{"id":"https://openalex.org/W2003764675","doi":"https://doi.org/10.1063/1.4704144","title":"Hydrodynamic loading and viscous damping of patterned perforations on microfabricated resonant structures","display_name":"Hydrodynamic loading and viscous damping of patterned perforations on microfabricated resonant structures","publication_year":2012,"publication_date":"2012-04-09","ids":{"openalex":"https://openalex.org/W2003764675","doi":"https://doi.org/10.1063/1.4704144","mag":"2003764675"},"language":"en","primary_location":{"id":"doi:10.1063/1.4704144","doi":"https://doi.org/10.1063/1.4704144","is_oa":false,"landing_page_url":"https://doi.org/10.1063/1.4704144","pdf_url":null,"source":{"id":"https://openalex.org/S105243760","display_name":"Applied Physics Letters","issn_l":"0003-6951","issn":["0003-6951","1077-3118","1520-8842"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-a","jufo-3","ki-jl-1","norway-2","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Applied Physics Letters","raw_type":"journal-article"},"volume":null,"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5064296640","display_name":"Kidong Park","orcid":"https://orcid.org/0000-0003-1046-4645","observed_orcids":["https://orcid.org/0000-0003-1046-4645"]},"institutions":[{"id":"https://openalex.org/I157725225","display_name":"University of Illinois Urbana-Champaign","ror":"https://ror.org/047426m28","country_code":"US","type":"education","lineage":["https://openalex.org/I157725225"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Kidong Park","raw_affiliation_strings":["University of Illinois at Urbana-Champaign 1 Department of Electrical and Computer Engineering, , Urbana, Illinois 61801, USA","University of Illinois at Urbana-Champaign 2 Micro and Nanotechnology Laboratory, , Urbana, Illinois 61801, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"University of Illinois at Urbana-Champaign 1 Department of Electrical and Computer Engineering, , Urbana, Illinois 61801, USA","institution_ids":["https://openalex.org/I157725225"]},{"raw_affiliation_string":"University of Illinois at Urbana-Champaign 2 Micro and Nanotechnology Laboratory, , Urbana, Illinois 61801, USA","institution_ids":["https://openalex.org/I157725225"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5068580881","display_name":"Jiwook Shim","orcid":"https://orcid.org/0000-0003-4088-2557","observed_orcids":["https://orcid.org/0000-0003-4088-2557"]},"institutions":[{"id":"https://openalex.org/I157725225","display_name":"University of Illinois Urbana-Champaign","ror":"https://ror.org/047426m28","country_code":"US","type":"education","lineage":["https://openalex.org/I157725225"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Jiwook Shim","raw_affiliation_strings":["University of Illinois at Urbana-Champaign 1 Department of Electrical and Computer Engineering, , Urbana, Illinois 61801, USA","University of Illinois at Urbana-Champaign 2 Micro and Nanotechnology Laboratory, , Urbana, Illinois 61801, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"University of Illinois at Urbana-Champaign 1 Department of Electrical and Computer Engineering, , Urbana, Illinois 61801, USA","institution_ids":["https://openalex.org/I157725225"]},{"raw_affiliation_string":"University of Illinois at Urbana-Champaign 2 Micro and Nanotechnology Laboratory, , Urbana, Illinois 61801, USA","institution_ids":["https://openalex.org/I157725225"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5072064478","display_name":"Vita Solovyeva","orcid":"https://orcid.org/0009-0008-6499-467X","observed_orcids":["https://orcid.org/0009-0008-6499-467X"]},"institutions":[{"id":"https://openalex.org/I157725225","display_name":"University of Illinois Urbana-Champaign","ror":"https://ror.org/047426m28","country_code":"US","type":"education","lineage":["https://openalex.org/I157725225"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Vita Solovyeva","raw_affiliation_strings":["University of Illinois at Urbana-Champaign 1 Department of Electrical and Computer Engineering, , Urbana, Illinois 61801, USA","University