{"id":"https://openalex.org/W2005440108","doi":"https://doi.org/10.1116/1.584571","title":"Selected area epitaxy in II\u2013VI compounds by laser-induced photo-metalorganic vapor phase epitaxy","display_name":"Selected area epitaxy in II\u2013VI compounds by laser-induced photo-metalorganic vapor phase epitaxy","publication_year":1989,"publication_date":"1989-09-01","ids":{"openalex":"https://openalex.org/W2005440108","doi":"https://doi.org/10.1116/1.584571","mag":"2005440108"},"language":"en","primary_location":{"id":"doi:10.1116/1.584571","doi":"https://doi.org/10.1116/1.584571","is_oa":false,"landing_page_url":"https://doi.org/10.1116/1.584571","pdf_url":null,"source":{"id":"https://openalex.org/S4210191927","display_name":"Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena","issn_l":"0734-211X","issn":["0734-211X","2327-9877"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/P4310320061","host_organization_name":"AIP Publishing","host_organization_lineage":["https://openalex.org/P4310320061","https://openalex.org/P4310320257"],"host_organization_lineage_names":["AIP Publishing","American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena","raw_type":"journal-article"},"volume":null,"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5088028111","display_name":"S.J.C. Irvine","orcid":"https://orcid.org/0000-0002-1652-4496","observed_orcids":["https://orcid.org/0000-0002-1652-4496"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"S. J. C. Irvine","raw_affiliation_strings":["Royal Signals and Radar Establishment, Malvern, Worcestershire WR14 3PS, United Kingdom"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Royal Signals and Radar Establishment, Malvern, Worcestershire WR14 3PS, United Kingdom","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5027348713","display_name":"H. C. Hill","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"H. Hill","raw_affiliation_strings":["Royal Signals and Radar Establishment, Malvern, Worcestershire WR14 3PS, United Kingdom"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Royal Signals and Radar Establishment, Malvern, Worcestershire WR14 3PS, United Kingdom","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5108426456","display_name":"G. T. Brown","orcid":"https://orcid.org/0009-0003-6707-5015","observed_orcids":["https://orcid.org/0009-0003-6707-5015"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"G. T. Brown","raw_affiliation_strings":["Royal Signals and Radar Establishment, Malvern, Worcestershire WR14 3PS, United Kingdom"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Royal Signals and Radar Establishment, Malvern, Worcestershire WR14 3PS, United Kingdom","institution_ids":[]}]},{"author_position":"middle","author":{"id":null,"display_name":"S. J. Barnett","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"S. J. Barnett","raw_affiliation_strings":["Royal Signals and Radar Establishment, Malvern, Worcestershire WR14 3PS, United Kingdom"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Royal Signals and Radar Establishment, Malvern, Worcestershire WR14 3PS, United Kingdom","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5025786521","display_name":"Janet E. Hails","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"J. E. Hails","raw_affiliation_strings":["Royal Signals and Radar Establishment, Malvern, Worcestershire WR14 3PS, United Kingdom"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Royal Signals and Radar Establishment, Malvern, Worcestershire WR14 3PS, United Kingdom","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5052208002","display_name":"O. D. Dosser","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"O. D. Dosser","raw_affiliation_strings":["Royal Signals and Radar Establishment, Malvern, Worcestershire WR14 3PS, United Kingdom"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Royal Signals and Radar Establishment, Malvern, Worcestershire WR14 3PS, United Kingdom","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5011483092","display_name":"J. Brian Mullin","orcid":"https://orcid.org/0009-0008-4905-2027","observed_orcids":["https://orcid.org/0009-0008-4905-2027"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"J. B. Mullin","raw_affiliation_strings":["Royal Signals and Radar Establishment, Malvern, Worcestershire WR14 3PS, United Kingdom"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Royal Signals and Radar Establishment, Malvern, Worcestershire WR14 3PS, United Kingdom","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":0,"institutions_distinct_count":0,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":1.4173,"has_fulltext":false,"cited_by_count":15,"citation_normalized_percentile":{"value":0.79231514,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":96},"biblio":{"volume":"7","issue":"5","first_page":"1191","last_page":"1199"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11637","display_name":"Advanced Semiconductor Detectors and Materials","score":0.8413000106811523,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11637","display_name":"Advanced Semiconductor Detectors and Materials","score":0.8413000106811523,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11853","display_name":"Semiconductor materials and interfaces","score":0.04470000043511391,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10590","display_name":"Chalcogenide