{"id":"https://openalex.org/W2005264682","doi":"https://doi.org/10.1109/smicnd.2010.5650285","title":"High mobility Si-Ge channels and novel high-k materials for nanomosfets","display_name":"High mobility Si-Ge channels and novel high-k materials for nanomosfets","publication_year":2010,"publication_date":"2010-10-01","ids":{"openalex":"https://openalex.org/W2005264682","doi":"https://doi.org/10.1109/smicnd.2010.5650285","mag":"2005264682"},"language":"en","primary_location":{"id":"doi:10.1109/smicnd.2010.5650285","doi":"https://doi.org/10.1109/smicnd.2010.5650285","is_oa":false,"landing_page_url":"https://doi.org/10.1109/smicnd.2010.5650285","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"CAS 2010 Proceedings (International Semiconductor Conference)","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5043626665","display_name":"Wen-Jie Yu","orcid":"https://orcid.org/0000-0001-5261-2728","observed_orcids":["https://orcid.org/0000-0001-5261-2728"]},"institutions":[{"id":"https://openalex.org/I171892758","display_name":"Forschungszentrum J\u00fclich","ror":"https://ror.org/02nv7yv05","country_code":"DE","type":"facility","lineage":["https://openalex.org/I1305996414","https://openalex.org/I171892758"]},{"id":"https://openalex.org/I4210133912","display_name":"J\u00fclich Aachen Research Alliance","ror":"https://ror.org/02r0e4r58","country_code":"DE","type":"facility","lineage":["https://openalex.org/I1305996414","https://openalex.org/I171892758","https://openalex.org/I4210133912"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"W Yu","raw_affiliation_strings":["Institute of Bio and Nanosystems (IBN-1) and JARA \u2013 Fundamentals of Future Information Technology, Juelich, Germany","Institute of Bio and Nanosystems (IBN-1) and JARA - Fundamentals of Future Information Technology, Forschungszentrum Juelich, 52425, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Bio and Nanosystems (IBN-1) and JARA \u2013 Fundamentals of Future Information Technology, Juelich, Germany","institution_ids":["https://openalex.org/I4210133912"]},{"raw_affiliation_string":"Institute of Bio and Nanosystems (IBN-1) and JARA - Fundamentals of Future Information Technology, Forschungszentrum Juelich, 52425, Germany","institution_ids":["https://openalex.org/I171892758","https://openalex.org/I4210133912"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5049832461","display_name":"B. Zhang","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I171892758","display_name":"Forschungszentrum J\u00fclich","ror":"https://ror.org/02nv7yv05","country_code":"DE","type":"facility","lineage":["https://openalex.org/I1305996414","https://openalex.org/I171892758"]},{"id":"https://openalex.org/I4210133912","display_name":"J\u00fclich Aachen Research Alliance","ror":"https://ror.org/02r0e4r58","country_code":"DE","type":"facility","lineage":["https://openalex.org/I1305996414","https://openalex.org/I171892758","https://openalex.org/I4210133912"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"B Zhang","raw_affiliation_strings":["Institute of Bio and Nanosystems (IBN-1) and JARA \u2013 Fundamentals of Future Information Technology, Juelich, Germany","Institute of Bio and Nanosystems (IBN-1) and JARA - Fundamentals of Future Information Technology, Forschungszentrum Juelich, 52425, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Bio and Nanosystems (IBN-1) and JARA \u2013 Fundamentals of Future Information Technology, Juelich, Germany","institution_ids":["https://openalex.org/I4210133912"]},{"raw_affiliation_string":"Institute of Bio and Nanosystems (IBN-1) and JARA - Fundamentals of Future Information Technology, Forschungszentrum Juelich, 52425, Germany","institution_ids":["https://openalex.org/I171892758","https://openalex.org/I4210133912"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5088906526","display_name":"E. Dur\u011fun \u00d6zben","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I171892758","display_name":"Forschungszentrum