of Illinois at Urbana-Champaign 2 Micro and Nanotechnology Laboratory, , Urbana, Illinois 61801, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"University of Illinois at Urbana-Champaign 1 Department of Electrical and Computer Engineering, , Urbana, Illinois 61801, USA","institution_ids":["https://openalex.org/I157725225"]},{"raw_affiliation_string":"University of Illinois at Urbana-Champaign 2 Micro and Nanotechnology Laboratory, , Urbana, Illinois 61801, USA","institution_ids":["https://openalex.org/I157725225"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5066493672","display_name":"Elise A. Corbin","orcid":"https://orcid.org/0000-0003-2373-0420","observed_orcids":["https://orcid.org/0000-0003-2373-0420"]},"institutions":[{"id":"https://openalex.org/I157725225","display_name":"University of Illinois Urbana-Champaign","ror":"https://ror.org/047426m28","country_code":"US","type":"education","lineage":["https://openalex.org/I157725225"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Elise Corbin","raw_affiliation_strings":["University of Illinois at Urbana-Champaign 2 Micro and Nanotechnology Laboratory, , Urbana, Illinois 61801, USA","University of Illinois at Urbana-Champaign 3 Department of Mechanical Science and Engineering, , Urbana, Illinois 61801, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"University of Illinois at Urbana-Champaign 2 Micro and Nanotechnology Laboratory, , Urbana, Illinois 61801, USA","institution_ids":["https://openalex.org/I157725225"]},{"raw_affiliation_string":"University of Illinois at Urbana-Champaign 3 Department of Mechanical Science and Engineering, , Urbana, Illinois 61801, USA","institution_ids":["https://openalex.org/I157725225"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5051930107","display_name":"Shouvik Banerjee","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I157725225","display_name":"University of Illinois Urbana-Champaign","ror":"https://ror.org/047426m28","country_code":"US","type":"education","lineage":["https://openalex.org/I157725225"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Shouvik Banerjee","raw_affiliation_strings":["University of Illinois at Urbana-Champaign 2 Micro and Nanotechnology Laboratory, , Urbana, Illinois 61801, USA","University of Illinois at Urbana-Champaign 4 Department of Material Science and Engineering, , Urbana, Illinois 61801, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"University of Illinois at Urbana-Champaign 2 Micro and Nanotechnology Laboratory, , Urbana, Illinois 61801, USA","institution_ids":["https://openalex.org/I157725225"]},{"raw_affiliation_string":"University of Illinois at Urbana-Champaign 4 Department of Material Science and Engineering, , Urbana, Illinois 61801, USA","institution_ids":["https://openalex.org/I157725225"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5050715203","display_name":"Rashid Bashir","orcid":"https://orcid.org/0000-0002-7225-9180","observed_orcids":["https://orcid.org/0000-0002-7225-9180"]},"institutions":[{"id":"https://openalex.org/I157725225","display_name":"University of Illinois Urbana-Champaign","ror":"https://ror.org/047426m28","country_code":"US","type":"education","lineage":["https://openalex.org/I157725225"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Rashid Bashir","raw_affiliation_strings":["University of Illinois at Urbana-Champaign 1 Department of Electrical and Computer Engineering, , Urbana, Illinois 61801, USA","University of Illinois at Urbana-Champaign 2 Micro and Nanotechnology Laboratory, , Urbana, Illinois 61801, USA","University of Illinois at Urbana-Champaign 5 Department of Bioengineering, , Urbana, Illinois 61801, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"University of Illinois at Urbana-Champaign 1 Department of Electrical and Computer Engineering, , Urbana, Illinois 61801, USA","institution_ids":["https://openalex.org/I157725225"]},{"raw_affiliation_string":"University of Illinois at Urbana-Champaign 2 Micro and Nanotechnology Laboratory, , Urbana, Illinois 