{"id":"https://openalex.org/W2003132325","doi":"https://doi.org/10.1080/0020754031000087256","title":"Design of a sampling strategy for measuring and compensating for overlay errors in semiconductor manufacturing","display_name":"Design of a sampling strategy for measuring and compensating for overlay errors in semiconductor manufacturing","publication_year":2003,"publication_date":"2003-01-01","ids":{"openalex":"https://openalex.org/W2003132325","doi":"https://doi.org/10.1080/0020754031000087256","mag":"2003132325"},"language":"en","primary_location":{"id":"doi:10.1080/0020754031000087256","doi":"https://doi.org/10.1080/0020754031000087256","is_oa":false,"landing_page_url":"https://doi.org/10.1080/0020754031000087256","pdf_url":null,"source":{"id":"https://openalex.org/S65690446","display_name":"International Journal of Production Research","issn_l":"0020-7543","issn":["0020-7543","1366-588X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["abdc-a","anvur-class-a","anvur-scientific","cwts-core","fnege-2","jufo-2","ki-jl-2","norway-2","poland-140","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320547","host_organization_name":"Taylor & Francis","host_organization_lineage":["https://openalex.org/P4310320547","https://openalex.org/P4310320449"],"host_organization_lineage_names":["Taylor & Francis","Informa"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"International Journal of Production Research","raw_type":"journal-article"},"volume":null,"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5020132059","display_name":"Chen\u2013Fu Chien","orcid":"https://orcid.org/0000-0003-3328-4946","observed_orcids":["https://orcid.org/0000-0003-3328-4946"]},"institutions":[{"id":"https://openalex.org/I25846049","display_name":"National Tsing Hua University","ror":"https://ror.org/00zdnkx70","country_code":"TW","type":"education","lineage":["https://openalex.org/I25846049"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"C.-F. Chien","raw_affiliation_strings":["a   Department of Industrial Engineering & Engineering Management , National Tsing Hua University , 101 Section 2 Kuang Fu Road, Hsinchu, Taiwan, 30043,  ROC"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"a   Department of Industrial Engineering & Engineering Management , National Tsing Hua University , 101 Section 2 Kuang Fu Road, Hsinchu, Taiwan, 30043,  ROC","institution_ids":["https://openalex.org/I25846049"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5028910589","display_name":"Kuo-Hao Chang","orcid":"https://orcid.org/0000-0002-3828-960X","observed_orcids":["https://orcid.org/0000-0002-3828-960X"]},"institutions":[{"id":"https://openalex.org/I25846049","display_name":"National Tsing Hua University","ror":"https://ror.org/00zdnkx70","country_code":"TW","type":"education","lineage":["https://openalex.org/I25846049"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"K.-H. Chang","raw_affiliation_strings":["a   Department of Industrial Engineering & Engineering Management , National Tsing Hua University , 101 Section 2 Kuang Fu Road, Hsinchu, Taiwan, 30043,  ROC"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"a   Department of Industrial Engineering & Engineering Management , National Tsing Hua University , 101 Section 2 Kuang Fu Road, Hsinchu, Taiwan, 30043,  ROC","institution_ids":["https://openalex.org/I25846049"]}]},{"author_position":"last","author":{"id":null,"display_name":"C.-P. Chen","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210092191","display_name":"Macronix International (Taiwan)","ror":"https://ror.org/01bggjn73","country_code":"TW","type":"company","lineage":["https://openalex.org/I4210092191"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"C.