{"id":"https://openalex.org/W2005808203","doi":"https://doi.org/10.1016/s0042-207x(97)00124-3","title":"Composite metal/C:H films prepared in an unbalanced magnetron","display_name":"Composite metal/C:H films prepared in an unbalanced magnetron","publication_year":1997,"publication_date":"1997-10-01","ids":{"openalex":"https://openalex.org/W2005808203","doi":"https://doi.org/10.1016/s0042-207x(97)00124-3","mag":"2005808203"},"language":"en","primary_location":{"id":"doi:10.1016/s0042-207x(97)00124-3","doi":"https://doi.org/10.1016/s0042-207x(97)00124-3","is_oa":false,"landing_page_url":"https://doi.org/10.1016/s0042-207x(97)00124-3","pdf_url":null,"source":{"id":"https://openalex.org/S86481247","display_name":"Vacuum","issn_l":"0042-207X","issn":["0042-207X","1879-2715"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-c","jufo-1","ki-jl-1","norway-1","poland-70","russia-white-list-1"],"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Vacuum","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5045359292","display_name":"Hynek Biederman","orcid":"https://orcid.org/0000-0003-4061-8481","observed_orcids":["https://orcid.org/0000-0003-4061-8481"]},"institutions":[{"id":"https://openalex.org/I21250087","display_name":"Charles University","ror":"https://ror.org/024d6js02","country_code":"CZ","type":"education","lineage":["https://openalex.org/I21250087"]}],"countries":["CZ"],"is_corresponding":true,"raw_author_name":"H. Biederman","raw_affiliation_strings":["Faculty of Mathematics and Physics, Charles University, V Holesovickach 2, 180 00, Prague, 8. Czech Republic","Faculty of Mathematics and Physics Charles University V Hole\u0161ovi\u010dk\u00e1ch 2 180 00 Prague 8 Czech Republic"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Faculty of Mathematics and Physics, Charles University, V Holesovickach 2, 180 00, Prague, 8. Czech Republic","institution_ids":["https://openalex.org/I21250087"]},{"raw_affiliation_string":"Faculty of Mathematics and Physics Charles University V Hole\u0161ovi\u010dk\u00e1ch 2 180 00 Prague 8 Czech Republic","institution_ids":["https://openalex.org/I21250087"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111709372","display_name":"R.P. Howson","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I143804889","display_name":"Loughborough University","ror":"https://ror.org/04vg4w365","country_code":"GB","type":"education","lineage":["https://openalex.org/I143804889"]},{"id":"https://openalex.org/I22299242","display_name":"Kyoto University","ror":"https://ror.org/02kpeqv85","country_code":"JP","type":"education","lineage":["https://openalex.org/I22299242"]}],"countries":["GB","JP"],"is_corresponding":false,"raw_author_name":"R.P. Howson","raw_affiliation_strings":["Department of Physics, Loughborough University, Loughborough, UK","Kyoto University, Faculty of Engineering, Sakyo, Kyoto 606-01, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Physics, Loughborough University, Loughborough, UK","institution_ids":["https://openalex.org/I143804889"]},{"raw_affiliation_string":"Kyoto University, Faculty of Engineering, Sakyo, Kyoto 606-01, Japan","institution_ids":["https://openalex.org/I22299242"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5072041742","display_name":"Danka Slav\u00ednsk\u00e1","orcid":"https://orcid.org/0000-0002-4900-1018","observed_orcids":["https://orcid.org/0000-0002-4900-1018"]},"institutions":[{"id":"https://openalex.org/I21250087","display_name":"Charles University","ror":"https://ror.org/024d6js02","country_code":"CZ","type":"education","lineage":["https://openalex.org/I21250087"]}],"countries":["CZ"],"is_corresponding":false,"raw_author_name":"D. Slav\u00ednsk\u00e1","raw_affiliation_strings":["Faculty of Mathematics and Physics, Charles University, V Holesovickach 2, 180 00, Prague, 8. Czech Republic","Faculty of Mathematics and Physics Charles University V Hole\u0161ovi\u010dk\u00e1ch 2 180 00 Prague 8 Czech Republic"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Faculty of Mathematics and Physics, Charles University, V Holesovickach 2, 180 00, Prague, 8. Czech Republic","institution_ids":["https://openalex.org/I21250087"]},{"raw_affiliation_string":"Faculty of Mathematics and Physics Charles University V Hole\u0161ovi\u010dk\u00e1ch 2 180 00 Prague 8 Czech Republic","institution_ids":["https://openalex.org/I21250087"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5085292344","display_name":"V