{"id":"https://openalex.org/W2008166319","doi":"https://doi.org/10.1109/tmag.2013.2252330","title":"Switching Field Variation in MgO Magnetic Tunnel Junction Nanopillars: Experimental Results and Micromagnetic Simulations","display_name":"Switching Field Variation in MgO Magnetic Tunnel Junction Nanopillars: Experimental Results and Micromagnetic Simulations","publication_year":2013,"publication_date":"2013-07-01","ids":{"openalex":"https://openalex.org/W2008166319","doi":"https://doi.org/10.1109/tmag.2013.2252330","mag":"2008166319"},"language":"en","primary_location":{"id":"doi:10.1109/tmag.2013.2252330","doi":"https://doi.org/10.1109/tmag.2013.2252330","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tmag.2013.2252330","pdf_url":null,"source":{"id":"https://openalex.org/S50523690","display_name":"IEEE Transactions on Magnetics","issn_l":"0018-9464","issn":["0018-9464","1941-0069"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-b","jufo-2","ki-jl-1","norway-1","poland-70","russia-white-list-2","vabb-shw"],"host_organization":"https://openalex.org/P4310320755","host_organization_name":"IEEE Magnetics Society","host_organization_lineage":["https://openalex.org/P4310320755","https://openalex.org/P4310319808"],"host_organization_lineage_names":["IEEE Magnetics Society","Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Magnetics","raw_type":"journal-article"},"parent_works":[],"lineage":["https://openalex.org/W2008166319"],"child_works_count":0,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5050156185","display_name":"Ana V. Silva","orcid":"https://orcid.org/0000-0003-0328-1787","observed_orcids":["https://orcid.org/0000-0003-0328-1787"]},"institutions":[{"id":"https://openalex.org/I4210109601","display_name":"Instituto de Engenharia de Sistemas e Computadores Microsistemas e Nanotecnologias","ror":"https://ror.org/022mzwp71","country_code":"PT","type":"nonprofit","lineage":["https://openalex.org/I4210109601","https://openalex.org/I4210125590"]}],"countries":["PT"],"is_corresponding":false,"raw_author_name":"Ana V. Silva","raw_affiliation_strings":["$^{1}$ Instituto de Sistemas e Computadores-Microsistemas e Nanotecnologias (INESC-MN), Lisboa , Portugal","Inst. de Sist. e Comput.-Microsistemas e Nanotecnologias (INESC-MN), Lisbon, Portugal"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"$^{1}$ Instituto de Sistemas e Computadores-Microsistemas e Nanotecnologias (INESC-MN), Lisboa , Portugal","institution_ids":["https://openalex.org/I4210109601"]},{"raw_affiliation_string":"Inst. de Sist. e Comput.-Microsistemas e Nanotecnologias (INESC-MN), Lisbon, Portugal","institution_ids":["https://openalex.org/I4210109601"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5071432695","display_name":"Diana C. Leit\u00e3o","orcid":"https://orcid.org/0000-0001-8419-2967","observed_orcids":["https://orcid.org/0000-0001-8419-2967"]},"institutions":[{"id":"https://openalex.org/I4210109601","display_name":"Instituto de Engenharia de Sistemas e Computadores Microsistemas e Nanotecnologias","ror":"https://ror.org/022mzwp71","country_code":"PT","type":"nonprofit","lineage":["https://openalex.org/I4210109601","https://openalex.org/I4210125590"]}],"countries":["PT"],"is_corresponding":false,"raw_author_name":"Diana C. Leitao","raw_affiliation_strings":["$^{1}$ Instituto de Sistemas e Computadores-Microsistemas e Nanotecnologias (INESC-MN), Lisboa, Portugal","Inst. de Sist. e Comput.-Microsistemas e Nanotecnologias (INESC-MN), Lisbon, Portugal"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"$^{1}$ Instituto de Sistemas e Computadores-Microsistemas e Nanotecnologias (INESC-MN), Lisboa, Portugal","institution_ids":["https://openalex.org/I4210109601"]},{"raw_affiliation_string":"Inst. de Sist. e Comput.