{"id":"https://openalex.org/W2006903672","doi":"https://doi.org/10.1109/jproc.2006.873618","title":"Microsensor Integration Into Systems-on-Chip","display_name":"Microsensor Integration Into Systems-on-Chip","publication_year":2006,"publication_date":"2006-06-01","ids":{"openalex":"https://openalex.org/W2006903672","doi":"https://doi.org/10.1109/jproc.2006.873618","mag":"2006903672"},"language":"en","primary_location":{"id":"doi:10.1109/jproc.2006.873618","doi":"https://doi.org/10.1109/jproc.2006.873618","is_oa":false,"landing_page_url":"https://doi.org/10.1109/jproc.2006.873618","pdf_url":null,"source":{"id":"https://openalex.org/S68686220","display_name":"Proceedings of the IEEE","issn_l":"0018-9219","issn":["0018-9219","1558-2256"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","ccf-a","cwts-core","dongbi-b","jufo-3","norway-2","poland-200","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Proceedings of the IEEE","raw_type":"journal-article"},"volume":null,"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5067362832","display_name":"Oliver Brand","orcid":"https://orcid.org/0000-0001-7438-1094","observed_orcids":["https://orcid.org/0000-0001-7438-1094"]},"institutions":[{"id":"https://openalex.org/I130701444","display_name":"Georgia Institute of Technology","ror":"https://ror.org/01zkghx44","country_code":"US","type":"education","lineage":["https://openalex.org/I130701444"]}],"countries":["US"],"is_corresponding":true,"raw_author_name":"O. Brand","raw_affiliation_strings":["School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, GA, USA","Sch. of Electr. & Comput. Eng.,, Georgia Inst. of Technol., Atlanta, GA, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, GA, USA","institution_ids":["https://openalex.org/I130701444"]},{"raw_affiliation_string":"Sch. of Electr. & Comput. Eng.,, Georgia Inst. of Technol., Atlanta, GA, USA","institution_ids":["https://openalex.org/I130701444"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":["https://openalex.org/A5067362832"],"corresponding_institution_ids":["https://openalex.org/I130701444"],"apc_list":{"value":2645,"currency":"USD","value_usd":2645},"apc_paid":null,"fwci":8.4318,"has_fulltext":false,"cited_by_count":106,"citation_normalized_percentile":{"value":0.97642966,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":89,"max":99},"biblio":{"volume":"94","issue":"6","first_page":"1160","last_page":"1176"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9976000189781189,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9976000189781189,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10323","display_name":"Analog and Mixed-Signal Circuit Design","score":0.0010999999940395355,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10412","display_name":"Microfluidic and Capillary Electrophoresis Applications","score":9.999999747378752e-05,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/system-on-chip","display_name":"system-on-chip","score":0.8970000147819519},{"id":"https://openalex.org/keywords/micromachining","display_name":"micromachining","score":0.8199999928474426},{"id":"https://openalex.org/keywords/pressure-sensors","display_name":"pressure sensors","score":0.6740000247955322},{"id":"https://openalex.org/keywords/inertial-sensors","display_name":"inertial sensors","score":0.9800000190734863},{"id":"https://openalex.org/keywords/chemical-sensing","display_name":"chemical sensing","score":0.7390000224113464},{"id":"https://openalex.org/keywords/biochemical-sensing","display_name":"biochemical sensing","score":0.9829999804496765},{"id":"https://openalex.org/keywords/atomic-force-microscopy","display_name":"atomic force microscopy","score":0.9959999918937683},{"id":"https://openalex.org/keywords/cmos-integration","display_name":"CMOS integration","score":0.6650000214576721},{"id":"https://openalex.org/keywords/cointegration","display_name":"cointegration","score":0.6190000176429749},{"id":"https://openalex.org/keywords/digital-signal-processing","display_name":"digital signal processing","score":0.6050000190734863},{"id":"https://openalex.org/keywords/microsystems","display_name":"microsystems","score":0.6039999723434448}],"concepts":[{"id":"https://openalex.org/C151054161","wikidata":"https://www.wikidata.org/wiki/Q379385","display_name":"Microsystem","level":2,"score":0.8780962228775024},{"id":"https://openalex.org/C115051666","wikidata":"https://www.wikidata.org/wiki/Q6522493","display_name":"Ranging","level":2,"score":0.7342376708984375},{"id":"https://openalex.org/C187937830","wikidata":"https://www.wikidata.org/wiki/Q175403","display_name":"Microelectronics","level":2,"score":0.6566979885101318},{"id":"https://openalex.org/C165005293","wikidata":"https://www.wikidata.org/wiki/Q1074500","display_name":"Chip","level":2,"score":0.6506346464157104},{"id":"https://openalex.org/C145667562","wikidata":"https://www.wikidata.org/wiki/Q7646003","display_name":"Surface