{"id":"https://openalex.org/W2007639632","doi":"https://doi.org/10.1080/10584589508019355","title":"Materials interactions in the integration of PZT ferroelectric capacitors","display_name":"Materials interactions in the integration of PZT ferroelectric capacitors","publication_year":1995,"publication_date":"1995-01-01","ids":{"openalex":"https://openalex.org/W2007639632","doi":"https://doi.org/10.1080/10584589508019355","mag":"2007639632"},"language":"en","primary_location":{"id":"doi:10.1080/10584589508019355","doi":"https://doi.org/10.1080/10584589508019355","is_oa":false,"landing_page_url":"https://doi.org/10.1080/10584589508019355","pdf_url":null,"source":{"id":"https://openalex.org/S194927175","display_name":"Integrated ferroelectrics","issn_l":"1026-7530","issn":["1026-7530","1058-4587","1607-8489"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-c","jufo-1","norway-1","poland-20","russia-white-list-3"],"host_organization":"https://openalex.org/P4310320547","host_organization_name":"Taylor & Francis","host_organization_lineage":["https://openalex.org/P4310320547","https://openalex.org/P4310320449"],"host_organization_lineage_names":["Taylor & Francis","Informa"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Integrated Ferroelectrics","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5103365154","display_name":"Robert E. Jones","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1333370159","display_name":"Motorola (United States)","ror":"https://ror.org/01hafxd32","country_code":"US","type":"company","lineage":["https://openalex.org/I1333370159"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"R. E. Jones","raw_affiliation_strings":["a  Materials Research and Strategic Technologies , Motorola Austin, Texas, 78721,  U.S.A","Materials Research and Strategic Technologies, Motorola , Austin, Texas, 78721, U.S.A"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"a  Materials Research and Strategic Technologies , Motorola Austin, Texas, 78721,  U.S.A","institution_ids":["https://openalex.org/I1333370159"]},{"raw_affiliation_string":"Materials Research and Strategic Technologies, Motorola , Austin, Texas, 78721, U.S.A","institution_ids":["https://openalex.org/I1333370159"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5112076223","display_name":"P.D. Maniar","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1333370159","display_name":"Motorola (United States)","ror":"https://ror.org/01hafxd32","country_code":"US","type":"company","lineage":["https://openalex.org/I1333370159"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"P. D. Maniar","raw_affiliation_strings":["a  Materials Research and Strategic Technologies , Motorola Austin, Texas, 78721,  U.S.A","Materials Research and Strategic Technologies, Motorola , Austin, Texas, 78721, U.S.A"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"a  Materials Research and Strategic Technologies , Motorola Austin, Texas, 78721,  U.S.A","institution_ids":["https://openalex.org/I1333370159"]},{"raw_affiliation_string":"Materials Research and Strategic Technologies, Motorola , Austin, Texas, 78721, U.S.A","institution_ids":["https://openalex.org/I1333370159"]}]},{"author_position":"middle","author":{"id":null,"display_name":"A. C. Campbell","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1333370159","display_name":"Motorola (United States)","ror":"https://ror.org/01hafxd32","country_code":"US","type":"company","lineage":["https://openalex.org/I1333370159"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"A. C. Campbell","raw_affiliation_strings":["a  Materials Research and Strategic Technologies , Motorola Austin, Texas, 78721,  U.S.A","Materials Research and Strategic Technologies, Motorola , Austin, Texas, 78721, U.S.A"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"a  Materials Research and Strategic Technologies , Motorola Austin, Texas, 78721,  U.S.A","institution_ids":["https://openalex.org/I1333370159"]},{"raw_affiliation_string":"Materials Research and Strategic Technologies, Motorola , Austin, Texas, 78721, U.S.A","institution_ids":["https://openalex.org/I1333370159"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5037470620","display_name":"Reza Moazzami","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1333370159","display_name":"Motorola (United States)","ror":"https://ror.org/01hafxd32","country_code":"US","type":"company","lineage":["https://openalex.org/I1333370159"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"R. Moazzami","raw_affiliation_strings":["a  Materials Research and Strategic Technologies , Motorola Austin, Texas, 78721,  U.S.A","Materials Research and Strategic Technologies, Motorola , Austin, Texas, 78721, U.S.A"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"a  Materials Research and Strategic Technologies , Motorola Austin, Texas, 78721,  U.S.A","institution_ids":["https://openalex.org/I1333370159"]},{"raw_affiliation_string":"Materials Research and Strategic Technologies, Motorola , Austin, Texas, 78721, U.S.A","institution_ids":["https://openalex.org/I1333370159"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5012306318","display_name":"Jeffrey L. Dupuie","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1292974536","display_name":"Ford Motor Company (United