{"id":"https://openalex.org/W2005658651","doi":"https://doi.org/10.1260/1756-8315.2.4.215","title":"Thickness Uniformity of Spin Coated Film Influenced by Nonuniform Temperature of Substrates","display_name":"Thickness Uniformity of Spin Coated Film Influenced by Nonuniform Temperature of Substrates","publication_year":2010,"publication_date":"2010-12-01","ids":{"openalex":"https://openalex.org/W2005658651","doi":"https://doi.org/10.1260/1756-8315.2.4.215","mag":"2005658651"},"language":"en","primary_location":{"id":"doi:10.1260/1756-8315.2.4.215","doi":"https://doi.org/10.1260/1756-8315.2.4.215","is_oa":false,"landing_page_url":"https://doi.org/10.1260/1756-8315.2.4.215","pdf_url":null,"source":{"id":"https://openalex.org/S125718529","display_name":"International Journal of Emerging Multidisciplinary Fluid Sciences","issn_l":"1756-8315","issn":["1756-8315","1756-8323"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core"],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"International Journal of Emerging Multidisciplinary Fluid Sciences","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5057833745","display_name":"Taku Ohara","orcid":"https://orcid.org/0000-0003-0304-7042","observed_orcids":["https://orcid.org/0000-0003-0304-7042"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Taku Ohara","raw_affiliation_strings":["Nanoscale Flow Research Division"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Nanoscale Flow Research Division","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5006553198","display_name":"Shinichiro Matsubara","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210117815","display_name":"Mitsubishi Heavy Industries (Japan)","ror":"https://ror.org/02aq67p44","country_code":"JP","type":"company","lineage":["https://openalex.org/I1306287861","https://openalex.org/I4210117815"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Shinichiro Matsubara","raw_affiliation_strings":["Mitsubishi Heavy Industries ,"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Mitsubishi Heavy Industries ,","institution_ids":["https://openalex.org/I4210117815"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5042550238","display_name":"Hirotoshi Kadowaki","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Hirotoshi Kadowaki","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5049168876","display_name":"Gota Kikugawa","orcid":"https://orcid.org/0000-0002-8145-8309","observed_orcids":["https://orcid.org/0000-0002-8145-8309"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Gota Kikugawa","raw_affiliation_strings":["Nanoscale Flow Research Division"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Nanoscale Flow Research Division","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5109063224","display_name":"Kazuhiro Takeshita","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I114132059","display_name":"Tokyo Electron (Japan)","ror":"https://ror.org/05gd76j39","country_code":"JP","type":"company","lineage":["https://openalex.org/I114132059"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Kazuhiro Takeshita","raw_affiliation_strings":["Tokyo Electron Limited"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Tokyo Electron Limited","institution_ids":["https://openalex.org/I114132059"]}]},{"author_position":"last","author":{"id":null,"display_name":"Tomoko Hamada","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I114132059","display_name":"Tokyo Electron (Japan)","ror":"https://ror.org/05gd76j39","country_code":"JP","type":"company","lineage":["https://openalex.org/I114132059"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Tomoko Hamada","raw_affiliation_strings":["Tokyo Electron Limited"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Tokyo Electron Limited","institution_ids":["https://openalex.org/I114132059"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.1632778,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":93},"biblio":{"volume":"2","issue":"4","first_page":"215","last_page":"232"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12141","display_name":"Fluid Dynamics and Thin Films","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12141","display_name":"Fluid Dynamics and Thin Films","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11382","display_name":"Fluid Dynamics and Heat Transfer","score":0.0,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11379","display_name":"Rheology and Fluid Dynamics Studies","score":0.0,"subfield":{"id":"https://openalex.org/subfields/1507","display_name":"Fluid Flow and Transfer Processes"},"field":{"id":"https://openalex.org/fields/15","display_name":"Chemical Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/spin-coating","display_name":"spin coating","score":0.9950000047683716},{"id":"https://openalex.org/keywords/film-thickness-uniformity","display_name":"film thickness uniformity","score":0.9649999737739563},{"id":"https://openalex.org/keywords/thin-film-drying","display_name":"thin film drying","score":0.6600000262260437},{"id":"https://openalex.org/keywords/solvent-evaporation","display_name":"solvent