-Microsistemas e Nanotecnologias (INESC-MN), Lisbon, Portugal","institution_ids":["https://openalex.org/I4210109601"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5065051886","display_name":"Zhiwei Huo","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210109601","display_name":"Instituto de Engenharia de Sistemas e Computadores Microsistemas e Nanotecnologias","ror":"https://ror.org/022mzwp71","country_code":"PT","type":"nonprofit","lineage":["https://openalex.org/I4210109601","https://openalex.org/I4210125590"]}],"countries":["PT"],"is_corresponding":false,"raw_author_name":"Zhiwei Huo","raw_affiliation_strings":["$^{1}$ Instituto de Sistemas e Computadores-Microsistemas e Nanotecnologias (INESC-MN), Lisboa, Portugal","Inst. de Sist. e Comput.-Microsistemas e Nanotecnologias (INESC-MN), Lisbon, Portugal"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"$^{1}$ Instituto de Sistemas e Computadores-Microsistemas e Nanotecnologias (INESC-MN), Lisboa, Portugal","institution_ids":["https://openalex.org/I4210109601"]},{"raw_affiliation_string":"Inst. de Sist. e Comput.-Microsistemas e Nanotecnologias (INESC-MN), Lisbon, Portugal","institution_ids":["https://openalex.org/I4210109601"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5089855855","display_name":"Rita J. Macedo","orcid":"https://orcid.org/0000-0002-4266-0635","observed_orcids":["https://orcid.org/0000-0002-4266-0635"]},"institutions":[{"id":"https://openalex.org/I4210109601","display_name":"Instituto de Engenharia de Sistemas e Computadores Microsistemas e Nanotecnologias","ror":"https://ror.org/022mzwp71","country_code":"PT","type":"nonprofit","lineage":["https://openalex.org/I4210109601","https://openalex.org/I4210125590"]}],"countries":["PT"],"is_corresponding":false,"raw_author_name":"Rita J. Macedo","raw_affiliation_strings":["$^{1}$ Instituto de Sistemas e Computadores-Microsistemas e Nanotecnologias (INESC-MN), Lisboa, Portugal","Inst. de Sist. e Comput.-Microsistemas e Nanotecnologias (INESC-MN), Lisbon, Portugal"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"$^{1}$ Instituto de Sistemas e Computadores-Microsistemas e Nanotecnologias (INESC-MN), Lisboa, Portugal","institution_ids":["https://openalex.org/I4210109601"]},{"raw_affiliation_string":"Inst. de Sist. e Comput.-Microsistemas e Nanotecnologias (INESC-MN), Lisbon, Portugal","institution_ids":["https://openalex.org/I4210109601"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5046758034","display_name":"Ricardo Ferreira","orcid":"https://orcid.org/0000-0003-0953-2225","observed_orcids":["https://orcid.org/0000-0003-0953-2225"]},"institutions":[{"id":"https://openalex.org/I4210141319","display_name":"International Iberian Nanotechnology Laboratory","ror":"https://ror.org/04dv3aq25","country_code":"PT","type":"facility","lineage":["https://openalex.org/I4210141319"]}],"countries":["PT"],"is_corresponding":false,"raw_author_name":"Ricardo Ferreira","raw_affiliation_strings":["$^{3}$International Iberian Nanotechnology Laboratory (INL), Braga , Portugal","Int. Iberian Nanotechnol. Lab. (INL), Braga, Portugal"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"$^{3}$International Iberian Nanotechnology Laboratory (INL), Braga , Portugal","institution_ids":["https://openalex.org/I4210141319"]},{"raw_affiliation_string":"Int. Iberian Nanotechnol. Lab. (INL), Braga, Portugal","institution_ids":["https://openalex.org/I4210141319"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5001553356","display_name":"Elvira Paz","orcid":"https://orcid.org/0000-0003-0908-9948","observed_orcids":["https://orcid.org/0000-0003-0908-9948"]},"institutions":[{"id":"https://openalex.org/I4210141319","display_name":"International Iberian Nanotechnology Laboratory","ror":"https://ror.org/04dv3aq25","country_code":"PT","type":"facility","lineage":["https://openalex.org/I4210141319"]}],"countries":["PT"],"is_corresponding":false,"raw_author_name":"Elvira Paz","raw_affiliation_strings":["$^{3}$ International Iberian Nanotechnology Laboratory (INL), Braga, Portugal","Int. Iberian Nanotechnol. Lab. (INL), Braga, Portugal"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"$^{3}$ International Iberian Nanotechnology Laboratory (INL), Braga, Portugal","institution_ids":["https://openalex.org/I4210141319"]},{"raw_affiliation_string":"Int. Iberian