States)","ror":"https://ror.org/00g2tkw06","country_code":"US","type":"company","lineage":["https://openalex.org/I1292974536"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"J. L. Dupuie","raw_affiliation_strings":["c   Plastic and Trim Products Division , Ford Motor Co. , Redford, MI, 48239,  U.S.A","Plastic and Trim Products Division , Ford Motor Co. , Redford, MI, 48239, U.S.A"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"c   Plastic and Trim Products Division , Ford Motor Co. , Redford, MI, 48239,  U.S.A","institution_ids":["https://openalex.org/I1292974536"]},{"raw_affiliation_string":"Plastic and Trim Products Division , Ford Motor Co. , Redford, MI, 48239, U.S.A","institution_ids":["https://openalex.org/I1292974536"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5075494859","display_name":"Rich Gregory","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1333370159","display_name":"Motorola (United States)","ror":"https://ror.org/01hafxd32","country_code":"US","type":"company","lineage":["https://openalex.org/I1333370159"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"R. B. Gregory","raw_affiliation_strings":["d  MRST, Motorola , Mesa, AZ, 85201,  U.S.A","MRST, Motorola , Mesa, AZ, 85201, U.S.A"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"d  MRST, Motorola , Mesa, AZ, 85201,  U.S.A","institution_ids":["https://openalex.org/I1333370159"]},{"raw_affiliation_string":"MRST, Motorola , Mesa, AZ, 85201, U.S.A","institution_ids":["https://openalex.org/I1333370159"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5109286000","display_name":"Mike Kottke","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1333370159","display_name":"Motorola (United States)","ror":"https://ror.org/01hafxd32","country_code":"US","type":"company","lineage":["https://openalex.org/I1333370159"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"M. L. Kottke","raw_affiliation_strings":["d  MRST, Motorola , Mesa, AZ, 85201,  U.S.A","MRST, Motorola , Mesa, AZ, 85201, U.S.A"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"d  MRST, Motorola , Mesa, AZ, 85201,  U.S.A","institution_ids":["https://openalex.org/I1333370159"]},{"raw_affiliation_string":"MRST, Motorola , Mesa, AZ, 85201, U.S.A","institution_ids":["https://openalex.org/I1333370159"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5046297628","display_name":"Mike Bozack","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I82497590","display_name":"Auburn University","ror":"https://ror.org/02v80fc35","country_code":"US","type":"education","lineage":["https://openalex.org/I82497590"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"M. L. Bozack","raw_affiliation_strings":["b   Dept. of Physics , Auburn University , Auburn, Alabama, 36849,  U.S.A","Dept. of Physics , Auburn University , Auburn, Alabama, 36849, U.S.A"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"b   Dept. of Physics , Auburn University , Auburn, Alabama, 36849,  U.S.A","institution_ids":["https://openalex.org/I82497590"]},{"raw_affiliation_string":"Dept. of Physics , Auburn University , Auburn, Alabama, 36849, U.S.A","institution_ids":["https://openalex.org/I82497590"]}]},{"author_position":"middle","author":{"id":null,"display_name":"J. R. Williams","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1333370159","display_name":"Motorola (United States)","ror":"https://ror.org/01hafxd32","country_code":"US","type":"company","lineage":["https://openalex.org/I1333370159"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"J. R. Williams","raw_affiliation_strings":["a  Materials Research and Strategic Technologies , Motorola Austin, Texas, 78721,  U.S.A","Materials Research and Strategic Technologies, Motorola , Austin, Texas, 78721, U.S.A"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"a  Materials Research and Strategic Technologies , Motorola Austin, Texas, 78721,  U.S.A","institution_ids":["https://openalex.org/I1333370159"]},{"raw_affiliation_string":"Materials Research and Strategic Technologies, Motorola , Austin, Texas, 78721, U.S.A","institution_ids":["https://openalex.org/I1333370159"]}]},{"author_position":"last","author":{"id":null,"display_name":"J. M. Ferrero","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1333370159","display_name":"Motorola (United States)","ror":"https://ror.org/01hafxd32","country_code":"US","type":"company","lineage":["https://openalex.org/I1333370159"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"J. M. Ferrero","raw_affiliation_strings":["a  Materials Research and Strategic Technologies , Motorola Austin, Texas, 78721,  U.S.A","Materials Research and Strategic Technologies, Motorola , Austin, Texas, 78721, U.S.A"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"a  Materials Research and Strategic Technologies , Motorola Austin, Texas, 78721,  U.S.A","institution_ids":["https://openalex.org/I1333370159"]},{"raw_affiliation_string":"Materials Research and Strategic Technologies, Motorola , Austin, Texas, 78721, U.S.A","institution_ids":["https://openalex.org/I1333370159"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":4.5681,"has_fulltext":false,"cited_by_count":22,"citation_normalized_percentile":{"value":0.95218892,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":null,"biblio":{"volume":"6","issue":"1-4","first_page":"81","last_page":"92"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10107","display_name":"Ferroelectric