogen atmosphere","score":0.8379999995231628},{"id":"https://openalex.org/keywords/rf-power","display_name":"RF power","score":0.7649999856948853},{"id":"https://openalex.org/keywords/optical-properties","display_name":"optical properties","score":0.9419999718666077},{"id":"https://openalex.org/keywords/sp2-carbon-content","display_name":"sp2 carbon content","score":0.8489999771118164},{"id":"https://openalex.org/keywords/ion-bombardment","display_name":"ion bombardment","score":0.9800000190734863},{"id":"https://openalex.org/keywords/film-disorder","display_name":"film disorder","score":0.7110000252723694},{"id":"https://openalex.org/keywords/photothermal-deflection-spectroscopy","display_name":"photothermal deflection spectroscopy","score":0.9200000166893005}],"concepts":[{"id":"https://openalex.org/C2777492770","wikidata":"https://www.wikidata.org/wiki/Q5037986","display_name":"Carbon nitride","level":4,"score":0.6774781942367554},{"id":"https://openalex.org/C175708663","wikidata":"https://www.wikidata.org/wiki/Q899559","display_name":"X-ray photoelectron spectroscopy","level":2,"score":0.669438898563385},{"id":"https://openalex.org/C61427134","wikidata":"https://www.wikidata.org/wiki/Q847609","display_name":"Sputter deposition","level":4,"score":0.6590814590454102},{"id":"https://openalex.org/C40003534","wikidata":"https://www.wikidata.org/wiki/Q862228","display_name":"Raman spectroscopy","level":2,"score":0.6286249160766602},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5946639180183411},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.5705593824386597},{"id":"https://openalex.org/C22423302","wikidata":"https://www.wikidata.org/wiki/Q898444","display_name":"Sputtering","level":3,"score":0.5209868550300598},{"id":"https://openalex.org/C194760766","wikidata":"https://www.wikidata.org/wiki/Q410851","display_name":"Nitride","level":3,"score":0.520477294921875},{"id":"https://openalex.org/C32891209","wikidata":"https://www.wikidata.org/wiki/Q483666","display_name":"Spectroscopy","level":2,"score":0.4935210943222046},{"id":"https://openalex.org/C123408415","wikidata":"https://www.wikidata.org/wiki/Q194154","display_name":"Cavity magnetron","level":4,"score":0.461901992559433},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.45781436562538147},{"id":"https://openalex.org/C140205800","wikidata":"https://www.wikidata.org/wiki/Q5860","display_name":"Carbon fibers","level":3,"score":0.43972456455230713},{"id":"https://openalex.org/C2779698641","wikidata":"https://www.wikidata.org/wiki/Q5309","display_name":"Graphite","level":2,"score":0.4153466820716858},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.29454582929611206},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.14671793580055237},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.13107401132583618},{"id":"https://openalex.org/C42360764","wikidata":"https://www.wikidata.org/wiki/Q83588","display_name":"Chemical engineering","level":1,"score":0.11904516816139221},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.09033343195915222},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.08713707327842712},{"id":"https://openalex.org/C104779481","wikidata":"https://www.wikidata.org/wiki/Q50707","display_name":"Composite number","level":2,"score":0.0},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0},{"id":"https://openalex.org/C55493867","wikidata":"https://www.wikidata.org/wiki/Q7094","display_name":"Biochemistry","level":1,"score":0.0},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.0},{"id":"https://openalex.org/C65165184","wikidata":"https://www.wikidata.org/wiki/Q218831","display_name":"Photocatalysis","level":3,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C161790260","wikidata":"https://www.wikidata.org/wiki/Q82264","display_name":"Catalysis","level":2,"score":0.0},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1016/s0038-1098(01)00411-2","doi":"https://doi.org/10.1016/s0038-1098(01)00411-2","is_oa":false,"landing_page_url":"https://doi.org/10.1016/s0038-1098(01)00411-2","pdf_url":null,"source":{"id":"https://openalex.org/S82088436","display_name":"Solid State Communications","issn_l":"0038-1098","issn":["0038-1098","1879-2766"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-c","jufo-1","norway-1","poland-70","russia-white-list-2"],"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Solid State Communications","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320337753","display_name":"Interreg","ror":null}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":31,"referenced_works":["https://openalex.org/W618602388","https://openalex.org/W1967052936","https://openalex.org/W1969293409","https://openalex.org/W1976705497","https://openalex.org/W1978328563","https://openalex.org/W1985021358","https://openalex.org/W1985881684","https://openalex.org/W1992902526","https://openalex.org/W1998967270","https://openalex.org/W2003450335","https://openalex.org/W2003660576","https://openalex.org/W2014009716","https://openalex.org/W2014064851","https://openalex.org/W2022372371","https://openalex.org/W2022696853","https://openalex.org/W2025659062","https://openalex.org/W2034893474","https://openalex.org/W2044299498","https://openalex.org/W2049347630","https://openalex.org/W2058272047","https://openalex.org/W2063047440","https://openalex.org/W2063938870","https://openalex.org/W2071440465","https://openalex.org/W2074672014","https://openalex.org/W2075751118","https://openalex.org/W2092332261","https://openalex.org/W2092476503","https://openalex.org/W2095183611","https://openalex.org/W2235679284","https://openalex.org/W4247741531","https://openalex.org/W4253056353"],"related_works":["https://openalex.org/W2051051459","https://openalex.org/W2005181453","https://openalex.org/W1975408585","https://openalex.org/W2079010008","https://openalex.org/W53567231","https://openalex.org/W2037007718","https://openalex.org/W4248525032","https://openalex.org/W1653165680","https://openalex.org/W1987194126","https://openalex.org/W2069498392"],"abstract_inverted_index":null,"counts_by_year":[{"year":2024,"cited_by_count":1},{"year":2019,"cited_by_count":2},{"year":2018,"cited_by_count":1},{"year":2017,"cited_by_count":1},{"year":2015,"cited_by_count":1},{"year":2014,"cited_by_count":1},{"year":2012,"cited_by_count":1}],"updated_date":"2026-10-30T12:39:25.321706","created_date":"2016-06-24T00:00:00"}