micromachining","level":4,"score":0.6141619086265564},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.5695028901100159},{"id":"https://openalex.org/C19527686","wikidata":"https://www.wikidata.org/wiki/Q1665453","display_name":"System integration","level":2,"score":0.535315990447998},{"id":"https://openalex.org/C118021083","wikidata":"https://www.wikidata.org/wiki/Q610398","display_name":"System on a chip","level":2,"score":0.5100494027137756},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.49511900544166565},{"id":"https://openalex.org/C530198007","wikidata":"https://www.wikidata.org/wiki/Q80831","display_name":"Integrated circuit","level":2,"score":0.4823879301548004},{"id":"https://openalex.org/C62907940","wikidata":"https://www.wikidata.org/wiki/Q1541329","display_name":"Mixed-signal integrated circuit","level":3,"score":0.47057101130485535},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.46345609426498413},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.4509741961956024},{"id":"https://openalex.org/C2779843651","wikidata":"https://www.wikidata.org/wiki/Q7390335","display_name":"SIGNAL (programming language)","level":2,"score":0.44046714901924133},{"id":"https://openalex.org/C41075158","wikidata":"https://www.wikidata.org/wiki/Q4996485","display_name":"Bulk micromachining","level":5,"score":0.4353214502334595},{"id":"https://openalex.org/C149635348","wikidata":"https://www.wikidata.org/wiki/Q193040","display_name":"Embedded system","level":1,"score":0.33083295822143555},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.32809072732925415},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.3242452144622803},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.29871708154678345},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.2481558918952942},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.12871745228767395},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/jproc.2006.873618","doi":"https://doi.org/10.1109/jproc.2006.873618","is_oa":false,"landing_page_url":"https://doi.org/10.1109/jproc.2006.873618","pdf_url":null,"source":{"id":"https://openalex.org/S68686220","display_name":"Proceedings of the IEEE","issn_l":"0018-9219","issn":["0018-9219","1558-2256"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","ccf-a","cwts-core","dongbi-b","jufo-3","norway-2","poland-200","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Proceedings of the IEEE","raw_type":"journal-article"},{"id":"pmh:oai:smartech.gatech.edu:1853/48108","doi":null,"is_oa":false,"landing_page_url":"http://repository.gatech.edu/bitstreams/0ae52b77-71bf-4fb8-8da6-7cd90fc946b1/download","pdf_url":null,"source":{"id":"https://openalex.org/S4377196313","display_name":"SMARTech Repository (Georgia Institute of Technology)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I130701444","host_organization_name":"Georgia Institute of Technology","host_organization_lineage":["https://openalex.org/I130701444"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"Text"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":86,"referenced_works":["https://openalex.org/W125553660","https://openalex.org/W595104386","https://openalex.org/W1480430730","https://openalex.org/W1516008183","https://openalex.org/W1524386129","https://openalex.org/W1539134572","https://openalex.org/W1543680791","https://openalex.org/W1578749844","https://openalex.org/W1581680054","https://openalex.org/W1587823126","https://openalex.org/W1601235395","https://openalex.org/W1820080906","https://openalex.org/W1852391565","https://openalex.org/W1861770194","https://openalex.org/W1873363772","https://openalex.org/W1879488296","https://openalex.org/W1889751050","https://openalex.org/W1914978473","https://openalex.org/W1967428644","https://openalex.org/W1970770629","https://openalex.org/W1973900437","https://openalex.org/W1984363698","https://openalex.org/W1991004252","https://openalex.org/W1998539781","https://openalex.org/W2007901286","https://openalex.org/W2010737519","https://openalex.org/W2016180229","https://openalex