{"id":"https://openalex.org/W2005779183","doi":"https://doi.org/10.1016/s1007-0214(10)70091-2","title":"Electrothermal driving microcantilever resonator as a platform for chemical gas sensing","display_name":"Electrothermal driving microcantilever resonator as a platform for chemical gas sensing","publication_year":2010,"publication_date":"2010-10-01","ids":{"openalex":"https://openalex.org/W2005779183","doi":"https://doi.org/10.1016/s1007-0214(10)70091-2","mag":"2005779183"},"language":"en","primary_location":{"id":"doi:10.1016/s1007-0214(10)70091-2","doi":"https://doi.org/10.1016/s1007-0214(10)70091-2","is_oa":false,"landing_page_url":"https://doi.org/10.1016/s1007-0214(10)70091-2","pdf_url":null,"source":{"id":"https://openalex.org/S24978797","display_name":"Tsinghua Science & Technology","issn_l":"1007-0214","issn":["1007-0214","1878-7606"],"is_oa":false,"is_in_doaj":true,"is_core":true,"listed_in":["cwts-core","doaj","dongbi-b","poland-70","russia-white-list-1"],"host_organization":"https://openalex.org/P4310311901","host_organization_name":"Tsinghua University Press","host_organization_lineage":["https://openalex.org/P4310311901","https://openalex.org/P4353108601"],"host_organization_lineage_names":["Tsinghua University Press","Tsinghua University"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Tsinghua Science and Technology","raw_type":"journal-article"},"volume":null,"type":"article","indexed_in":["crossref","doaj"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5075339397","display_name":"Ying Dong","orcid":"https://orcid.org/0000-0002-6413-8653","observed_orcids":["https://orcid.org/0000-0002-6413-8653"]},"institutions":[{"id":"https://openalex.org/I99065089","display_name":"Tsinghua University","ror":"https://ror.org/03cve4549","country_code":"CN","type":"education","lineage":["https://openalex.org/I99065089"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Ying Dong","raw_affiliation_strings":["Department of Precision Instruments and Mechanology, Tsinghua University, Beijing 100084, China; State Key Laboratory of Precision Measurement Technology and Instruments, Tsinghua University, Beijing 100084, China","Department of Precision Instruments and Mechanology, Tsinghua University, Beijing 100084, China","State Key Laboratory of Precision Measurement Technology and Instruments, Tsinghua University, Beijing 100084, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Precision Instruments and Mechanology, Tsinghua University, Beijing 100084, China; State Key Laboratory of Precision Measurement Technology and Instruments, Tsinghua University, Beijing 100084, China","institution_ids":["https://openalex.org/I99065089"]},{"raw_affiliation_string":"Department of Precision Instruments and Mechanology, Tsinghua University, Beijing 100084, China","institution_ids":["https://openalex.org/I99065089"]},{"raw_affiliation_string":"State Key Laboratory of Precision Measurement Technology and Instruments, Tsinghua University, Beijing 100084, China","institution_ids":["https://openalex.org/I99065089"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5079273603","display_name":"Wei Feng Gao","orcid":"https://orcid.org/0000-0002-8503-4562","observed_orcids":["https://orcid.org/0000-0002-8503-4562"]},"institutions":[{"id":"https://openalex.org/I99065089","display_name":"Tsinghua University","ror":"https://ror.org/03cve4549","country_code":"CN","type":"education","lineage":["https://openalex.org/I99065089"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Wei Gao","raw_affiliation_strings":["Department of Precision Instruments and Mechanology, Tsinghua University, Beijing 100084, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Precision Instruments and Mechanology, Tsinghua University, Beijing 100084, China","institution_ids":["https://openalex.org/I99065089"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5011723653","display_name":"Yi Zheng","orcid":"https://orcid.org/0000-0002-3222-8339","observed_orcids":["https://orcid.org/0000-0002-3222-8339"]},"institutions":[{"id":"https://openalex.org/I99065089","display_name":"Tsinghua University","ror":"https://ror.org/03cve4549","country_code":"CN","type":"education","lineage":["https://openalex.org/I99065089"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yi Zheng","raw_affiliation_strings":["Department of Precision Instruments and Mechanology, Tsinghua University, Beijing 100084, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Precision Instruments and Mechanology, Tsinghua University, Beijing 100084, China","institution_ids":["https://openalex.org/I99065089"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5041300353","display_name":"Zheng