and Piezoelectric Materials","score":0.6772000193595886,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10107","display_name":"Ferroelectric and Piezoelectric Materials","score":0.6772000193595886,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12808","display_name":"Ferroelectric and Negative Capacitance Devices","score":0.2847000062465668,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.020999999716877937,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/cmos-integration","display_name":"CMOS integration","score":0.8100000023841858},{"id":"https://openalex.org/keywords/pt-ti-electrodes","display_name":"Pt/Ti electrodes","score":0.9309999942779541},{"id":"https://openalex.org/keywords/crystallization","display_name":"crystallization","score":0.8009999990463257},{"id":"https://openalex.org/keywords/dielectric-interfaces","display_name":"dielectric interfaces","score":0.6779999732971191},{"id":"https://openalex.org/keywords/silica","display_name":"silica","score":0.8529999852180481},{"id":"https://openalex.org/keywords/silicon-nitride","display_name":"silicon nitride","score":0.9900000095367432},{"id":"https://openalex.org/keywords/alumina","display_name":"alumina","score":0.996999979019165},{"id":"https://openalex.org/keywords/titanium-dioxide","display_name":"titanium dioxide","score":0.996999979019165}],"concepts":[{"id":"https://openalex.org/C52192207","wikidata":"https://www.wikidata.org/wiki/Q5322","display_name":"Capacitor","level":3,"score":0.9155840873718262},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.9082739353179932},{"id":"https://openalex.org/C79090758","wikidata":"https://www.wikidata.org/wiki/Q1045739","display_name":"Ferroelectricity","level":3,"score":0.8131229877471924},{"id":"https://openalex.org/C133386390","wikidata":"https://www.wikidata.org/wiki/Q184996","display_name":"Dielectric","level":2,"score":0.7184157967567444},{"id":"https://openalex.org/C189366214","wikidata":"https://www.wikidata.org/wiki/Q4103842","display_name":"Ferroelectric capacitor","level":4,"score":0.5687451958656311},{"id":"https://openalex.org/C203036418","wikidata":"https://www.wikidata.org/wiki/Q284256","display_name":"Crystallization","level":2,"score":0.5276383757591248},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.45783093571662903},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.44624772667884827},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.34772658348083496},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.17345276474952698},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.15498989820480347},{"id":"https://openalex.org/C42360764","wikidata":"https://www.wikidata.org/wiki/Q83588","display_name":"Chemical engineering","level":1,"score":0.09241151809692383},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0},{"id":"https://openalex.org/C147789679","wikidata":"https://www.wikidata.org/wiki/Q11372","display_name":"Physical chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1080/10584589508019355","doi":"https://doi.org/10.1080/10584589508019355","is_oa":false,"landing_page_url":"https://doi.org/10.1080/10584589508019355","pdf_url":null,"source":{"id":"https://openalex.org/S194927175","display_name":"Integrated ferroelectrics","issn_l":"1026-7530","issn":["1026-7530","1058-4587","1607-8489"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-c","jufo-1","norway-1","poland-20","russia-white-list-3"],"host_organization":"https://openalex.org/P4310320547","host_organization_name":"Taylor & Francis","host_organization_lineage":["https://openalex.org/P4310320547","https://openalex.org/P4310320449"],"host_organization_lineage_names":["Taylor & Francis","Informa"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Integrated Ferroelectrics","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":7,"referenced_works":["https://openalex.org/W1976071389","https://openalex.org/W2068413754","https://openalex.org/W2077133132","https://openalex.org/W2140002781","https://openalex.org/W2321661829","https://openalex.org/W2323183350","https://openalex.org/W2562039948"],"related_works":["https://openalex.org/W2090772862","https://openalex.org/W2521510372","https://openalex.org/W402953816","https://openalex.org/W2072598902","https://openalex.org/W7026718055","https://openalex.org/W2036730182","https://openalex.org/W2146496010","https://openalex.org/W1976105167","https://openalex.org/W2051472039","https://openalex.org/W2464812206"],"abstract_inverted_index":{"Investigations":[0],"of":[1,8,27,45],"materials":[2],"interactions":[3,19],"that":[4],"complicate":[5],"the":[6,21,25,43],"integration":[7],"PZT":[9,30],"ferroelectric":[10],"capacitors":[11],"into":[12],"CMOS":[13],"technologies":[14],"are":[15],"discussed.":[16],"These":[17],"include":[18],"within":[20],"Pt/Ti":[22],"electrodes":[23],"structure,":[24],"reactions":[26],"sol-gel":[28],"deposited":[29],"during":[31],"crystallization":[32],"with":[33],"various":[34],"underlying":[35],"dielectrics":[36],"(SiO2,":[37],"Si3N4,":[38],"Al2O3,":[39],"and":[40,42],"TiO2),":[41],"impact":[44],"other":[46],"integrated":[47],"circuit":[48],"processes":[49],"on":[50],"fabricated":[51],"capacitors.":[52]},"counts_by_year":[],"updated_date":"2026-11-07T11:25:07.637180","created_date":"2016-06-24T00:00:00"}