-P. Chen","raw_affiliation_strings":["b  Macronix International Co., Ltd , Hsinchu, Taiwan, 30077,  ROC"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"b  Macronix International Co., Ltd , Hsinchu, Taiwan, 30077,  ROC","institution_ids":["https://openalex.org/I4210092191"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":1.833,"has_fulltext":false,"cited_by_count":36,"citation_normalized_percentile":{"value":0.86869207,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":98},"biblio":{"volume":"41","issue":"11","first_page":"2547","last_page":"2561"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11443","display_name":"Advanced Statistical Process Monitoring","score":0.39579999446868896,"subfield":{"id":"https://openalex.org/subfields/1804","display_name":"Statistics, Probability and Uncertainty"},"field":{"id":"https://openalex.org/fields/18","display_name":"Decision Sciences"},"domain":{"id":"https://openalex.org/domains/2","display_name":"Social Sciences"}},"topics":[{"id":"https://openalex.org/T11443","display_name":"Advanced Statistical Process Monitoring","score":0.39579999446868896,"subfield":{"id":"https://openalex.org/subfields/1804","display_name":"Statistics, Probability and Uncertainty"},"field":{"id":"https://openalex.org/fields/18","display_name":"Decision Sciences"},"domain":{"id":"https://openalex.org/domains/2","display_name":"Social Sciences"}},{"id":"https://openalex.org/T11798","display_name":"Optimal Experimental Design Methods","score":0.13369999825954437,"subfield":{"id":"https://openalex.org/subfields/1803","display_name":"Management Science and Operations Research"},"field":{"id":"https://openalex.org/fields/18","display_name":"Decision Sciences"},"domain":{"id":"https://openalex.org/domains/2","display_name":"Social Sciences"}},{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.10930000245571136,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/overlay-error","display_name":"overlay error","score":0.8930000066757202},{"id":"https://openalex.org/keywords/sampling-strategy","display_name":"sampling strategy","score":0.8939999938011169},{"id":"https://openalex.org/keywords/semiconductor-manufacturing","display_name":"semiconductor manufacturing","score":0.8410000205039978},{"id":"https://openalex.org/keywords/overlay-model","display_name":"overlay model","score":0.6460000276565552},{"id":"https://openalex.org/keywords/assignable-causes","display_name":"assignable causes","score":0.6819999814033508},{"id":"https://openalex.org/keywords/wafer-fabrication","display_name":"wafer fabrication","score":0.7480000257492065}],"concepts":[{"id":"https://openalex.org/C136085584","wikidata":"https://www.wikidata.org/wiki/Q910289","display_name":"Overlay","level":2,"score":0.964708685874939},{"id":"https://openalex.org/C66018809","wikidata":"https://www.wikidata.org/wiki/Q1570432","display_name":"Semiconductor device fabrication","level":3,"score":0.7833096981048584},{"id":"https://openalex.org/C140779682","wikidata":"https://www.wikidata.org/wiki/Q210868","display_name":"Sampling (signal processing)","level":3,"score":0.7613185048103333},{"id":"https://openalex.org/C2780009758","wikidata":"https://www.wikidata.org/wiki/Q6804172","display_name":"Measure (data warehouse)","level":2,"score":0.6430274248123169},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.6121783256530762},{"id":"https://openalex.org/C200601418","wikidata":"https://www.wikidata.org/wiki/Q2193887","display_name":"Reliability engineering","level":1,"score":0.5382364392280579},{"id":"https://openalex.org/C132480984","wikidata":"https://www.wikidata.org/wiki/Q2034239","display_name":"Goodness of fit","level":2,"score":0.5099197626113892},{"id":"https://openalex.org/C2780023022","wikidata":"https://www.wikidata.org/wiki/Q1338171","display_name":"Compensation (psychology)","level":2,"score":0.48978638648986816},{"id":"https://openalex.org/C35750839","wikidata":"https://www.wikidata.org/wiki/Q7959421","display_name":"Wafer fabrication","level":3,"score":0.4707408845424652},{"id":"https://openalex.org/C124101348","wikidata":"https://www.wikidata.org/wiki/Q172491","display_name":"Data mining","level":1,"score":0.46012401580810547},{"id":"https://openalex.org/C13736549","wikidata":"https://www.wikidata.org/wiki/Q4489420","display_name":"Industrial engineering","level":1,"score":0.3668934106826782},{"id":"https://openalex.org/C79403827","wikidata":"https://www.wikidata.org/wiki/Q3988","display_name":"Real-time computing","level":1,"score":0.3238389492034912},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.3050321936607361},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.2573062777519226},{"id":"https://openalex.org/C119857082","wikidata":"https://www.wikidata.org/wiki/Q2539","display_name":"Machine