You","orcid":"https://orcid.org/0000-0002-3941-1371","observed_orcids":["https://orcid.org/0000-0002-3941-1371"]},"institutions":[{"id":"https://openalex.org/I99065089","display_name":"Tsinghua University","ror":"https://ror.org/03cve4549","country_code":"CN","type":"education","lineage":["https://openalex.org/I99065089"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zheng You","raw_affiliation_strings":["Department of Precision Instruments and Mechanology, Tsinghua University, Beijing 100084, China; State Key Laboratory of Precision Measurement Technology and Instruments, Tsinghua University, Beijing 100084, China","Department of Precision Instruments and Mechanology, Tsinghua University, Beijing 100084, China","State Key Laboratory of Precision Measurement Technology and Instruments, Tsinghua University, Beijing 100084, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Precision Instruments and Mechanology, Tsinghua University, Beijing 100084, China; State Key Laboratory of Precision Measurement Technology and Instruments, Tsinghua University, Beijing 100084, China","institution_ids":["https://openalex.org/I99065089"]},{"raw_affiliation_string":"Department of Precision Instruments and Mechanology, Tsinghua University, Beijing 100084, China","institution_ids":["https://openalex.org/I99065089"]},{"raw_affiliation_string":"State Key Laboratory of Precision Measurement Technology and Instruments, Tsinghua University, Beijing 100084, China","institution_ids":["https://openalex.org/I99065089"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I99065089"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.15453492,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":94},"biblio":{"volume":"15","issue":"5","first_page":"481","last_page":"488"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9550999999046326,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9550999999046326,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10461","display_name":"Gas Sensing Nanomaterials and Sensors","score":0.0357000008225441,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.006899999920278788,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/microcantilever-resonators","display_name":"microcantilever resonators","score":0.9490000009536743},{"id":"https://openalex.org/keywords/electrothermal-actuation","display_name":"electrothermal actuation","score":0.8970000147819519},{"id":"https://openalex.org/keywords/piezoresistive-sensing","display_name":"piezoresistive sensing","score":0.8420000076293945},{"id":"https://openalex.org/keywords/chemical-gas-sensing","display_name":"chemical gas sensing","score":0.8230000138282776},{"id":"https://openalex.org/keywords/volatile-organic-compounds","display_name":"volatile organic compounds","score":0.9330000281333923},{"id":"https://openalex.org/keywords/polymer-coatings","display_name":"polymer coatings","score":0.6259999871253967},{"id":"https://openalex.org/keywords/silicon-on-insulator","display_name":"silicon-on-insulator","score":0.8529999852180481},{"id":"https://openalex.org/keywords/direct-bonding","display_name":"direct bonding","score":0.8659999966621399},{"id":"https://openalex.org/keywords/integrated-gas-sensors","display_name":"integrated gas sensors","score":0.6140000224113464},{"id":"https://openalex.org/keywords/microfabrication","display_name":"microfabrication","score":0.5839999914169312}],"concepts":[{"id":"https://openalex.org/C97126364","wikidata":"https://www.wikidata.org/wiki/Q349669","display_name":"Resonator","level":2,"score":0.8650394082069397},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.7517828941345215},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7366816997528076},{"id":"https://openalex.org/C198490522","wikidata":"https://www.wikidata.org/wiki/Q1932915","display_name":"Piezoresistive effect","level":2,"score":0.694434642791748},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.6904392242431641},{"id":"https://openalex.org/C141354745","wikidata":"https://www.wikidata.org/wiki/Q17227","display_name":"Cantilever","level":2,"score":0.626152515411377},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.5635126233100891},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5118343234062195},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.4613931179046631},{"id":"https://openalex.org/C53143962","wikidata":"https://www.wikidata.org/wiki/Q1478788","display_name":"Silicon on