{"id":"https://openalex.org/W2004985658","doi":"https://doi.org/10.1063/1.4771876","title":"Analysis of cathode geometry to minimize cathode erosion in direct current microplasma jet","display_name":"Analysis of cathode geometry to minimize cathode erosion in direct current microplasma jet","publication_year":2012,"publication_date":"2012-12-15","ids":{"openalex":"https://openalex.org/W2004985658","doi":"https://doi.org/10.1063/1.4771876","mag":"2004985658"},"language":"en","primary_location":{"id":"doi:10.1063/1.4771876","doi":"https://doi.org/10.1063/1.4771876","is_oa":false,"landing_page_url":"https://doi.org/10.1063/1.4771876","pdf_url":null,"source":{"id":"https://openalex.org/S187991544","display_name":"Journal of Applied Physics","issn_l":"0021-8979","issn":["0021-8979","1089-7550","1520-8850"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-d","jufo-1","norway-1","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Applied Physics","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5074155186","display_name":"Federica Causa","orcid":"https://orcid.org/0000-0003-0508-3100","observed_orcids":["https://orcid.org/0000-0003-0508-3100"]},"institutions":[{"id":"https://openalex.org/I112862951","display_name":"University of Messina","ror":"https://ror.org/05ctdxz19","country_code":"IT","type":"education","lineage":["https://openalex.org/I112862951"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Federica Causa","raw_affiliation_strings":["Dipartimento di Scienze dell'Ambiente, della Sicurezza, del Territorio, degli Alimenti e della Salute, Universit\u00e0 degli studi di Messina 1 , 98122 Messina, Italy"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Dipartimento di Scienze dell'Ambiente, della Sicurezza, del Territorio, degli Alimenti e della Salute, Universit\u00e0 degli studi di Messina 1 , 98122 Messina, Italy","institution_ids":["https://openalex.org/I112862951"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5056335039","display_name":"F. Ghezzi","orcid":"https://orcid.org/0000-0003-3363-5187","observed_orcids":["https://orcid.org/0000-0003-3363-5187"]},"institutions":[{"id":"https://openalex.org/I110120368","display_name":"National Agency for New Technologies, Energy and Sustainable Economic Development","ror":"https://ror.org/02an8es95","country_code":"IT","type":"government","lineage":["https://openalex.org/I110120368"]},{"id":"https://openalex.org/I4210128796","display_name":"Institute of Plasma Physics","ror":"https://ror.org/02n2bgz18","country_code":"IT","type":"facility","lineage":["https://openalex.org/I4210128796","https://openalex.org/I4210154486","https://openalex.org/I4210155236"]},{"id":"https://openalex.org/I4210155236","display_name":"National Research Council","ror":"https://ror.org/04zaypm56","country_code":"IT","type":"nonprofit","lineage":["https://openalex.org/I4210155236"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Francesco Ghezzi","raw_affiliation_strings":["Istituto di Fisica del Plasma, Consiglio Nazionale delle Ricerche, EURATOM-ENEA-CNR Association 2 , Via R. Cozzi 53, 20125 Milano, Italy"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Istituto di Fisica del Plasma, Consiglio Nazionale delle Ricerche, EURATOM-ENEA-CNR Association 2 , Via R. Cozzi 53, 20125 Milano, Italy","institution_ids":["https://openalex.org/I110120368","https://openalex.org/I4210128796","https://openalex.org/I4210155236"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5003877348","display_name":"D. Dellasega","orcid":"https://orcid.org/0000-0002-7389-9307","observed_orcids":["https://orcid.org/0000-0002-7389-9307"]},"institutions":[{"id":"https://openalex.org/I110120368","display_name":"National Agency for New Technologies, Energy and Sustainable Economic Development","ror":"https://ror.org/02an8es95","country_code":"IT","type":"government","lineage":["https://openalex.org/I110120368"]},{"id":"https://openalex.org/I4210128796","display_name":"Institute of Plasma Physics","ror":"https://ror.org/02n2bgz18","country_code":"IT","type":"facility","lineage":["https://openalex.org/I4210128796","https://openalex.org/I4210154486","https://openalex.org/I4210155236"]},{"id":"https://openalex.org/I4210155236","display_name":"National Research Council","ror":"https://ror.org/04zaypm56","country_code":"IT","type":"nonprofit","lineage":["https://openalex.org/I4210155236"]},{"id":"https://openalex.org/I93860229","display_name":"Politecnico