{"id":"https://openalex.org/W2003707658","doi":"https://doi.org/10.1103/physrevb.60.13561","title":"Optical and electrical properties of doped amorphous silicon suboxides","display_name":"Optical and electrical properties of doped amorphous silicon suboxides","publication_year":1999,"publication_date":"1999-11-15","ids":{"openalex":"https://openalex.org/W2003707658","doi":"https://doi.org/10.1103/physrevb.60.13561","mag":"2003707658"},"language":"en","primary_location":{"id":"doi:10.1103/physrevb.60.13561","doi":"https://doi.org/10.1103/physrevb.60.13561","is_oa":false,"landing_page_url":"https://doi.org/10.1103/physrevb.60.13561","pdf_url":null,"source":{"id":"https://openalex.org/S4210174675","display_name":"Physical review. B, Condensed matter","issn_l":"0163-1829","issn":["0163-1829","1095-3795"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","ki-jl-2"],"host_organization":"https://openalex.org/P4310320261","host_organization_name":"American Physical Society","host_organization_lineage":["https://openalex.org/P4310320261"],"host_organization_lineage_names":["American Physical Society"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Physical Review B","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5111706879","display_name":"Rainer Janssen","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I62916508","display_name":"Technical University of Munich","ror":"https://ror.org/02kkvpp62","country_code":"DE","type":"education","lineage":["https://openalex.org/I62916508"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"R. Janssen","raw_affiliation_strings":["Walter Schottky Institute, Technical University of Munich, Am Coulombwall, D-85748 Garching, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Walter Schottky Institute, Technical University of Munich, Am Coulombwall, D-85748 Garching, Germany","institution_ids":["https://openalex.org/I62916508"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5008196118","display_name":"Andreas Janotta","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I62916508","display_name":"Technical University of Munich","ror":"https://ror.org/02kkvpp62","country_code":"DE","type":"education","lineage":["https://openalex.org/I62916508"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"A. Janotta","raw_affiliation_strings":["Walter Schottky Institute, Technical University of Munich, Am Coulombwall, D-85748 Garching, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Walter Schottky Institute, Technical University of Munich, Am Coulombwall, D-85748 Garching, Germany","institution_ids":["https://openalex.org/I62916508"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5055021194","display_name":"Doriana Dimova-Malinovska","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I24768866","display_name":"Bulgarian Academy of Sciences","ror":"https://ror.org/01x8hew03","country_code":"BG","type":"government","lineage":["https://openalex.org/I24768866"]},{"id":"https://openalex.org/I4210149724","display_name":"Central Laboratory of Solar Energy and New Energy Sources","ror":"https://ror.org/05c3m0811","country_code":"BG","type":"facility","lineage":["https://openalex.org/I24768866","https://openalex.org/I4210149724"]},{"id":"https://openalex.org/I62916508","display_name":"Technical University of Munich","ror":"https://ror.org/02kkvpp62","country_code":"DE","type":"education","lineage":["https://openalex.org/I62916508"]}],"countries":["BG","DE"],"is_corresponding":false,"raw_author_name":"D. Dimova-Malinovska","raw_affiliation_strings":["Walter Schottky Institute, Technical University of Munich, Am Coulombwall, D-85748 Garching, Germany","Central Laboratory for Solar Energy and New Energy Resources, Bulgarian Academy of Science, Tzarigradsko Chaussee 72, 1784 Sofia, Bulgaria"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Walter Schottky Institute, Technical University of Munich, Am Coulombwall, D-85748 Garching, Germany","institution_ids":["https://openalex.org/I62916508"]},{"raw_affiliation_string":"Central Laboratory for Solar Energy and New Energy Resources, Bulgarian Academy of Science, Tzarigradsko Chaussee 72, 1784 Sofia, Bulgaria","institution_ids":["https://openalex.org/I24768866","https://openalex.org/I4210149724"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5004139860","display_name":"M. Stutzmann","orcid":"https://orcid.org/0000-0002-0068-3505","observed_orcids":["https://orcid.org/0000-0002-0068-3505"]},"institutions":[{"id":"https://openalex.org/I62916508","display_name":"Technical University of Munich","ror":"https://ror.org/02kkvpp62","country_code":"DE","type":"education","lineage":["https://openalex.org/I62916508"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"M. Stutzmann","raw_affiliation_strings":["Walter Schottky Institute, Technical University of Munich, Am Coulombwall, D-85748 Garching, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Walter Schottky Institute, Technical University of Munich, Am Coulombwall, D-85748 