J\u00fclich","ror":"https://ror.org/02nv7yv05","country_code":"DE","type":"facility","lineage":["https://openalex.org/I1305996414","https://openalex.org/I171892758"]},{"id":"https://openalex.org/I4210133912","display_name":"J\u00fclich Aachen Research Alliance","ror":"https://ror.org/02r0e4r58","country_code":"DE","type":"facility","lineage":["https://openalex.org/I1305996414","https://openalex.org/I171892758","https://openalex.org/I4210133912"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"E Durgun-O\u0308zben","raw_affiliation_strings":["Institute of Bio and Nanosystems (IBN-1) and JARA - Fundamentals of Future Information Technology, Forschungszentrum Juelich, 52425, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Bio and Nanosystems (IBN-1) and JARA - Fundamentals of Future Information Technology, Forschungszentrum Juelich, 52425, Germany","institution_ids":["https://openalex.org/I171892758","https://openalex.org/I4210133912"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5024927517","display_name":"Renato Amaral Minamisawa","orcid":"https://orcid.org/0000-0002-4187-544X","observed_orcids":["https://orcid.org/0000-0002-4187-544X"]},"institutions":[{"id":"https://openalex.org/I171892758","display_name":"Forschungszentrum J\u00fclich","ror":"https://ror.org/02nv7yv05","country_code":"DE","type":"facility","lineage":["https://openalex.org/I1305996414","https://openalex.org/I171892758"]},{"id":"https://openalex.org/I4210133912","display_name":"J\u00fclich Aachen Research Alliance","ror":"https://ror.org/02r0e4r58","country_code":"DE","type":"facility","lineage":["https://openalex.org/I1305996414","https://openalex.org/I171892758","https://openalex.org/I4210133912"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"R A Minamisawa","raw_affiliation_strings":["Institute of Bio and Nanosystems (IBN-1) and JARA \u2013 Fundamentals of Future Information Technology, Juelich, Germany","Institute of Bio and Nanosystems (IBN-1) and JARA - Fundamentals of Future Information Technology, Forschungszentrum Juelich, 52425, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Bio and Nanosystems (IBN-1) and JARA \u2013 Fundamentals of Future Information Technology, Juelich, Germany","institution_ids":["https://openalex.org/I4210133912"]},{"raw_affiliation_string":"Institute of Bio and Nanosystems (IBN-1) and JARA - Fundamentals of Future Information Technology, Forschungszentrum Juelich, 52425, Germany","institution_ids":["https://openalex.org/I171892758","https://openalex.org/I4210133912"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5057127285","display_name":"R. Lupt\u00e1k","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I171892758","display_name":"Forschungszentrum J\u00fclich","ror":"https://ror.org/02nv7yv05","country_code":"DE","type":"facility","lineage":["https://openalex.org/I1305996414","https://openalex.org/I171892758"]},{"id":"https://openalex.org/I4210133912","display_name":"J\u00fclich Aachen Research Alliance","ror":"https://ror.org/02r0e4r58","country_code":"DE","type":"facility","lineage":["https://openalex.org/I1305996414","https://openalex.org/I171892758","https://openalex.org/I4210133912"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"R Luptak","raw_affiliation_strings":["Institute of Bio and Nanosystems (IBN-1) and JARA \u2013 Fundamentals of Future Information Technology, Juelich, Germany","Institute of Bio and Nanosystems (IBN-1) and JARA - Fundamentals of Future Information Technology, Forschungszentrum Juelich, 52425, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Bio and Nanosystems (IBN-1) and JARA \u2013 Fundamentals of Future Information Technology, Juelich, Germany","institution_ids":["https://openalex.org/I4210133912"]},{"raw_affiliation_string":"Institute of Bio and Nanosystems (IBN-1) and JARA - Fundamentals of Future Information Technology, Forschungszentrum Juelich, 52425, Germany","institution_ids":["https://openalex.org/I171892758","https://openalex.org/I4210133912"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5060930180","display_name":"Michael S. Hagedorn","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I171892758","display_name":"Forschungszentrum