{"id":"https://openalex.org/W2004223352","doi":"https://doi.org/10.1016/0168-583x(93)96182-c","title":"In situ detection of rearrangement processes during electron beam annealing of ion implanted InP","display_name":"In situ detection of rearrangement processes during electron beam annealing of ion implanted InP","publication_year":1993,"publication_date":"1993-06-01","ids":{"openalex":"https://openalex.org/W2004223352","doi":"https://doi.org/10.1016/0168-583x(93)96182-c","mag":"2004223352"},"language":"en","primary_location":{"id":"doi:10.1016/0168-583x(93)96182-c","doi":"https://doi.org/10.1016/0168-583x(93)96182-c","is_oa":false,"landing_page_url":"https://doi.org/10.1016/0168-583x(93)96182-c","pdf_url":null,"source":{"id":"https://openalex.org/S113542562","display_name":"Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms","issn_l":"0168-583X","issn":["0168-583X","1872-9584"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-b","jufo-2","ki-jl-1","norway-1","poland-70","russia-white-list-2","vabb-shw"],"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":null,"display_name":"C. Maurer","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I114090438","display_name":"Goethe University Frankfurt","ror":"https://ror.org/04cvxnb49","country_code":"DE","type":"education","lineage":["https://openalex.org/I114090438"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"C. Maurer","raw_affiliation_strings":["Institut f\u00fcr Kernphysik, Johann Wolfgang Goethe-Universit\u00e4t, August Euler-Str. 6, D-6000 Frankfurt am Main, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institut f\u00fcr Kernphysik, Johann Wolfgang Goethe-Universit\u00e4t, August Euler-Str. 6, D-6000 Frankfurt am Main, Germany","institution_ids":["https://openalex.org/I114090438"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5026586679","display_name":"R. Kallweit","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I2802562207","display_name":"Deutsche Bundespost","ror":"https://ror.org/0150tj573","country_code":"DE","type":"government","lineage":["https://openalex.org/I2802562207"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"R. Kallweit","raw_affiliation_strings":["Forschungsinstitut der Deutschen Bundespost Telekom, Postfach 100003, D-6100 Darmstadt, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Forschungsinstitut der Deutschen Bundespost Telekom, Postfach 100003, D-6100 Darmstadt, Germany","institution_ids":["https://openalex.org/I2802562207"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5082521634","display_name":"H. Baumann","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I114090438","display_name":"Goethe University Frankfurt","ror":"https://ror.org/04cvxnb49","country_code":"DE","type":"education","lineage":["https://openalex.org/I114090438"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"H. Baumann","raw_affiliation_strings":["Institut f\u00fcr Kernphysik, Johann Wolfgang Goethe-Universit\u00e4t, August Euler-Str. 6, D-6000 Frankfurt am Main, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institut f\u00fcr Kernphysik, Johann Wolfgang Goethe-Universit\u00e4t, August Euler-Str. 6, D-6000 Frankfurt am Main, Germany","institution_ids":["https://openalex.org/I114090438"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5044289180","display_name":"\u039a. Bethge","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I114090438","display_name":"Goethe University Frankfurt","ror":"https://ror.org/04cvxnb49","country_code":"DE","type":"education","lineage":["https://openalex.org/I114090438"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"K. Bethge","raw_affiliation_strings":["Institut f\u00fcr Kernphysik, Johann Wolfgang Goethe-Universit\u00e4t, August Euler-Str. 6, D-6000 Frankfurt am Main, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institut f\u00fcr Kernphysik, Johann Wolfgang Goethe-Universit\u00e4t, August Euler-Str. 6, D-6000 Frankfurt am Main, Germany","institution_ids":["https://openalex.org/I114090438"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5113620389","display_name":"E. F. Krimmel","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I114090438","display_name":"Goethe University Frankfurt","ror":"https://ror.org/04cvxnb49","country_code":"DE","type":"education","lineage":["https://openalex.org/I114090438"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"E.F. Krimmel","raw_affiliation_strings":["Institut f\u00fcr Kernphysik, Johann Wolfgang Goethe-Universit\u00e4t, August Euler-Str. 6, D-6000 Frankfurt am Main, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institut f\u00fcr Kernphysik, Johann Wolfgang Goethe-Universit\u00e4t, August Euler-Str. 6, D-6000 Frankfurt am Main, Germany","institution_ids":["https://openalex.org/I114090438"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":{"value":2810,"currency":"USD","value_usd":2810},"apc_paid":null,"fwci":3.8274,"has_fulltext":false,"cited_by_count":29,"citation_normalized_percentile":{"value":0.94195702,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":null,"biblio":{"volume":"80-81","issue":null,"first_page":"564","last_page":"568"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11853","display_name":"Semiconductor materials and