learning","level":1,"score":0.15744516253471375},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.078066885471344},{"id":"https://openalex.org/C94915269","wikidata":"https://www.wikidata.org/wiki/Q1834857","display_name":"Detector","level":2,"score":0.0772010087966919},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.0},{"id":"https://openalex.org/C11171543","wikidata":"https://www.wikidata.org/wiki/Q41630","display_name":"Psychoanalysis","level":1,"score":0.0},{"id":"https://openalex.org/C15744967","wikidata":"https://www.wikidata.org/wiki/Q9418","display_name":"Psychology","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1080/0020754031000087256","doi":"https://doi.org/10.1080/0020754031000087256","is_oa":false,"landing_page_url":"https://doi.org/10.1080/0020754031000087256","pdf_url":null,"source":{"id":"https://openalex.org/S65690446","display_name":"International Journal of Production Research","issn_l":"0020-7543","issn":["0020-7543","1366-588X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["abdc-a","anvur-class-a","anvur-scientific","cwts-core","fnege-2","jufo-2","ki-jl-2","norway-2","poland-140","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320547","host_organization_name":"Taylor & Francis","host_organization_lineage":["https://openalex.org/P4310320547","https://openalex.org/P4310320449"],"host_organization_lineage_names":["Taylor & Francis","Informa"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"International Journal of Production Research","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"sustainable_development_goals_aurora":[{"score":0.47999998927116394,"id":"https://metadata.un.org/sdg/9","display_name":"Industry, innovation and infrastructure"}],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W2079678870","https://openalex.org/W1998103843","https://openalex.org/W2092331848","https://openalex.org/W2045404331","https://openalex.org/W2057096154","https://openalex.org/W1976757111","https://openalex.org/W2015278344","https://openalex.org/W2145355652","https://openalex.org/W2121897380","https://openalex.org/W2020073095"],"abstract_inverted_index":{"To":[0,88],"enhance":[1],"the":[2,21,37,40,55,81,90,93,96,120],"resolution":[3],"and":[4,17,47,75,123,134],"alignment":[5],"accuracy":[6],"in":[7,86],"semiconductor":[8],"manufacturing,":[9],"it":[10],"is":[11],"important":[12],"to":[13,35,43,48,65,73],"measure":[14,74],"overlay":[15,41,50,78,121],"errors":[16,79],"control":[18,52],"them":[19],"into":[20],"tolerances":[22],"by":[23],"removing":[24],"assignable":[25],"causes.":[26],"A":[27],"number":[28,83],"of":[29,69,84,92,117],"related":[30],"studies":[31],"have":[32],"been":[33],"done":[34],"examine":[36],"factors":[38],"causing":[39],"errors,":[42],"propose":[44,66],"mathematical":[45],"models":[46],"develop":[49],"error":[51],"methods.":[53],"However,":[54],"involved":[56],"sampling":[57,70,97,111],"strategies":[58,98],"received":[59],"little":[60],"attention.":[61],"This":[62,128],"study":[63],"aimed":[64],"specific":[67],"designs":[68],"patterns":[71,112],"effectively":[72],"compensate":[76],"for":[77,119],"within":[80],"limited":[82],"samples":[85],"practice.":[87],"verify":[89],"validity":[91],"proposed":[94,110],"approach,":[95],"were":[99],"compared":[100],"using":[101],"empirical":[102],"data":[103],"from":[104],"a":[105,114],"wafer":[106],"fabrication":[107],"facility.":[108],"The":[109],"had":[113],"higher":[115],"goodness":[116],"fit":[118],"model":[122],"lower":[124],"residuals":[125],"after":[126],"compensation.":[127],"paper":[129],"concludes":[130],"with":[131],"our":[132],"findings":[133],"discussions":[135],"on":[136],"further":[137],"research.":[138]},"counts_by_year":[{"year":2026,"cited_by_count":2},{"year":2025,"cited_by_count":3},{"year":2023,"cited_by_count":3},{"year":2022,"cited_by_count":2},{"year":2021,"cited_by_count":1},{"year":2020,"cited_by_count":3},{"year":2019,"cited_by_count":6},{"year":2016,"cited_by_count":1},{"year":2015,"cited_by_count":1},{"year":2014,"cited_by_count":2},{"year":2013,"cited_by_count":3}],"updated_date":"2026-10-14T16:39:01.820549","created_date":"2016-06-24T00:00:00"}