.org/W2019865352","https://openalex.org/W2028391090","https://openalex.org/W2033942423","https://openalex.org/W2035484224","https://openalex.org/W2036682406","https://openalex.org/W2039400597","https://openalex.org/W2050281778","https://openalex.org/W2050449422","https://openalex.org/W2053839707","https://openalex.org/W2058379753","https://openalex.org/W2060603102","https://openalex.org/W2061793163","https://openalex.org/W2064121258","https://openalex.org/W2082981272","https://openalex.org/W2083932672","https://openalex.org/W2087150829","https://openalex.org/W2098437989","https://openalex.org/W2103983729","https://openalex.org/W2104431065","https://openalex.org/W2116596313","https://openalex.org/W2116876604","https://openalex.org/W2137178805","https://openalex.org/W2143661553","https://openalex.org/W2147142329","https://openalex.org/W2147199688","https://openalex.org/W2147732975","https://openalex.org/W2147978583","https://openalex.org/W2152267393","https://openalex.org/W2152717583","https://openalex.org/W2153959273","https://openalex.org/W2154488179","https://openalex.org/W2157302285","https://openalex.org/W2159300718","https://openalex.org/W2160501410","https://openalex.org/W2162078995","https://openalex.org/W2162869577","https://openalex.org/W2163966671","https://openalex.org/W2166121654","https://openalex.org/W2169258629","https://openalex.org/W2169322470","https://openalex.org/W2169856829","https://openalex.org/W2171191871","https://openalex.org/W2171849451","https://openalex.org/W2172794083","https://openalex.org/W2174225487","https://openalex.org/W2180930892","https://openalex.org/W2461770105","https://openalex.org/W2533397867","https://openalex.org/W2536971087","https://openalex.org/W3119507340","https://openalex.org/W3119746049","https://openalex.org/W3119847439","https://openalex.org/W4211203023","https://openalex.org/W4244150903","https://openalex.org/W4250931269","https://openalex.org/W4285719527","https://openalex.org/W6605086119","https://openalex.org/W6677450481","https://openalex.org/W6718763548"],"related_works":["https://openalex.org/W2188665512","https://openalex.org/W1515328401","https://openalex.org/W1665539654","https://openalex.org/W2067483851","https://openalex.org/W1607927274","https://openalex.org/W4412623644","https://openalex.org/W2048415152","https://openalex.org/W1587588825","https://openalex.org/W4241128391","https://openalex.org/W2475866228"],"abstract_inverted_index":{"Sensing":[0],"systems-on-chip":[1],"(SSoCs),":[2],"combining":[3],"micromachined":[4,108],"sensing":[5,22,47,66],"structures":[6],"and":[7,20,45,75,122],"microelectronic":[8],"building":[9],"blocks":[10],"on":[11,79],"a":[12,31],"single":[13],"chip,":[14],"are":[15,68,96],"reviewed.":[16],"While":[17],"single-chip":[18],"pressure":[19],"inertial":[21],"systems":[23,67],"have":[24],"been":[25],"commercially":[26],"available":[27],"for":[28,64],"more":[29],"than":[30],"decade,":[32],"the":[33,53,80,82,88,100],"recent":[34],"expansion":[35],"of":[36,56,94,107],"SSoC":[37],"into":[38,72],"new":[39],"application":[40],"areas,":[41],"ranging":[42,104],"from":[43,105],"chemical":[44],"biochemical":[46],"to":[48,98,115],"atomic":[49],"force":[50],"microscopy,":[51],"demonstrates":[52],"full":[54],"potential":[55],"this":[57],"microsensor":[58],"integration":[59,102],"approach.":[60],"Available":[61],"fabrication":[62],"processes":[63],"integrated":[65,89],"summarized,":[69],"categorizing":[70],"them":[71],"pre-,":[73],"intra-,":[74],"post-CMOS":[76],"approaches":[77],"depending":[78],"way":[81],"micromachining":[83],"module":[84],"is":[85],"merged":[86],"with":[87,110,117],"circuit":[90],"(IC)":[91],"technology.":[92],"Examples":[93],"SSoCs":[95],"presented":[97],"highlight":[99],"different":[101],"options,":[103],"cointegration":[106],"sensors":[109],"purely":[111],"analog":[112],"signal":[113,120],"chains":[114],"microsystems":[116],"cointegrated":[118],"digital":[119,123],"processors":[121],"interfaces.":[124]},"counts_by_year":[{"year":2024,"cited_by_count":1},{"year":2023,"cited_by_count":2},{"year":2022,"cited_by_count":6},{"year":2021,"cited_by_count":4},{"year":2020,"cited_by_count":6},{"year":2019,"cited_by_count":1},{"year":2018,"cited_by_count":3},{"year":2017,"cited_by_count":6},{"year":2016,"cited_by_count":5},{"year":2015,"cited_by_count":7},{"year":2014,"cited_by_count":6},{"year":2013,"cited_by_count":9},{"year":2012,"cited_by_count":6}],"updated_date":"2026-10-16T09:59:22.235173","created_date":"2016-06-24T00:00:00"}