Nanotechnol. Lab. (INL), Braga, Portugal","institution_ids":["https://openalex.org/I4210141319"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5037311572","display_name":"Francis Leonard Deepak","orcid":"https://orcid.org/0000-0002-3833-1775","observed_orcids":["https://orcid.org/0000-0002-3833-1775"]},"institutions":[{"id":"https://openalex.org/I4210141319","display_name":"International Iberian Nanotechnology Laboratory","ror":"https://ror.org/04dv3aq25","country_code":"PT","type":"facility","lineage":["https://openalex.org/I4210141319"]}],"countries":["PT"],"is_corresponding":false,"raw_author_name":"Francis Leonard Deepak","raw_affiliation_strings":["$^{3}$ International Iberian Nanotechnology Laboratory (INL), Braga, Portugal","Int. Iberian Nanotechnol. Lab. (INL), Braga, Portugal"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"$^{3}$ International Iberian Nanotechnology Laboratory (INL), Braga, Portugal","institution_ids":["https://openalex.org/I4210141319"]},{"raw_affiliation_string":"Int. Iberian Nanotechnol. Lab. (INL), Braga, Portugal","institution_ids":["https://openalex.org/I4210141319"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5073937337","display_name":"Susana Cardoso","orcid":"https://orcid.org/0000-0001-6913-6529","observed_orcids":["https://orcid.org/0000-0001-6913-6529"]},"institutions":[{"id":"https://openalex.org/I4210109601","display_name":"Instituto de Engenharia de Sistemas e Computadores Microsistemas e Nanotecnologias","ror":"https://ror.org/022mzwp71","country_code":"PT","type":"nonprofit","lineage":["https://openalex.org/I4210109601","https://openalex.org/I4210125590"]}],"countries":["PT"],"is_corresponding":false,"raw_author_name":"Susana Cardoso","raw_affiliation_strings":["$^{1}$ Instituto de Sistemas e Computadores-Microsistemas e Nanotecnologias (INESC-MN), Lisboa, Portugal","Inst. de Sist. e Comput.-Microsistemas e Nanotecnologias (INESC-MN), Lisbon, Portugal"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"$^{1}$ Instituto de Sistemas e Computadores-Microsistemas e Nanotecnologias (INESC-MN), Lisboa, Portugal","institution_ids":["https://openalex.org/I4210109601"]},{"raw_affiliation_string":"Inst. de Sist. e Comput.-Microsistemas e Nanotecnologias (INESC-MN), Lisbon, Portugal","institution_ids":["https://openalex.org/I4210109601"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5028180730","display_name":"P. P. Freitas","orcid":"https://orcid.org/0000-0003-0015-1186","observed_orcids":["https://orcid.org/0000-0003-0015-1186"]},"institutions":[{"id":"https://openalex.org/I4210109601","display_name":"Instituto de Engenharia de Sistemas e Computadores Microsistemas e Nanotecnologias","ror":"https://ror.org/022mzwp71","country_code":"PT","type":"nonprofit","lineage":["https://openalex.org/I4210109601","https://openalex.org/I4210125590"]},{"id":"https://openalex.org/I4210125590","display_name":"Institute for Systems Engineering and Computers","ror":"https://ror.org/033wn8m60","country_code":"PT","type":"nonprofit","lineage":["https://openalex.org/I4210125590"]}],"countries":["PT"],"is_corresponding":false,"raw_author_name":"Paulo P. Freitas","raw_affiliation_strings":["$^{1}$Instituto de Sistemas e Computadores-Microsistemas e Nanotecnologias (INESC-MN), Lisboa, Portugal","Inst. de Sist. e Comput.-Microsistemas e Nanotecnologias (INESC-MN), Lisbon, Portugal"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"$^{1}$Instituto de Sistemas e Computadores-Microsistemas e Nanotecnologias (INESC-MN), Lisboa, Portugal","institution_ids":["https://openalex.org/I4210109601","https://openalex.org/I4210125590"]},{"raw_affiliation_string":"Inst. de Sist. e Comput.