Stund\u017eia","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I21250087","display_name":"Charles University","ror":"https://ror.org/024d6js02","country_code":"CZ","type":"education","lineage":["https://openalex.org/I21250087"]}],"countries":["CZ"],"is_corresponding":false,"raw_author_name":"V. Stund\u017eia","raw_affiliation_strings":["Faculty of Mathematics and Physics, Charles University, V Holesovickach 2, 180 00, Prague, 8. Czech Republic","Faculty of Mathematics and Physics Charles University V Hole\u0161ovi\u010dk\u00e1ch 2 180 00 Prague 8 Czech Republic"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Faculty of Mathematics and Physics, Charles University, V Holesovickach 2, 180 00, Prague, 8. Czech Republic","institution_ids":["https://openalex.org/I21250087"]},{"raw_affiliation_string":"Faculty of Mathematics and Physics Charles University V Hole\u0161ovi\u010dk\u00e1ch 2 180 00 Prague 8 Czech Republic","institution_ids":["https://openalex.org/I21250087"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5111780848","display_name":"Joseph Zemek","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I202391551","display_name":"Czech Academy of Sciences","ror":"https://ror.org/053avzc18","country_code":"CZ","type":"government","lineage":["https://openalex.org/I202391551"]},{"id":"https://openalex.org/I4210122644","display_name":"FZU - Institute of Physics of the Czech Academy of Sciences","ror":"https://ror.org/02yhj4v17","country_code":"CZ","type":"facility","lineage":["https://openalex.org/I202391551","https://openalex.org/I4210122644"]}],"countries":["CZ"],"is_corresponding":false,"raw_author_name":"J. Zemek","raw_affiliation_strings":["Institute of Physics, Academy of Sciences, Czech Republic, Cukrovarnick\u00e1 10, 16253 Prague 6, Czech Republic"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Physics, Academy of Sciences, Czech Republic, Cukrovarnick\u00e1 10, 16253 Prague 6, Czech Republic","institution_ids":["https://openalex.org/I202391551","https://openalex.org/I4210122644"]}]}],"institutions":[],"countries_distinct_count":3,"institutions_distinct_count":5,"corresponding_author_ids":["https://openalex.org/A5045359292"],"corresponding_institution_ids":["https://openalex.org/I21250087"],"apc_list":{"value":2860,"currency":"USD","value_usd":2860},"apc_paid":null,"fwci":3.8935,"has_fulltext":false,"cited_by_count":14,"citation_normalized_percentile":{"value":0.92482576,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":88,"max":93},"biblio":{"volume":"48","issue":"10","first_page":"883","last_page":"886"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10377","display_name":"Metal and Thin Film Mechanics","score":0.6039999723434448,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10377","display_name":"Metal and Thin Film Mechanics","score":0.6039999723434448,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11661","display_name":"Copper Interconnects and Reliability","score":0.10159999877214432,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10781","display_name":"Low-Pressure Plasma Processing and Diagnostics","score":0.08009999990463257,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/sputtered-metal-films","display_name":"sputtered metal films","score":0.6010000109672546},{"id":"https://openalex.org/keywords/plasma-polymerization","display_name":"plasma polymerization","score":0.7749999761581421},{"id":"https://openalex.org/keywords/n-hexane","display_name":"n-hexane","score":0.9020000100135803},{"id":"https://openalex.org/keywords/ion-bombardment","display_name":"ion bombardment","score":0.7379999756813049},{"id":"https://openalex.org/keywords/film-aging","display_name":"film aging","score":0.6769999861717224},{"id":"https://openalex.org/keywords/electrical-resistance","display_name":"electrical resistance","score":0.925000011920929},{"id":"https://openalex.org/keywords/silver","display_name":"silver","score":0.6330000162124634},{"id":"https://openalex.org/keywords/nickel","display_name":"nickel","score":1.0},{"id":"https://openalex.org/keywords/molybdenum","display_name":"molybdenum","score":1.0}],"concepts":[{"id":"https://openalex.org/C123408415","wikidata":"https://www.wikidata.org/wiki/Q194154","display_name":"Cavity