J\u00fclich","ror":"https://ror.org/02nv7yv05","country_code":"DE","type":"facility","lineage":["https://openalex.org/I1305996414","https://openalex.org/I171892758"]},{"id":"https://openalex.org/I4210133912","display_name":"J\u00fclich Aachen Research Alliance","ror":"https://ror.org/02r0e4r58","country_code":"DE","type":"facility","lineage":["https://openalex.org/I1305996414","https://openalex.org/I171892758","https://openalex.org/I4210133912"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"M Hagedorn","raw_affiliation_strings":["Institute of Bio and Nanosystems (IBN-1) and JARA \u2013 Fundamentals of Future Information Technology, Juelich, Germany","Institute of Bio and Nanosystems (IBN-1) and JARA - Fundamentals of Future Information Technology, Forschungszentrum Juelich, 52425, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Bio and Nanosystems (IBN-1) and JARA \u2013 Fundamentals of Future Information Technology, Juelich, Germany","institution_ids":["https://openalex.org/I4210133912"]},{"raw_affiliation_string":"Institute of Bio and Nanosystems (IBN-1) and JARA - Fundamentals of Future Information Technology, Forschungszentrum Juelich, 52425, Germany","institution_ids":["https://openalex.org/I171892758","https://openalex.org/I4210133912"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5080009784","display_name":"Bernd Holl\u00e4nder","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I171892758","display_name":"Forschungszentrum J\u00fclich","ror":"https://ror.org/02nv7yv05","country_code":"DE","type":"facility","lineage":["https://openalex.org/I1305996414","https://openalex.org/I171892758"]},{"id":"https://openalex.org/I4210133912","display_name":"J\u00fclich Aachen Research Alliance","ror":"https://ror.org/02r0e4r58","country_code":"DE","type":"facility","lineage":["https://openalex.org/I1305996414","https://openalex.org/I171892758","https://openalex.org/I4210133912"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"B Holla\u0308nder","raw_affiliation_strings":["Institute of Bio and Nanosystems (IBN-1) and JARA - Fundamentals of Future Information Technology, Forschungszentrum Juelich, 52425, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Bio and Nanosystems (IBN-1) and JARA - Fundamentals of Future Information Technology, Forschungszentrum Juelich, 52425, Germany","institution_ids":["https://openalex.org/I171892758","https://openalex.org/I4210133912"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5048707198","display_name":"J\u00fcrgen Schubert","orcid":"https://orcid.org/0000-0003-0185-6794","observed_orcids":["https://orcid.org/0000-0003-0185-6794"]},"institutions":[{"id":"https://openalex.org/I171892758","display_name":"Forschungszentrum J\u00fclich","ror":"https://ror.org/02nv7yv05","country_code":"DE","type":"facility","lineage":["https://openalex.org/I1305996414","https://openalex.org/I171892758"]},{"id":"https://openalex.org/I4210133912","display_name":"J\u00fclich Aachen Research Alliance","ror":"https://ror.org/02r0e4r58","country_code":"DE","type":"facility","lineage":["https://openalex.org/I1305996414","https://openalex.org/I171892758","https://openalex.org/I4210133912"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"J Schubert","raw_affiliation_strings":["Institute of Bio and Nanosystems (IBN-1) and JARA \u2013 Fundamentals of Future Information Technology, Juelich, Germany","Institute of Bio and Nanosystems (IBN-1) and JARA - Fundamentals of Future Information Technology, Forschungszentrum Juelich, 52425, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Bio and Nanosystems (IBN-1) and JARA \u2013 Fundamentals of Future Information Technology, Juelich, Germany","institution_ids":["https://openalex.org/I4210133912"]},{"raw_affiliation_string":"Institute of Bio and Nanosystems (IBN-1) and JARA - Fundamentals of Future Information Technology, Forschungszentrum Juelich, 52425, Germany","institution_ids":["https://openalex.org/I171892758","https://openalex.org/I4210133912"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101486606","display_name":"Jean\u2010Michel