61801, USA","institution_ids":["https://openalex.org/I157725225"]},{"raw_affiliation_string":"University of Illinois at Urbana-Champaign 5 Department of Bioengineering, , Urbana, Illinois 61801, USA","institution_ids":["https://openalex.org/I157725225"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I157725225"],"apc_list":null,"apc_paid":null,"fwci":1.0225,"has_fulltext":false,"cited_by_count":8,"citation_normalized_percentile":{"value":0.78088401,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":97},"biblio":{"volume":"100","issue":"15","first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9922000169754028,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9922000169754028,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.003000000026077032,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.0008999999845400453,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/hydrodynamic-forces","display_name":"hydrodynamic forces","score":0.9539999961853027},{"id":"https://openalex.org/keywords/viscous-damping","display_name":"viscous damping","score":0.9990000128746033},{"id":"https://openalex.org/keywords/perforated-panels","display_name":"perforated plates","score":0.8899999856948853},{"id":"https://openalex.org/keywords/resonant-frequency","display_name":"resonant frequency","score":0.7379999756813049},{"id":"https://openalex.org/keywords/quality-factor","display_name":"quality factor","score":0.9990000128746033},{"id":"https://openalex.org/keywords/added-mass","display_name":"added mass","score":0.5870000123977661},{"id":"https://openalex.org/keywords/fluid-viscosity","display_name":"fluid viscosity","score":0.671999990940094},{"id":"https://openalex.org/keywords/focused-ion-beam-patterning","display_name":"focused ion beam patterning","score":0.8650000095367432},{"id":"https://openalex.org/keywords/fluid-structure-interaction","display_name":"fluid-structure interaction","score":0.5950000286102295}],"concepts":[{"id":"https://openalex.org/C2989485891","wikidata":"https://www.wikidata.org/wiki/Q56291844","display_name":"Viscous damping","level":3,"score":0.6155853271484375},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5845153331756592},{"id":"https://openalex.org/C57879066","wikidata":"https://www.wikidata.org/wiki/Q41217","display_name":"Mechanics","level":1,"score":0.45781296491622925},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.3937353193759918},{"id":"https://openalex.org/C198394728","wikidata":"https://www.wikidata.org/wiki/Q3695508","display_name":"Vibration","level":2,"score":0.359172523021698},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.287417471408844},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.221734881401062}],"mesh":[],"locations_count":4,"locations":[{"id":"doi:10.1063/1.4704144","doi":"https://doi.org/10.1063/1.4704144","is_oa":false,"landing_page_url":"https://doi.org/10.1063/1.4704144","pdf_url":null,"source":{"id":"https://openalex.org/S105243760","display_name":"Applied Physics Letters","issn_l":"0003-6951","issn":["0003-6951","1077-3118","1520-8842"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-a","jufo-3","ki-jl-1","norway-2","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Applied Physics Letters","raw_type":"journal-article"},{"id":"pmh:oai:digitalcommons.lsu.edu:eecs_pubs-2155","doi":null,"is_oa":false,"landing_page_url":"https://digitalcommons.lsu.edu/eecs_pubs/1153","pdf_url":null,"source":{"id":"https://openalex.org/S4210169993","display_name":"Civil War Book Review","issn_l":"1528-6592","issn":["1528-6592"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/P4310315936","host_organization_name":"Louisiana State University","host_organization_lineage":["https://openalex.org/P4310315936"],"host_organization_lineage_names":["Louisiana State University"],"type":"journal"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Faculty Publications","raw_type":"text"},{"id":"pmh:oai:repository.lsu.edu:eecs_pubs-2155","doi":null,"is_oa":false,"landing_page_url":"https://repository.lsu.edu/eecs_pubs/1153","pdf_url":null,"source":{"id":"https://openalex.org/S4210169993","display_name":"Civil