Semiconductor Thin Films","score":0.04149999842047691,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/ii-vi-compounds","display_name":"II-VI compounds","score":0.8100000023841858},{"id":"https://openalex.org/keywords/cadmium-telluride","display_name":"CdTe","score":0.8930000066757202},{"id":"https://openalex.org/keywords/nucleation","display_name":"nucleation","score":0.625},{"id":"https://openalex.org/keywords/native-oxide-removal","display_name":"native oxide removal","score":0.9330000281333923},{"id":"https://openalex.org/keywords/shadow-masking","display_name":"shadow masking","score":0.5979999899864197},{"id":"https://openalex.org/keywords/projection-lithography","display_name":"projection lithography","score":0.6370000243186951}],"concepts":[{"id":"https://openalex.org/C110738630","wikidata":"https://www.wikidata.org/wiki/Q1135540","display_name":"Epitaxy","level":3,"score":0.5902965664863586},{"id":"https://openalex.org/C6110044","wikidata":"https://www.wikidata.org/wiki/Q4118086","display_name":"Cadmium telluride photovoltaics","level":2,"score":0.5872523188591003},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.5385535359382629},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.4993455410003662},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.43894749879837036},{"id":"https://openalex.org/C61048295","wikidata":"https://www.wikidata.org/wiki/Q909022","display_name":"Nucleation","level":2,"score":0.4377760887145996},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.42575377225875854},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.32354915142059326},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.192499041557312},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.09108284115791321},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.07960662245750427}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1116/1.584571","doi":"https://doi.org/10.1116/1.584571","is_oa":false,"landing_page_url":"https://doi.org/10.1116/1.584571","pdf_url":null,"source":{"id":"https://openalex.org/S4210191927","display_name":"Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena","issn_l":"0734-211X","issn":["0734-211X","2327-9877"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/P4310320061","host_organization_name":"AIP Publishing","host_organization_lineage":["https://openalex.org/P4310320061","https://openalex.org/P4310320257"],"host_organization_lineage_names":["AIP Publishing","American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W4321076222","https://openalex.org/W2062110478","https://openalex.org/W2031374178","https://openalex.org/W2013314203","https://openalex.org/W2319781601","https://openalex.org/W2104779414","https://openalex.org/W2047902660","https://openalex.org/W2006466822","https://openalex.org/W2334946134","https://openalex.org/W2145591104"],"abstract_inverted_index":{"Selected":[0],"area":[1],"epitaxy":[2,111],"of":[3,18,29,49,78,142],"CdTe":[4,79,110],"onto":[5,80,134],"GaAs(100)2\u00b0\u2192(110)":[6],"substrates":[7,82],"is":[8,21,158],"reported":[9],"where":[10],"a":[11,101,119,128,182],"frequency-doubled":[12],"argon":[13],"ion":[14],"laser,":[15],"output":[16],"wavelength":[17],"257":[19,66],"nm,":[20],"used":[22],"to":[23,87,139],"photolytically":[24],"decompose":[25],"the":[26,30,85,89,135,178],"precursors.":[27],"Photodissociation":[28],"precursors":[31],"dimethyl":[32,34,39,60],"telluride,":[33,37],"ditelluride,":[35],"diethyl":[36],"and":[38,54,68,127,144],"cadmium":[40],"have":[41,62,69],"been":[42,113],"investigated":[43],"for":[44,92,105,118],"their":[45,50],"suitability":[46],"in":[47],"terms":[48],"ultraviolet":[51],"absorption":[52],"spectra":[53],"thermal":[55,71],"stability.":[56],"Diethyl":[57],"telluride":[58,61],"or":[59],"strong":[63],"absorptions":[64],"at":[65,115,149],"nm":[67],"good":[70,160],"stabilities":[72],"yielding":[73],"high":[74,150],"photoenhancement":[75],"factors.":[76],"Nucleation":[77],"GaAs":[81],"has":[83,99,112],"revealed":[84],"need":[86],"remove":[88],"native":[90],"oxide":[91],"epitaxial":[93],"growth.":[94],"HeNe":[95],"laser":[96,151,179],"thin-film":[97],"interference":[98],"indicated":[100],"4-min":[102],"nucleation":[103],"delay":[104],"pyrolytic":[106],"precursor":[107],"decomposition.":[108],"Photopatterned":[109],"demonstrated":[114],"300":[116],"\u00b0C":[117],"two-dimensional":[120],"mesa":[121],"pattern":[122,130],"obtained":[123,131],"by":[124,132,170,177],"shadow":[125],"masking":[126],"bar":[129],"projection":[133],"surface.":[136],"Deposition":[137],"due":[138],"vapor":[140],"diffusion":[141],"Cd":[143],"Te":[145],"was":[146],"only":[147],"evident":[148],"intensities.":[152],"At":[153],"low":[154],"intensities":[155],"feature":[156,162],"definition":[157],"very":[159],"with":[161],"sizes":[163],"\u223c100":[164],"\u03bcm.":[165],"These":[166],"results":[167],"are":[168],"explained":[169],"surface-rate-limiting":[171],"kinetics":[172],"that":[173],"can":[174],"be":[175,185],"stimulated":[176],"radiation.":[180],"Such":[181],"mechanism":[183],"could":[184],"laser-stimulated":[186],"hydrocarbon":[187],"desorption.":[188]},"counts_by_year":[{"year":2019,"cited_by_count":2},{"year":2014,"cited_by_count":1},{"year":2013,"cited_by_count":1},{"year":2012,"cited_by_count":1}],"updated_date":"2026-09-29T14:09:16.559479","created_date":"2016-06-24T00:00:00"}