Hartmann","orcid":"https://orcid.org/0000-0001-7006-8586","observed_orcids":["https://orcid.org/0000-0001-7006-8586","https://orcid.org/0000-0002-9493-1281"]},"institutions":[{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I3020098449","display_name":"CEA Grenoble","ror":"https://ror.org/02mg6n827","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I3020098449"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"J M Hartmann","raw_affiliation_strings":["CEA-LETI, MINATEC, Grenoble Cedex 9, France","CEA-LETI, MINATEC, 17 Rue des Martyrs, 38054 Grenoble Cedex 9, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEA-LETI, MINATEC, Grenoble Cedex 9, France","institution_ids":["https://openalex.org/I2738703131","https://openalex.org/I4210150049"]},{"raw_affiliation_string":"CEA-LETI, MINATEC, 17 Rue des Martyrs, 38054 Grenoble Cedex 9, France","institution_ids":["https://openalex.org/I2738703131","https://openalex.org/I3020098449","https://openalex.org/I4210150049"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5025064617","display_name":"Konstantin K. Bourdelle","orcid":"https://orcid.org/0009-0009-7497-045X","observed_orcids":["https://orcid.org/0009-0009-7497-045X"]},"institutions":[{"id":"https://openalex.org/I108523894","display_name":"Soitec (France)","ror":"https://ror.org/00s730510","country_code":"FR","type":"company","lineage":["https://openalex.org/I108523894"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"K K Bourdelle","raw_affiliation_strings":["SOITEC, Parc Technologique des Fontaines, Bernin, France","SOITEC \u2013 Parc technologique des Fontaines, 38190 Bernin, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"SOITEC, Parc Technologique des Fontaines, Bernin, France","institution_ids":["https://openalex.org/I108523894"]},{"raw_affiliation_string":"SOITEC \u2013 Parc technologique des Fontaines, 38190 Bernin, France","institution_ids":["https://openalex.org/I108523894"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5037261108","display_name":"Qing\u2010Tai Zhao","orcid":"https://orcid.org/0000-0002-2794-2757","observed_orcids":["https://orcid.org/0000-0002-2794-2757"]},"institutions":[{"id":"https://openalex.org/I171892758","display_name":"Forschungszentrum J\u00fclich","ror":"https://ror.org/02nv7yv05","country_code":"DE","type":"facility","lineage":["https://openalex.org/I1305996414","https://openalex.org/I171892758"]},{"id":"https://openalex.org/I4210133912","display_name":"J\u00fclich Aachen Research Alliance","ror":"https://ror.org/02r0e4r58","country_code":"DE","type":"facility","lineage":["https://openalex.org/I1305996414","https://openalex.org/I171892758","https://openalex.org/I4210133912"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Q T Zhao","raw_affiliation_strings":["Institute of Bio and Nanosystems (IBN-1) and JARA \u2013 Fundamentals of Future Information Technology, Juelich, Germany","Institute of Bio and Nanosystems (IBN-1) and JARA - Fundamentals of Future Information Technology, Forschungszentrum Juelich, 52425, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Bio and Nanosystems (IBN-1) and JARA \u2013 Fundamentals of Future Information Technology, Juelich, Germany","institution_ids":["https://openalex.org/I4210133912"]},{"raw_affiliation_string":"Institute of Bio and Nanosystems (IBN-1) and JARA - Fundamentals of Future Information Technology, Forschungszentrum Juelich, 52425, Germany","institution_ids":["https://openalex.org/I171892758","https://openalex.org/I4210133912"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5023796900","display_name":"Dan Buca","orcid":"https://orcid.org/0000-0002-3692-5596","observed_orcids":["https://orcid.org/0000-0002-3692-5596"]},"institutions":[{"id":"https://openalex.org/I171892758","display_name":"Forschungszentrum J\u00fclich","ror":"https://ror.org/02nv7yv05","country_code":"DE","type":"facility","lineage":["https://openalex.org/I1305996414","https://openalex.org/I171892758"]},{"id":"https://openalex.org/I4210133912","display_name":"J\u00fclich Aachen