insulator","level":3,"score":0.453535795211792},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.3263307511806488},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.08273077011108398},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1016/s1007-0214(10)70091-2","doi":"https://doi.org/10.1016/s1007-0214(10)70091-2","is_oa":false,"landing_page_url":"https://doi.org/10.1016/s1007-0214(10)70091-2","pdf_url":null,"source":{"id":"https://openalex.org/S24978797","display_name":"Tsinghua Science & Technology","issn_l":"1007-0214","issn":["1007-0214","1878-7606"],"is_oa":false,"is_in_doaj":true,"is_core":true,"listed_in":["cwts-core","doaj","dongbi-b","poland-70","russia-white-list-1"],"host_organization":"https://openalex.org/P4310311901","host_organization_name":"Tsinghua University Press","host_organization_lineage":["https://openalex.org/P4310311901","https://openalex.org/P4353108601"],"host_organization_lineage_names":["Tsinghua University Press","Tsinghua University"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Tsinghua Science and Technology","raw_type":"journal-article"},{"id":"pmh:oai:authors.library.caltech.edu:84561","doi":null,"is_oa":false,"landing_page_url":"https://authors.library.caltech.edu/84561/","pdf_url":null,"source":{"id":"https://openalex.org/S4306402161","display_name":"CaltechAUTHORS (California Institute of Technology)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I122411786","host_organization_name":"California Institute of Technology","host_organization_lineage":["https://openalex.org/I122411786"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"Article"}],"best_oa_location":null,"sustainable_development_goals":[],"sustainable_development_goals_aurora":[{"score":0.5699999928474426,"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy"}],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":15,"referenced_works":["https://openalex.org/W22571095","https://openalex.org/W1570342004","https://openalex.org/W1968416806","https://openalex.org/W1996255182","https://openalex.org/W2011230106","https://openalex.org/W2013477944","https://openalex.org/W2031360519","https://openalex.org/W2036682406","https://openalex.org/W2059504624","https://openalex.org/W2061543408","https://openalex.org/W2065745205","https://openalex.org/W2085640403","https://openalex.org/W2120522709","https://openalex.org/W2127533763","https://openalex.org/W2170925765"],"related_works":["https://openalex.org/W2150004397","https://openalex.org/W2025294681","https://openalex.org/W2540685717","https://openalex.org/W1973407535","https://openalex.org/W2105225674","https://openalex.org/W2045503801","https://openalex.org/W2474799934","https://openalex.org/W2122612554","https://openalex.org/W2121972528","https://openalex.org/W3040115070"],"abstract_inverted_index":{"In":[0,127],"the":[1,4,51,54,72,84,93,98,101,111,115,120,124,130,138,143,154],"current":[2],"research,":[3],"use":[5],"of":[6,53,82,92,100,114,123,137],"a":[7,12,29,40,45,56,108],"micromachined":[8],"cantilever":[9],"resonator":[10,22,74,95,125,145,157],"as":[11],"platform":[13],"for":[14,59,110],"chemical":[15],"gas":[16,57,102,139],"sensing":[17],"was":[18],"examined.":[19],"The":[20,68,90,104,148],"microcantilever":[21,73,94,144,156],"integrates":[23],"an":[24],"electrothermal":[25],"driving":[26],"unit":[27],"and":[28,33,87,119,135],"piezoresistive":[30],"detecting":[31],"unit,":[32],"it":[34],"is":[35],"fabricated":[36],"by":[37],"direct":[38],"bonding":[39],"silicon-on-insulator":[41],"(SOl)":[42],"wafer.":[43],"With":[44],"particular":[46],"polymer":[47],"layer":[48],"coated":[49],"on":[50,142],"surface":[52],"microcantilever,":[55],"sensor":[58,140],"volatile":[60],"organic":[61],"components":[62],"(VOGs)":[63],"detection":[64],"can":[65,96],"be":[66],"realized.":[67],"operation":[69],"mechanism":[70],"provides":[71,107],"with":[75,161],"integrated":[76,112],"circuit":[77],"(IG)":[78],"compatibility":[79],"in":[80],"terms":[81],"both":[83],"fabrication":[85,113],"process":[86],"operating":[88],"voltage.":[89],"configuration":[91],"optimize":[97],"performance":[99,160],"sensor.":[103],"SOl":[105],"wafer":[106],"solution":[109],"microstructure,":[116],"transducers,":[117],"electronics,":[118],"precise":[121],"control":[122],"parameters.":[126],"this":[128],"paper,":[129],"principles,":[131],"design,":[132],"analysis,":[133],"process,":[134],"demonstration":[136],"based":[141],"are":[146],"presented.":[147],"experimental":[149],"results":[150],"provide":[151],"confirmation":[152],"that":[153],"polymer-coated":[155],"has":[158],"excellent":[159],"regard":[162],"to":[163],"VOG":[164],"detection.":[165]},"counts_by_year":[{"year":2021,"cited_by_count":1},{"year":2014,"cited_by_count":1}],"updated_date":"2026-10-13T10:08:12.033832","created_date":"2025-10-10T00:00:00"}