{"id":"https://openalex.org/W2005289805","doi":"https://doi.org/10.1016/0257-8972(93)90084-2","title":"Plasma-assisted deposition of hard material layers from organometallic precursors","display_name":"Plasma-assisted deposition of hard material layers from organometallic precursors","publication_year":1993,"publication_date":"1993-10-01","ids":{"openalex":"https://openalex.org/W2005289805","doi":"https://doi.org/10.1016/0257-8972(93)90084-2","mag":"2005289805"},"language":"en","primary_location":{"id":"doi:10.1016/0257-8972(93)90084-2","doi":"https://doi.org/10.1016/0257-8972(93)90084-2","is_oa":false,"landing_page_url":"https://doi.org/10.1016/0257-8972(93)90084-2","pdf_url":null,"source":{"id":"https://openalex.org/S76010543","display_name":"Surface and Coatings Technology","issn_l":"0257-8972","issn":["0257-8972","1879-3347"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-b","jufo-2","ki-jl-1","norway-1","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Surface and Coatings Technology","raw_type":"journal-article"},"volume":null,"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5113600108","display_name":"Ch. T\u00e4schner","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I3018417779","display_name":"Leibniz Institute for Solid State and Materials Research","ror":"https://ror.org/04zb59n70","country_code":"DE","type":"facility","lineage":["https://openalex.org/I3018417779","https://openalex.org/I315704651"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Ch. T\u00e4schner","raw_affiliation_strings":["Institut f\u00fcr Festk\u00f6rper- und Werkstofforschung e.V.,Helmhotzstr. 20,0-8027 Dresden, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institut f\u00fcr Festk\u00f6rper- und Werkstofforschung e.V.,Helmhotzstr. 20,0-8027 Dresden, Germany","institution_ids":["https://openalex.org/I3018417779"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5058142022","display_name":"Karl Bartsch","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I3018417779","display_name":"Leibniz Institute for Solid State and Materials Research","ror":"https://ror.org/04zb59n70","country_code":"DE","type":"facility","lineage":["https://openalex.org/I3018417779","https://openalex.org/I315704651"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"K. Bartsch","raw_affiliation_strings":["Institut f\u00fcr Festk\u00f6rper- und Werkstofforschung e.V.,Helmhotzstr. 20,0-8027 Dresden, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institut f\u00fcr Festk\u00f6rper- und Werkstofforschung e.V.,Helmhotzstr. 20,0-8027 Dresden, Germany","institution_ids":["https://openalex.org/I3018417779"]}]},{"author_position":"last","author":{"id":null,"display_name":"A. Leonhardt","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I3018417779","display_name":"Leibniz Institute for Solid State and Materials Research","ror":"https://ror.org/04zb59n70","country_code":"DE","type":"facility","lineage":["https://openalex.org/I3018417779","https://openalex.org/I315704651"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"A. Leonhardt","raw_affiliation_strings":["Institut f\u00fcr Festk\u00f6rper- und Werkstofforschung e.V.,Helmhotzstr. 20,0-8027 Dresden, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institut f\u00fcr Festk\u00f6rper- und Werkstofforschung e.V.,Helmhotzstr. 20,0-8027 Dresden, Germany","institution_ids":["https://openalex.org/I3018417779"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I3018417779"],"apc_list":{"value":3880,"currency":"USD","value_usd":3880},"apc_paid":null,"fwci":2.1018,"has_fulltext":false,"cited_by_count":12,"citation_normalized_percentile":{"value":0.84086194,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":94},"biblio":{"volume":"59","issue":"1-3","first_page":"207","last_page":"211"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10377","display_name":"Metal and Thin Film Mechanics","score":0.9564999938011169,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10377","display_name":"Metal and Thin Film Mechanics","score":0.9564999938011169,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13470","display_name":"Surface Treatment and Coatings","score":0.024900000542402267,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10781","display_name":"Plasma Diagnostics and Applications","score":0.003000000026077032,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/plasma-assisted-chemical-vapour-deposition","display_name":"plasma-assisted chemical vapour deposition","score":0.9769999980926514},{"id":"https://openalex.org/keywords/hard-coatings","display_name":"hard