Research Alliance","ror":"https://ror.org/02r0e4r58","country_code":"DE","type":"facility","lineage":["https://openalex.org/I1305996414","https://openalex.org/I171892758","https://openalex.org/I4210133912"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"D Buca","raw_affiliation_strings":["Institute of Bio and Nanosystems (IBN-1) and JARA \u2013 Fundamentals of Future Information Technology, Juelich, Germany","Institute of Bio and Nanosystems (IBN-1) and JARA - Fundamentals of Future Information Technology, Forschungszentrum Juelich, 52425, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Bio and Nanosystems (IBN-1) and JARA \u2013 Fundamentals of Future Information Technology, Juelich, Germany","institution_ids":["https://openalex.org/I4210133912"]},{"raw_affiliation_string":"Institute of Bio and Nanosystems (IBN-1) and JARA - Fundamentals of Future Information Technology, Forschungszentrum Juelich, 52425, Germany","institution_ids":["https://openalex.org/I171892758","https://openalex.org/I4210133912"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5019891361","display_name":"S. Mantl","orcid":"https://orcid.org/0000-0002-4266-0619","observed_orcids":["https://orcid.org/0000-0002-4266-0619"]},"institutions":[{"id":"https://openalex.org/I171892758","display_name":"Forschungszentrum J\u00fclich","ror":"https://ror.org/02nv7yv05","country_code":"DE","type":"facility","lineage":["https://openalex.org/I1305996414","https://openalex.org/I171892758"]},{"id":"https://openalex.org/I4210133912","display_name":"J\u00fclich Aachen Research Alliance","ror":"https://ror.org/02r0e4r58","country_code":"DE","type":"facility","lineage":["https://openalex.org/I1305996414","https://openalex.org/I171892758","https://openalex.org/I4210133912"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"S Mantl","raw_affiliation_strings":["Institute of Bio and Nanosystems (IBN-1) and JARA \u2013 Fundamentals of Future Information Technology, Juelich, Germany","Institute of Bio and Nanosystems (IBN-1) and JARA - Fundamentals of Future Information Technology, Forschungszentrum Juelich, 52425, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Bio and Nanosystems (IBN-1) and JARA \u2013 Fundamentals of Future Information Technology, Juelich, Germany","institution_ids":["https://openalex.org/I4210133912"]},{"raw_affiliation_string":"Institute of Bio and Nanosystems (IBN-1) and JARA - Fundamentals of Future Information Technology, Forschungszentrum Juelich, 52425, Germany","institution_ids":["https://openalex.org/I171892758","https://openalex.org/I4210133912"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":6,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.09868224,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"105","issue":null,"first_page":"57","last_page":"62"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.8148999810218811,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.8148999810218811,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10558","display_name":"Advancements in Semiconductor Devices and Circuit Design","score":0.17870000004768372,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11661","display_name":"Copper Interconnects and Reliability","score":0.0010999999940395355,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/sige-channel","display_name":"SiGe channel","score":0.7689999938011169},{"id":"https://openalex.org/keywords/high-k-dielectrics","display_name":"high-k dielectrics","score":0.8659999966621399},{"id":"https://openalex.org/keywords/hafnium-oxide","display_name":"hafnium oxide","score":0.8420000076293945},{"id":"https://openalex.org/keywords/rare-earth-oxides","display_name":"rare earth oxides","score":0.7670000195503235},{"id":"https://openalex.org/keywords/nanoscale-mosfets","display_name":"nanoscale MOSFETs","score":0.8640000224113464},{"id":"https://openalex.org/keywords/gate-first-process","display_name":"gate-first process","score":0.6399999856948853},{"id":"https://openalex.org/keywords/metal-gate","display_name":"metal