di Milano","ror":"https://ror.org/01nffqt88","country_code":"IT","type":"education","lineage":["https://openalex.org/I93860229"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"David Dellasega","raw_affiliation_strings":["Dipartimento di Energia, Politecnico di Milano 3 , Via Ponzio 34/3, 20133 Milano, Italy","Istituto di Fisica del Plasma, Consiglio Nazionale delle Ricerche, EURATOM-ENEA-CNR Association 2 , Via R. Cozzi 53, 20125 Milano, Italy"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Dipartimento di Energia, Politecnico di Milano 3 , Via Ponzio 34/3, 20133 Milano, Italy","institution_ids":["https://openalex.org/I93860229"]},{"raw_affiliation_string":"Istituto di Fisica del Plasma, Consiglio Nazionale delle Ricerche, EURATOM-ENEA-CNR Association 2 , Via R. Cozzi 53, 20125 Milano, Italy","institution_ids":["https://openalex.org/I110120368","https://openalex.org/I4210128796","https://openalex.org/I4210155236"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5040204479","display_name":"Roberto Caniello","orcid":"https://orcid.org/0000-0003-1479-2793","observed_orcids":["https://orcid.org/0000-0003-1479-2793"]},"institutions":[{"id":"https://openalex.org/I110120368","display_name":"National Agency for New Technologies, Energy and Sustainable Economic Development","ror":"https://ror.org/02an8es95","country_code":"IT","type":"government","lineage":["https://openalex.org/I110120368"]},{"id":"https://openalex.org/I4210128796","display_name":"Institute of Plasma Physics","ror":"https://ror.org/02n2bgz18","country_code":"IT","type":"facility","lineage":["https://openalex.org/I4210128796","https://openalex.org/I4210154486","https://openalex.org/I4210155236"]},{"id":"https://openalex.org/I4210155236","display_name":"National Research Council","ror":"https://ror.org/04zaypm56","country_code":"IT","type":"nonprofit","lineage":["https://openalex.org/I4210155236"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Roberto Caniello","raw_affiliation_strings":["Istituto di Fisica del Plasma, Consiglio Nazionale delle Ricerche, EURATOM-ENEA-CNR Association 2 , Via R. Cozzi 53, 20125 Milano, Italy"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Istituto di Fisica del Plasma, Consiglio Nazionale delle Ricerche, EURATOM-ENEA-CNR Association 2 , Via R. Cozzi 53, 20125 Milano, Italy","institution_ids":["https://openalex.org/I110120368","https://openalex.org/I4210128796","https://openalex.org/I4210155236"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5073261020","display_name":"Giovanni Grosso","orcid":"https://orcid.org/0009-0003-6695-152X","observed_orcids":["https://orcid.org/0009-0003-6695-152X","https://orcid.org/0000-0002-3737-2444"]},"institutions":[{"id":"https://openalex.org/I110120368","display_name":"National Agency for New Technologies, Energy and Sustainable Economic Development","ror":"https://ror.org/02an8es95","country_code":"IT","type":"government","lineage":["https://openalex.org/I110120368"]},{"id":"https://openalex.org/I4210128796","display_name":"Institute of Plasma Physics","ror":"https://ror.org/02n2bgz18","country_code":"IT","type":"facility","lineage":["https://openalex.org/I4210128796","https://openalex.org/I4210154486","https://openalex.org/I4210155236"]},{"id":"https://openalex.org/I4210155236","display_name":"National Research Council","ror":"https://ror.org/04zaypm56","country_code":"IT","type":"nonprofit","lineage":["https://openalex.org/I4210155236"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Giovanni Grosso","raw_affiliation_strings":["Istituto di Fisica del Plasma, Consiglio Nazionale delle Ricerche, EURATOM-ENEA-CNR Association 2 , Via R. Cozzi 53, 20125 Milano, Italy"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Istituto di Fisica del Plasma, Consiglio Nazionale delle Ricerche, EURATOM-ENEA-CNR Association 2 , Via R. Cozzi 53, 20125 Milano, Italy","institution_ids":["https://openalex.org/I110120368","https://openalex.org/I4210128796","https://openalex.org/I4210155236"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":5,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":{"value":3500,"currency":"USD","value_usd":3500},"apc_paid":null,"fwci":0.6065,"has_fulltext":false,"cited_by_count":5,"citation_normalized_percentile":{"value":0.70951326,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":96},"biblio":{"volume":"112","issue":"12","first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10781","display_name":"Low-Pressure