magnetron","level":4,"score":0.6790982484817505},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6091350317001343},{"id":"https://openalex.org/C104779481","wikidata":"https://www.wikidata.org/wiki/Q50707","display_name":"Composite number","level":2,"score":0.5418596267700195},{"id":"https://openalex.org/C544153396","wikidata":"https://www.wikidata.org/wiki/Q11426","display_name":"Metal","level":2,"score":0.5407289266586304},{"id":"https://openalex.org/C82706917","wikidata":"https://www.wikidata.org/wiki/Q10251","display_name":"Plasma","level":2,"score":0.4979684352874756},{"id":"https://openalex.org/C145148216","wikidata":"https://www.wikidata.org/wiki/Q36496","display_name":"Ion","level":2,"score":0.4948989748954773},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.47227367758750916},{"id":"https://openalex.org/C20254490","wikidata":"https://www.wikidata.org/wiki/Q719550","display_name":"Biasing","level":3,"score":0.4551137089729309},{"id":"https://openalex.org/C500499127","wikidata":"https://www.wikidata.org/wiki/Q332154","display_name":"Ageing","level":2,"score":0.45083746314048767},{"id":"https://openalex.org/C61427134","wikidata":"https://www.wikidata.org/wiki/Q847609","display_name":"Sputter deposition","level":4,"score":0.4287380874156952},{"id":"https://openalex.org/C64297162","wikidata":"https://www.wikidata.org/wiki/Q1987070","display_name":"Deposition (geology)","level":3,"score":0.4242286682128906},{"id":"https://openalex.org/C2777077568","wikidata":"https://www.wikidata.org/wiki/Q150440","display_name":"Hexane","level":2,"score":0.41106978058815},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.37820473313331604},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.3466264009475708},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.2787303328514099},{"id":"https://openalex.org/C22423302","wikidata":"https://www.wikidata.org/wiki/Q898444","display_name":"Sputtering","level":3,"score":0.2498297095298767},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.2436213493347168},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.11505284905433655},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.10730868577957153},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.08450064063072205},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.0510026216506958},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C2816523","wikidata":"https://www.wikidata.org/wiki/Q180184","display_name":"Sediment","level":2,"score":0.0},{"id":"https://openalex.org/C151730666","wikidata":"https://www.wikidata.org/wiki/Q7205","display_name":"Paleontology","level":1,"score":0.0},{"id":"https://openalex.org/C54355233","wikidata":"https://www.wikidata.org/wiki/Q7162","display_name":"Genetics","level":1,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1016/s0042-207x(97)00124-3","doi":"https://doi.org/10.1016/s0042-207x(97)00124-3","is_oa":false,"landing_page_url":"https://doi.org/10.1016/s0042-207x(97)00124-3","pdf_url":null,"source":{"id":"https://openalex.org/S86481247","display_name":"Vacuum","issn_l":"0042-207X","issn":["0042-207X","1879-2715"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-c","jufo-1","ki-jl-1","norway-1","poland-70","russia-white-list-1"],"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Vacuum","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320321006","display_name":"Grantov\u00e1 Agentura \u010cesk\u00e9 Republiky","ror":"https://ror.org/01pv73b02"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":12,"referenced_works":["https://openalex.org/W609933390","https://openalex.org/W624458234","https://openalex.org/W1581746468","https://openalex.org/W1639626114","https://openalex.org/W1643625480","https://openalex.org/W1968763118","https://openalex.org/W1991500306","https://openalex.org/W2042008614","https://openalex.org/W2043990954","https://openalex.org/W2054317239","https://openalex.org/W2057388424","https://openalex.org/W2211337513"],"related_works":["https://openalex.org/W2042008614","https://openalex.org/W2057388424","https://openalex.org/W7127262362","https://openalex.org/W2034575542","https://openalex.org/W2066626467","https://openalex.org/W1964929525","https://openalex.org/W2095267877","https://openalex.org/W1997938020","https://openalex.org/W2000943875","https://openalex.org/W2054736744"],"abstract_inverted_index":null,"counts_by_year":[{"year":2018,"cited_by_count":1}],"updated_date":"2026-10-30T12:39:25.321706","created_date":"2016-06-24T00:00:00"}