gate","score":0.902999997138977},{"id":"https://openalex.org/keywords/short-channel-effects","display_name":"short-channel effects","score":0.8960000276565552},{"id":"https://openalex.org/keywords/gate-control","display_name":"gate control","score":0.6890000104904175},{"id":"https://openalex.org/keywords/cmos-scaling","display_name":"CMOS scaling","score":0.7580000162124634}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6884070634841919},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.6268202066421509},{"id":"https://openalex.org/C51140833","wikidata":"https://www.wikidata.org/wiki/Q6822740","display_name":"Metal gate","level":5,"score":0.6132324934005737},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.6092624068260193},{"id":"https://openalex.org/C16317505","wikidata":"https://www.wikidata.org/wiki/Q132013","display_name":"High-\u03ba dielectric","level":3,"score":0.5959123969078064},{"id":"https://openalex.org/C172385210","wikidata":"https://www.wikidata.org/wiki/Q5339","display_name":"Transistor","level":3,"score":0.5908575654029846},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5731738209724426},{"id":"https://openalex.org/C131017901","wikidata":"https://www.wikidata.org/wiki/Q170451","display_name":"Logic gate","level":2,"score":0.5421299934387207},{"id":"https://openalex.org/C127162648","wikidata":"https://www.wikidata.org/wiki/Q16858953","display_name":"Channel (broadcasting)","level":2,"score":0.5238285660743713},{"id":"https://openalex.org/C64452783","wikidata":"https://www.wikidata.org/wiki/Q1524945","display_name":"Ternary operation","level":2,"score":0.5104728937149048},{"id":"https://openalex.org/C2778413303","wikidata":"https://www.wikidata.org/wiki/Q210793","display_name":"MOSFET","level":4,"score":0.46547314524650574},{"id":"https://openalex.org/C99844830","wikidata":"https://www.wikidata.org/wiki/Q102441924","display_name":"Scaling","level":2,"score":0.45986509323120117},{"id":"https://openalex.org/C133386390","wikidata":"https://www.wikidata.org/wiki/Q184996","display_name":"Dielectric","level":2,"score":0.4591706395149231},{"id":"https://openalex.org/C9395851","wikidata":"https://www.wikidata.org/wiki/Q177929","display_name":"Stack (abstract data type)","level":2,"score":0.43217596411705017},{"id":"https://openalex.org/C106782819","wikidata":"https://www.wikidata.org/wiki/Q6501076","display_name":"Electron mobility","level":2,"score":0.4307175874710083},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.430642306804657},{"id":"https://openalex.org/C162307627","wikidata":"https://www.wikidata.org/wiki/Q204833","display_name":"Enhanced Data Rates for GSM Evolution","level":2,"score":0.4273141026496887},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.4187825918197632},{"id":"https://openalex.org/C166972891","wikidata":"https://www.wikidata.org/wiki/Q5527011","display_name":"Gate dielectric","level":4,"score":0.41803067922592163},{"id":"https://openalex.org/C2780389399","wikidata":"https://www.wikidata.org/wiki/Q367849","display_name":"Silicon-germanium","level":3,"score":0.41429150104522705},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.3371206223964691},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.3339415490627289},{"id":"https://openalex.org/C2361726","wikidata":"https://www.wikidata.org/wiki/Q5527031","display_name":"Gate oxide","level":4,"score":0.22897523641586304},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.15197226405143738},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.11516335606575012},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.09215331077575684},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C2524010","wikidata":"https://www.wikidata.org/wiki/Q8087","display_name":"Geometry","level":1,"score":0.0},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0}],"mesh":[],"locations_count":3,"locations":[{"id":"doi:10.1109/smicnd.2010.5650285","doi":"https://doi.org/10.1109/smicnd.2010.5650285","is_oa":false,"landing_page_url":"https://doi.org/10.1109/smicnd.2010.5650285","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"CAS 2010 Proceedings (International Semiconductor Conference)","raw_type":"proceedings-article"},{"id":"pmh:oai:juser.fz-juelich.de:12084","doi":null,"is_oa":false,"landing_page_url":"http://juser.fz-juelich.de/search?p=id:%22PreJuSER-12084%22","pdf_url":null,"source":{"id":"https://openalex.org/S4306401090","display_name":"JuSER (Forschungszentrum J\u00fclich)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I171892758","host_organization_name":"Forschungszentrum J\u00fclich","host_organization_lineage":["https://openalex.org/I171892758"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Proceeding of 33rd Edition IEEE International Semiconductor Conference, CAS 2010. - S. 57 - 62","raw_type":"info:eu-repo/semantics/conferenceObject"},{"id":"pmh:oai:juser.fz-juelich.de:12089","doi":null,"is_oa":false,"landing_page_url":"http://juser.fz-juelich.de/record/12089","pdf_url":null,"source":{"id":"https://openalex.org/S4306401090","display_name":"JuSER (Forschungszentrum J\u00fclich)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I171892758","host_organization_name":"Forschungszentrum J\u00fclich","host_organization_lineage":["https://openalex.org/I171892758"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"33rd Edition IEEE International Semiconductor Conference, CAS-2010","raw_type":"info:eu-repo/semantics/conferenceObject"}],"best_oa_location":null,"sustainable_development_goals":[],"sustainable_development_goals_aurora":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":22,"referenced_works":["https://openalex.org/W1655063812","https://openalex.org/W1981804000","https://openalex.org/W1999457869","https://openalex.org/W2002143605","https://openalex.org/W2003645630","https://openalex.org/W2006125868","https://openalex.org/W2014510507","https://openalex.org/W2024224444","https://openalex.org/W2025166205","https://openalex.org/W2040799501","https://openalex.org/W2050002217","https://openalex.org/W2051020436","https://openalex.org/W2061481408","https://openalex.org/W2092291355","https://openalex.org/W2100392624","https://openalex.org/W2137670291","https://openalex.org/W2156254240","https://openalex.org/W2161245994","https://openalex.org/W2169409420","https://openalex.org/W2171586113","https://openalex.org/W3142400278","https://openalex.org/W6684856819"],"related_works":["https://openalex.org/W2796938634","https://openalex.org/W2071712090","https://openalex.org/W1973221791","https://openalex.org/W2287887285","https://openalex.org/W1716862708","https://openalex.org/W2013679759","https://openalex.org/W4231761429","https://openalex.org/W2125592959","https://openalex.org/W2167406464","https://openalex.org/W1589267155"],"abstract_inverted_index":{"The":[0],"implementation":[1],"of":[2],"more":[3],"powerful":[4],"materials":[5],"into":[6],"leading":[7],"edge":[8],"CMOS":[9],"devices":[10],"allows":[11],"performance":[12],"improvements":[13],"without":[14,17],"scaling":[15],"and":[16,43,58,63,67,77,100],"changing":[18],"the":[19,26,89],"circuit":[20],"design":[21],"libraries.":[22],"This":[23],"highly":[24],"motivates":[25],"research":[27],"on":[28],"novel":[29,64],"materials.":[30],"In":[31],"this":[32],"paper":[33],"we":[34],"present":[35],"various":[36,78],"transistor":[37],"fabrication":[38],"processes":[39],"like":[40,51],"\u201cgate":[41],"first\u201d":[42],"\u201creplacement":[44],"gate\u201d":[45],"for":[46,88],"different":[47],"channel":[48,103],"stack":[49],"configurations":[50],"strained":[52,54],"Si,":[53],"SiGe":[55],"alloy":[56],"layers":[57],"Ge":[59],"channels":[60],"with":[61,83],"HfO2":[62,72],"high-k":[65],"dielectrics":[66],"metal":[68],"gates.":[69],"We":[70],"discuss":[71],"as":[73],"a":[74],"reference":[75],"material":[76],"ternary":[79],"rare":[80],"earth":[81],"oxides":[82],"k":[84],"\u2248":[85],"30":[86],"desired":[87],"next":[90],"technology":[91],"nodes":[92],"in":[93],"order":[94],"to":[95],"ensure":[96],"optimum":[97],"gate":[98],"control":[99],"minimum":[101],"short":[102],"effects.":[104]},"counts_by_year":[],"updated_date":"2026-10-13T10:08:12.033832","created_date":"2025-10-10T00:00:00"}