Garching, Germany","institution_ids":["https://openalex.org/I62916508"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":3,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":3.4202,"has_fulltext":false,"cited_by_count":43,"citation_normalized_percentile":{"value":0.91494815,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":88,"max":97},"biblio":{"volume":"60","issue":"19","first_page":"13561","last_page":"13572"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10623","display_name":"Thin-Film Transistor Technologies","score":0.5874000191688538,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10623","display_name":"Thin-Film Transistor Technologies","score":0.5874000191688538,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10624","display_name":"Silicon and Solar Cell Technologies","score":0.3086000084877014,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11169","display_name":"Silicon Nanostructures and Photoluminescence","score":0.035100001841783524,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/hydrogenated-amorphous-silicon","display_name":"hydrogenated amorphous silicon","score":0.7739999890327454},{"id":"https://openalex.org/keywords/annealing","display_name":"annealing","score":0.7580000162124634},{"id":"https://openalex.org/keywords/p-type-doping","display_name":"p-type doping","score":0.8989999890327454},{"id":"https://openalex.org/keywords/n-type-doping","display_name":"n-type doping","score":1.0},{"id":"https://openalex.org/keywords/dopant-activation","display_name":"dopant activation","score":0.890999972820282},{"id":"https://openalex.org/keywords/dark-conductivity","display_name":"dark conductivity","score":0.7910000085830688},{"id":"https://openalex.org/keywords/optical-band-gap","display_name":"optical band gap","score":0.9649999737739563},{"id":"https://openalex.org/keywords/hydrogen-effusion","display_name":"hydrogen effusion","score":0.8809999823570251},{"id":"https://openalex.org/keywords/oxygen-concentration","display_name":"oxygen concentration","score":0.6589999794960022},{"id":"https://openalex.org/keywords/hydrogen-evolution-reaction","display_name":"hydrogen evolution reaction","score":0.5699999928474426},{"id":"https://openalex.org/keywords/amorphous-network-structure","display_name":"amorphous network structure","score":0.7440000176429749},{"id":"https://openalex.org/keywords/plasma-enhanced-chemical-vapor-deposition","display_name":"plasma-enhanced chemical vapor deposition","score":0.7919999957084656}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7269472479820251},{"id":"https://openalex.org/C56052488","wikidata":"https://www.wikidata.org/wiki/Q103382","display_name":"Amorphous solid","level":2,"score":0.6900169849395752},{"id":"https://openalex.org/C2780634616","wikidata":"https://www.wikidata.org/wiki/Q425366","display_name":"Suboxide","level":3,"score":0.6797382831573486},{"id":"https://openalex.org/C2777855556","wikidata":"https://www.wikidata.org/wiki/Q4339544","display_name":"Annealing (glass)","level":2,"score":0.6116615533828735},{"id":"https://openalex.org/C2776390347","wikidata":"https://www.wikidata.org/wiki/Q474163","display_name":"Amorphous silicon","level":4,"score":0.5968104600906372},{"id":"https://openalex.org/C512968161","wikidata":"https://www.wikidata.org/wiki/Q556","display_name":"Hydrogen","level":2,"score":0.5901108980178833},{"id":"https://openalex.org/C57863236","wikidata":"https://www.wikidata.org/wiki/Q1130571","display_name":"Doping","level":2,"score":0.5452878475189209},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.528647243976593},{"id":"https://openalex.org/C191952053","wikidata":"https://www.wikidata.org/wiki/Q15119237","display_name":"Dopant","level":3,"score":0.5080320835113525},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.4789436459541321},{"id":"https://openalex.org/C57410435","wikidata":"https://www.wikidata.org/wiki/Q505668","display_name":"Chemical vapor deposition","level":2,"score":0.46735572814941406},{"id":"https://openalex.org/C69990965","wikidata":"https://www.wikidata.org/wiki/Q65402698","display_name":"Electrical resistivity and conductivity","level":2,"score":0.4600612223148346},{"id":"https://openalex.org/C540031477","wikidata":"https://www.wikidata.org/wiki/Q629","display_name":"Oxygen","level":2,"score":0.447191059589386},{"id":"https://openalex.org/C2779667780","wikidata":"https://www.wikidata.org/wiki/Q18206302","display_name":"Crystalline silicon","level":3,"score":0.17929527163505554},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.13914328813552856},{"id":"https://openalex.org/C8010536","wikidata":"https://www.wikidata.org/wiki/Q160398","display_name":"Crystallography","level":1,"score":0.1307629644870758},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.11378321051597595},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.11185619235038757},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.08528396487236023},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.0},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1103/physrevb.60.13561","doi":"https://doi.org/10.1103/physrevb.60.13561","is_oa":false,"landing_page_url":"https://doi.org/10.1103/physrevb.60.13561","pdf_url":null,"source":{"id":"https://openalex.org/S4210174675","display_name":"Physical