evaporation","score":0.8569999933242798},{"id":"https://openalex.org/keywords/heat-and-mass-transfer","display_name":"heat and mass transfer","score":0.9399999976158142},{"id":"https://openalex.org/keywords/polymer-solutions","display_name":"polymer solutions","score":0.550000011920929},{"id":"https://openalex.org/keywords/newtonian-viscosity","display_name":"Newtonian viscosity","score":0.8190000057220459},{"id":"https://openalex.org/keywords/finite-difference-simulation","display_name":"finite difference simulation","score":0.7269999980926514},{"id":"https://openalex.org/keywords/three-dimensional-flow-simulation","display_name":"three-dimensional flow simulation","score":0.4449999928474426}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6556297540664673},{"id":"https://openalex.org/C42704618","wikidata":"https://www.wikidata.org/wiki/Q910917","display_name":"Spin (aerodynamics)","level":2,"score":0.5460621118545532},{"id":"https://openalex.org/C26873012","wikidata":"https://www.wikidata.org/wiki/Q214781","display_name":"Condensed matter physics","level":1,"score":0.3887043595314026},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.3710796535015106},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.3540990650653839},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.15136656165122986},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.13256728649139404},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.10176599025726318}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1260/1756-8315.2.4.215","doi":"https://doi.org/10.1260/1756-8315.2.4.215","is_oa":false,"landing_page_url":"https://doi.org/10.1260/1756-8315.2.4.215","pdf_url":null,"source":{"id":"https://openalex.org/S125718529","display_name":"International Journal of Emerging Multidisciplinary Fluid Sciences","issn_l":"1756-8315","issn":["1756-8315","1756-8323"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core"],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"International Journal of Emerging Multidisciplinary Fluid Sciences","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":25,"referenced_works":["https://openalex.org/W1977783875","https://openalex.org/W1981839887","https://openalex.org/W1988563891","https://openalex.org/W1995830193","https://openalex.org/W2011830428","https://openalex.org/W2015770028","https://openalex.org/W2022317649","https://openalex.org/W2025064062","https://openalex.org/W2025984665","https://openalex.org/W2032325097","https://openalex.org/W2033943540","https://openalex.org/W2038372298","https://openalex.org/W2043104094","https://openalex.org/W2045485961","https://openalex.org/W2057118243","https://openalex.org/W2057791345","https://openalex.org/W2059277390","https://openalex.org/W2071500439","https://openalex.org/W2071766879","https://openalex.org/W2083763784","https://openalex.org/W2086440644","https://openalex.org/W2089084130","https://openalex.org/W2090955920","https://openalex.org/W2092144330","https://openalex.org/W2334183683"],"related_works":["https://openalex.org/W2742238690","https://openalex.org/W3209239995","https://openalex.org/W2083763784","https://openalex.org/W2057134102","https://openalex.org/W2149109956","https://openalex.org/W7166336385","https://openalex.org/W2092504161","https://openalex.org/W2463153195","https://openalex.org/W2015770028","https://openalex.org/W2111546679"],"abstract_inverted_index":{"The":[0,16,44,79,140],"film":[1,50,95,110,126,157],"thinning":[2],"process":[3,81],"in":[4],"the":[5,47,53,72,84,88,97,102,108,121,124,143,155],"spin":[6],"coating":[7,17,48,89,94,149],"has":[8],"been":[9,129,138],"analyzed":[10,58],"by":[11,71,153],"finite":[12],"difference":[13],"computational":[14,135],"simulations.":[15],"liquid":[18,49,90,156],"was":[19,36,57,104,112],"assumed":[20],"to":[21,65],"be":[22],"a":[23,39,92,159],"solution":[24],"of":[25,41,46,67,96,116,123],"polymer":[26],"solute":[27,42,98],"and":[28,61,69,91,106,148],"volatile":[29],"organic":[30],"solvent,":[31],"for":[32,131],"which":[33,132],"Newtonian":[34],"viscosity":[35],"given":[37],"as":[38],"function":[40],"concentration.":[43],"flow":[45],"that":[51],"covers":[52],"entire":[54],"substrate":[55,73,103,118,144],"surface":[56,74],"where":[59,142],"heat":[60],"mass":[62],"transfer":[63],"due":[64],"evaporation":[66],"solvent":[68,85],"heating/cooling":[70],"were":[75],"taken":[76],"into":[77],"consideration.":[78],"whole":[80],"until":[82],"all":[83],"evaporates":[86],"off":[87],"dry":[93],"is":[99,145,150],"left":[100],"on":[101,120],"solved,":[105],"then":[107],"final":[109,125],"thickness":[111,127],"determined.":[113],"Especially,":[114],"influences":[115],"nonuniform":[117],"temperature":[119],"profile":[122],"have":[128,137],"focused,":[130],"three":[133],"dimensional":[134],"simulations":[136],"performed.":[139],"case":[141],"at":[146],"rest":[147],"processed":[151],"only":[152],"drying":[154],"after":[158],"certain":[160],"am...":[161]},"counts_by_year":[{"year":2025,"cited_by_count":1}],"updated_date":"2026-09-27T08:07:27.782135","created_date":"2016-06-24T00:00:00"}