interfaces","score":0.5996000170707703,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11853","display_name":"Semiconductor materials and interfaces","score":0.5996000170707703,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12166","display_name":"Ion-surface interactions and analysis","score":0.37040001153945923,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.01640000008046627,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/electron-beam-annealing","display_name":"electron beam annealing","score":0.9490000009536743},{"id":"https://openalex.org/keywords/ion-implantation","display_name":"ion implantation","score":0.9559999704360962},{"id":"https://openalex.org/keywords/indium-phosphide","display_name":"indium phosphide","score":0.9570000171661377},{"id":"https://openalex.org/keywords/in-situ-detection","display_name":"in situ detection","score":0.7350000143051147},{"id":"https://openalex.org/keywords/thermal-radiation","display_name":"thermal radiation","score":0.6800000071525574},{"id":"https://openalex.org/keywords/surface-structure","display_name":"surface structure","score":0.5149999856948853},{"id":"https://openalex.org/keywords/carrier-concentration","display_name":"carrier concentration","score":0.9589999914169312},{"id":"https://openalex.org/keywords/phosphorus-diffusion","display_name":"phosphorus diffusion","score":0.7889999747276306},{"id":"https://openalex.org/keywords/phosphorus-activation","display_name":"phosphorus activation","score":0.9020000100135803},{"id":"https://openalex.org/keywords/semi-insulating-inp","display_name":"semi-insulating InP","score":0.6859999895095825},{"id":"https://openalex.org/keywords/magnesium-implantation","display_name":"magnesium implantation","score":0.8500000238418579}],"concepts":[{"id":"https://openalex.org/C41823505","wikidata":"https://www.wikidata.org/wiki/Q1436752","display_name":"Ion implantation","level":3,"score":0.7897171378135681},{"id":"https://openalex.org/C2777855556","wikidata":"https://www.wikidata.org/wiki/Q4339544","display_name":"Annealing (glass)","level":2,"score":0.7606841921806335},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6398656964302063},{"id":"https://openalex.org/C50774322","wikidata":"https://www.wikidata.org/wiki/Q644248","display_name":"Ion beam","level":3,"score":0.5968239903450012},{"id":"https://openalex.org/C207948433","wikidata":"https://www.wikidata.org/wiki/Q685487","display_name":"Tempering","level":2,"score":0.561459481716156},{"id":"https://openalex.org/C111337013","wikidata":"https://www.wikidata.org/wiki/Q2737837","display_name":"Irradiation","level":2,"score":0.5516034364700317},{"id":"https://openalex.org/C71987851","wikidata":"https://www.wikidata.org/wiki/Q7216430","display_name":"Impurity","level":2,"score":0.5286691188812256},{"id":"https://openalex.org/C105163801","wikidata":"https://www.wikidata.org/wiki/Q12103748","display_name":"Electron beam processing","level":3,"score":0.5170900821685791},{"id":"https://openalex.org/C145148216","wikidata":"https://www.wikidata.org/wiki/Q36496","display_name":"Ion","level":2,"score":0.5040677785873413},{"id":"https://openalex.org/C95312477","wikidata":"https://www.wikidata.org/wiki/Q207340","display_name":"Cathode ray","level":3,"score":0.466594934463501},{"id":"https://openalex.org/C108225325","wikidata":"https://www.wikidata.org/wiki/Q11456","display_name":"Semiconductor","level":2,"score":0.46460646390914917},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.4425842761993408},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.409845769405365},{"id":"https://openalex.org/C147120987","wikidata":"https://www.wikidata.org/wiki/Q2225","display_name":"Electron","level":2,"score":0.38589614629745483},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.26184138655662537},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.07441762089729309},{"id":"https://openalex.org/C185544564","wikidata":"https://www.wikidata.org/wiki/Q81197","display_name":"Nuclear physics","level":1,"score":0.06748834252357483},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1016/0168-583x(93)96182-c","doi":"https://doi.org/10.1016/0168-583x(93)96182-c","is_oa":false,"landing_page_url":"https://doi.org/10.1016/0168-583x(93)96182-c","pdf_url":null,"source":{"id":"https://openalex.org/S113542562","display_name":"Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms","issn_l":"0168-583X","issn":["0168-583X","1872-9584"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-b","jufo-2","ki-jl-1","norway-1","poland-70","russia-white-list-2","vabb-shw"],"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":4,"referenced_works":["https://openalex.org/W653408234","https://openalex.org/W2015331973","https://openalex.org/W2470290615","https://openalex.org/W3197160344"],"related_works":["https://openalex.org/W1671304764","https://openalex.org/W14426518","https://openalex.org/W2090573424","https://openalex.org/W2069279760","https://openalex.org/W2173132733","https://openalex.org/W2126142700","https://openalex.org/W2056886840","https://openalex.org/W2099117425","https://openalex.org/W2013192037","https://openalex.org/W2329486553"],"abstract_inverted_index":null,"counts_by_year":[],"updated_date":"2026-09-29T14:09:16.559479","created_date":"2016-06-24T00:00:00"}