Plasma Processing and Diagnostics","score":0.8628000020980835,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10781","display_name":"Low-Pressure Plasma Processing and Diagnostics","score":0.8628000020980835,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10642","display_name":"Atmospheric-Pressure Plasma Applications","score":0.09269999712705612,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12077","display_name":"Vacuum and Plasma Arcs","score":0.039500001817941666,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/cathode-erosion","display_name":"cathode erosion","score":0.847000002861023},{"id":"https://openalex.org/keywords/microplasma-jet","display_name":"microplasma jet","score":0.8600000143051147},{"id":"https://openalex.org/keywords/cathode-geometry","display_name":"cathode geometry","score":0.8479999899864197},{"id":"https://openalex.org/keywords/hydrogen-contamination","display_name":"hydrogen contamination","score":0.4230000078678131},{"id":"https://openalex.org/keywords/electric-field-simulation","display_name":"electric field simulation","score":0.6129999756813049},{"id":"https://openalex.org/keywords/ion-acceleration","display_name":"ion acceleration","score":0.9279999732971191},{"id":"https://openalex.org/keywords/hollow-cathode-discharge","display_name":"hollow cathode discharge","score":0.8849999904632568},{"id":"https://openalex.org/keywords/deposition-quality","display_name":"deposition quality","score":0.5519999861717224}],"concepts":[{"id":"https://openalex.org/C49110097","wikidata":"https://www.wikidata.org/wiki/Q175233","display_name":"Cathode","level":2,"score":0.9515609741210938},{"id":"https://openalex.org/C70420769","wikidata":"https://www.wikidata.org/wiki/Q6839915","display_name":"Microplasma","level":3,"score":0.7802013158798218},{"id":"https://openalex.org/C119947313","wikidata":"https://www.wikidata.org/wiki/Q5596635","display_name":"Jet (fluid)","level":2,"score":0.5883570909500122},{"id":"https://openalex.org/C64297162","wikidata":"https://www.wikidata.org/wiki/Q1987070","display_name":"Deposition (geology)","level":3,"score":0.5675773620605469},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5268981456756592},{"id":"https://openalex.org/C207437497","wikidata":"https://www.wikidata.org/wiki/Q814902","display_name":"Cold cathode","level":3,"score":0.4984915256500244},{"id":"https://openalex.org/C26771246","wikidata":"https://www.wikidata.org/wiki/Q321095","display_name":"Scanning electron microscope","level":2,"score":0.45118340849876404},{"id":"https://openalex.org/C100460472","wikidata":"https://www.wikidata.org/wiki/Q2368605","display_name":"Etching (microfabrication)","level":3,"score":0.4489594101905823},{"id":"https://openalex.org/C47645306","wikidata":"https://www.wikidata.org/wiki/Q1365473","display_name":"Hot cathode","level":3,"score":0.44204413890838623},{"id":"https://openalex.org/C82706917","wikidata":"https://www.wikidata.org/wiki/Q10251","display_name":"Plasma","level":2,"score":0.40651702880859375},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.3898366391658783},{"id":"https://openalex.org/C184779094","wikidata":"https://www.wikidata.org/wiki/Q26383","display_name":"Atomic physics","level":1,"score":0.3770284652709961},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.3604997992515564},{"id":"https://openalex.org/C2524010","wikidata":"https://www.wikidata.org/wiki/Q8087","display_name":"Geometry","level":1,"score":0.3557799458503723},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.3505488336086273},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.21318116784095764},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.10520496964454651},{"id":"https://openalex.org/C57879066","wikidata":"https://www.wikidata.org/wiki/Q41217","display_name":"Mechanics","level":1,"score":0.09841153025627136},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0},{"id":"https://openalex.org/C147789679","wikidata":"https://www.wikidata.org/wiki/Q11372","display_name":"Physical chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.0},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.0},{"id":"https://openalex.org/C2816523","wikidata":"https://www.wikidata.org/wiki/Q180184","display_name":"Sediment","level":2,"score":0.0},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.0},{"id":"https://openalex.org/C151730666","wikidata":"https://www.wikidata.org/wiki/Q7205","display_name":"Paleontology","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1063/1.4771876","doi":"https://doi.org/10.1063/1.4771876","is_oa":false,"landing_page_url":"https://doi.org/10.1063/1.4771876","pdf_url":null,"source":{"id":"https://openalex.org/S187991544","display_name":"Journal