War Book Review","issn_l":"1528-6592","issn":["1528-6592"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/P4310315936","host_organization_name":"Louisiana State University","host_organization_lineage":["https://openalex.org/P4310315936"],"host_organization_lineage_names":["Louisiana State University"],"type":"journal"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Faculty Publications","raw_type":"text"},{"id":"pmh:oai:sdu.dk:openaire_cris_publications/59bbfd1a-0251-441f-980d-f4af1638c198","doi":null,"is_oa":false,"landing_page_url":"http://www.scopus.com/inward/record.url?scp=84859805897&partnerID=8YFLogxK","pdf_url":null,"source":{"id":"https://openalex.org/S4306400423","display_name":"University of Southern Denmark Research Portal (University of Southern Denmark)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I177969490","host_organization_name":"University of Southern Denmark","host_organization_lineage":["https://openalex.org/I177969490"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Park, K, Shim, J, Solovyeva, V, Corbin, E, Banerjee, S & Bashir, R 2012, 'Hydrodynamic loading and viscous damping of patterned perforations on microfabricated resonant structures', Applied Physics Letters, vol. 100, no. 15. https://doi.org/10.1063/1.4704144","raw_type":"info:eu-repo/semantics/article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":24,"referenced_works":["https://openalex.org/W2003766830","https://openalex.org/W2006867930","https://openalex.org/W2019203060","https://openalex.org/W2023401067","https://openalex.org/W2028969753","https://openalex.org/W2037838910","https://openalex.org/W2041406399","https://openalex.org/W2043446744","https://openalex.org/W2045627722","https://openalex.org/W2062327827","https://openalex.org/W2066755978","https://openalex.org/W2067965740","https://openalex.org/W2084403547","https://openalex.org/W2096500209","https://openalex.org/W2107701846","https://openalex.org/W2123459197","https://openalex.org/W2129434196","https://openalex.org/W2130723482","https://openalex.org/W2132905138","https://openalex.org/W2138308932","https://openalex.org/W2146831098","https://openalex.org/W2153009750","https://openalex.org/W2160337667","https://openalex.org/W3023079725"],"related_works":["https://openalex.org/W2093502651","https://openalex.org/W2299642405","https://openalex.org/W2050464484","https://openalex.org/W2116288835","https://openalex.org/W2603112016","https://openalex.org/W2128608809","https://openalex.org/W2787216255","https://openalex.org/W4386133819","https://openalex.org/W4223411509","https://openalex.org/W2044831963"],"abstract_inverted_index":{"We":[0],"examined":[1],"the":[2,50,55,63,71,88,94,100],"hydrodynamic":[3,35],"loading":[4,36],"of":[5,37,70,73,75,90,102],"vertically":[6],"resonating":[7],"microfabricated":[8],"plates":[9],"immersed":[10],"in":[11],"liquids":[12],"with":[13,21,28,54,83],"different":[14],"viscosities.":[15],"The":[16,34,78],"planar":[17],"structures":[18,92],"were":[19],"patterned":[20],"focused":[22],"ion":[23],"beam,":[24],"perforating":[25],"various":[26,38],"shapes":[27],"identical":[29],"area":[30],"but":[31],"varying":[32],"perimeters.":[33],"geometries":[39],"was":[40,66],"characterized":[41],"from":[42],"resonant":[43],"frequency":[44],"and":[45,85],"quality":[46],"factor.":[47],"In":[48],"water,":[49],"damping":[51],"increased":[52],"linearly":[53],"perimeter":[56],"at":[57],"45.4":[58],"\u00d7":[59],"10\u22123":[60],"Ns/m2,":[61],"until":[62],"perforation\u2019s":[64,95],"radius":[65,96],"123%":[67],"\u00b1":[68],"13%":[69],"depth":[72,101],"penetration":[74],"fluid\u2019s":[76],"oscillation.":[77],"added":[79],"mass":[80],"effect":[81],"decreased":[82],"perforations":[84],"recovered":[86],"to":[87],"level":[89],"un-perforated":[91],"when":[93],"became":[97],"smaller":[98],"than":[99],"penetration.":[103]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2016,"cited_by_count":2},{"year":2014,"cited_by_count":2},{"year":2013,"cited_by_count":3}],"updated_date":"2026-09-26T08:19:03.415552","created_date":"2016-06-24T00:00:00"}