{"id":"https://openalex.org/W2005907413","doi":"https://doi.org/10.1117/12.797612","title":"Computer simulation of coating processes with monochromatic monitoring","display_name":"Computer simulation of coating processes with monochromatic monitoring","publication_year":2008,"publication_date":"2008-09-19","ids":{"openalex":"https://openalex.org/W2005907413","doi":"https://doi.org/10.1117/12.797612","mag":"2005907413"},"language":"en","primary_location":{"id":"doi:10.1117/12.797612","doi":"https://doi.org/10.1117/12.797612","is_oa":false,"landing_page_url":"https://doi.org/10.1117/12.797612","pdf_url":null,"source":{"id":"https://openalex.org/S183492911","display_name":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","issn_l":"0277-786X","issn":["0277-786X","1996-756X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","norway-1"],"host_organization":"https://openalex.org/P4310315543","host_organization_name":"SPIE","host_organization_lineage":["https://openalex.org/P4310315543"],"host_organization_lineage_names":["SPIE"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"SPIE Proceedings","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5067129377","display_name":"Alfons Zoller","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"A. Z\u00f6ller","raw_affiliation_strings":["Leybold Optics GmbH (Germany)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Leybold Optics GmbH (Germany)","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5082464821","display_name":"Michael Boos","orcid":"https://orcid.org/0000-0002-6138-6248","observed_orcids":["https://orcid.org/0000-0002-6138-6248","https://orcid.org/0000-0001-6414-2452"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"M. Boos","raw_affiliation_strings":["Leybold Optics GmbH (Germany)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Leybold Optics GmbH (Germany)","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5074058160","display_name":"Harro Hagedorn","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"H. Hagedorn","raw_affiliation_strings":["Leybold Optics GmbH (Germany)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Leybold Optics GmbH (Germany)","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5022338486","display_name":"Boris Romanov","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"B. Romanov","raw_affiliation_strings":["Leybold Optics GmbH (Germany)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Leybold Optics GmbH (Germany)","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":0,"institutions_distinct_count":0,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":14.6499,"has_fulltext":false,"cited_by_count":38,"citation_normalized_percentile":{"value":0.99190031,"is_in_top_1_percent":true,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":88,"max":98},"biblio":{"volume":"7101","issue":null,"first_page":"71010G","last_page":"71010G"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11723","display_name":"Optical Coatings and Gratings","score":0.9980000257492065,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11723","display_name":"Optical Coatings and Gratings","score":0.9980000257492065,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13889","display_name":"Advanced Materials and Semiconductor Technologies","score":0.00039999998989515007,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10377","display_name":"Metal and Thin Film Mechanics","score":0.00019999999494757503,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/multilayer-coatings","display_name":"multilayer coatings","score":0.6420000195503235},{"id":"https://openalex.org/keywords/coating-process-simulation","display_name":"coating process simulation","score":0.765999972820282},{"id":"https://openalex.org/keywords/notch-filter","display_name":"notch filter","score":0.7509999871253967}],"concepts":[{"id":"https://openalex.org/C2781448156","wikidata":"https://www.wikidata.org/wiki/Q1570182","display_name":"Coating","level":2,"score":0.7627093195915222},{"id":"https://openalex.org/C40833965","wikidata":"https://www.wikidata.org/wiki/Q6901438","display_name":"Monochromatic color","level":2,"score":0.7195122241973877},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.6837027072906494},{"id":"https://openalex.org/C2777904410","wikidata":"https://www.wikidata.org/wiki/Q7397","display_name":"Software","level":2,"score":0.5370388031005859},{"id":"https://openalex.org/C71597924","wikidata":"https://www.wikidata.org/wiki/Q2890543","display_name":"Optical coating","level":3,"score":0.5291524529457092},{"id":"https://openalex.org/C106131492","wikidata":"https://www.wikidata.org/wiki/Q3072260","display_name":"Filter (signal processing)","level":2,"score":0.44749072194099426},{"id":"https://openalex.org/C45613198","wikidata":"https://www.wikidata.org/wiki/Q1134091","display_name":"Optical