coatings","score":0.6299999952316284},{"id":"https://openalex.org/keywords/titanium-carbonitride","display_name":"titanium carbonitride","score":0.6899999976158142},{"id":"https://openalex.org/keywords/zirconium-carbonitride","display_name":"zirconium carbonitride","score":0.9980000257492065},{"id":"https://openalex.org/keywords/low-deposition-temperature","display_name":"low deposition temperature","score":0.6150000095367432},{"id":"https://openalex.org/keywords/deposition-rate","display_name":"deposition rate","score":0.609000027179718},{"id":"https://openalex.org/keywords/coating-microstructure","display_name":"coating microstructure","score":0.6639999747276306},{"id":"https://openalex.org/keywords/grain-growth","display_name":"grain growth","score":0.6589999794960022},{"id":"https://openalex.org/keywords/organometallic-precursors","display_name":"organometallic precursors","score":0.8299999833106995}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.8015841245651245},{"id":"https://openalex.org/C525849907","wikidata":"https://www.wikidata.org/wiki/Q1096","display_name":"Tin","level":2,"score":0.7002344131469727},{"id":"https://openalex.org/C64297162","wikidata":"https://www.wikidata.org/wiki/Q1987070","display_name":"Deposition (geology)","level":3,"score":0.6699057817459106},{"id":"https://openalex.org/C87976508","wikidata":"https://www.wikidata.org/wiki/Q1498213","display_name":"Microstructure","level":2,"score":0.6402139663696289},{"id":"https://openalex.org/C57410435","wikidata":"https://www.wikidata.org/wiki/Q505668","display_name":"Chemical vapor deposition","level":2,"score":0.5150232315063477},{"id":"https://openalex.org/C506065880","wikidata":"https://www.wikidata.org/wiki/Q716","display_name":"Titanium","level":2,"score":0.5110636949539185},{"id":"https://openalex.org/C534791751","wikidata":"https://www.wikidata.org/wiki/Q1038","display_name":"Zirconium","level":2,"score":0.5044687986373901},{"id":"https://openalex.org/C146088050","wikidata":"https://www.wikidata.org/wiki/Q744818","display_name":"Transmission electron microscopy","level":2,"score":0.49213117361068726},{"id":"https://openalex.org/C82706917","wikidata":"https://www.wikidata.org/wiki/Q10251","display_name":"Plasma","level":2,"score":0.4681940972805023},{"id":"https://openalex.org/C192191005","wikidata":"https://www.wikidata.org/wiki/Q466491","display_name":"Grain size","level":2,"score":0.4664795994758606},{"id":"https://openalex.org/C42360764","wikidata":"https://www.wikidata.org/wiki/Q83588","display_name":"Chemical engineering","level":1,"score":0.4100109338760376},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.3648739457130432},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.35215523838996887},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.21490293741226196},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.1012968122959137},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.09214648604393005},{"id":"https://openalex.org/C2816523","wikidata":"https://www.wikidata.org/wiki/Q180184","display_name":"Sediment","level":2,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C151730666","wikidata":"https://www.wikidata.org/wiki/Q7205","display_name":"Paleontology","level":1,"score":0.0},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1016/0257-8972(93)90084-2","doi":"https://doi.org/10.1016/0257-8972(93)90084-2","is_oa":false,"landing_page_url":"https://doi.org/10.1016/0257-8972(93)90084-2","pdf_url":null,"source":{"id":"https://openalex.org/S76010543","display_name":"Surface and Coatings Technology","issn_l":"0257-8972","issn":["0257-8972","1879-3347"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-b","jufo-2","ki-jl-1","norway-1","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Surface and Coatings Technology","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":7,"referenced_works":["https://openalex.org/W220589034","https://openalex.org/W644229288","https://openalex.org/W2042067944","https://openalex.org/W2055813469","https://openalex.org/W2056946057","https://openalex.org/W2070653813","https://openalex.org/W2335616552"],"related_works":["https://openalex.org/W1989694950","https://openalex.org/W2079936140","https://openalex.org/W2070653813","https://openalex.org/W2084962806","https://openalex.org/W2020736865","https://openalex.org/W1970402223","https://openalex.org/W2007652258","https://openalex.org/W2062618186","https://openalex.org/W2034394796","https://openalex.org/W2001759529"],"abstract_inverted_index":null,"counts_by_year":[{"year":2017,"cited_by_count":1}],"updated_date":"2026-09-29T14:09:16.559479","created_date":"2016-06-24T00:00:00"}