of Applied Physics","issn_l":"0021-8979","issn":["0021-8979","1089-7550","1520-8850"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-d","jufo-1","norway-1","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Applied Physics","raw_type":"journal-article"},{"id":"pmh:oai:re.public.polimi.it:11311/702726","doi":null,"is_oa":false,"landing_page_url":"http://hdl.handle.net/11311/702726","pdf_url":null,"source":{"id":"https://openalex.org/S4306400312","display_name":"Virtual Community of Pathological Anatomy (University of Castilla La Mancha)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I79189158","host_organization_name":"University of Castilla-La Mancha","host_organization_lineage":["https://openalex.org/I79189158"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"info:eu-repo/semantics/article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":10,"referenced_works":["https://openalex.org/W1980127507","https://openalex.org/W1982396512","https://openalex.org/W1993791819","https://openalex.org/W2009651970","https://openalex.org/W2034493383","https://openalex.org/W2039288457","https://openalex.org/W2104196199","https://openalex.org/W2134720555","https://openalex.org/W2134804715","https://openalex.org/W2164987815"],"related_works":["https://openalex.org/W2292953279","https://openalex.org/W1998892160","https://openalex.org/W1979880358","https://openalex.org/W2152690702","https://openalex.org/W4313350221","https://openalex.org/W335079265","https://openalex.org/W2050512635","https://openalex.org/W2005404625","https://openalex.org/W1988888804","https://openalex.org/W2024666448"],"abstract_inverted_index":{"Microplasma":[0],"jets":[1],"are":[2,95],"now":[3],"widely":[4],"used":[5],"for":[6,28,158],"deposition,":[7],"etching,":[8],"and":[9,60,71],"materials":[10],"processing.":[11],"The":[12,36],"present":[13,82,143],"study":[14],"focuses":[15],"on":[16,25,45],"the":[17,20,41,50,113,117,122,133,142,148,159,166,183,186,189],"investigation":[18,144],"of":[19,22,43,49,112,121,150,168,176,185],"influence":[21,42],"cathode":[23,56,81,86,94,118,135,170,191],"geometry":[24,161,192],"deposition":[26,31],"quality,":[27],"microplasma":[29],"jet":[30],"systems":[32],"in":[33,137,179],"low":[34],"vacuum.":[35],"interest":[37],"here":[38],"is":[39,130,156,193],"understanding":[40],"hydrogen":[44],"sputtering":[46],"and/or":[47],"evaporation":[48],"electrodes.":[51],"Samples":[52,76],"obtained":[53,77,90],"with":[54,58,78,91],"two":[55],"geometries":[57],"tapered":[59,123],"rectangular":[61,160,190],"cross-sections":[62],"have":[63],"been":[64],"investigated":[65],"experimentally":[66],"by":[67,104],"scanning":[68],"electron":[69],"microscopy":[70],"energy":[72],"dispersion":[73],"X-ray":[74],"spectroscopy.":[75],"a":[79,92,108,126,173],"tapered-geometry":[80],"heavy":[83],"contamination,":[84],"demonstrating":[85],"erosion,":[87],"while":[88],"samples":[89],"rectangular-cross-section":[93],"free":[96],"from":[97,141],"contamination.":[98],"These":[99],"experimental":[100],"characteristics":[101],"were":[102],"explained":[103],"modelling":[105],"results":[106],"showing":[107],"larger":[109,157],"radial":[110,151],"component":[111],"electric":[114],"field":[115,154],"at":[116],"inner":[119],"wall":[120],"cathode.":[124],"As":[125],"result,":[127],"ion":[128],"acceleration":[129],"larger,":[131],"explaining":[132,165],"observed":[134,178],"erosion":[136],"this":[138,180],"case.":[139,181],"Results":[140],"also":[145],"show":[146],"that":[147],"ratio":[149],"to":[152,195,199],"axial":[153],"components":[155],"case,":[162],"thus,":[163],"qualitatively":[164],"presence":[167],"micro-hollow":[169],"discharge":[171],"over":[172],"wide":[174],"range":[175],"currents":[177],"In":[182],"light":[184],"above":[187],"findings,":[188],"considered":[194],"be":[196],"more":[197],"effective":[198],"achieve":[200],"cleaner":[201],"deposition.":[202]},"counts_by_year":[{"year":2017,"cited_by_count":1},{"year":2016,"cited_by_count":1},{"year":2015,"cited_by_count":1},{"year":2014,"cited_by_count":2}],"updated_date":"2026-10-10T09:11:00.788812","created_date":"2016-06-24T00:00:00"}