filter","level":2,"score":0.44325751066207886},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.44172239303588867},{"id":"https://openalex.org/C2776257435","wikidata":"https://www.wikidata.org/wiki/Q1576430","display_name":"Bandwidth (computing)","level":2,"score":0.43189021944999695},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.4307522177696228},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.4073626399040222},{"id":"https://openalex.org/C79403827","wikidata":"https://www.wikidata.org/wiki/Q3988","display_name":"Real-time computing","level":1,"score":0.33885931968688965},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.1836213767528534},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.12015783786773682},{"id":"https://openalex.org/C31972630","wikidata":"https://www.wikidata.org/wiki/Q844240","display_name":"Computer vision","level":1,"score":0.11357533931732178},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.10502579808235168},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.10300642251968384},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1117/12.797612","doi":"https://doi.org/10.1117/12.797612","is_oa":false,"landing_page_url":"https://doi.org/10.1117/12.797612","pdf_url":null,"source":{"id":"https://openalex.org/S183492911","display_name":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","issn_l":"0277-786X","issn":["0277-786X","1996-756X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","norway-1"],"host_organization":"https://openalex.org/P4310315543","host_organization_name":"SPIE","host_organization_lineage":["https://openalex.org/P4310315543"],"host_organization_lineage_names":["SPIE"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"SPIE Proceedings","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":6,"referenced_works":["https://openalex.org/W1977900769","https://openalex.org/W2004807074","https://openalex.org/W2103893465","https://openalex.org/W2158454550","https://openalex.org/W2164280110","https://openalex.org/W2751573450"],"related_works":["https://openalex.org/W3199197790","https://openalex.org/W4321516876","https://openalex.org/W2789629691","https://openalex.org/W4320926503","https://openalex.org/W2894810383","https://openalex.org/W2159555323","https://openalex.org/W2188420175","https://openalex.org/W1575430325","https://openalex.org/W4234967769","https://openalex.org/W3120532818"],"abstract_inverted_index":{"For":[0,114],"the":[1,17,23,54,89,108,115,118,152],"production":[2],"of":[3,19,44,56,80,107,117],"high":[4],"performance":[5],"multilayer":[6],"systems":[7],"optical":[8,94],"monitoring":[9,21,36,95,119],"is":[10,28,96],"essential.":[11],"Substantial":[12],"progress":[13],"was":[14],"achieved":[15],"by":[16,77,102,157],"introduction":[18],"direct":[20],"on":[22],"rotating":[24],"substrate":[25],"holder.":[26],"It":[27],"a":[29,34,41,138],"complex":[30],"task":[31],"to":[32],"develop":[33],"stable":[35],"strategy":[37],"for":[38],"multilayers":[39],"with":[40,92,145],"large":[42],"number":[43],"layers":[45],"and":[46,51,66,70,104,137],"irregular":[47],"thicknesses.":[48],"The":[49],"verification":[50],"improvement":[52],"requires":[53],"feedback":[55],"more":[57],"or":[58],"less":[59],"numerous":[60],"real":[61,121,158],"coating":[62,81,90,159],"runs.":[63,82,148],"This":[64],"expensive":[65],"time":[67],"consuming":[68],"trial":[69],"error":[71],"method":[72],"can":[73],"be":[74],"reduced":[75],"significantly":[76],"computer":[78],"simulation":[79,116,153],"A":[83,133],"new":[84],"software":[85],"tool":[86],"which":[87],"simulates":[88],"process":[91],"monochromatic":[93,122],"introduced.":[97],"Process":[98],"instabilities":[99],"are":[100,129],"described":[101],"systematic":[103],"random":[105],"errors":[106],"deposition":[109,147],"rate,":[110],"refractive":[111],"indices,":[112],"etc.":[113,128],"curve":[120],"bandwidth,":[123],"signal":[124],"noise,":[125],"measurement":[126],"frequency,":[127],"taken":[130],"into":[131],"account.":[132],"UV-IR":[134],"cut":[135],"filter":[136,141],"single":[139],"notch":[140],"design":[142],"were":[143,155],"simulated":[144],"virtual":[146],"In":[149],"both":[150],"cases":[151],"results":[154],"confirmed":[156],"processes.":[160]},"counts_by_year":[{"year":2026,"cited_by_count":3},{"year":2025,"cited_by_count":2},{"year":2023,"cited_by_count":6},{"year":2022,"cited_by_count":3},{"year":2021,"cited_by_count":2},{"year":2019,"cited_by_count":4},{"year":2018,"cited_by_count":2},{"year":2017,"cited_by_count":2},{"year":2016,"cited_by_count":1},{"year":2015,"cited_by_count":3},{"year":2013,"cited_by_count":1},{"year":2012,"cited_by_count":1}],"updated_date":"2026-11-07T11:25:07.637180","created_date":"2016-06-24T00:00:00"}