-Microsistemas e Nanotecnologias (INESC-MN), Lisbon, Portugal","institution_ids":["https://openalex.org/I4210109601"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":{"value":2645,"currency":"USD","value_usd":2645},"apc_paid":null,"fwci":1.2472,"has_fulltext":false,"cited_by_count":14,"citation_normalized_percentile":{"value":0.78216962,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":87,"max":97},"biblio":{"volume":"49","issue":"7","first_page":"4405","last_page":"4408"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10049","display_name":"Magnetic properties of thin films","score":0.9955999851226807,"subfield":{"id":"https://openalex.org/subfields/3104","display_name":"Condensed Matter Physics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10049","display_name":"Magnetic properties of thin films","score":0.9955999851226807,"subfield":{"id":"https://openalex.org/subfields/3104","display_name":"Condensed Matter Physics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11222","display_name":"Magnetic Properties and Applications","score":0.000699999975040555,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11782","display_name":"Magnetic Properties of Alloys","score":0.0006000000284984708,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/magnetic-tunnel-junctions","display_name":"magnetic tunnel junctions","score":0.9049999713897705},{"id":"https://openalex.org/keywords/mgo-tunnel-barrier","display_name":"MgO tunnel barrier","score":0.7910000085830688},{"id":"https://openalex.org/keywords/nanopillars","display_name":"nanopillars","score":0.8989999890327454},{"id":"https://openalex.org/keywords/switching-field","display_name":"switching field","score":0.9599999785423279},{"id":"https://openalex.org/keywords/micromagnetic-simulation","display_name":"micromagnetic simulation","score":0.8040000200271606},{"id":"https://openalex.org/keywords/single-domain-state","display_name":"single-domain state","score":0.6230000257492065},{"id":"https://openalex.org/keywords/thermal-activation","display_name":"thermal activation","score":0.9210000038146973}],"concepts":[{"id":"https://openalex.org/C25479853","wikidata":"https://www.wikidata.org/wiki/Q12228614","display_name":"Nanopillar","level":3,"score":0.9416823983192444},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6260594129562378},{"id":"https://openalex.org/C142089489","wikidata":"https://www.wikidata.org/wiki/Q1053976","display_name":"Antiparallel (mathematics)","level":3,"score":0.6170182824134827},{"id":"https://openalex.org/C119835096","wikidata":"https://www.wikidata.org/wiki/Q6839648","display_name":"Micromagnetics","level":4,"score":0.5638262033462524},{"id":"https://openalex.org/C155058782","wikidata":"https://www.wikidata.org/wiki/Q66468430","display_name":"Remanence","level":4,"score":0.5621593594551086},{"id":"https://openalex.org/C26873012","wikidata":"https://www.wikidata.org/wiki/Q214781","display_name":"Condensed matter physics","level":1,"score":0.515535831451416},{"id":"https://openalex.org/C82217956","wikidata":"https://www.wikidata.org/wiki/Q184207","display_name":"Ferromagnetism","level":2,"score":0.4737473428249359},{"id":"https://openalex.org/C56202322","wikidata":"https://www.wikidata.org/wiki/Q1884383","display_name":"Tunnel magnetoresistance","level":3,"score":0.45486515760421753},{"id":"https://openalex.org/C115260700","wikidata":"https://www.wikidata.org/wiki/Q11408","display_name":"Magnetic field","level":2,"score":0.4395485818386078},{"id":"https://openalex.org/C162117346","wikidata":"https://www.wikidata.org/wiki/Q1106386","display_name":"Nanolithography","level":4,"score":0.41214632987976074},{"id":"https://openalex.org/C46141821","wikidata":"https://www.wikidata.org/wiki/Q209402","display_name":"Nuclear magnetic resonance","level":1,"score":0.3342657685279846},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.3315027952194214},{"id":"https://openalex.org/C32546565","wikidata":"https://www.wikidata.org/wiki/Q856711","display_name":"Magnetization","level":3,"score":0.30705052614212036},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.2620178461074829},{"id":"https://openalex.org/C186187911","wikidata":"https://www.wikidata.org/wiki/Q1093894","display_name":"Nanostructure","level":2,"score":0.18026119470596313},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.09685748815536499},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/tmag.2013.2252330","doi":"https://doi.org/10.1109/tmag.2013.2252330","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tmag.2013.2252330","pdf_url":null,"source":{"id":"https://openalex.org/S50523690","display_name":"IEEE