review. B, Condensed matter","issn_l":"0163-1829","issn":["0163-1829","1095-3795"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","ki-jl-2"],"host_organization":"https://openalex.org/P4310320261","host_organization_name":"American Physical Society","host_organization_lineage":["https://openalex.org/P4310320261"],"host_organization_lineage_names":["American Physical Society"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Physical Review B","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":41,"referenced_works":["https://openalex.org/W438631863","https://openalex.org/W586640009","https://openalex.org/W595248868","https://openalex.org/W609879506","https://openalex.org/W1970123511","https://openalex.org/W1970938130","https://openalex.org/W1973894142","https://openalex.org/W1975671483","https://openalex.org/W1981563162","https://openalex.org/W1982416952","https://openalex.org/W1989142476","https://openalex.org/W1989663083","https://openalex.org/W1992657310","https://openalex.org/W1994544754","https://openalex.org/W1995971811","https://openalex.org/W1996799788","https://openalex.org/W1998610833","https://openalex.org/W2002024806","https://openalex.org/W2004516425","https://openalex.org/W2009190107","https://openalex.org/W2013467948","https://openalex.org/W2018033216","https://openalex.org/W2025930438","https://openalex.org/W2031838806","https://openalex.org/W2038453556","https://openalex.org/W2038457947","https://openalex.org/W2040572926","https://openalex.org/W2042712062","https://openalex.org/W2046749559","https://openalex.org/W2047046343","https://openalex.org/W2047265303","https://openalex.org/W2075253313","https://openalex.org/W2076106985","https://openalex.org/W2082689179","https://openalex.org/W2087632650","https://openalex.org/W2091149465","https://openalex.org/W2323751896","https://openalex.org/W2326878643","https://openalex.org/W3118546015","https://openalex.org/W3128729140","https://openalex.org/W4229578609"],"related_works":["https://openalex.org/W2041818992","https://openalex.org/W2051228044","https://openalex.org/W2038457947","https://openalex.org/W2061567488","https://openalex.org/W2012955477","https://openalex.org/W2092384241","https://openalex.org/W2049853352","https://openalex.org/W2032170685","https://openalex.org/W1996514148","https://openalex.org/W2045610046"],"abstract_inverted_index":{"In":[0],"this":[1],"work":[2],"we":[3],"investigate":[4],"the":[5,11,47,60,64,79,86,97,137,143,150],"effects":[6],"of":[7,16,39,46,63,78,85,96,105,134,142,147,169],"thermal":[8,68,123],"annealing":[9,69,72,126],"on":[10,149],"optical":[12,138],"and":[13,30,55,162],"electrical":[14],"properties":[15,45],"doped":[17],"amorphous":[18,65,154,170],"silicon":[19],"suboxide":[20],"$(a\\ensuremath{-}{\\mathrm{SiO}}_{x}:\\mathrm{H})$":[21],"samples":[22,108],"prepared":[23],"by":[24],"plasma-enhanced":[25],"chemical-vapor":[26],"deposition.":[27],"Efficient":[28],"p-":[29],"n-type":[31],"doping":[32,120],"is":[33,160],"possible":[34],"up":[35],"to":[36,131,164,167],"a":[37,75],"concentration":[38],"10":[40],"at.":[41,111],"%":[42,112],"oxygen.":[43,113],"Structural":[44],"films":[48],"are":[49],"deduced":[50],"from":[51],"hydrogen":[52,151],"evolution":[53],"measurements":[54],"infrared":[56],"spectroscopy.":[57],"Changes":[58],"in":[59],"microscopic":[61],"structure":[62],"network":[66],"upon":[67,122],"at":[70,127],"low":[71],"temperatures":[73,129],"cause":[74],"dopant":[76],"activation":[77,121],"p-type":[80],"samples.":[81,144],"The":[82,145],"resulting":[83],"increase":[84],"dark":[87],"conductivity":[88],"becomes":[89],"less":[90],"pronounced":[91],"for":[92,107,153],"increasing":[93],"oxygen":[94,158],"content":[95,152,159],"films,":[98],"but":[99],"still":[100],"comprises":[101],"almost":[102],"two":[103],"orders":[104],"magnitude":[106],"with":[109,156],"9":[110],"N-type":[114],"suboxides":[115,155],"do":[116],"not":[117],"show":[118],"such":[119],"annealing.":[124],"Thermal":[125],"higher":[128],"leads":[130],"an":[132],"effusion":[133],"hydrogen,":[135],"reducing":[136],"band":[139],"gap":[140],"${E}_{04}$":[141,148],"dependence":[146],"different":[157],"investigated":[161],"found":[163],"be":[165],"similar":[166],"that":[168],"silicon.":[171]},"counts_by_year":[{"year":2024,"cited_by_count":1},{"year":2020,"cited_by_count":1},{"year":2019,"cited_by_count":2},{"year":2018,"cited_by_count":2},{"year":2017,"cited_by_count":1},{"year":2016,"cited_by_count":1},{"year":2015,"cited_by_count":1},{"year":2014,"cited_by_count":3},{"year":2013,"cited_by_count":3},{"year":2012,"cited_by_count":2}],"updated_date":"2026-11-07T11:25:07.637180","created_date":"2016-06-24T00:00:00"}