Transactions on Magnetics","issn_l":"0018-9464","issn":["0018-9464","1941-0069"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-b","jufo-2","ki-jl-1","norway-1","poland-70","russia-white-list-2","vabb-shw"],"host_organization":"https://openalex.org/P4310320755","host_organization_name":"IEEE Magnetics Society","host_organization_lineage":["https://openalex.org/P4310320755","https://openalex.org/P4310319808"],"host_organization_lineage_names":["IEEE Magnetics Society","Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Magnetics","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":19,"referenced_works":["https://openalex.org/W1969868886","https://openalex.org/W1978189994","https://openalex.org/W1979949772","https://openalex.org/W1980263111","https://openalex.org/W1995149031","https://openalex.org/W2016543497","https://openalex.org/W2020077517","https://openalex.org/W2033072452","https://openalex.org/W2048592125","https://openalex.org/W2062764369","https://openalex.org/W2065327886","https://openalex.org/W2075348819","https://openalex.org/W2091312555","https://openalex.org/W2092287433","https://openalex.org/W2142288903","https://openalex.org/W2146796006","https://openalex.org/W2314921311","https://openalex.org/W2964459192","https://openalex.org/W4249123797"],"related_works":["https://openalex.org/W2125371684","https://openalex.org/W3014387136","https://openalex.org/W2065327886","https://openalex.org/W2801569002","https://openalex.org/W2084145530","https://openalex.org/W2096172940","https://openalex.org/W4281293772","https://openalex.org/W2522449035","https://openalex.org/W2306278439","https://openalex.org/W1662853978"],"abstract_inverted_index":{"The":[0,54],"switching":[1,76],"field":[2],"dependence":[3],"on":[4],"the":[5,47,51,73,91,101,134,137],"size":[6],"of":[7,50,93,100,112,136],"nanometric":[8],"magnetic":[9,35,48],"tunnel":[10],"junctions":[11],"was":[12,42,88,125],"studied.":[13],"CoFe/Ru/CoFeB/MgO/CoFeB":[14],"nanopillars":[15],"were":[16,79],"fabricated":[17],"down":[18],"to":[19,45,116,127],"150":[20],"\u00d7":[21],"300":[22],"nm2and":[23],"characterized,":[24],"revealing":[25],"a":[26,31,57,65,94],"squared":[27],"transfer":[28],"curve":[29],"with":[30,90],"sharp":[32,66],"transition":[33,67],"between":[34,68],"states.":[36],"A":[37],"micromagnetic":[38],"finite":[39],"element":[40],"tool":[41,132],"then":[43],"used":[44,106],"simulate":[46],"behavior":[49],"studied":[52],"nanopillar.":[53],"simulations":[55],"indicated":[56],"single-domain":[58],"like":[59],"state":[60],"at":[61],"remanence,":[62],"also":[63],"displaying":[64],"parallel/antiparallel":[69],"free-layer":[70],"configurations.":[71],"Overall,":[72],"experimentally":[74],"measured":[75],"fields":[77],"(Hsw)":[78],"smaller":[80],"than":[81],"those":[82],"obtained":[83],"from":[84],"simulations.":[85],"Such":[86],"trend":[87],"consistent":[89],"presence":[92],"particular":[95,130],"free":[96],"layer":[97],"profile,":[98],"signature":[99],"two":[102],"angle":[103],"etching":[104],"step":[105],"for":[107,133],"pillar":[108],"definition.":[109],"Further":[110],"decrease":[111],"experimental":[113],"Hswwas":[114],"attributed":[115],"local":[117],"defects":[118],"and":[119],"thermal":[120],"activated":[121],"processes.":[122],"This":[123],"study":[124],"able":[126],"validate":[128],"this":[129],"simulation":[131],"control":[135],"nanofabrication":[138],"process.":[139]},"counts_by_year":[{"year":2024,"cited_by_count":1},{"year":2021,"cited_by_count":1},{"year":2018,"cited_by_count":3},{"year":2017,"cited_by_count":1},{"year":2015,"cited_by_count":4},{"year":2014,"cited_by_count":3},{"year":2013,"cited_by_count":1}],"updated_date":"2026-10-02T10:15:12.560889","created_date":"2016-06-24T00:00:00"}